DC & RF Magnetron Sputter

download DC & RF Magnetron  Sputter

of 10

  • date post

    23-Feb-2016
  • Category

    Documents

  • view

    123
  • download

    0

Embed Size (px)

description

DC & RF Magnetron Sputter . Pei-Ju Chen * Chien-Neng Liao. Introduction. Thin film deposition . Physical vapor deposition (PVD). Chemical vapor deposition (CVD). Sputter Evaporation E-gun. MOCVD LPCVD APCVD. +. +. +. +. +. +. +. +. +. +. Plasma-1. - PowerPoint PPT Presentation

Transcript of DC & RF Magnetron Sputter

PowerPoint Template

DC & RF Magnetron Sputter Pei-Ju Chen* Chien-Neng Liao11IntroductionThin film deposition Physical vapor deposition (PVD)Chemical vapor deposition (CVD) Sputter Evaporation E-gun MOCVD LPCVD APCVDPlasma-110-6torre-e-e-moleculee-electronione-e-e-High Ve-e-e-AnodeCathodeEnergyPlasma-2

Relaxation : A*A + h(photons)

Excitation : e- + A A* + e-

Ionization : e- + A A+ + 2 e-

Dissociation : e- + AB e- + A + B DC sputterDCDC

e-e-AnodeCathodee-e-e-Metale-e-AnodeCathodee-e-e-Non metale-e-e-e-5RF sputter1955Wehner13.56MHz

e-e-AnodeCathodee-e-e-e-e-e-e-e-e-CathodeAnodee-e-e-e-e-e-e-moleculee-electronionDC()(arc)()()6Magnetron sputter-11010ion/cm31013ion/cm3e-e-e-AnodeCathodee-e-e-e-e-AnodeCathodee-e-Magnetic fielde-moleculee-electronionDCRF 7

Magnetron sputter-2()

http://www.helmholtz-berlin.de/forschung/enma/solare-brennstoffe/analytische-methoden/reaktives-magnetron-sputtern_en.htmlSummaryDCRFMagnetronGantt chart