Cressington 208 HR Sputter coater

download Cressington 208 HR Sputter coater

of 22

  • date post

    07-Feb-2016
  • Category

    Documents

  • view

    145
  • download

    5

Embed Size (px)

description

Cressington 208 HR Sputter coater. Overview. Argon On. Check to see if the Argon tank (bottle) main valve is on. Do NOT turn the pressure adjust needle valve on the regulator. Argon On Number 2. Normally the specimen chamber is left under vacuum. - PowerPoint PPT Presentation

Transcript of Cressington 208 HR Sputter coater

  • Cressington 208 HRSputter coater

  • Overview

  • Argon OnCheck to see if the Argon tank (bottle) main valve is on.Do NOT turn the pressure adjust needle valve on the regulator.

  • Argon On Number 2Normally the specimen chamber is left under vacuum.Open the inline valve on the argon line. This will vent the chamber. Give it a few seconds.

  • Open Sample ChamberOpen chamber by lifting the Target Assembly. Do not place your fingers on the target.

  • Remove Glass JarTo load samples, remove the glass cylinder and place it on clean aluminum foil.

  • Place samples in chamberThe stage has a various holders for the different types of samples stubsLoad samples on stage.

  • Close ChamberReplace the glass jar making sure that the o-ring is clean.Close Chamber top (target assembly) making sure that the top is seated properly on the glass jar. DO NOT DROP THE TARGET ASSEMBLY, lift slightly and pull gently outward to fit top on jar.

  • Power UpFlip the POWER toggle switch.The unit will start up in the AUTO mode.

  • Move ShutterMove the shutter out of the way.The shutter is used for deposition onto thermally sensitive samples.

  • Presets for AUTO Mode - 1Preset the deposition time by pressing the PAUSE/TEST button and adjusting the SET buttons in the TIMER/current area.

  • Presets for AUTO Mode - 2Preset the plasma current by pressing the SETma button and adjusting the SET buttons in the TIMER/current area.

  • Starting the Sputter CyclePress the CYCLE/STOP button in the AUTO areaThis will start the sputter cycle.

  • What does the Cycle Do?The Cycle mode will then:Pump the chamber to 0.05 mbar;Open argon flush then close;Pump to 0.15 mbar;Open argon flush then close;Open leak valvePump to 0.15 mbarSwitch on HV;Sputter at preselected current for preselected time/thickness

  • Remove samplesLift the Target assembly.CAREFUL the glass jar may stick to the top O-ring. HOLD THE GLASS while lifting the target assembly.Remove samples

  • ShutdownReplace glass jar;Close lid (target assembly)Close inline valve on argon lineTurn on Power and let chamber pump for a minute.Turn off PowerClose Valve on top of Argon Bottle.

  • Film Thickness Monitor (FTM)Coatings can also be deposited using the FTM.Density and Tooling factors currently in memory can be displayed by pressing the relevant button.

  • FTM - 2To adjust a value, hold the button for 2 seconds until the period begins to flash. Scroll up or down with the arrow buttons.Zero resets the display to zero after a measurement

  • FTM - 3To display the current FTM termination thickness, press TERMINATOR and hold for two seconds. To adjust use the arrow buttons.

  • FTM Target Density

  • FTM - Tooling Factor

  • OtherCressington has a number of options.Multi targetsDifferent size jars.Check with CAF personnel before using these.