ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May...

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Transcript of ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May...

  • Slide 1
  • ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May 1, 2013
  • Slide 2
  • Motivations: Offer a deposition tool for optical coating industry that combines the advantages of both e-beam evaporation (large area, fast rate) and IBS deposition (stable process, higher film quality). Approaches: Plasma enhanced pulsed DC magnetron sputtering Basic concept is based on a 54-inch chamber with a planetary system that contains six 16-inch planets.
  • Slide 3
  • Key Performances / Features: Sputtered deposition of multilayers of metals, and metal oxides Large area, fast deposition rate 6 x 16-inch planets Rate: Ta 2 O 5 / Nb 2 O 5 : 5/s, SiO 2 : 6/s Uniformity: typical 1.0%, goal: 0.5% Thickness control Standard: quartz crystal, time power Optional: through-the-planet optical monitoring (Single Wavelength or Broad Band)
  • Slide 4
  • Optical Sputter Coater Pulsed DC ion / plasma enhanced Materials: Ta 2 O 5 /SiO 2 Very stable and repeatable process: Deposition rate: 5.0/s --- Ta 2 O 5 6.0/s --- SiO 2
  • Slide 5
  • Optical Sputter Coater
  • Slide 6
  • Single layer Ta 2 O 5, 5.0 /s
  • Slide 7
  • Single layer SiO 2, 6.0/s
  • Slide 8
  • Single layer uniformity across a 16-inch planet: < 1%
  • Slide 9
  • Uniformity of a LP filter across a 16-inch planet (spectrally measured)
  • Slide 10
  • Uniformity of a LP filter across a 16-inch planet (Normalized)
  • Slide 11
  • 550nm Longpass Filter, 30 layers
  • Slide 12
  • Coating examples : 72-layer SP (Ta 2 O 5 /SiO 2, 5.7m) Backside uncoated
  • Slide 13
  • Coating examples : 37-layer GFF (Ta 2 O 5 /SiO 2, 3.8m) Backside uncoated
  • Slide 14
  • Coating examples: 14-layer BBAR (Ta 2 O 5 /SiO 2 )
  • Slide 15
  • Coating examples: 10-layer Dual-band AR (Ta 2 O 5 /SiO 2 )
  • Slide 16
  • Coating examples: 58-layer IR cut filter (Ta 2 O 5 /SiO 2 )
  • Slide 17
  • IR Cut Filter Made by a Competitors Coater
  • Slide 18
  • Coating examples: IR cut filter Argus54 Competitors
  • Slide 19
  • Coating examples: 104-layer WB(Ta 2 O 5 /SiO 2, 7.9m)
  • Slide 20
  • Coating examples: 224-layer WB(Ta 2 O 5 /SiO 2, 23m)
  • Slide 21
  • Coating examples: 80-layer WB(Ta 2 O 5 /SiO 2, 7.1m) Backside uncoated
  • Slide 22
  • Coating examples: 52-layer Longpass(Ta 2 O 5 /SiO 2, 3.0m) Backside uncoated
  • Slide 23
  • Current status: Optical properties: excellent Absorption: low Scattering: low Mechanical properties Dense, durable film Film stress: 230 300MPa, compressive Film uniformity Less Than 0.5% on a 16-inch planet High throughput; unparalleled process stability
  • Slide 24
  • Platform Comparison
  • Slide 25
  • Products and Applications for the Argus Optics System