UHV Standard Components
101
Standard Components KF Components ISO Components CF Components Quick CF Components 3
description
Reference on UHV Standard components for the design of Vacuum Systems.Includes CF and KF Systems
Transcript of UHV Standard Components
Standard Components
KF Components
ISO Components
CF Components
Quick CF Components
3
3
Contents
KF Flanges
KF Seals
Page 3-5 to 3-6
Page 3-22 to 3-27
ISO Components
KF ComponentsKF Flexible hoses
Page 3-6 to 3-16Page 3-17 to 3-18
KF Glass-to-metal connectors Page 3-20
CF Components
KF Liquid feedthroughs
ISO Connecting elements
Page 3-19
Page 3-55 to 3-58ISO Seals Page 3-50 to 3-55
ISO Flanges
CF Flanges
Page 3-36 to 3-39
Page 3-62 to 3-67
CF Gaskets Page 3-84 to 3-85
CF ComponentsCF Flexible hoses
Page 3-68 to 3-77Page 3-78
CF Glass-to-metal connectors Page 3-82CF Liquid feedthroughs Page 3-81
ISO Flexible hoses Page 3-47
KF Components
KF Connecting elements Page 3-28 to 3-31
ISO Components Page 3-40 to 3-46
CF Connecting elements Page 3-86 to 3-89
Quick CF Components
Quick CF Flanges Page 3-92 to 3-93
Quick CF Gaskets Page 3-99 to 3-100
Quick CF Fittings Page 3-93 to 3-95
Heating jackets for Quick CF clamp chains VaCFix® Page 3-101
CF Quick access door Page 3-79 to 3-80
KF Viewports Page 3-21
ISO Viewports Page 3-48 to 3-49
CF Viewports Page 3-83 to 3-84
Quick CF Viewports Page 3-95Optical fiber feedthroughs on Quick CF flanges Page 3-96SUB-D Feedthroughs on Quick CF flanges Page 3-96Edge welded bellows with Quick CF flanges Page 3-97UHV angle valve with Quick CF flanges Page 3-97Total pressure measurement with Quick CF flanges Page 3-98
Quick CF Clamp chains VaCFix®, stainless steel Page 3-101
Introduction Page 3-3 to 3-4
Introduction Page 3-32 to 3-35
Introduction Page 3-59 to 3-61
Introduction Page 3-90 to 3-91
3-2 www.vacom-vacuum.com
3
www.vacom-vacuum.com 3-3
KF Components
KF Flange KF Centering ring
The Small Flange or KF standard (DIN 28403, ISO 2861) is the standard connection for vacuum pipes up to the nominal diameter of DN50 used in low, fine and high vacuum. The connection between two flanges is shown in the following figure:
Introduction
Functional Principle
A seal is positioned between the two flanges. The seal consists of a centering ring and the O-ring stretched upon. The flanges are held together by a clamp. The clamp has an inclined interior surface adequate to the conical outer surface of the flanges.
Usually centering rings and standard clamps are used with wing nuts. They enable a quick and easy assembly without any tools. Trapped centering rings and special clamps or clamp chains are offered for special applications. Claw clamps or so-called bulkhead clamps are available for wall mounting.
Dimensions of KF Flanges / KF Centering rings
Dimension DN10 DN16 DN20 DN25 DN32 DN40 DN50A 30.0 30.0 40.0 40.0 55.0 55.0 75.0
D 12.2 17.2 22.2 26.2 34.2 41.2 52.2
D2 10.0 16.0 21.0 25.0 32.0 40.0 50.0
RA 14.0 19.0 25.0 28.0 38.0 41.0 53.0
L 5.1 4.5 5.0 4.6 5.3 4.4 5.4
L2 3.5 3.5 3.5 3.5 3.5 3.5 4.5
All dimensions in mm, unless otherwise stated, are only for orientation purposes.
