VLSI-Unit 2

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    A Brief History

    1958: First integrated circuit Flip-flop using two transistors Built by Jack Kilby at Texas Instruments

    2003 Intel Pentium 4 mprocessor (55 million transistors) 512 Mbit DRAM (> 0.5 billion transistors)

    53% compound annual growth rate over 45 years No other technology has grown so fast so long

    Driven by miniaturization of transistors Smaller is cheaper, faster, lower in power! Revolutionary effects on society

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    Introduction

    Integrated circuits: many transistors on one chip.

    Very Large Scale Integration (VLSI): very many

    Complementary Metal Oxide Semiconductor

    Fast, cheap, low power transistors How to build your own simple CMOS chip

    CMOS transistors

    Building logic gates from transistors

    Transistor layout and fabrication

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    VLSI Applications

    VLSI is an implementation technology for electronic circuitry - analog or

    digital

    It is concerned with forming a pattern of interconnected switches and

    gates on the surface of a crystal of semiconductor

    Microprocessors personal computers

    microcontrollers

    Memory - DRAM / SRAM

    Special Purpose Processors - ASICS (CD players, DSP applications)

    Optical Switches

    Has made highly sophisticated control systems mass-producible and

    therefore cheap

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    Invention of the Transistor

    Vacuum tubes ruled in first half of 20th century

    Large, expensive, power-hungry, unreliable

    1947: first point contact transistor John Bardeen and Walter Brattain at Bell Labs

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    Semiconductors and Doping

    Adding trace amounts of certain materials to semiconductorsalters the crystal structure and can change their electricalproperties in particular it can change the number of free electrons or holes

    N-Type

    semiconductor has free electrons dopant is (typically) phosphorus, arsenic, antimony

    P-Type semiconductor has free holes

    dopant is (typically) boron, indium, gallium

    Dopants are usually implanted into the semiconductor usingImplant Technology

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    1970s processes usually had only nMOS transistors

    Inexpensive, but consume power while idle

    1980s-present: CMOS processes for low idle power

    MOS Integrated Circuits

    Intel 1101 256-bit SRAM Intel 4004 4-bit mProc

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    Moores Law

    1965: Gordon Moore plotted transistor on each chip

    Fit straight line on semilog scale

    Transistor counts have doubled every 26 months

    Year

    Transistors

    40048008

    8080

    8086

    80286Intel386

    Intel486Pentium

    Pentium ProPentium II

    Pentium III

    Pentium 4

    1,000

    10,000

    100,000

    1,000,000

    10,000,000

    100,000,000

    1,000,000,000

    1970 1975 1980 1985 1990 1995 2000

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    MOS Capacitor

    Gate and body form MOS capacitor

    Operating modes

    Accumulation

    Depletion

    Inversion

    polysilicon gate

    (a)

    silicon dioxide insulator

    p-type body+-

    Vg

    < 0

    (b)

    +-

    0 < Vg

    < Vt

    depletion region

    (c)

    +-

    Vg

    > Vt

    depletion region

    inversion region

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    Terminal Voltages

    Mode of operation depends on Vg, Vd, Vs

    Vgs = Vg Vs

    Vgd = Vg Vd

    Vds = Vd Vs = Vgs - Vgd

    Source and drain are symmetric diffusion terminals

    By convention, source is terminal at lower voltage

    nMOS body is grounded. First assume source is 0 too.

    Three regions of operation Cutoff

    Linear

    Saturation

    Vg

    Vs

    Vd

    Vgd

    Vgs

    Vds

    +-

    +

    -

    +

    -

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    nMOS Cutoff

    No channel

    Ids = 0

    +-

    Vgs

    = 0

    n+ n+

    +-

    Vgd

    p-type body

    b

    g

    s d

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    nMOS Linear

    Channel forms

    Current flows from d to s

    e- from s to d

    Ids increases with Vds

    Similar to linear resistor

    +

    -

    Vgs

    > Vt

    n+ n+

    +

    -

    Vgd

    = Vgs

    +-

    Vgs

    > Vt

    n+ n+

    +-

    Vgs > Vgd > Vt

    Vds

    = 0

    0 < Vds

    < Vgs

    -Vt

    p-type body

    p-type body

    b

    g

    s d

    b

    g

    s dIds

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    nMOS Saturation

    Channel pinches off

    Ids independent of Vds

    We say current saturates Similar to current source

    +-

    Vgs

    > Vt

    n+ n+

    +-

    Vgd

    < Vt

    Vds > Vgs-Vt

    p-type body

    b

    g

    s d Ids

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    pMOS Transistor

    Similar, but doping and voltages reversed

    Gate low: transistor ON

    Gate high: transistor OFF

    Bubble indicates inverted behavior

    SiO2

    n

    GateSource Drain

    bulk Si

    Polysilicon

    p+ p+

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    Power Supply Voltage

    GND = 0 V

    In 1980s, VDD = 5V

    VDD has decreased in modern processes High VDD would damage modern tiny transistors

