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Teleconference, 02 December 2013
LaserMicroFab1st Year
Marina Makrygianni, Ioanna Zergioti
National Technical University of Athens
Collaboration of NTUA, CNRS/LP3, OL
Teleconference, 02 December 2013
Technical objectives
Selective laser micro and nano‐
patterning
Precise ablation of a predefined
area
Maskless, Non-contact, Dry process
Laser micro printing/curing of metallic NP inks for 2D interconnects and laser printing of biomaterials
High Printing resolution
Direct biomaterials
immobilization
Teleconference, 02 December 2013
Secondments (1/2)
NTUA
I. Zergioti2 months
during 2013
M. Makrygianni 6 months during
2013
CNRS/LP3
P. Delaporte 2 months
during 2013
OL
D. Karnakis 2 months
during 2013
OL NTUA
Teleconference, 02 December 2013
Secondments (2/2)
M. Makrygianni at OL• Design/calculation of the
beam path from laser to target in projection imaging setup
• Development of experimental Setup: attenuation system, zoom telescope, mirrors, objective lens.
• First LIFT experiments of semiconducting polymer P3HT in solid phase
• Fabrication of Imaging and Shadow masks
P. Delaporte at OL• Writing a book
chapter• Experiments in beam
shaping
I. Zergioti at OL• LIFT Experimental
Setup• Experiments in beam
shaping• First experiments in
laser sintering
D. Karnakis at NTUA• LIFT experiments of
semiconducting polymer P3HT in ns regime.
• LIFT experiments of semiconducting polymer P3HT in ps regime.
Teleconference, 02 December 2013
Recruitments3 post-doctoral positions for a duration of 18 months
CNRS/LP3 Post-doctoral position• The main activities of this post-doctoral position will be focused on ‘selective
micro and nano-structuring of thin films’ and ‘laser micro-printing’.• The LP3 Post-doctoral position application period is closed. Daniel Puerto
Garcia has been selected, and he will start from January for 18 months
NTUA Post-doctoral position• The main activities of this post-doctoral position will be focused on ‘laser
micro-printing’, ‘laser micro-curing” and “laser development of biosensors”.• The NTUA Post-doctoral position application deadline has been extended to
31/12/2013
OL Post-doctoral position• The OL Post-doctoral position application is not open yet. The position is
planned to open on 01 Sept 2014 for 18 months. This will be formally advertised well in advance around April/May 2014.
Teleconference, 02 December 2013
Technical progress
At CNRS/LP3• Beam shaping with SLM (Hamamatsu) and microlens arrays.• LIFT of silver NPs inks at high velocity.• LIFT printing of conductive structures and electrodes.• Selective scribing of Transparent Conductive Oxide on Semiconductor (PV).
At NTUA • New LIFT setup in ps regime.• New Two-point probe measurement system.• LIFT experiments in ps and ns regime of semiconducting polymer P3HT.• LIFT experiments in ns regime of copper ink in liquid phase.
At OL• New experimental setup for LIFT experiments and laser micromachining.• First experiments in ns regime of semiconducting polymer P3HT.• Gaussian to Top Hat beam shaping experiments.• First experiments in laser sintering of Ag-NPs.
Teleconference, 02 December 2013
Dissemination Activities during seconded period (1st Year)Transfer of knowledge between Academia and Industrial partners
– Oral presentations to OL staff:
– Oral presentation to students and staff of NTUA
• Present project to other Universities:
P. Delaporte(LP3) Overview of LP3's activities in advanced laser microprocessing
P. Delaporte(LP3) Potential and limitations of the laser transfer printing technique LIFT
M. Makrygianni(NTUA) Fabrication of hybrid (Organic/Inorganic) transistors by means of laser technologies
I. Zergioti(NTUA) Laser Technologies in organic electronics and sensors (part 1)
I. Zergioti (NTUA) Laser Technologies in organic electronics and sensors (part 2)
M. Makrygianni(NTUA) Summary of activities at OL the last 6 months
D. Karnakis(OL) Industrial Laser Micromachinning
I. Zergioti(NTUA) Laser Technologies in organic electronics and sensors Swansea, Wales, UK
Teleconference, 02 December 2013
Oral presentations: M. Makrygianni, I. Theodorakos, C. Boutopoulos, I. Zergioti, Laser-Induced Forward
Transfer of Metallic Nanoparticle Inks, 5th Pan Hellenic Conference on Metallic Materials 2013.