3
www.vacom-vacuum.com3-4
KF Components
Introduction
Materials
Fields of Application
O-rings / Edge seals Centering rings / support rings Flanges Components / TubesNBR (O-ring)FKM (O-ring)MVQ (O-ring)PTFE (edge seal)Aluminium (edge seal)
AluminiumStainless steel 1.4301Stainless steel 1.4404
PTFE
AluminiumStainless steel 1.4301Stainless steel 1.4305Stainless steel 1.4404
AluminiumStainless steel 1.4301Stainless steel 1.4305Stainless steel 1.4404Stainless steel 1.4435Stainless steel 1.4541Stainless steel 1.4571
MaterialComponents and seals
Pressure range[mbar]
Leak rate[mbar l/s]
Recommendedcentering ring
Recommendedconnecting element
Aluminium withelastomer seal 1.0E-7 to 1500 1.0E-8 Inside
OutsideStandard clamp
Clamp chain
Stainless steel withelastomer seal 1.0E-8 to 1500 1.0E-9 Inside
OutsideStandard clamp
Clamp chain
Stainless steel with mitmetal seal 1.0E-9 to 1500 < 1.0E-9 Outside Clamp chain or
special clamp
KF Components
KF Flanges
KF Blank flanges
aluminium stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
DADNOrder codeAluminium Stainless steel 304 Stainless steel 316L
KF16BS-304KF16BA 16 30 17.2KF16BS-316KF25BS-304KF25BA 25 40 26.2KF25BS-316KF40BS-304KF40BA 40 55 41.2KF40BS-316KF50BS-304KF50BA 50 75 52.2KF50BS-316
KF Bored flanges, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
KF16B19-316KF16B19-304 16 30 17.2 19 4.5 3.5KF16B20-316- 16 30 17.2 20 4.3 3.5KF25B28-316KF25B28-304 25 40 26.2 28 4.6 3.5KF40B41-316KF40B41-304 40 55 41.2 41 4.9 3.5KF40B44-316KF40B44-304 40 55 41.2 44.5 4.4 3.5KF50B53-316KF50B53-304 50 75 52.2 53 5.9 4.5KF50B57-316KF50B57-304 50 75 52.2 57 5.4 4.5
L2LRADADNOrder codeStainless steel 304 Stainless steel 316L
3
3-5www.vacom-vacuum.com
KF Components
KF Flanges
KF Flange caps, plastics
Packing unit 10 pieces.
16KF16CAP25KF25CAP40KF40CAP50KF50CAP
DN #FehlerOrder code
KF Components
KF Tubulations (half nipples), stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths and nominal diameters on request.
-TU16K13-19-304 16 30 13 19TU16K20-20-316TU16K20-20-304 16 30 20 20TU16K30-20-316TU16K30-20-304 16 30 30 20TU16K40-20-316- 16 30 40 20TU16K70-20-316TU16K70-20-304 16 30 70 20-TU25K13-25-304 25 40 13 25TU25K20-28-316TU25K20-28-304 25 40 20 28TU25K30-28-316TU25K30-28-304 25 40 30 28TU25K40-28-316- 25 40 40 28TU25K70-28-316TU25K70-28-304 25 40 70 28-TU40K19-38-304 40 55 19 38TU40K20-44.5-316TU40K20-44.5-304 40 55 20 44.5TU40K30-44.5-316TU40K30-44.5-304 40 55 30 44.5TU40K40-44.5-316- 40 55 40 44.5TU40K70-44.5-316TU40K70-44.5-304 40 55 70 44.5-TU50K19-51-304 50 75 19 51TU50K20-57-316TU50K20-57-304 50 75 20 57TU50K30-57-316TU50K30-57-304 50 75 30 57TU50K40-57-316- 50 75 40 57TU50K70-57-316TU50K70-57-304 50 75 70 57
RALADNOrder codeStainless steel 304 Stainless steel 316L
3
3-6 www.vacom-vacuum.com
KF Components
KF Components
KF Tube, 1m length, stainless steel
Other lengths on request.Quality according to DIN 11850/11866 on requestSurface finishinside Ra < 0.8 µmweld seam area Ra < 1.6 µm
Technical dataDelivery conditions according to DIN EN 10217-7longitudinally weldedweld factor 1.0inside and outside pickled
R316-19x1.5-1R304-19x1.5-1 16 19 16R316-28x1.5-1R304-28x1.5-1 25 28 25R316-41x1.5-1R304-41x1.5-1 40 41 38R316-53x1.5-1R304-53x1.5-1 50 53 50
RIRADNOrder codeSt. steel 304 St. steel 316L
KF Hose nozzles
Technical dataHose ID 10 mm
KF16HNS-316KF16HNA 16 30KF25HNS-316KF25HNA 25 40KF40HNS-316KF40HNA 40 55KF50HNS-316- 50 75
ADNOrder codeAluminium Stainless steel 316L
KF Tubulation for PVC hose, stainless steel 316
Option: clean room products (= CRP) on request.