    Lower VDD saves power

    VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0,

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    Transistors as Switches

    We can view MOS transistors as electrically

    controlled switches

    Voltage at gate controls path from source to

    drain

    g

    s

    d

    g = 0

    s

    dg = 1

    s

    d

    g

    s

    d

    s

    d

    s

    d

    nMOS

    pMOS

    OFFON

    ONOFF

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    I-V Characteristics

    In Linear region, Ids depends on

    How much charge is in the channel?

    How fast is the charge moving?

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    Channel Charge

    MOS structure looks like parallel plate

    capacitor while operating in inversion

    Gate oxide channel

    Qchannel =

    n+ n+

    p-type body

    +

    Vgd

    gate

    + +

    source

    -

    Vgs-

    drain

    Vds

    channel-

    Vg

    Vs

    Vd

    Cg

    n+ n+

    p-type body

    W

    L

    tox

    SiO2

    gate oxide(good insulator,

    ox= 3.9)

    polysilicon

    gate

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    Channel Charge

    MOS structure looks like parallel plate

    capacitor while operating in inversion

    Gate oxide channel

    Qchannel = CV

    C =

    n+ n+

    p-type body

    +

    Vgd

    gate

    + +

    source

    -

    Vgs-

    drain

    Vds

    channel-

    Vg

    Vs

    Vd

    Cg

    n+ n+

    p-type body

    W

    L

    tox

    SiO2

    gate oxide(good insulator,

    ox= 3.9)

    polysilicon

    gate

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    Channel Charge

    MOS structure looks like parallel plate capacitor while

    operating in inversion

    Gate oxide channel

    Qchannel

    = CV

    C = Cg = oxWL/tox = CoxWL

    V =

    n+ n+

    p-type body

    +

    Vgd

    gate

    + +

    source

    -

    Vgs-

    drain

    Vds

    channel-

    Vg

    Vs

    Vd

    Cg

    n+ n+

    p-type body

    W

    L

    tox

    SiO2

    gate oxide(good insulator,

    ox= 3.9)

    polysilicon

    gate

    Cox = ox/ tox

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    Channel Charge

    MOS structure looks like parallel plate capacitor while

    operating in inversion

    Gate oxide channel

    Qchannel

    = CV

    C = Cg = oxWL/tox = CoxWL

    V = Vgc Vt = (Vgs Vds/2) Vt

    n+ n+

    p-type body

    +

    Vgd

    gate

    + +

    source

    -

    Vgs-

    drain

    Vds

    channel-

    Vg

    Vs

    Vd

    Cg

    n+ n+

    p-type body

    W

    L

    tox

    SiO2

    gate oxide(good insulator,

    ox= 3.9)

