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SCHOOL OF MECHANICAL ENGINEERING

REPORT ON CAPSTON PROJECT

TITLE: DESIGN & FABRICATION OF A LOW COST SPIN COATER

Submitted to Lovely Professional University

In partial fulfillment of the requirement for the award of

“DEGREE OF BACHELOR OF TECHNOLOGY [MECHANICAL

ENGINEERING]”

Submitted By

Name Registration No.

SAURABH PANDEY 11102793

KAPIL RAGHUWANSHI 11105326

SUDHIR YADAV 11108007

PUNEET KUMAR 11111389

Research Supervisor Mr. Sumit shoor

UID. 14602

Assistant Professor

School Of Mechanical Engineering

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CERTIFICATE

This is certified that Saurabh Pandey, Kapil Raghuwanshi, Sudhir Yadav, Puneet Kumar have

complete this capstone project of – Design & Fabrication of Low Cost Spin Coater under my

guidance. During this project they have done most efforts to study and understand the subject in

detail. In addition to the books mentioned in the bibliography they have referred various study

material, magazine, websites, research papers and notes to complete this project. During this

project they have been very much curious and enthusiast to understand the spirit of the expert

documentation and procedures.

We wish them best of luck.

Research Supervisor

Mr. Sumit Shoor

14602

Asst. Professor

School Of Mechanical Engg. Signature of Supervisor

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DECLARATION

This is to certify that we are the student of School Of Mechanical Engineering, pursuing

Bachelor of Technology(Mechanical Engineering) have completed capstone project on topic

“Design & Fabrication of Low Cost Spin Coater” for partial fulfillment of degree of Bachelor

of Technology to Lovely professional University, Phagwara (PUNJAB).We solemnly declare

that the work done by us is original and no copy of it has been submitted to Lovely Professional

University or any other university for award of any other degree/fellowship.

Name Registration Number Signature

Saurabh Pandey 11102793

Kapil Raghuwanshi 11105326

Sudhir Yadav 11108007

Puneet Kumar 11111389

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Acknowledgement

I take this opportunity to present my votes of thanks to all those guidepost who really acted as lightening pillars

to enlighten our way throughout this project that has led to successful and satisfactory completion of

this study. We are really grateful to our teacher for providing us with an opportunity to undertake

this project in this university and providing us with all the facilities. We are highly thankful to

Mr. Sumit Shoor(Asst. Professor) for his active support, valuable time and advice, whole-

hearted guidance, sincere cooperation and pains-taking involvement during the study

and in completing the assignment of preparing the said project within the time

stipulated.

Lastly, we are thankful to all those particularly the various friends who have been

instrumental in creating proper, healthy and conductive environment and including

new and fresh innovative ideas for us during the project, their help, it woul d have

been extremely difficult for us to prepare the project in a time bound framework.

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ABSTRACT

The goal of this capstone project was designing a low cost spin coater which works

economically.

With the help of this spin coater we can create a thin film on the flat surface of any work piece.

This process is basically follows the principle of Centrifugal Force which draws a rotating body

away from the centre of rotation.

The thickness of film depends on different factors which are as follows:

Concentration of the Solution

Rotational Speed

Rotation Time

So these above are some factors which can affect the thickness of the film. By taking care of

these above said factors we can get the desired thickness of film of any substrate.

Spin Coating is a fast and easy method to generate thin and homogeneous films out of solutions.

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TABLE OF CONTENTS

Title Page

Cover Page i

Certificate ii

Declaration iii

Acknowledgement iv

Abstract v

Table of Contents vi – vii

List of figures viii

List of Graph ix

List of Tables x

CHAPTER 1 Introduction 1 - 4

1.1 Definition and brief history of Spin Coating 1

1.2 Physics of Spin Coating 2

1.3 Industrial uses of spin Coating technology 2

1.4 Common spin coating defects 2 -3

1.5 The Spinning Coating Process 4

1.6 Objective of Project 4

CHAPTER 2 Literature Review 5 - 8

2.1 Introduction 5

2.1.1 Spin Coater with a touch screen interface 5

2.1.2 Cost effective home-made Spin Coater 6 - 7

for depositing thin films

2.1.3 Design & Fabrication of a Low cost effective 7

Spin Coater for deposition of thin films

2.1.4 A comprehensive study of spin coating as a 8

thin film deposition technique and coating Equipment

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CHAPTER 3 Material and Modeling 9-16