25KF25TUH-316 40 25 3840KF40TUH-316 55 38 5050KF50TUH-316 75 51 55
DN LRAAOrder code
KF Hose clamps for PVC hose
D=max. hose size
16KF16HC 2525KF25HC 3640KF40HC 5050KF50HC 60
DN DOrder code
3
3-7www.vacom-vacuum.com
KF Components
KF Components
PVC hoses, by the meter
Technical dataTemperature range -15 °C ... 65 °CDifferential pressure 900 mbar
16PVC16 26 1925PVC25 33 2540PVC40 47 3850PVC50 60 50
DN RIRAOrder code
Transparent PVC hose with an internal spring steel spiral
KF Hose connectors, PVC, stainless steel
Other lengths on request.
16KF16PVC25 30 25016KF16PVC50 30 50016KF16PVC100 30 100025KF25PVC25 40 25025KF25PVC50 40 50025KF25PVC100 40 100040KF40PVC25 55 25040KF40PVC50 55 50040KF40PVC100 55 100050KF50PVC25 75 25050KF50PVC50 75 50050KF50PVC100 75 1000
DN LAOrder code
KF Straight connectors
Other lengths on request.Option: clean room products (= CRP) made of stainless steel 316L on request.
LADNOrder codeAluminium Stainless steel 304 Stainless steel 316L
SC16K-304SC16KA 16 30 80SC16K-316SC25K-304SC25KA 25 40 100SC25K-316SC40K-304SC40KA 40 55 130SC40K-316SC50K-304- 50 75 140SC50K-316
3
3-8 www.vacom-vacuum.com
KF Components
KF Components
KF Tubulated reducing adapters, aluminium
25KF25R16A-40 16 40 3040KF40R16A-40 16 55 3040KF40R25A-40 25 55 4050KF50R40A-40 40 75 55
DN A2ADN2Order code
KF Tubulated reducing adapters, conical, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
KF25R16/CO-316KF25R16/CO-304 25 16 40 30 26 17KF40R16/CO-316KF40R16/CO-304 40 16 55 30 41 17KF40R25/CO-316KF40R25/CO-304 40 25 55 40 41 26KF50R25/CO-316KF50R25/CO-304 50 25 75 40 52 26KF50R40/CO-316KF50R40/CO-304 50 40 75 55 52 41
D2DA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L
KF Tubulated reducing adapters, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
KF25R16-316KF25R16-304 25 16 40 30KF40R16-316KF40R16-304 40 16 55 30KF40R25-316KF40R25-304 40 25 55 40KF50R25-316KF50R25-304 50 25 75 40KF50R40-316KF50R40-304 50 40 75 55
A2ADN2DNOrder codeStainless steel 304 Stainless steel 316L
3
3-9www.vacom-vacuum.com
KF Components
KF Components
KF to ISO-K Adapters, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths on request.
SK063025-316SK063025-304 63 25 95 40SK063040-316SK063040-304 63 40 95 55SK063050-316SK063050-304 63 50 95 75SK100040-316SK100040-304 100 40 130 55
A2ADN2DNOrder codeStainless steel 304 Stainless steel 316L
KF to ISO-K Adapters, conical, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L on request.
