K575X Sputter Coater Instruction Manual

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Transcript of K575X Sputter Coater Instruction Manual

  • K575X Sputter Coater Instruction Manual

    For technical and applications advice plus our on-line shop for spares and consumable parts visit www.quorumtech.com

  • Quorum Technologies Ltd

    South Stour Avenue

    Ashford

    Kent

    TN23 7RS Tel: +44 (0) 1233 646332

    UK Fax: +44 (0) 1233 640744

    Email: sales@quorumtech.com

    Website: http:///www.quorumtech.com

    For further information regarding any of the other products designed and manufactured by Quorum Technologies, contact your local representative or directly to Quorum Technologies at the address above.

    Issue Date Details Revised By

    1 09/08/1999 Initial Issue DJR

    2 22/09/1999 Amended list of default values DJR

    3 19/0620/00 Corrected vacuum pump down information DJR

    4 23/04/2003 Amended Picture and some text. RIS

    5 19/12/2003 Amended FTM section JB

    6 17/05/2005 Added Target Information HJR

    7 21/03/2007 Amended target information HJR

    8 03/04/2007 No Cycles and clean current and parameters & FTM user defined tooling factor adjustments added.

    PRM

    9 21/05/2007 Amended target information.

    Amended company name and email address

    KJW

    10 01/08/2007 Company name change, new document layout JLS

    11 20/02/2008 Modifications to maintenance procedure NCR124 JLS

    Disclaimer The components and packages described in this document are mutually compatible and guaranteed to meet or exceed the published performance specifications. No performance guarantees, however, can be given in circumstances where these component packages are used in conjunction with equipment supplied by companies other than Quorum Technologies Ltd.

    Quorum Emitech is a wholly owned business of Quorum Technologies Limited. Registered offices Unit 19 Charlwoods Road, East Grinstead, West Sussex. RH19 2HL. Registered in England and Wales, company No. 4273003.

  • K575X Sputter Coater

    K575X - Instruction Manual 3 A4117197-Issue 11

    1 Contents

    1.1 Section Contents

    1 Contents .......................................................................................................... 3 1.1 Section Contents .................................................................................................. 3 1.2 List of Figures....................................................................................................... 4 1.3 List of Tables ........................................................................................................ 4

    2 Health and Safety............................................................................................ 5 2.1 Control of Substances Hazardous to Health (COSHH) ........................................ 5 2.2 WEEE Compliance............................................................................................... 5 2.3 Conformity ............................................................................................................ 6 2.4 Hazard Signal Words ........................................................................................... 6 2.5 Fail Safe ............................................................................................................... 6

    3 Description ...................................................................................................... 7 3.1 K575X Turbo Sputter Coater ................................................................................ 7

    3.1.1 Features................................................................................................................. 8 3.1.2 Benefits.................................................................................................................. 8

    3.2 Specifications ....................................................................................................... 8 3.2.1 Services ................................................................................................................. 8

    4 Installation....................................................................................................... 9 4.1 Preliminary Checks .............................................................................................. 9 4.2 Connections ....................................................................................................... 10

    5 Operation....................................................................................................... 12 5.1 Display................................................................................................................ 12 5.2 Settings .............................................................................................................. 13 5.3 Default Settings .................................................................................................. 14 5.4 Initial Operating Checks ..................................................................................... 15 5.5 Sequence ........................................................................................................... 16

    5.5.1 Start ..................................................................................................................... 16 5.5.2 Pumping to High Vacuum .................................................................................... 17 5.5.3 Pump Hold ........................................................................................................... 17 5.5.4 Bleeding Gas into Chamber ................................................................................. 17 5.5.5 Cleaning Oxidised Target ..................................................................................... 18 5.5.6 Coating Now ........................................................................................................ 18 5.5.7 No. Cycles (number of cycles) ........................................................................... 18 5.5.8 Coating Finished, (completing the cycle).............................................................. 18

    5.6 Film Thickness Monitor F.T.M (Option) .............................................................. 19 5.6.1 FTM Parameters .................................................................................................. 19 5.6.2 FTM Operation..................................................................................................... 19

    5.7 Vacuum Shutdown (Option) ............................................................................... 21 6 Service and Maintenance............................................................................. 22

    6.1 Maintenance....................................................................................................... 22 6.2 Changing the Target........................................................................................... 23 6.3 Troubleshooting the K575X................................................................................ 25 6.4 Turbo Pump........................................................................................................ 25 6.5 Spares ................................................................................................................ 26 6.6 Accessories ........................................................................................................ 26 6.7 Fuse Listings ...................................................................................................... 27

    7 Appendices.................................................................................................... 28 7.1 World Wide Electrical Supplies .......................................................................... 28 7.2 Pump Plug Wiring .............................................................................................. 29 7.3 Sputtering Deposition Rate ................................................................................ 30 7.4 Return of Goods ................................................................................................. 31

    7.4.1 General Introduction:............................................................................................ 31 7.4.2 Health and Safety Declaration.............................................................................. 31 7.4.3 Despatch.............................................................................................................. 31 7.4.4 Return Address: ................................................................................................... 31 7.4.5 Declaration of Contamination Form...................................................................... 32

    8 Index .............................................................................................................. 33

  • K575X Turbo Sputter Coater

    A4117197-Issue 11 4 K575X - Instruction Manual

    1.2 List of Figures Figure 2-1: WEEE Directive Symbol ..................................................................................................... 5 Figure 3-1: K575X Turbo Sputter Coater ............................................................................................... 7 Figure 4-1: K575X Rear Panel ............................................................................................................ 10 Figure 5-1: K575X Front Panel............................................................................................................ 12 Figure 5-2: Default Settings ................................................................................................................ 14 Figure 5-3: Plasma Formed under Poor Vacuum ................................................................................ 15 Figure 5-4: Desired Plasma Formation...........................