LaserMicroFab 1 st Year Marina Makrygianni, Ioanna Zergioti National Technical University of...

Teleconference, 02 December 2013

LaserMicroFab1st Year

Marina Makrygianni, Ioanna Zergioti

National Technical University of Athens

Collaboration of NTUA, CNRS/LP3, OL


Technical objectives

Selective laser micro and nano‐

patterning

Precise ablation of a predefined

area

Maskless, Non-contact, Dry process

Laser micro printing/curing of metallic NP inks for 2D interconnects and laser printing of biomaterials

High Printing resolution

Direct biomaterials

immobilization


Secondments (1/2)

NTUA

I. Zergioti2 months

during 2013

M. Makrygianni 6 months during

2013

CNRS/LP3

P. Delaporte 2 months

during 2013

OL

D. Karnakis 2 months

during 2013

OL NTUA


Secondments (2/2)

M. Makrygianni at OL• Design/calculation of the

beam path from laser to target in projection imaging setup

• Development of experimental Setup: attenuation system, zoom telescope, mirrors, objective lens.

• First LIFT experiments of semiconducting polymer P3HT in solid phase

• Fabrication of Imaging and Shadow masks

P. Delaporte at OL• Writing a book

chapter• Experiments in beam

shaping

I. Zergioti at OL• LIFT Experimental

Setup• Experiments in beam

shaping• First experiments in

laser sintering

D. Karnakis at NTUA• LIFT experiments of

semiconducting polymer P3HT in ns regime.

• LIFT experiments of semiconducting polymer P3HT in ps regime.


Recruitments3 post-doctoral positions for a duration of 18 months

CNRS/LP3 Post-doctoral position• The main activities of this post-doctoral position will be focused on ‘selective

micro and nano-structuring of thin films’ and ‘laser micro-printing’.• The LP3 Post-doctoral position application period is closed. Daniel Puerto

Garcia has been selected, and he will start from January for 18 months

NTUA Post-doctoral position• The main activities of this post-doctoral position will be focused on ‘laser

micro-printing’, ‘laser micro-curing” and “laser development of biosensors”.• The NTUA Post-doctoral position application deadline has been extended to

31/12/2013

OL Post-doctoral position• The OL Post-doctoral position application is not open yet. The position is

planned to open on 01 Sept 2014 for 18 months. This will be formally advertised well in advance around April/May 2014.


Technical progress

At CNRS/LP3• Beam shaping with SLM (Hamamatsu) and microlens arrays.• LIFT of silver NPs inks at high velocity.• LIFT printing of conductive structures and electrodes.• Selective scribing of Transparent Conductive Oxide on Semiconductor (PV).

At NTUA • New LIFT setup in ps regime.• New Two-point probe measurement system.• LIFT experiments in ps and ns regime of semiconducting polymer P3HT.• LIFT experiments in ns regime of copper ink in liquid phase.

At OL• New experimental setup for LIFT experiments and laser micromachining.• First experiments in ns regime of semiconducting polymer P3HT.• Gaussian to Top Hat beam shaping experiments.• First experiments in laser sintering of Ag-NPs.


Dissemination Activities during seconded period (1st Year)Transfer of knowledge between Academia and Industrial partners

– Oral presentations to OL staff:

– Oral presentation to students and staff of NTUA

• Present project to other Universities:

P. Delaporte(LP3) Overview of LP3's activities in advanced laser microprocessing

P. Delaporte(LP3) Potential and limitations of the laser transfer printing technique LIFT

M. Makrygianni(NTUA) Fabrication of hybrid (Organic/Inorganic) transistors by means of laser technologies

I. Zergioti(NTUA) Laser Technologies in organic electronics and sensors (part 1)

I. Zergioti (NTUA) Laser Technologies in organic electronics and sensors (part 2)

M. Makrygianni(NTUA) Summary of activities at OL the last 6 months

D. Karnakis(OL) Industrial Laser Micromachinning

I. Zergioti(NTUA) Laser Technologies in organic electronics and sensors Swansea, Wales, UK


Oral presentations: M. Makrygianni, I. Theodorakos, C. Boutopoulos, I. Zergioti, Laser-Induced Forward

Transfer of Metallic Nanoparticle Inks, 5th Pan Hellenic Conference on Metallic Materials 2013.