S. Papazoglou, M. Makrygianni, S. Chatzandroulis, I. Raptis, I. Zergioti, Laser Induced Forward Transfer as a Tool for the Fabrication of Graphene-Based Organic Electronic Devices, XXIX PCSSP 2013
S. Papazoglou, M. Makrygianni, I. Zergioti, Laser Induced Forward Transfer of hybrid Graphene/PQT for organic electronics applications, EMRS 2013
J. Ailuno, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive materials for passive microelectronic components’, 6th International Symposium on Flexible Organic Electronics (ISFOE13), Thessaloniki, Greece, 8-11 July 2013
E. Biver, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive inks at high velocity’, 6th International Symposium on Flexible Organic Electronics (ISFOE13), Thessaloniki, Greece, 8-11 July 2013
Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International Congress on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary conference, Miami, USA, October 6-10, 2013
Participation in conferences (1/2)
Teleconference, 02 December 2013
Oral presentations: Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for
Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013 Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International Congress
on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary conference, Miami, USA, October 6-10, 2013
Ph. Delaporte, ‘Laser fabrication of nano/micro-structured materials: printing and ablation’, Invited Seminar, Workshop on ‘Planar Optronic Systems’, PlanOS, Friedrichsdorf, Germany, November 13th, 2013
Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013
Poster presentation: M. Makrygianni, S. Papazoglou, I. Raptis, S. Chatzandroulis, I. Zergioti, LASER PRINTED
POLYMERIC SEMICODUCTOR/ GRAPHENE COMPOSITE FOR ELECTRONIC DEVICES, 12th International Conference on Laser Ablation (COLA 2013).
M. Chatzipetrou, E. Touloupakis, A. Gkouzou, I. Zergioti, An enzyme biosensor for food quality monitoring fabricated by Laser Induced Forward Transfer, 12th International Conference on Laser Ablation (COLA 2013).
Participation in conferences (2/2)
Teleconference, 02 December 2013
Peer-review publications
1. S. Papazoglou, Y.S. Raptis, S. Chatzandroulis, I. Zergioti, A study on the pulsed laser printing of liquid phase, submitted to Applied Physics A
2. S. Papazoglou, V. Tsouti, Y.S. Raptis, I. Zergioti, S. Chatzandroulis, Partially Reduced Graphene Oxide Chemical Sensor Employing Laser Induced Forward Transfer – Fabrication and Evaluation, submitted to Sensors and Actuators: B. Chemical
3. Eleftherios Touloupakis, Marianneza Chatzipetrou, Christos Boutopoulos, Alkisti Gkouzou, Ioanna Zergioti, A polyphenol biosensor realized by laser printing technology, submitted to Sensors and Actuators: B. Chemical
4. Delaporte Ph., Zergioti I., Karnakis D., Chapter Laser Processing in Flexible Organic Electronics in the Handbook of flexible organic electronics, materials, manufacturing and applications, Woodhead Publishing, to be published, 2014
Teleconference, 02 December 2013
List of deliverables
Del. no.
Deliverable name WP no. Nature Delivery date/Leader
D1.1 Report on materials selection WP1 Report 6 (CNRS)
D2.1 Report on the materials and substrates selected for sensor applications
WP2 Report 6 (NTUA)
Deliverables 1st Year
Prepared and ready for internal review
Teleconference, 02 December 2013
1st Workshop organizationWorkshop on Laser Technologies at ISFOE13
Teleconference, 02 December 2013
1st Workshop organizationWorkshop on Laser Technologies at ISFOE13
Type of activities Title
Invited Talk I. Zergioti Laser Induced Forward Transfer as an advanced tool for direct immobilization of enzymes
Oral Talk P. Delaporte Laser printing of conductive inks at high velocity
Oral Talk M. Makrygianni Laser Induced Forward Transfer of single and multilayer organic materials
Oral Talk P. Delaporte Laser printing of conductive materials for passive microelectronic components
Oral Talk S. Papazoglou
Pulsed laser printing of Graphene/Polymer ‐materials for organic electronic devices
Oral TalkI. Zergioti
Laser Digital Micro Nano fabrication for ‐Organic Electronics and Sensor applications
Oral D. Karnakis
Large Area High Resolution Digital Printing for Organic Thin Film Transistor Fabrication
Teleconference, 02 December 2013
Outreach Activities
ONE OUTREACH/RESEARCHER/YEAR
– Oral presentations:
– Advertisement:Video to be uploaded on the Internet
I. Zergioti(NTUA)
“Use of Laser for the Realization of flexible electronics and Biosensors” at The Hellenic Physical Society (Ε.Ε.F.)
I. Zergioti (NTUA)
“Use of Laser for the Realization of Biosensors” at The Hellenic Physical Society (Ε.Ε.F.)