    polysilicon

    gate

    Cox = ox/ tox

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    Carrier velocity

    Charge is carried by e-

    Carrier velocity vproportional to lateral E-field

    between source and drain

    v=

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    Carrier velocity

    Charge is carried by e-

    Carrier velocity vproportional to lateral E-field

    between source and drain

    v= mE m called mobility

    E =

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    Carrier velocity

    Charge is carried by e-

    Carrier velocity vproportional to lateral E-field

    between source and drain

    v= mE m called mobility

    E = Vds/L

    Time for carrier to cross channel: t=

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    Carrier velocity

    Charge is carried by e-

    Carrier velocity vproportional to lateral E-field

    between source and drain

    v= mE m called mobility

    E = Vds/L

    Time for carrier to cross channel: t= L / v

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    nMOS Linear I-V

    Now we know

    How much charge Qchannel is in the channel

    How much time teach carrier takes to cross

    dsI

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    nMOS Linear I-V

    Now we know

    How much charge Qchannel is in the channel

    How much time teach carrier takes to crosschannel

    dsQI

    t

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    nMOS Linear I-V

    Now we know

    How much charge Qchannel is in the channel

    How much time teach carrier takes to cross

    channel

    ox 2

    2

    ds

    dsgs t ds

    dsgs t ds

    QI

    t

    W VC V V V

    LV

    V V V

    m

    ox=

    WC

    L m

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    nMOS Saturation I-V

    If Vgd < Vt, channel pinches off near drain

    When Vds > Vdsat = Vgs Vt

    Now drain voltage no longer increases current

    dsI

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    nMOS Saturation I-V

    If Vgd < Vt, channel pinches off near drain

    When Vds > Vdsat = Vgs Vt

    Now drain voltage no longer increases current

    2dsat

    ds gs t dsat

    V I V V V

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    nMOS Saturation I-V

    If Vgd < Vt, channel pinches off near drain

    When Vds > Vdsat = Vgs Vt

    Now drain voltage no longer increases current

    2

    2

    2

    dsatds gs t dsat

    gs t

    V I V V V

    V V

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    nMOS I-V Summary

    2

    cutoff

    linear

    saturatio

    0

    2

    2n

    gs t

    dsds gs t ds ds dsat

    gs t ds dsat

    V V

    V I V V V V V

    V V V V

    Shockley1st order transistor models

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    pMOS I-V

    All dopings and voltages are inverted for pMOS

    Mobility mp is determined by holes

    Thus pMOS must be wider to provide same

    current

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    Channel Length Modulation

    Reverse-biased p-n junctions form adepletion region

    Region between n and p with no carriers

    Width of depletion Ld region grows with reversebias

    Leff= L Ld

    Shorter Leffgives more current

    Ids increases with Vds Even in saturation

    n+

    p

    GateSource Drain

    bulk Si

    n+

    VDDGND VDD

    GND

    LL

    eff

    Depletion Region

    Width: Ld

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    Chan Length Mod I-V

    l = channel length modulation coefficient not feature size

    Empirically fit to I-V characteristics

    2

    12

    ds gs t ds I V V V

    l

    Ids

    (mA)

    Vds0 0.3 0.6 0.9 1.2 1.5 1.8

    100

    200

    300

    400

    Vgs

    = 0.6

    Vgs

    = 0.9

    Vgs

    = 1.2

    Vgs

    = 1.5

    Vgs

    = 1.8

    0

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    CMOS DC Response

    DC Response: Vout vs. Vin for a gate

    Ex: Inverter

    When Vin = 0 -> Vout = VDD

    When Vin = VDD -> Vout = 0

    In between, Vout depends on

    transistor size and current

    By KCL, must settle such thatIdsn = |Idsp|

    We could solve equations

    Idsn

    Idsp V

    out

    VDD

    Vin

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    Transistor Operation

    Current depends on region of transistor

    behavior

    For what Vin and Vout are nMOS and pMOS in

    Cutoff?

    Linear?

    Saturation?

