A Borussia Dortmund elemzés angol/ The Borussia Dortmund Analysis
Measurements @ Dortmund on TESLA-ON wafers
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Transcript of Measurements @ Dortmund on TESLA-ON wafers
Measurements @ Dortmund on TESLA-ON wafers
J.Kudlatyon behalf of the group of
DortmundApril 2004
Atlas Pixel Italia Apr 2004 2
Mask alignment
5371-08 0.5-2.5 Y-Y Y-Y Y-Y correct
5371-10 N.V.-2.5 Y-Y 2.0-Y Y-Y correct
5371-11 0.5-2.5 Y-Y Y-Y Y-Y correct
5371-18 N.V.-2.5 Y-Y Y-Y Y-Y correct
6257-06 Y-Y Y-Y Y-Y Y-Y correct
6260-01 Y-Y Y-Y Y-Y Y-Y correct
6260-12 Y-Y Y-Y Y-Y Y-Y correct
6260-17 Y-Y Y-Y Y-Y Y-Y correct
6260-18 Y-Y Y-Y Y-Y Y-Y correct
6260-23 Y-Y Y-Y Y-Y Y-Y correct
Mask Alignment (H-V) Wafer n-side L n-side R p-side L p-side R ID marking
very bad w
afers
cut !
see next slide
Atlas Pixel Italia Apr 2004 3
All 4 wafers from batch #5371 have got bad mask alignment.
Test structures are partially or at all unseen
?
Atlas Pixel Italia Apr 2004 4
All 5 wafers from batch #6260 have got asymmetric cut of edges
Atlas Pixel Italia Apr 2004 5
Planarity ( 40µm)
Wafer (µm)
5371-08 77.71 !
5371-10 83.64 !
5371-11 85.54 !
5371-18 59.79
6257-06 20.26
6260-01 28.91
6260-12 39.01
6260-17 35.37
6260-18 26.27
6260-23 26.77
Atlas Pixel Italia Apr 2004 6
5371-08
5371-10
5371-11
5371-18
Atlas Pixel Italia Apr 2004 7
I-V on diodes 16,17 (IVD)
Wafer Vbd (V)16-17
Iop (nA) 16-17
5371-08 500 500 11.33 2.83
5371-10 500 500 11.20 2.45
5371-11 500 280 10.82 7.70
5371-18 500 500 9.45 1.98
6257-06 500 500 12.89 4.10
6260-01 15 500 ? 4.16
6260-12 500 500 11.52 2.06
6260-17 500 500 13.41 2.15
6260-18 500 500 13.45 1.81
6260-23 405 500 13.31 2.39
Atlas Pixel Italia Apr 2004 8
C-V on diodes 16,17 (CVD)
Wafer Vdep (V) Cdep (pF) Vop (V) (cm)
5371-08 110 105
3.29 3.54 160 155 1913 2004
5371-10 90 90 3.12 3.16
150 150 2338 2338
5371-11 90 95 0.92 3.10 150 150 2338 2215
5371-18 70 70 4.26 4.29
150 150 3007 3007
6257-06 65 70 3.09 3.10
150 150 3238 3007
6260-01 175 55 5.43 4.29 225 150 1202 3827
6260-12 55 55 4.28 4.27 150 150 3827 3827
6260-17 65 65 3.40 3.19 150 150 3238 3238
6260-18 65 65 3.17 3.19 150 150 3238 3238
6260-23 70 70 3.11 3.25 150 150 3007 3238
Atlas Pixel Italia Apr 2004 9
Wafer Vbd (V) S good tiles
5371-08 500 500 500 1.079 1.067 1.26 1-2-3
5371-10 500 380 357 1.07 1.15 1.13 1-2-3
5371-11 365 500 500 1.16 1.14 1.11 1-2-3
5371-18 470 20 225 1.13 – 1.52 1-x-3