63SK063040/CO-304 40 95 55 70 4163SK063050/CO-304 50 95 75 70 5280SK080040/CO-304 40 110 55 83 4180SK080050/CO-304 50 110 75 83 52
100SK100040/CO-304 40 130 55 102 41100SK100050/CO-304 50 130 75 102 52
DN D2DA2ADN2Order code
KF to CF Adapters, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16KA016016-316 16 34 30 3640KA040016-316 16 70 30 3640KA040025-316 25 70 40 3640KA040040-316 40 70 55 5063KA063025-316 25 114 40 5063KA063040-316 40 114 55 50
DN LA2ADN2Order code
3
3-10 www.vacom-vacuum.com
KF Components
KF Components
KF-G Adapters, G outside thread, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
10KF10GA14-316 30 1/4" 7 22 1016KF16GA12-316 30 1/2" 14 24 1616KF16GA14-316 30 1/4" 7 20 1016KF16GA34-316 30 3/4" 16 26 1816KF16GA38-316 30 3/8" 10 24 1325KF25GA1-316 40 1" 25 29 2725KF25GA12-316 40 1/2" 14 24 1625KF25GA14-316 40 1/4" 7 22 1025KF25GA114-316 40 1 1/4" 25 35 2740KF40GA114-316 55 1 1/4" 34 35 3640KF40GA112-316 55 1 1/2" 34 32 3650KF50GA2-316 75 2" 49 40 -25KF25GA34-316 40 3/4" 16 26 18
DN SWLDGZAOrder code
KF-G Adapters, G inside thread, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KF16GI18-316 30 1/8" 7 -16KF16GI14-316 30 1/4" 10 1916KF16GI38-316 30 3/8" 14 1925KF25GI14-316 40 1/4" 10 1925KF25GI12-316 40 1/2" 15 2725KF25GI34-316 40 3/4" 20 -40KF40GI12-316 55 1/2" 15 2740KF40GI1-316 55 1" 20 4140KF40GI114-316 55 1 1/4" 22 -40KF40GI14-316 55 1/4" 15 19
DN SWLGZAOrder code
KF Threaded flanges, G outside thread, stainless steel 316L with FKM seal
16KF16EF-316 30 1/2" 16 35 15 2225KF25EF-316 40 1" 25 45 25 3640KF40EF-316 55 1 1/2" 41 50 30 50
DN SWL2LDGZAOrder code
KF Flange adapters for screwing into tubes.
3
3-11www.vacom-vacuum.com
KF Components
KF Components
KF-R Adapters, R outside thread, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KF16RA14-316 30 1/4" 7 20 -16KF16RA12-316 30 1/2" 14 27 1925KF25RA1-316 40 1" 25 32 2740KF40RA112-316 55 1 1/2" 38 40 4150KF50RA2-316 75 2" 51 43 -
DN SWLDGZAOrder code
KF to NPT Adapters, NTP outside thread
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KF16NPT14-316 30 1/4" 7.4 25 -16KF16NPT12-316 30 1/2" 14.9 32 1916KF16NPT34-316 30 3/4" 16 34 1925KF25NPT14-316 40 1/4" 7.4 25 -25KF25NPT34-316 40 3/4" 16 34 1940KF40NPT12-316 55 1/2" 14.9 32 19
DN SWLDGZAOrder code
KF to NPT Adapters, NPT outside thread, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KF16NPT18F-316 30 1/8" 10 1316KF16NPT14F-316 30 1/4" 13 1925KF25NPT14F-316 40 1/4" 13 1925KF25NPT18F-316 40 1/8" 10 13
DN SWLGZAOrder code
KF to Swagelok Adapters, imperial, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KSWA166-316 30 4.8 35 616KSWA168-316 30 6.4 38 816KSWA1610-316 30 7.9 44 1025KSWA256-316 40 4.8 33 625KSWA258-316 40 6.4 38 825KSWA2510-316 40 7.9 44 1040KSWA406-316 55 4.8 33 640KSWA408-316 55 6.4 38 840KSWA4010-316 55 7.9 44 10
DN RMLDAOrder code
3
3-12 www.vacom-vacuum.com
KF Components
KF Components
KF to Swagelok Adapters, imperial, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KSWA167-316 30 4.8 35 1/4"16KSWA169-316 30 7.1 44 3/8"16KSWA1613-316 30 10.4 53 1/2"25KSWA257-316 40 4.8 33 1/4"25KSWA259-316 40 7.1 44 3/8"25KSWA2513-316 40 10.4 53 1/2"40KSWA407-316 55 4.8 33 1/4"40KSWA409-316 55 7.1 44 3/8"40KSWA4013-316 55 10.4 53 1/2"
DN RZLDAOrder code
KF to VCR Adapters, female or male, stainless steel 316L
female male
Option: clean room products (= CRP) made of stainless steel 316L on request.
