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Page 1: itemlist.jakou.comitemlist.jakou.com/sputter/sntek.pdf · .Deposition : MO film deposition by DC magnetron sputtering method CIGS film deposition by MBE intrinsic and n type ZnO film
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Sputter Deposition Processes

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Fundamentals of Sputter Deposition

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Chapter6 Film Deposition

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SINGULUS TECHNOLOGIESSINGULUS TECHNOLOGIES AG Q3-2016 - 25 - Process Overview SINGULUS TECHNOLOGIES Thin Film Deposition - Sputter deposition (DC, RF, MF, Bipolar, pulsed) - Evaporation

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Multi-Scale Model of the RF Diode Sputter Deposition … · is capable of predicting the thin-film deposition rate, the sputtered metal atoms’ energy and angular distribution, both

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Sputter deposition of MgxAlyOz thin films in a dual-magnetron … 2012. 7. 23. · The open access journal for physics New Jou rnal of Ph ys ics Sputter deposition of MgxAlyOz thin

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