3.1 Introduction 9

3.2 Materials/Parts used in the making of the project 9

3.3 Specification of Materials/Equipments 10-12

3.4 Modeling of spin coater 12-15

3.4.1 Key stages of spin coating 13-15

3.6 Cost Analysis 16

CHAPTER 4 Results & Discussion 17 - 20

4.1 Introduction 17

4.2 Result 17 - 19

4.2.1 Graph between film thickness Vs spin time 18

4.2.2 Graph between film thickness Vs spin speed 18- 19

4.3 Spin coating troubleshooting process 19- 20

CHAPTER 5 Conclusion & Future scope 20 - 21

5.1 Conclusion 21 - 22

5.1.1 Advantage 21

5.1.2 Disadvantage 21 - 22

5.2 Future scope 22

References 23- 24

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LIST OF FIGUERS

FIGURE 1.1

Spin Coating using Centrifugal force

Page No. 1

FIGURE 1.2

Defects occurs from spin coating

Page No. 3

FIGURE 1.3

Defects occurs from spin coating

Page No. 3

FIGURE 1.4

Dispense of coating fluid at the centre

Page No. 4

FIGURE 2.1

Touch screen interface

Page No. 5

FIGURE 2.2

Chuck with adjustable Clamps

Page No. 6

FIGURE 3.1

Front View of outer cabinet

Page No. 10

FIGURE 3.2

High speed sewing machine motor

Page No. 11

FIGURE 3.3

Front & Rear view of the Disk with

Clamping arrangement

Page No. 12

FIGURE 3.4

Final design of spin coater

Page No. 13

FIGURE 3.5

Key stages of spin coating process

Page No. 14

FIGURE 4.1

First experiment

Page No. 17

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LIST OF GRAPHS

GRAPH 4.1

Relationship between film

thickness and spinning time

Page No. 18

GRAPH 4.2

Relationship between film

thickness and spinning time

Page No. 19

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LIST OF TABLE

TABLE 3.1

Cost analysis

Page No. 16

TABLE 4.1

Troubleshooting

Page No. 20

TABLE 4.2

Troubleshooting

Page No. 20

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CHAPTER 01

INTRODUCTION

Spin Coating is basically a procedure which is used to deposit uniform thin films to any flat

surface of work piece. Usually a small amount of coating material is applied on the centre of the

work piece’s surface when the disk is spinning at very low speed. Here in this process we are

using the basic principle of centrifugal force. This is applied due to the spinning of Disk.

FIG. 1.1 Spin Coating using Centrifugal force [1]

1.1 Definition and brief history of Spin Coating

A process in which solution is spread evenly over a surface using centripetal force when

the disk is rotating.

Spin Coating will result in a relatively uniform thin film of a specific thickness.

Spin Coating is an important way of creating thin films in the microelectronics industry

where we need thin films coating.

Spin Coating was first used to apply coatings of paints and pitch around seventy years

ago.

In 1958 Emsile et. Al. developed the first spin coating model.

This model has been used as a basis for future more specific or complicated models.

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1.2 Physics of Spin Coating

Spin Coating process basically uses the principle of Centrifugal force. When the disk is rotating

in any direction, a centrifugal force generates which draws rotating body away from the centre of

rotation. We will further discuss about the centrifugal force here:

Centrifugal Force

Centrifugal force is the apparent force that draws a rotating body away from the centre of

rotation. It is caused by the inertia of the body.[2]

1.3 Industrial uses of Spin Coating technology

Photo resists for patterning wafers in micro circuit production.

Insulating layers for micro circuit fabrication such as polymers.