M. Sentis(CNRS-LP3)
« Laser : Between Dream and reality since more than half-century »Conference given to general public in the frame of Marseille European Capital of
Culture (MP2013) – Marseille December 5th, 2013
G. Coustillier(CNRS-LP3)
« Fêtes de La Science » Open days at CNRS-LP3 Laboratory with exhibitions and conferences, including
LaserMicroFab project, Marseille, 9-13 octobre 2013
A.Kearsley (Oxf.Lasers)
“Oxford Lasers: a laser micromachining system integrator” NanoKTN, Workshop on Graphene supply chain, Institute of Physics, London, 28 November 2013
Teleconference, 02 December 2013
Technical Achievements and Results
Teleconference, 02 December 2013
Activities during seconded period (1st Year)Technical achievements at OL
Design of laser beam path for LIFT experiments and laser micromachining
Setup: DPSS ns Nd:YAG laser X-Y-Z motorized stages
Zoom lens system: Beam expansion design
with OSLO software 2 converging lenses of (L1
and L3) and 1 diverging lens (L2)
Solid Phase LIFT experiments:Printing of P3HT pixels through a Cimita SoftwareLaser micromachining:Realization of imaging and shadow masks
Teleconference, 02 December 2013
Technical results at OLLIFT of Polymer: P3HT
Donor: without Ti DRL450 nm P3HT spin-coated on quartz
Receiver: Glass Substrate
Energy Study:
Threshold transfer fluence ≈ 300 mJ/cm2
Many debris around the deposits > 450 mJ/cm2
× Adhesion problem on glass substrate.
395 mJ/cm2
LIFT with circular maskLaser spot diameter: 80 μm
Teleconference, 02 December 2013
100 150 200 250 300 350 400 45010
20
30
40
50
60
70
80
90
From Donor: P3HT on Ti/Quartz
Rou
ghne
ss (n
m)
Fluence (mJ/cm2)
Fluence (mJ/cm2)
250 290 320 365 380 400
Technical results at NTUALIFT of Polymer: P3HT
Donor: P3HT spin-coated on Ti/quartz
Energy Study:
Threshold transfer fluence ≈ 180 mJ/cm2
More roughness with increasing fluence.
Donor: with Ti DRL
Teleconference, 02 December 2013
0 20 40 60 80 100 120 1400
50100150200250300350400450500550
center 120 μm 190 μm
Tem
pera
ture
(o C)
Depth (μm)
PENTg=120 oCTmelt=270 oC
CW laser at 1064 nm, at 20W
Laser sintering: Nanoparticle ink curingSilver Ink on PEN
Teleconference, 02 December 2013
0,0 0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,00
50100150200250300350400450500550
0.44 msec, CW-laser (40 W), 42112 W/cm2
8 ns, pulse laser, 1300 mJ/cm2
8 ps, pulse laser, 1000 mJ/cm2
Tem
pera
ture
(o C)
Depth (μm)
wavelength:1064nm
PEN
Silver Ink on PEN
Reduced heat affected zone
Makes it possible to use plastic substrates
Laser sintering: Nanoparticle ink curingSimulation results using SENTAURUS
Irradiation with the use of Shorter pulses
Teleconference, 02 December 2013
Technical ResultsTechnical results at NTUA
-5 -4 -3 -2 -1 0 1 2 3 4 5
-1,0x10-4
-5,0x10-5
0,0
5,0x10-5
1,0x10-4
I (A
)
V (Volt)
7,72 x 10-2 Ω cm when sintered at 40 W
Reference with LIFT and cured at 150 oC for 60 min: 1,8 x 10-5 Ω cmSilver bulk: 1.59×10-6 Ω·cm
-0,5 -0,4 -0,3 -0,2 -0,1 0,0 0,1 0,2 0,3 0,4 0,5
-2,0x10-3
-1,5x10-3
-1,0x10-3
-5,0x10-4
0,0
5,0x10-4
1,0x10-3
1,5x10-3
2,0x10-3
I (A
)V (Volt)
7,41 x 10-4 Ω cm when sintered at 20 W
Sample: Ag-NP layer on glass Sample: Ag-NP layer on PEN
Electrical characterization of selectively laser cured Ag-NP lines
Teleconference, 02 December 2013
- Fabrication of interdigitated electrodes for the development of chemical sensors, in collaboration of all partners. To be submitted at LPM 2014
- Completion of the laser sintering experimental and simulations and publication asap, (NTUA-OL)- SPI response - LIFT of Cu ink (NTUA)
- Laser beam homogenisation from Gaussian to tophat for projection mask imaging beam delivery (OL)
Future work