Sputter Coater K575X Instruction Manual

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Transcript of Sputter Coater K575X Instruction Manual

K575X Sputter Coater Instruction Manual

For technical and applications advice plus our on-line shop for spares and consumable parts visit www.quorumtech.com

Quorum Technologies Ltd South Stour Avenue Ashford Kent TN23 7RS UK Email: Website: Tel: Fax: +44 (0) 1233 646332 +44 (0) 1233 640744

sales@quorumtech.com http:///www.quorumtech.com

For further information regarding any of the other products designed and manufactured by Quorum Technologies, contact your local representative or directly to Quorum Technologies at the address above.

Issue 1 2 3 4 5 6 7 8 9 10 11

Date 09/08/1999 22/09/1999 19/0620/00 23/04/2003 19/12/2003 17/05/2005 21/03/2007 03/04/2007 21/05/2007 01/08/2007 20/02/2008

Details Initial Issue Amended list of default values Corrected vacuum pump down information Amended Picture and some text. Amended FTM section Added Target Information Amended target information No Cycles and clean current and parameters & FTM user defined tooling factor adjustments added. Amended target information. Amended company name and email address Company name change, new document layout Modifications to maintenance procedure NCR124

Revised By DJR DJR DJR RIS JB HJR HJR PRM KJW JLS JLS

DisclaimerThe components and packages described in this document are mutually compatible and guaranteed to meet or exceed the published performance specifications. No performance guarantees, however, can be given in circumstances where these component packages are used in conjunction with equipment supplied by companies other than Quorum Technologies Ltd.

Quorum Emitech is a wholly owned business of Quorum Technologies Limited. Registered offices Unit 19 Charlwoods Road, East Grinstead, West Sussex. RH19 2HL. Registered in England and Wales, company No. 4273003.

K575X Sputter Coater

11.1

ContentsSection Contents1 Contents .......................................................................................................... 31.1 Section Contents .................................................................................................. 3 1.2 List of Figures....................................................................................................... 4 1.3 List of Tables ........................................................................................................ 4

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Health and Safety............................................................................................ 52.1 2.2 2.3 2.4 2.5 Control of Substances Hazardous to Health (COSHH) ........................................ 5 WEEE Compliance............................................................................................... 5 Conformity ............................................................................................................ 6 Hazard Signal Words ........................................................................................... 6 Fail Safe ............................................................................................................... 6

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Description ...................................................................................................... 73.1 K575X Turbo Sputter Coater ................................................................................ 73.1.1 3.1.2 3.2.1 Features................................................................................................................. 8 Benefits.................................................................................................................. 8 Services ................................................................................................................. 8

3.2 Specifications ....................................................................................................... 8

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Installation....................................................................................................... 94.1 Preliminary Checks .............................................................................................. 9 4.2 Connections ....................................................................................................... 10

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Operation....................................................................................................... 125.1 5.2 5.3 5.4 5.5 Display................................................................................................................ 12 Settings .............................................................................................................. 13 Default Settings .................................................................................................. 14 Initial Operating Checks ..................................................................................... 15 Sequence ........................................................................................................... 165.5.1 5.5.2 5.5.3 5.5.4 5.5.5 5.5.6 5.5.7 5.5.8 5.6.1 5.6.2 Start ..................................................................................................................... 16 Pumping to High Vacuum .................................................................................... 17 Pump Hold ........................................................................................................... 17 Bleeding Gas into Chamber ................................................................................. 17 Cleaning Oxidised Target ..................................................................................... 18 Coating Now ........................................................................................................ 18 No. Cycles (number of cycles) ........................................................................... 18 Coating Finished, (completing the cycle).............................................................. 18 FTM Parameters .................................................................................................. 19 FTM Operation ..................................................................................................... 19

5.6 Film Thickness Monitor F.T.M (Option) .............................................................. 19 5.7 Vacuum Shutdown (Option) ............................................................................... 21

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Service and Maintenance............................................................................. 226.1 6.2 6.3 6.4 6.5 6.6 6.7 Maintenance....................................................................................................... 22 Changing the Target........................................................................................... 23 Troubleshooting the K575X................................................................................ 25 Turbo Pump........................................................................................................ 25 Spares ................................................................................................................ 26 Accessories ........................................................................................................ 26 Fuse Listings ...................................................................................................... 27 World Wide Electrical Supplies .......................................................................... 28 Pump Plug Wiring .............................................................................................. 29 Sputtering Deposition Rate ................................................................................ 30 Return of Goods ................................................................................................. 317.4.1 7.4.2 7.4.3 7.4.4 7.4.5 General Introduction:............................................................................................ 31 Health and Safety Declaration.............................................................................. 31 Despatch.............................................................................................................. 31 Return Address: ................................................................................................... 31 Declaration of Contamination Form...................................................................... 32

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Appendices.................................................................................................... 287.1 7.2 7.3 7.4

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Index .............................................................................................................. 33

K575X - Instruction Manual

3

A4117197-Issue 11

K575X Turbo Sputter Coater

1.2

List of FiguresFigure 2-1: WEEE Directive Symbol ..................................................................................................... 5 Figure 3-1: K575X Turbo Sputter Coater ............................................................................................... 7 Figure 4-1: K575X Rear Panel ............................................................................................................ 10 Figure 5-1: K575X Front Panel............................................................................................................ 12 Figure 5-2: Default Settings ................................................................................................................ 14 Figure 5-3: Plasma Formed under Poor Vacuum ................................................................................ 15 Figure 5-4: Desired Plasma Formation................................................................................................ 16 Figure 6-1: Target Assembly Expanded View...............................................................