Flat screen display coatings.

Antireflection coatings and conductive oxides.

DVD & CD ROM.

Television tube antireflection coatings.

1.4 Common Spin Coating Defects

There occur lots of defects after completing the coating processes. Some of them are as follows:

Bubbles on the surface of the Coated substrate.

These bubbles occurs when fluid is deposited as the wafer is spinning, and may be

caused by a faulty dispense tip.

A swirling pattern may be observed.

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FIG. 1.2 Defects occurs from spin coating[3]

Causes :-

Fluid deposited off centre.

Acceleration too high.

Spin time too short.

Exhaust rate too high.

A mark or circle in the centre of the wafer could indicate a chuck mark.

FIG. 1.3 Defects occurs from spin coating[3]

If a Chuck mark occurs the type of chuck should be changed.

Uncoated areas on substrate occur when to little fluid is deposited on the substrate.

Pinhole defects can be caused by 1) Air Bubbles 2) particles in fluid/ Substrate

.

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1.5 Spin Coating process

A typical Spin Coating Process basically consist of four steps which consist of a Dispense step in

which the coating fluid material is deposited onto the surface of work piece, a high speed spin

step to thin the fluid, and a drying step eliminate excess coating fluid from the resulting film.

Loading Of Substrate

FIG. 1.4 Dispense of coating fluid at the centre

Dispense of Coating fluid on Substrate

Film Casting And Drying

Process Complete

This method was first described by Emslie et al. (1958) and Meyerhofer Et al. (1978) using

several simplifications.[4]

1.6 Objective of Project

The basic object of this project is to Design a low cost spin Coater which will effective as well as

economical. We tried here to Design a Spin Coater which is of low cost but fully functional.

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CHAPTER 2

LITRATURE REVIEW

2.1 Introduction

In very simple words spin coating is a method used to apply a layer of uniform thickness of thin

films to any work piece of flat surface. And the mechanism used for spin coating is known as

spin coater. So for getting some knowledge about above said project we need some basic

knowledge about the project which we got from some research papers, magazines, books etc. &

some of here as follows :

2.1.1 Spin Coater with a touch screen interface

Here according to Mr. Gurucharan V. Karnad(Dept. of Physics, Indian institute of science,

Bangalore), et. Al. Spin Coating is one of the coating technique used to apply thin uniform films

to flat surface of work piece. A spin coater is a machine used for spin coating , and is one of the

most ubiquitous instrument in any laboratory dealing with micro fluidic devices.

Run Time Setting Menu Display Screen RPM Setting

FIG. 2.1 [5]

They made a spin coater with a touch screen panel interface which cost about 350USD. The user

input is through the touch screen panel interface, where parameters like duration of spin and spin

speed can be entered. Real time speed is also displayed alongside.

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In these spin coater the substrate is mounted either using a double- side tape or a set of clamps.

Improvements with the help of vacuums chuck, computer interfacing etc. can be done as per

necessity.

FIG. 2.2 Chuck with adjustable Clamps

So here talking about our project we are using manual holding device over chuck for the

mounting of substrate. We studied in an article that there is a problem of entering fuid into the

vacuum pipe occurs when we are using vacuum chuck so we decide here not to use vacuum

chuck.[6]

2.1.2 Cost effective home-made Spin Coater for depositing thin

films

Writer : Mohua Fardousi et. Al.

A simple low cost spin coater design has been described in this paper. This low cost coating

system is used to deposit thin films. The system can be easily built with the basic knowledge of

machine and electronics.

According to them this project can be done using a DC motor and electronic circuit , Designed to

control the spinning speed. The spinning speed varies from 350- 3800 rpm.

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Talking about our project we used 230 volts regulator for controlling the speed of Motor. We

want to make a low cost project which are having very less complications so we did not used any

electronic circuit to avoid complications.[7]

2.1.3 Design & Fabrication of a Low cost effective Spin Coater for

deposition of thin films

Writer : Mohammad Meftahul Ferdaus et. Al.

