Wafer #31107, 31108, 31110

PT100 PT100 PT100 PT100 PT100

PT100 PT100 PT100 PT100 PT100

PT100 PT100 PT100 PT100 PT100

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Connections between sensor and heater

WAFER After gluing After soldering

#31107 #31107 #31107 Dig-Analog Dig Sensor Sensor

Res 1 Res2 Res 1 Res2 parasitic Res 1 Res2 parasitic PT100 PT100 parasitic

Channel1 102.4 57.7 Channel1 102 57.5 ~ Channel1 102.2 57.8 ~ 111.2 112.2 260K

Channel2 100.5 56.7 Channel2 100 56.4 ~ Channel2 100 56.6 6.2M 111.3 113 330K

Channel3 100.2 56.7 Channel3 99.8 56.4 ~ Channel3 99.7 56.5 ~ 111.3 113.1 850K

Channel4 100.9 ~ Channel4 100.5 ~ 46K Channel4 100.6 ~ 6.1K 111.3 113.1 8K

Channel5 102.5 58 Channel5 102 57.8 125K Channel5 102.1 56.1 1.3K 111.4 113.4

Channel6 103.7 59.5 Channel6 100.8 58.5 20M Channel6 102.9 59.3 12M 111.3

Channel7 101.4 58.1 Channel7 100.5 57.5 930K Channel7 100.3 57.9 26K 111.3

Channel8 100.5 57.7 Channel8 100 57.3 437Ω Channel8 96.3 57.5 ~ 111.4

Channel9 101.1 58 Channel9 100.8 57.7 6.4K Channel9 100.3 57.8 3.2K 111.3

Channel10 102.6 59 Channel10 103.1 59.1 5.9K Channel10 98.4 58.2 1.9K 111.2

resistances parasites mesurées entre 5K et 10MΩ sur les cannaux 6 à 10

resistances parasites mesurées entre 437 et 20MΩ sur les cannaux 6 à 10

resistances parasites mesurées entre 1.3K et 12MΩ

Sensor: 250KΩ entre 1 et 2 4 M Ω entre 4 et 5 Sensor: OK

Sensor:1-2:260KΩ 2-3:330KΩ 3-4:850KΩ 4-5:8KΩ

Heater #31107

#31108 #31108 Res 1 Res2 Res 1 Res2 parasitic

Channel1 101.4 57.1 Channel1 101.1 57 55KΩChannel2 99.5 56.2 Channel2 99.2 56 Channel3 99.3 56.2 Channel3 99.1 56.1 Channel4 100.1 ~ Channel4 99.8 ~ Channel5 101.5 57.3 Channel5 101.2 56.4 47KΩChannel6 102.8 59 Channel6 102.1 58.6 120KΩChannel7 100.5 57.6 Channel7 99.8 57.2 Channel8 99.7 57.2 Channel8 99.1 56.8 30MΩ Channel9 100.4 57.6 Channel9 99.9 57.2

Channel10 101.8 58.5 Channel10 101.1 58.2

resistances parasites mesurées entre 230K et 1.5MΩ sur les

cannaux 1 à 5resistances parasites mesurées

entre 47K et 30MΩ

Sensor: OK

Sensor: 387KΩ PT100#1

Heater #31108

#31110 #31110 #31110Dig-

Analog Dig Sensor Sensor Res 1 Res2 Res 1 Res2 parasitic Res 1 Res2 parasitic PT100 PT100 parasitic

Channel1 92.3 52 Channel1 91.6 51.6 Channel1 91.3 51.5 110.4 112.6 26KChannel2 90.4 51.1 Channel2 89.6 50.7 228K Channel2 89.4 50.4 17M 110.4 112.5 14KChannel3 90.3 51.1 Channel3 89.6 50.7 Channel3 89.5 50.5 110.4 112.6 5KChannel4 91.3 ~ Channel4 90.5 ~ Channel4 90 ~ 110.3 112.7 3.5KChannel5 93 52.7 Channel5 92.3 52.3 Channel5 92.9 53.7 110.5 112.4Channel6 93.9 54.2 Channel6 93.1 53.8 Channel6 90.9 52.4 115.3Channel7 91.7 52.9 Channel7 91 52.4 Channel7 90.2 52.3 110.7Channel8 91.2 52.6 Channel8 90.4 52.2 Channel8 90.8 52.3 110.7Channel9 91.8 52.9 Channel9 91.1 52.5 Channel9 91.1 52.4 111.3

Channel10 93.4 53.8 Channel10 92.8 53.4 Channel10 92.4 53.4 110.7

Pas de resistance parasite mesurée entre les résistances

resistances parasites mesurées sur CH2: 228KΩ

resistances parasites mesurées sur CH2: 17MΩ

Sensor: OK

Sensor: 16MΩ

Sensor:1-2:26K 2-3:14K 3-4:5K 4-5:3.5K

WAFER After gluing After soldering

Heater #31110