KVCR166M-316KVCR166F-316 16 30 4.8 36 1/4"KVCR1613M-316KVCR1613F-316 16 30 10.4 41 1/2"KVCR256M-316KVCR256F-316 25 40 4.8 36 1/4"KVCR2513M-316KVCR2513F-316 25 40 10.4 41 1/2"KVCR406M-316KVCR406F-316 40 55 4.8 36 1/4"KVCR4013M-316KVCR4013F-316 40 55 10.4 41 1/2"
RZLDADNOrder codeFemale Male
VCR Compatible gasket, stainless steel 316L
Option: clean room products (= CRP) on request.
without retainerVCR-1/2-SEAL-316UHP 1/2"without retainerVCR-1/4-SEAL-316UHP 1/4"
with retainerVCR-1/4-SEAL-RT-316UH 1/4"with retainerVCR-1/2-SEAL-RT-316UH 1/2"
Desing RZOrder code
Planar gaskets with or without retainer for sealing VCR compatible connections.
3
3-13www.vacom-vacuum.com
KF Components
KF Components
KF Pinch screw connection, stainless steel, FKM seal
16KF16TA12-316 30 13.1 50 12.725KF25TA12-316 40 13.1 50 12.725KF25TA25-316 40 25.8 60 25.440KF40TA25-316 55 25.8 60 25.4
DN RALDAOrder code
KF flange adapters for detachable connection of glass and stainless steel tubes.
KF Elbows 45°, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16EL416KF-316 30 2325EL425KF-316 40 2840EL440KF-316 55 4350EL450KF-316 75 51
DN SLAOrder code
KF Elbows, 90°
aluminium stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
SLADNOrder codeAluminium Stainless steel 304 Stainless steel 316L
EL16K-304EL16KA 16 30 40EL16K-316EL25K-304EL25KA 25 40 50EL25K-316EL40K-304EL40KA 40 55 65EL40K-316EL50K-304- 50 75 70EL50K-316
3
3-14 www.vacom-vacuum.com
KF Components
KF Components
KF Tees
aluminium stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
SLLADNOrder codeAluminium Stainless steel 304 Stainless steel 316L
TE16K-304TE16KA 16 30 80 40TE16K-316TE25K-304TE25KA 25 40 100 50TE25K-316TE40K-304TE40KA 40 55 130 65TE40K-316TE50K-304- 50 75 140 70TE50K-316
KF Unequal tees, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
25UTE025016K-316 16 40 30 100 4040UTE040016K-316 16 55 30 130 4040UTE040025K-316 25 55 40 130 5050UTE050016K-316 16 75 30 140 5050UTE050025K-316 25 75 40 140 6550UTE050040K-316 40 75 55 140 65
DN SLLA2ADN2Order code
KF 4-way crosses
aluminium stainless steel
Option: clean room products (= CRP) made of stainless steel 316L on request.