S. Papazoglou, M. Makrygianni, S. Chatzandroulis, I. Raptis, I. Zergioti, Laser Induced Forward Transfer as a Tool for the Fabrication of Graphene-Based Organic Electronic Devices, XXIX PCSSP 2013

S. Papazoglou, M. Makrygianni, I. Zergioti, Laser Induced Forward Transfer of hybrid Graphene/PQT for organic electronics applications, EMRS 2013

J. Ailuno, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive materials for passive microelectronic components’, 6th International Symposium on Flexible Organic Electronics (ISFOE13), Thessaloniki, Greece, 8-11 July 2013

E. Biver, L. Rapp, A.-P. Alloncle, M. Sentis, Ph. Delaporte, ‘Laser printing of conductive inks at high velocity’, 6th International Symposium on Flexible Organic Electronics (ISFOE13), Thessaloniki, Greece, 8-11 July 2013

Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International Congress on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary conference, Miami, USA, October 6-10, 2013

Participation in conferences (1/2)


Oral presentations: Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for

Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013 Ph. Delaporte, ‘Laser printing for micro and nanomanufacturing’, International Congress

on Applications of Lasers & Electro–Optics (ICALEO 2013), Plenary conference, Miami, USA, October 6-10, 2013

Ph. Delaporte, ‘Laser fabrication of nano/micro-structured materials: printing and ablation’, Invited Seminar, Workshop on ‘Planar Optronic Systems’, PlanOS, Friedrichsdorf, Germany, November 13th, 2013

Ph. Delaporte, J. Ailuno, E. Biver, L. Rapp, A.-P. Alloncle, ‘Potential of Laser Transfer for Printed Electronics’, Swiss e-Print conference, Basel, Switzerland, November 21-22, 2013

Poster presentation: M. Makrygianni, S. Papazoglou, I. Raptis, S. Chatzandroulis, I. Zergioti, LASER PRINTED

POLYMERIC SEMICODUCTOR/ GRAPHENE COMPOSITE FOR ELECTRONIC DEVICES, 12th International Conference on Laser Ablation (COLA 2013).

M. Chatzipetrou, E. Touloupakis, A. Gkouzou, I. Zergioti, An enzyme biosensor for food quality monitoring fabricated by Laser Induced Forward Transfer, 12th International Conference on Laser Ablation (COLA 2013).

Participation in conferences (2/2)


Peer-review publications

1. S. Papazoglou, Y.S. Raptis, S. Chatzandroulis, I. Zergioti, A study on the pulsed laser printing of liquid phase, submitted to Applied Physics A

2. S. Papazoglou, V. Tsouti, Y.S. Raptis, I. Zergioti, S. Chatzandroulis, Partially Reduced Graphene Oxide Chemical Sensor Employing Laser Induced Forward Transfer – Fabrication and Evaluation, submitted to Sensors and Actuators: B. Chemical

3. Eleftherios Touloupakis, Marianneza Chatzipetrou, Christos Boutopoulos, Alkisti Gkouzou, Ioanna Zergioti, A polyphenol biosensor realized by laser printing technology, submitted to Sensors and Actuators: B. Chemical

4. Delaporte Ph., Zergioti I., Karnakis D., Chapter Laser Processing in Flexible Organic Electronics in the Handbook of flexible organic electronics, materials, manufacturing and applications, Woodhead Publishing, to be published, 2014


List of deliverables

Del. no.

Deliverable name WP no. Nature Delivery date/Leader

D1.1 Report on materials selection WP1 Report 6 (CNRS)

D2.1 Report on the materials and substrates selected for sensor applications

WP2 Report 6 (NTUA)

Deliverables 1st Year

Prepared and ready for internal review


1st Workshop organizationWorkshop on Laser Technologies at ISFOE13


1st Workshop organizationWorkshop on Laser Technologies at ISFOE13

Type of activities Title

Invited Talk I. Zergioti Laser Induced Forward Transfer as an advanced tool for direct immobilization of enzymes

Oral Talk P. Delaporte Laser printing of conductive inks at high velocity

Oral Talk M. Makrygianni Laser Induced Forward Transfer of single and multilayer organic materials

Oral Talk P. Delaporte Laser printing of conductive materials for passive microelectronic components

Oral Talk S. Papazoglou

Pulsed laser printing of Graphene/Polymer ‐materials for organic electronic devices

Oral TalkI. Zergioti

Laser Digital Micro Nano fabrication for ‐Organic Electronics and Sensor applications

Oral D. Karnakis

Large Area High Resolution Digital Printing for Organic Thin Film Transistor Fabrication


Outreach Activities

ONE OUTREACH/RESEARCHER/YEAR

– Oral presentations:

– Advertisement:Video to be uploaded on the Internet

I. Zergioti(NTUA)

“Use of Laser for the Realization of flexible electronics and Biosensors” at The Hellenic Physical Society (Ε.Ε.F.)