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    nMOS Operation

    Cutoff Linear Saturated

    Vgsn < Vgsn >

    Vdsn

    Vdsn >

    Idsn

    Idsp Vout

    VDD

    Vin

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    nMOS Operation

    Cutoff Linear Saturated

    Vgsn < Vtn Vgsn > Vtn

    Vdsn < Vgsn Vtn

    Vgsn > Vtn

    Vdsn > Vgsn

    Vtn

    Idsn

    Idsp Vout

    VDD

    Vin

    Vgsn = VinVdsn = Vout

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    nMOS Operation

    Cutoff Linear Saturated

    Vgsn < VtnVin < Vtn

    Vgsn > VtnVin > Vtn

    Vdsn < Vgsn

    VtnVout < Vin - Vtn

    Vgsn > VtnVin > Vtn

    Vdsn > Vgsn

    VtnVout > Vin - Vtn

    Idsn

    Idsp Vout

    VDD

    Vin

    Vgsn

    = Vin

    Vdsn = Vout

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    pMOS Operation

    Cutoff Linear Saturated

    Vgsp > Vgsp

    Vgsp Vgsp Vtp

    Vgsp < Vtp

    Vdsp < Vgsp Vtp

    Idsn

    Idsp Vout

    VDD

    Vin

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    pMOS Operation

    Cutoff Linear Saturated

    Vgsp > Vtp Vgsp < Vtp

    Vdsp > Vgsp Vtp

    Vgsp < Vtp

    Vdsp < Vgsp Vtp

    Idsn

    Idsp Vout

    VDD

    Vin

    Vgsp = Vin - VDDVdsp = Vout - VDD

    Vtp

    < 0

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    pMOS Operation

    Cutoff Linear Saturated

    Vgsp > VtpVin > VDD + Vtp

    Vgsp < VtpVin < VDD + Vtp

    Vdsp > Vgsp

    VtpVout > Vin - Vtp

    Vgsp < VtpVin < VDD + Vtp

    Vdsp < Vgsp

    VtpVout < Vin - Vtp

    Idsn

    Idsp Vout

    VDD

    Vin

    Vgsp = Vin - VDDVdsp = Vout - VDD

    Vtp

    < 0

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    I-V Characteristics

    Make pMOS is wider than nMOS such that n= p

    Vgsn5

    Vgsn4

    Vgsn3

    Vgsn2

    Vgsn1

    Vgsp5

    Vgsp4

    Vgsp3

    Vgsp2

    Vgsp1

    VDD

    -VDD

    Vdsn

    -Vdsp

    -Idsp

    Idsn

    0

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    Current vs. Vout, Vin

    Vin5

    Vin4

    Vin3

    Vin2V

    in1

    Vin0

    Vin1

    Vin2

    Vin3V

    in4

    Idsn

    , |Idsp

    |

    Vout

    VDD

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    Load Line Analysis

    Vin5

    Vin4

    Vin3

    Vin2

    Vin1

    Vin0

    Vin1

    Vin2

    Vin3

    Vin4

    Idsn

    , |Idsp

    |

    Vout

    VDD

    For a given Vin:

    Plot Idsn, Idsp vs. Vout

    Vout must be where |currents| are equal in

    Idsn

    Idsp Vout

    VDD

    Vin

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    Load Line Analysis

    Vin0

    Vin0

    Idsn

    , |Idsp

    |

    Vout

    VDD

    Vin = 0

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    Load Line Analysis

    Vin1

    Vin1I

    dsn, |I

    dsp|

    Vout

    VDD

    Vin = 0.2VDD

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    Load Line Analysis

    Vin2

    Vin2

    Idsn

    , |Idsp

    |

    Vout

    VDD

    Vin = 0.4VDD

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    Load Line Analysis

    Vin3

    Vin3

    Idsn

    , |Idsp

    |

    Vout

    VDD

    Vin = 0.6VDD

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    Load Line Analysis

    Vin4

    Vin4

    Idsn

    , |Idsp

    |

    Vout

    VDD

    Vin = 0.8VDD

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    Load Line Analysis

    Vin5

    Vin0

    Vin1

    Vin2

    Vin3

    Vin4

    Idsn

    , |Idsp

    |

    Vout

    VDD

    Vin = VDD

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    Load Line Summary

    Vin5

    Vin4

    Vin3

    Vin2Vin1

    Vin0

    Vin1

    Vin2

    Vin3Vin4

    Idsn

    ,|Idsp

    |

    Vout

    VDD

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    DC Transfer Curve

    Transcribe points onto Vin vs. Vout plot

    Vin5

    Vin4

    Vin3

    Vin2

    Vin1

    Vin0

    Vin1

    Vin2

    Vin3

    Vin4

    Vout

    VDD

    CV

    out

    0

    Vin

    VDD

    VDD

    A B

    DE

    Vtn VDD /2 VDD+Vtp

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    Operating Regions

    Revisit transistor operating regions

    CV

    out

    0

    Vin

    VDD

    VDD

    A B

    DE

    Vtn VDD /2 VDD+Vtp

    Region nMOS pMOS

    A

    B

    C

    D

    E

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    Operating Regions

    Revisit transistor operating regions

    CV

    out

    0

    Vin

    VDD

    VDD

    A B

    DE

    Vtn VDD /2 VDD+Vtp

    Region nMOS pMOS

    A Cutoff Linear

    B Saturation Linear

    C Saturation Saturation

    D Linear Saturation

    E Linear Cutoff

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    Noise Margins

    How much noise can a gate input see before it

    does not recognize the input?

    IndeterminateRegion

    NML

    NMH

    Input CharacteristicsOutput Characteristics

    VOH

    VDD

    VOL

    GND

    VIH

    VIL

    Logical HighInput Range

    Logical LowInput Range

    Logical HighOutput Range

    Logical LowOutput Range