BioRad Sputter Coater

Instructions for gold coating a SEM sample.

NO, it’s not your eyes. This image is out of focus

Overview

Step 1 -- Argon On

Check to see if the Argon tank (bottle) main valve is on.

Do NOT turn the pressure adjust needle valve on the regulator.

Vent Specimen Chamber

Normally the specimen chamber is left under vacuum.

Turn on Power (red button illuminates)

Press Vent button (illuminates) Allow 30 seconds or so for the chamber

to vent Press the Vent button again after

chamber is vented

Vent Chamber #2

Open Sample Chamber

Open chamber by lifting the Target Assembly. Do not place your fingers on the target.

Place samples in chamber

Load samples on stage

Close Chamber top making sure that the top is seated properly on the glass jar.

DO NOT DROP THE TOP.

Pump chamber

Press Pump button (illuminates) Let chamber pump down to 2 – 4 10-1

mbar. Then press Pump button (light out).

Press Vent button (illuminates). This will purge the chamber of air. The press Vent button again (light out).

Press Pump button (illuminates) and pump down. Chamber pressure should reach 6 – 8 x 10-2 mbar. This takes about 15 minutes.

SETUP FOR SPUTTERING

Chamber pressure should reach 6 – 8 x 10-2 mbar. INT/LOCK – SET HT Button should be illuminated. Press the FTM – TIMER Button (illuminates);

sputtering is done by time; FTM does not work.

LEAK ARGON

Press the LEAK BUTTON (illuminates) – DO NOT ADJUST THE LEAK VALVE The pressure in the chamber should spike and

then drop back down to about 8 10-2 mbar.

Sputter Gold -- 1

Set the time on 30 sec. Press the start button on the timer unit. Slowly increase the kV (turn the knob)until the

Plasma current is about 25 mA. The kV knob will be at about the 1 o’clock position.

Sputter to desired thickness

Reset the timer to the desired time. This will vary depending upon the thickness of the coating that you want. Try 60 seconds for a start.

Remember that you can always put more on but it doesn’t come off very easy.

Recommend that you try very light coating and build up to your needed thickness. This is a trial and error process.

Take Out the Samples

Turn the kV knob to zero Press the LEAK Button (light out) Press PUMP button (light out) Press VENT button (illuminates) Let the chamber vent (takes about

30 seconds) Open chamber top and remove

samples.

Shut down

Close top (target assembly) making sure it is seated properly

Press VENT button (light out) Press PUMP button Turn off valve on top of Argon bottle Press POWER Button (light out) Sign In/Out