I. Zergioti (NTUA)

“Use of Laser for the Realization of Biosensors” at The Hellenic Physical Society (Ε.Ε.F.)

M. Sentis(CNRS-LP3)

« Laser : Between Dream and reality since more than half-century »Conference given to general public in the frame of Marseille European Capital of

Culture (MP2013) – Marseille December 5th, 2013

G. Coustillier(CNRS-LP3)

« Fêtes de La Science » Open days at CNRS-LP3 Laboratory with exhibitions and conferences, including

LaserMicroFab project, Marseille, 9-13 octobre 2013

A.Kearsley (Oxf.Lasers)

“Oxford Lasers: a laser micromachining system integrator” NanoKTN, Workshop on Graphene supply chain, Institute of Physics, London, 28 November 2013


Technical Achievements and Results


Activities during seconded period (1st Year)Technical achievements at OL

Design of laser beam path for LIFT experiments and laser micromachining

Setup: DPSS ns Nd:YAG laser X-Y-Z motorized stages

Zoom lens system: Beam expansion design

with OSLO software 2 converging lenses of (L1

and L3) and 1 diverging lens (L2)

Solid Phase LIFT experiments:Printing of P3HT pixels through a Cimita SoftwareLaser micromachining:Realization of imaging and shadow masks


Technical results at OLLIFT of Polymer: P3HT

Donor: without Ti DRL450 nm P3HT spin-coated on quartz

Receiver: Glass Substrate

Energy Study:

Threshold transfer fluence ≈ 300 mJ/cm2

Many debris around the deposits > 450 mJ/cm2

× Adhesion problem on glass substrate.

395 mJ/cm2

LIFT with circular maskLaser spot diameter: 80 μm


100 150 200 250 300 350 400 45010

20

30

40

50

60

70

80

90

From Donor: P3HT on Ti/Quartz

Rou

ghne

ss (n

m)

Fluence (mJ/cm2)

Fluence (mJ/cm2)

250 290 320 365 380 400

Technical results at NTUALIFT of Polymer: P3HT

Donor: P3HT spin-coated on Ti/quartz

Energy Study:

Threshold transfer fluence ≈ 180 mJ/cm2

More roughness with increasing fluence.

Donor: with Ti DRL


0 20 40 60 80 100 120 1400

50100150200250300350400450500550

center 120 μm 190 μm

Tem

pera

ture

(o C)

Depth (μm)

PENTg=120 oCTmelt=270 oC

CW laser at 1064 nm, at 20W

Laser sintering: Nanoparticle ink curingSilver Ink on PEN


0,0 0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,00

50100150200250300350400450500550

0.44 msec, CW-laser (40 W), 42112 W/cm2

8 ns, pulse laser, 1300 mJ/cm2

8 ps, pulse laser, 1000 mJ/cm2

Tem

pera

ture

(o C)

Depth (μm)

wavelength:1064nm

PEN

Silver Ink on PEN

Reduced heat affected zone

Makes it possible to use plastic substrates

Laser sintering: Nanoparticle ink curingSimulation results using SENTAURUS

Irradiation with the use of Shorter pulses


Technical ResultsTechnical results at NTUA

-5 -4 -3 -2 -1 0 1 2 3 4 5

-1,0x10-4

-5,0x10-5

0,0

5,0x10-5

1,0x10-4

I (A

)

V (Volt)

7,72 x 10-2 Ω cm when sintered at 40 W

Reference with LIFT and cured at 150 oC for 60 min: 1,8 x 10-5 Ω cmSilver bulk: 1.59×10-6 Ω·cm

-0,5 -0,4 -0,3 -0,2 -0,1 0,0 0,1 0,2 0,3 0,4 0,5

-2,0x10-3

-1,5x10-3

-1,0x10-3

-5,0x10-4

0,0

5,0x10-4

1,0x10-3

1,5x10-3

2,0x10-3

I (A

)V (Volt)

7,41 x 10-4 Ω cm when sintered at 20 W

Sample: Ag-NP layer on glass Sample: Ag-NP layer on PEN

Electrical characterization of selectively laser cured Ag-NP lines


- Fabrication of interdigitated electrodes for the development of chemical sensors, in collaboration of all partners. To be submitted at LPM 2014

- Completion of the laser sintering experimental and simulations and publication asap, (NTUA-OL)- SPI response - LIFT of Cu ink (NTUA)

- Laser beam homogenisation from Gaussian to tophat for projection mask imaging beam delivery (OL)

Future work

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