6257-06 265 290 290 1.29 1.28 1.33 1-2-3
6260-01 45 280 500 - 1.46 1.85 x-2-3
6260-12 50 500 500 - 1.23 1.27 x-2-3
6260-17 60 500 460 - 1.11 1.13 x-2-3
6260-18 390 285 50 1.11 1.59 - 1-2-x
6260-23 50 380 85 - 1.39 2.5 x-2-x
I-V on tiles 01,02,03
Atlas Pixel Italia Apr 2004 10
I-V on SC’s 04-09 and MC’s 10-13
Wafer good/total 04-09
good/total 10-13
5371-08 6/6 4/4
5371-10 6/6 4/4
5371-11 6/6 4/4
5371-18 5/6 3/4
6257-06 6/6 4/4
6260-01 3/6 4/4
6260-12 6/6 4/4
6260-17 6/6 4/4
6260-18 6/6 3/4
6260-23 6/6 2/4
Atlas Pixel Italia Apr 2004 11
I-t on good tiles (ITS)so far has been measured 1 wafer
Wafer-tile S
5371-08-02 1.03
Atlas Pixel Italia Apr 2004 12
I-V on MOS 22,24 (BOX)
Wafer Vbd (V) 22-24
5371-08 100 100
5371-10 100 100
5371-11 100 100
5371-18 NO 100
6257-06 100 NO
6260-01 NO NO
6260-12 NO NO
6260-17 NO NO
6260-18 NO NO
6260-23 100 NO
Atlas Pixel Italia Apr 2004 13
C-V on MOS 22,24 (COX)
Wafer Cox (pF)
Cmin (pF) CFB (pF) VFB (V)
5371-08 181 183 7.17 3.84 50.64 50.77 4 6
5371-10 183 184 7.21 7.7 47.26 47.22 4 4
5371-11 185 185 11.02 6.84
48.33 48.32 5.5 8.5
5371-18 0.65 276
0.17 13.41
0.67 46.6 3.5 6
6257-06 1.12 266
0.93 0.74 1.1 46.32 4 4
6260-01 266 267 2.01 1.43 66.5 66.61 3 4
6260-12 232 279 2.55 4.9 40.79 42.21 4.5 9.5
6260-17 212 266
2.23 2.062
43.06 44.91 2 3
6260-18 274 265 3.4 2.03 45.13 44.89 5.5 2
6260-23 268 264 7.28 1.74 46.40 46.28 2.5 2
Atlas Pixel Italia Apr 2004 14
I-V on gate-controlled diode (IVG)
so far 5 wafers have been measured
Wafer Iox (nA)
5371-08 0.43
5371-10 0.63
5371-11 NO
5371-18 0.53
6257-06 0.50
Atlas Pixel Italia Apr 2004 15
I-Vg on MOSFET (MFE)
Wafer Vth (V) p-dose (x 1012 cm-
2)
5371-08 30 1.91 (low COX)
5371-10 30 1.94 (low COX)
5371-11 30 1.96 (low COX)
5371-18 24 2.33
6257-06 26 2.44
6260-01 36 3.39
6260-12 22 2.16
6260-17 26 2.44
6260-18 26 2.43
6260-23 26 2.42
Atlas Pixel Italia Apr 2004 16
Vpix-V (PUT) Wafer Vpt (V)
5371-08 1.15 !
5371-10 1.49 !
5371-11 1.45 !
5371-18 1.54 !
6257-06 2.16
6260-01 3.84
6260-12 2.35
6260-17 2.37
6260-18 2.28
6260-23 2.33
Atlas Pixel Italia Apr 2004 17
Overview Wafer mask
alignbad cut
planarity
IV on tiles
BOX p-spraydose
PUT
5371-08 NO OK NO OK OK NO NO
5371-10 NO OK NO OK OK NO NO
5371-11 NO OK NO OK OK NO NO
5371-18 NO OK NO OK OK OK NO
6257-06 OK OK OK OK OK OK OK
6260-01 OK NO OK OK NO OK OK
6260-12 OK NO OK OK NO NO OK
6260-17 OK NO OK OK NO OK OK
6260-18 OK NO OK OK NO OK OK
6260-23 OK NO OK NO OK OK OK