Spin coater (LAMDA-P)

3D Micromanufacturing Lab.School of MechatronicsGwangju Institute of Science and Technology 3D Micromanufacturing Lab.School of MechatronicsGwangju Institute of Science and Technology

Spin coater (LAMDA-P)

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Spin coating is a procedure used to deposit uniform thin films to flat substrates.

Usually a small amount of coating material is applied on the center of the sub-

strate, which is either spinning at low speed or not spinning at all.

The substrate is then rotated at high speed in order to spread the coating mate-

rial by centrifugal force.

A machine is called a spin coater, or simply spinner.

What is the spin coating?

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Specifications (ACE-200)Wafer size (Max) 0.2 ~ 4 inch diameter

Bowl size 235 m/mBowl material SUS or P.P or Teflon

Special DC Motor UP & Down freeStep 100

Memory storage 100 programRotation Speed 0 to 50 ~ 8,000 rpm

Hold Time 1 ~ 999 secAccuracy ±1 R.P.M

Acceleration, deceleration free 3,000 R.P.M/secGraphic Function Real time for steps Graphic representation

Power Input AC 220 V, 50/60 HzVacuum Input -450 ~ -650 mmHg (6 mm ID/ 8 mm OD)

Display LCD (back Light)System Controller Micom control

Dimension (W x D x H) (320 x 420 x 240 mm)

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Specifications (Rocker 300)Motor capacity 1/8 HP

Vacuum capacity 16 L/minVacuum Input 650 mmHg

Dimension (W x D x H) (20 x 12 x 15.5 cm)Weight 4 kgType Piston type

Power Input AC 110/220 V, 50/60 Hz

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1. Connect spin coater power cord, vacuum hose and vacuum pump power cord on the back of the body.

Installation procedure

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Installation procedure cont.

2. Press main power switch “ON” at the back of the body.

3. Insert vacuum chuck to shift groove.

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: Selection button of program menu

: Equipment operation

: Equipment stop

: Vacuum (sample fixation), delete cell (data) of program

: When entering (setting) the step (in the page) data, cursor

position movement

: Memory initialization, delete line of step and program respectively

: Step (line) addition

Button function

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: Store information after entering step and program numbers, change program

entering screen

: Change step entering screen page, switch between graph and character screen

~ : Enter each number

: Spin coater power

: Vacuum pump power

: Sensor of controlling vacuum degree

Button function cont.

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1. Move to coding program with pressing button in initial screen. Then lo-

cate cursor (“_”) at “1. Coding program” and press button.

Program input procedure

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2. After inserting program number in select program “[ ]”, press button.


Program input procedure cont.

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3. After inserting data of rpm, ramp and time with respect step, move to next cell

(line) by using button.


4. After entering values at respect steps, press button. (Then entered values

are stored and character screen is changed to graphic screen.)


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5. Equipment operation screen can be switch graph or character screen to use

buttons.


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1. Prepare sample and coating solution.

2. After putting on the sample on the chuck, match the center of both.

3. Press button to fix the sample, after pressing button. If vacuum con-

dition is stable, “VACUUM” lamp is on.

4. If previous steps are finished, start coating process with pressing button

(“START” lamp is on) after inserting coating solution on the sample and closing

by using cover cap.

Instruction (how to use)

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5. If completing coating process, “START” lamp is off. Then take out the sample

after removing vacuum with pressing button.

6. Alarm function

6-1. If vacuum condition is not reached stable point, alarm lamp blink slowly.

After recovering stable vacuum condition, run with pressing button.

6-1. If motor is overloaded, alarm lamp blink quickly.

Turning off and waiting for 10 sec, then restart.

Instruction (how to use) cont.

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Spin coater (LAMDA-P)

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Transcript of Spin coater (LAMDA-P)