According to authors this paper tells us about the design and fabrication of a low cost spin coater for

depositing thin films on any flat substrate. In simple words spin coater is a machine that can dispense a

liquid fluid onto a substrate equally.

Some unique desirable properties of Spin coating machine such as ability to make defect free and uniform

thickness of thin film, accuracy when talking about rotation control together with a closed optimized

process chamber etc. are maintained in this prototype spin coater.

The materials used for making thin film liquefied in a volatile solvent. Here the system is fabricated by

using a dc motor and simple electronics circuit, in which the spinning speed can be controlled very easily.

In this design the spinning speed is up to 3,000 rpm that can be controlled step by step manually.

Thin film deposition by this cost effective spin coater is a very simple technique and can be used widely

for preparing films of uniform thickness.[8]

So as we said above we were trying to reduce complication from the project so we used regulator

for controlling the speed of motor. We can regulate motor from 300 rpm to 9000 rpm.

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2.1.4 A comprehensive study of spin coating as a thin film

deposition technique and coating Equipment

Writer : M. D. Tyona, Advances in Material Research, Vol. 2, No. 4(2013) 181 – 193 et. Al.

According to the author spin coating machine designed and fabricated using affordable

components. The system was easily built with the knowledge of mechanics, fluid mechanics and

basics of electronics. This equipment employs majorly three basic components and two circuit

units in its operation.

These includes a high speed Dc motor, a proximity sensor mounted at a distance of about 15mm

from a reflective metal attached to the spindle of the motor to detect every passage of reflective

metal at its front and generate pulses.

Talking about our project we are neither using any kind of sensor here nor any electronic circuit

for reducing or controlling the speed of motor. In the process of making our project we are

focusing on making a low cost Spin Coater. That’s why here we used a 230 volt Regulator for

controlling the speed of motor.[9]

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CHAPTER 03

MATERIAL AND MODELING

3.1 Introduction

Material and Modeling is an important part of the project report. In which we will discuss here

about the materials, equipments etc. what we used during making of our project as well as the

modeling of spin coater and spin coating process. Here also we will discuss about the design of

the project as well as we will do cost analysis of the project.

3.2 Materials/Equipments used in the making of the project

Materials and equipments are the base for making of any project. Here in the making of our

project we used Tin for the outer covering inside which we will assemble all the other

equipments like motor, shafts, pulley, belt, other electronic parts etc.

We used here Pewter for making clamps because of its several properties like it is very less in

their weight comparing to other metals or any things.

We used here a plastic pot for the upper covering of Disk as it is very less in weight. As we were

trying to reduce the weight of our project. We also used a syringe for deposition of fluid exactly

at the centre in exact measurement.[10]

We used here hard board for making the disk because of its light weight. Another reason for

using of hard board’s disk is its ease of cleaning as after every deposition of fluid some fluid may

be shown there on the disk.

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3.3 Specification of Materials/Equipment

As we said that we used here Tin for making the outer covering of body. So the

specification/Size of the Tin part was as given below:

We used 2 Parts of Tin here both are of same size 23” * 9” & after that we gave them a design as

shown below here:

Below shown is the front view of the outer cabinet:

FIG 3.1 Front View of outer cabinet

Another important equipment used here is motor. Which plays a very important role is working

of project. Specification of motor is as given below:

Basically we need here a motor which is having very high speed as well as that speed can

controlled by any external means. So we used here High speed sewing machine motor here as it

has speed about 9000 revolution per minute. Which is comparatively very high than other spin

motors etc.[11]

Talking about our requirement we need a motor here which can work in between 300 to 6500

Rpm and that can be controlled by any external means like regulator etc.

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Specification of Motor:

AMPS 0.5

HORSE POWER 1/12

CYCLE 50. Hz

VOLTS 220/230 V

R.P.M. 9000

FIG. 3.2 High speed sewing machine motor

We also used here a syringe of 10ml for the depositing of coating fluid in exact volume at the

centre. We fitted the syringe at the centre of the top cover.

