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Technology Development for InGaAs/InP-channel MOSFETs rodwell@ece.ucsb.edu 805-893-3244, 805-893-5705 fax MRS Spring Symposium, Tutorial: Advanced CMOS—Substrates,

Technology Development for InGaAs/InP-channel MOSFETs [email protected] 805-893-3244, 805-893-5705 fax MRS Spring Symposium, Tutorial: Advanced CMOS—Substrates,

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Technology Development & Design for 22 nm InGaAs/InP-channel MOSFETs

Technology Development & Design for 22 nm InGaAs/InP-channel MOSFETs

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