The SEM and Ion Pumps
UHV Systems
UHV – Ultra High Vacuum
Pressures of less than 10^-11 mbar
Pumps at an “atomic level”
Ion Pump
Also known as a “sputter ion pump”
Ionizes and captures gas via high electric potentials
Several different breeds, with common components.
Penning Trap
Standard Diode Pump
Contains one anode cathode set.
Common cathode material is Ti.
Efficiency/speed based on several factors.
“Pumping Action”
Sputtered Ti atoms act as getters.
Chemisorption and physisorption.
Net decrease in targeted particles.
Triode Pump
Contains one anode and two cathodes.
Noble Diode Pump
Same design as a standard or triode pump.
Makes use of tantalum to capture rebounding neutrals.
Ideal for applications dealing with light inert gasses like He or H2
Cost and Lifetime
Cost varies greatly...
Lifetime inversely proportional to pressure.
Industry standard at 40k hours at 1.3X10^-6 mbar
Main Advantages
No moving parts.(In contrast to turbo molecular pumps, and diffusion pumps)
No vibrations.
Little maintenance, no “regeneration”
Top Related