Talking about the disk we used hard board for making the disk because of its different properties

as we explained before in the report.

We also used here pewter for making of the holding arrangement and then we assemble those

pewter with the disk which is as shown below in the figure:

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FIG. 3.3 Front & Rear view of the Disk with Clamping arrangement

Then there are some other things which we use here in the making of our projects are as follows:

A shaft of Dia. 6 mm

2 nos. pulley of Internal Dia. 6mm

1 plastic pot with cover for top cover

Some screw bolts etc.

3.4 Modeling of spin coater

As already spin coating has been continuously used in the different industry long before, hardly

even a single theoretical study has been initiated. An exact theory of spin coating would allow

better understanding of design and control of the process in its various applications. Several

years of industrial production operations have shown that the depositions of thin films, which

constitute the main utilization of the spin coating process, are quasi perfectly controlled.

However, any progress in developing mathematical models should be probably more helpful in

the case of heat resistant dielectric insulating films (polyamides or other materials).[12]

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FIG. 3.4 Final design of spin coater

3.4.1 Key stages of spin coating

The operation of spin coating can be effectively modeled by dividing the whole process into four

stages sketched in Figure 10, which are deposition, spin-up (increase in rpm), spin-off (decrease

in rpm) and evaporation of solvents. The first three are commonly sequential, but spin-off and

evaporation usually overlap. Stage 3 and stage 4 are the two stages that have the most impact on

final coating thickness.

Deposition:

During the first stage, solution is provided to fall on rotating substrates from syringes and the

substrate is accelerated to the desired speed. Spreading of the solution takes place due to

centrifugal force and height is reduced to critical height. This is the stage of delivering an excess

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of the liquid to be coated to the surface of the substrate a portion of which’s immediately covered

or “wetted”.

FIG. 3.5 Key stages of spin coating process[13]

Spin-up:

The second stage is when the substrate is accelerated up to its final, desired, rotation speed. This

stage is usually characterized by aggressive fluid expulsion from the wafer surface by the

rotational motion. Because of the initial depth of fluid on the wafer surface, spiral vortices may

briefly be present during this stage; these would form as a result of the twisting motion caused by

the inertia that the top of the fluid layer exerts while the wafer below rotates faster and faster.

Eventually, the fluid is thin enough to be completely co-rotating with the wafer and any evidence

of fluid thickness differences is gone. Ultimately, the wafer reaches its desired speed and the

fluid is thin enough that the viscous shear drag exactly balances the rotational accelerations.[14]

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Stable fluid outflow:

This stage is also known as spin down process in which the speed of rotating of disk will get

decrease slowly. The third stage is when the substrate is spinning at a constant rate and fluid

viscous forces dominate fluid thinning behavior. This stage is characterized by gradual fluid

thinning.

Evaporation:

When spin-off stage ends the film drying stage begins. During this stage centrifugal out flow

stops and further shrinkage is due to solvent loss. This results in the formation of thin film on the

substrate. The fourth stage is when the substrate is spinning at a constant rate and solvent

evaporation dominates the coating thinning behavior. In this, the rate of evaporation depends on

two factors (a) the difference in partial pressure (actually chemical potential) of each solvent

species between the free surface of the liquid layer and the bulk of the gas flowing nearby.

During the evaporation stage the suspended or dissolved solids may grow so concentrated at the

liquid surface as to form a high viscosity, low diffusivity layer or solid skin.[15]

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3.5 Cost Analysis

Cost analysis is the portion where we will discuss about the cost of different used products,

materials as well as cost of the equipments etc.

The cost of every product/material/equipments is as shown below in the table:

TABLE:

Materials/Equipments

Names

Cost

Motor 1300

Tin for outer covering 700

Plastic pot 130

Syringe

10

Disk 200

Clamp 100

Shaft 50

Belt 10

Screw Bolts 50

Wires 20

Regulator 25

Plugs 25

Pulley 200

Welding Charges 200

TOTAL COST 3000

TABLE 3.1 Cost analysis

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CHAPTER 04

RESULT & DISCUSSION

4.1 Introduction

Here, we will discuss about different factors which affects coating as well as we will perform our

experiment and will put the result here. We will also discuss here the troubleshooting of spin

coating process.

