Load-lock vacuum coater

Thin Film Deposition /on Tech Inc. Fort Collins, Co/o. Ion Tech Inc. introduces a full line of complete processing systems capable of ion beam etching (IBE), reactive ion beam etching (RIBE), chemically assisted ion beam etching (CAIBE), ion beam assisted deposition (IBAD), and single or multilayer ion beam deposition that can be used to produce sophisticated thin films such as diamondlike carbon (DLC), complex alloys, and high-precision optical films. Standard and customized system designs for specific applications including vacuum chamber design, target and substrate fixture config- uration, and the number, position, and types of ion sources operating in the chamber are available. Systems are available with through-the-wall or stand-alone instal- lation and can be operated manually or completely automated. Circle 093 on reader information card Multistage Vacuum Coater Stokes VacuumInc. Philadelphia Stokes Vacuum has introduced a new multistage vacuum coating system that cleans, metallizes, polymer-coats, and top-coats in one process chamber under completely program- mable and repeatable parameters. The Tri-Coat System was developed originally for automotive applications that are subjected to harsh environments, such as headlamps and metallized trim. The in-situ polymer coating meets these demands while eliminating conventional top-coats with their environmental concerns. The four-stage cycle begins with glow-discharge cleaning and is followed by three coating processes: aluminum deposition, glow-discharge/polymer coating, and a silicon-oxide top coating. Stokes Vacuum engineers custom-match each vacuum coating system to the customers’ application requirements, offering automatic controls. Load-Lock Vacuum Coater Mill Lane Engineering Co. Inc. Lowell, Mass. An in-line vacuum coater introduced by Mill Lane Engineering Co. produces a 25 ft3 load of metallized parts every five minutes. The centrally located process chamber operates continuously to maintain uniform conditions essential for consistently high quality results. Incoming loads are outgassed and plasma cleaned in the entry lock. The exit lock enables the use of controlled atmospheres for cooling, curing, and other subsequent process steps. Optimum yield is insured by computer control. High productivity and a smooth flow of parts are other advantages of in-line technology. The versatile system may be configured to utilize either vacuum thermal evaporation or sputtering deposition making it well suited for decorative and functional metallic and nonmetallic coat- ings on metal, polymer, and ceramic substrates used in automotive, appliance, and hardware applications. Circle 094 on reader information card Circle 095 on reader information card METAL FINISHING . MARCH 1995 49

Upload
trannhi
Category

Documents
view
218
download
4

Embed Size (px):

Transcript of Load-lock vacuum coater

Thin Film Deposition /on Tech Inc. Fort Collins, Co/o.

Ion Tech Inc. introduces a full line of complete processing systems capable of ion beam etching (IBE), reactive ion beam etching (RIBE), chemically assisted ion beam etching (CAIBE), ion beam assisted deposition (IBAD), and single or multilayer ion beam deposition that can be used to produce sophisticated thin films such as diamondlike carbon (DLC), complex alloys, and high-precision optical films. Standard and customized system designs for specific applications including vacuum chamber design, target and substrate fixture config- uration, and the number, position, and types of ion sources operating in the chamber are available. Systems are available with through-the-wall or stand-alone instal- lation and can be operated manually or completely automated.

Circle 093 on reader information card

Multistage Vacuum Coater Stokes Vacuum Inc. Philadelphia

Stokes Vacuum has introduced a new multistage vacuum coating system that cleans, metallizes, polymer-coats, and top-coats in one process chamber under completely program- mable and repeatable parameters. The Tri-Coat System was developed originally for automotive applications that are subjected to harsh environments, such as headlamps and metallized trim. The in-situ polymer coating meets these demands while eliminating conventional top-coats with their environmental concerns. The four-stage cycle begins with glow-discharge cleaning and is followed by three coating processes: aluminum deposition, glow-discharge/polymer coating, and a silicon-oxide top coating. Stokes Vacuum engineers custom-match each vacuum coating system to the customers’ application requirements, offering automatic controls.

Load-Lock Vacuum Coater Mill Lane Engineering Co. Inc. Lowell, Mass.

An in-line vacuum coater introduced by Mill Lane Engineering Co. produces a 25 ft3 load of metallized parts every five minutes. The centrally located process chamber operates continuously to maintain uniform conditions essential for consistently high quality results. Incoming loads are outgassed and plasma cleaned in the entry lock. The exit lock enables the use of controlled atmospheres for cooling, curing, and other subsequent process steps. Optimum yield is insured by computer control. High productivity and a smooth flow of parts are other advantages of in-line technology. The versatile system may be configured to utilize either vacuum thermal evaporation or sputtering deposition making it well suited for decorative and functional metallic and nonmetallic coat- ings on metal, polymer, and ceramic substrates used in automotive, appliance, and hardware applications.

Circle 094 on reader information card

Circle 095 on reader information card

METAL FINISHING . MARCH 1995 49