4.2 Result

We perform on our project by taking a glass lid and the coating solution is the mixture of color

and water. Fill that solution in syringe and place the glass lid on disk and tighten by the clamps.

Place the top cover on its position.

After that start the machine and control the speed of motor with the help of the regulator. The

speed should be about 300 rpm at the time of starting the at the same speed press the syringe so

that deposition of the coating fluid can be occurs at the centre of glass lid.

Then slowly increase the speed of motor up to 6500 rpm. This is the second process of spin

coating leave as it is for 60 seconds and then slowly decreases the speed and bring it to around

1000 rpm so that evaporation can be occurs.

As we said before we perform a demonstration and what we got is as shown below:

FIG. 4.1 First experiment

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4.2.1 Graph between film thickness Vs spin time

There are several factors which affect the thickness of film. Basic Initial conditions that can be

recommended for a good film deposition are the following:

1) The spinning disk should be perfectly leveled horizontally.

2) The deposited solution should wet the substrate.

3) The substrate must be clean and free from any kind of dust particles.

4) The solution should be homogeneous and uniform.

The relationship of film thickness with spinning time is as shown in graph below:

GRAPH 4.1 Relationship between film thickness and spinning time

So here above is the graph showing the relationship between film thicknesses Vs. spinning time

As its shown here by increasing the spin time we can reduce the thickness of film.

4.2.2 Graph between film thickness Vs spin speed

Another factor which affects the film thickness is spin speed. So the relationship between film

thickness and spin speed is as shown in graph below:

We can get from the below graph that we can reduce the film thickness by increase in spin speed.

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GRAPH 4.2 Relationship Between film thickness and spin speed

There are several methods for the thin film deposition. Among all the advantages of spin-coating

methods are: available equipments, no time-consuming delays, fast operating and low cost. The

important factors are:

• Fluid viscosity.

• Solution concentration

• Angular speed.

• Spin Time.

• Evaporation rate of solvent.

Applications: In insulating layers for microcircuit fabrication (like: polymers, SOG), microcircuit

production, flat screen display coatings, antireflection coatings, in dielectric application and

microelectronic industries for the fabrication of integrated circuits.

4.3 Spin coating troubleshooting process

As already explained, there are number of major factors which affect the coating process. Some

of them are these as follows spin speed, acceleration, spin time and exhaust. Following is a list of

issues to consider for specific process problems.

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Film too thin

Reason Solution

Spin speed too high Select lower speed

Spin time too long Decrease time during high speed step

TABLE 4.1 Troubleshooting

Film too thick

Spin speed too low Select higher speed

Spin time too short Increase time during high speed step

TABLE 4.2 Troubleshooting

Air bubbles on wafer surface

1) Air bubbles in dispensed fluid (resin)

2) Dispense tip is cut unevenly or has burrs or defects

Comets, streaks, or flares

1) Fluid velocity (dispense rate) is too high

2) Spin bowl exhaust rate is too high

3) Resist sits on wafer too long prior to spin

4) Spin speed and acceleration setting is too high

5) Particles exist on substrate surface prior to dispense

6) Fluid is not being dispensed at the center of the substrate surface

Swirl pattern

1) Spin bowl exhaust rate is too high

2) Fluid is striking substrate surface off center

3) Spin speed and acceleration setting is too high

4) Spin time too short

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CHAPTER 05

Conclusion & Future scope

5.1 Conclusion

A cost effective spin-coater was successfully designed and fabricated. The total system is very

simple. Spin coaters are ideal tools for the preparation of thin films. In this work, thin films are

successfully prepared by spin-coating method. This spin coater can also be used for film

deposition of different types of precursor solution.

From this review we conclude that one can understand the basic physics behind the spin coating

process. And establish the relationship between film thickness Vs. time and speed.

.

5.1.1 Advantages

As evidenced by its maturity, spin coating has many advantages in coating operations with its

biggest advantage being the absence of coupled process variables. Film thickness is easily

changed by changing spin speed, or switching to a different viscosity photo resist. But among the

alternative coating techniques, many have multiple coupled parameters, making coating control

more complex. Another advantage of spin coating is the ability of the film to get progressively

more uniform as it thins, and if the film ever becomes completely uniform during the coating

process, it will remain so for the duration of the process. It is low cost and fast operating system.

The maturity of spin coating implies many of the issues involved in spin coating have been

studied and a lot of information exists on the subject.

5.1.2 Disadvantages

The disadvantages of spin coating are few, but they are becoming more important as substrate

size increases and photo resist costs rise. Large substrates cannot be spun at a sufficiently high

rate in order to allow the film to thin. The biggest disadvantage of spin coating is its lack of

material efficiency. Typical spin coating processes utilize only 2–5% of the material dispensed

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onto the substrate, while the remaining 95–98% is flung off in to the coating bowl and disposed.

Not only are the prices of the photo resist increasing substantially, but disposal costs increasing

as well. If economically feasible manufacturing costs are to be maintained, a method for

improving this material utilization is of primary importance, especially in the flat panel display

area.

5.2 Future scope

By including microprocessor in the main circuit we can include the auto on/off system. We also

can add a digital display to know the speed, time and other necessary readings.

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REFERENCE

[1] A G Emsile, F T Bonner and L G Peek J. Appl. Phys. 29 858 (1958)

[2] D Meyerhofer J. Appl. Phys. A9 3993 (1978)

[3] D E Bornside, C W Macosko et al, J. Imaging Tech. 13 122 (1987)

[4] R K Yonkoski and D S Soane J. Appl. Phys. 72 725 (1992)

[5] C J Lawrence and W Zhou Journal of Non-Newtonian Fluid Mechanics 39 137 (1991)

[6] S Middleman An Introduction to Fluid Dynamics (New York : John Wiley and Sons) (1998)

[7] O Omar, A K Ray, A K Hassan and F Davis Supramolecular Science 4 417 (1997)

[8] W W Flack, D S Soong, A T Bell and D W Hess J. Appl. Phys. 56 1199 (1983)

[9] http://www.cise.columbia.edu/clean/process/spintheory.pdf

[10] http://www.mse.arizona.edu/faculty/birnie/Coatings

[11] Ohring, M. (1992), ‘The Materials Science of Thin Films’, Academic Press limited, 24-28

Oval Road, London, NW1, 7DX, UK, pp. XIII. Moshfegh, A. Z. Känel, H.V., Kashyap, S.C.,

and Wuttig, M. (2003), ‘Proceedings of the International Workshop on Physics And Technology

Of Thin Films’, World Scientific Publishing Co. Pvt Ltd. 5 Toh Tuck Link, Singapore, 596224

Tehran, Iran, pp. IX.

[12] Seshan, K. (2002), ‘Handbook of thin-film Deposition processes and techniques: Principles,

Methods, Equipment and Applications’, 2nd ed, Norwich, New York, U.S.A.: Noyes

publications, William andrew publishing.

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[13] Aguilar, R.G., and López, J.O. (2011), ‘Low cost instrumentation for spin-coating

deposition of thin films in an undergraduate laboratory’, Latin American Journal of Physics

Education, 5 (2), 368-373.

[14] Smirnov, M.A., Rambu, P., Baban, C., and Rusu, G.I. (2010), ‘Electronic Transport

Properties in Polycrystalline ZnO Thin Films’, Journal of Advanced Research in Physics, 1 (2),

021011.

[15] Sevvanthi, P. Claude, A., Jayanthi, C., and Poiyamozhi, A. (2012), ‘Instrumentation for

fabricating an indigenous spin coating apparatus and growth of zinc oxide thin films and their

characterizations’, Advances in Applied Science Research, 3 (6), 3573-3580.