LADNOrder codeAluminium Stainless steel 304 Stainless steel 316L
X16K-304X16KA 16 30 80X16K-316X25K-304X25KA 25 40 100X25K-316X40K-304X40KA 40 55 130X40K-316X50K-304- 50 75 140X50K-316
3
3-15www.vacom-vacuum.com
KF Components
KF Components
KF Reducing 4-way crosses, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
25X25K16-316 16 40 30 100 8040X40K16-316 16 55 30 130 8040X40K25-316 25 55 40 130 10050X50K25-316 25 75 40 140 10050X50K40-316 40 75 55 140 130
DN SLLA2ADN2Order code
KF 6-way crosses, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16XX16K-316 30 8025XX25K-316 40 10040XX40K-316 55 13050XX50K-316 75 140
DN LAOrder code
3
3-16 www.vacom-vacuum.com
KF Components
KF Flexible hoses
KF Flexible hoses, stainless steel
Technical dataKF connecting piece st. steel 304/316LFlexible hose st. steel 316L/316TiDynamic bending radii acc. to EN ISO 10380Base load 10,000 cycles
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths on request.
Bendingradius
LADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 304 annealed
FX16K25-316FX16K25-304 16 30 250 -FX16K25AN-304FX16K50-316FX16K50-304 16 30 500 -FX16K50AN-304FX16K75-316FX16K75-304 16 30 750 50FX16K75AN-304FX16K100-316FX16K100-304 16 30 1000 50FX16K100AN-304FX25K25-316FX25K25-304 25 40 250 103FX25K25AN-304FX25K50-316FX25K50-304 25 40 500 103FX25K50AN-304FX25K75-316FX25K75-304 25 40 750 103FX25K75AN-304FX25K100-316FX25K100-304 25 40 1000 103FX25K100AN-304FX40K25-316FX40K25-304 40 55 250 90FX40K25AN-304FX40K50-316FX40K50-304 40 55 500 90FX40K50AN-304FX40K75-316FX40K75-304 40 55 750 90FX40K75AN-304FX40K100-316FX40K100-304 40 55 1000 90FX40K100AN-304FX50K25-316FX50K25-304 50 75 250 120FX50K25AN-304FX50K50-316FX50K50-304 50 75 500 120FX50K50AN-304FX50K75-316FX50K75-304 50 75 750 120FX50K75AN-304FX50K100-316FX50K100-304 50 75 1000 120FX50K100AN-304
Flexible hoses of stainless steel for flexible connection of KF components.
KF Braided flexible hoses, stainless steel
25BFX25K13 40 13525BFX25K25 40 25040BFX40K13 55 13540BFX40K25 55 25050BFX50K13 75 13550BFX50K25 75 250
DN LAOrder code
3
3-17www.vacom-vacuum.com
KF Components
KF Flexible hoses
KF Hydroformed bellows connectors, stainless steel
Technical dataKF connecting piece stainless steel 304/316LHydroformed bellowsconnectors
stainless steel 316Ti
Tolerance length ±5 mm
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths on request.
-KF16FXB-304 16 30 64 70KF25FXB-316KF25FXB-304 25 40 63 80KF40FXB-316KF40FXB-304 40 55 84 100KF50FXB-316KF50FXB-304 50 75 84 100KF16FXB-121-316- 16 30 90 121KF25FXB-121-316- 25 40 90 121KF40FXB-121-316- 40 55 95 121KF50FXB-121-316- 50 75 100 121
LLminADNOrder codeStainless steel 304 Stainless steel 316L
Hydroformed bellows are applied to reduce vibrations and conduct a vertical stroke.
3
3-18 www.vacom-vacuum.com
KF Components
KF Liquid feedthroughs
KF 1-way liquid feedthroughs, stainless steel 316L
for liquid for liquid nitrogen
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths and connections on request.SW (Swagelok compatible adapter)
LNFKF16PP-316LFKF16PP-316 16 30 6 75 45 tube tubeLNFKF40PP-316LFKF40PP-316 40 55 6 75 45 tube tubeLNFKF40PPL-316LFKF40PPL-316 40 55 12 75 45 tube tubeLNFKF40PSL-316LFKF40PSL-316 40 55 12 114 45 tube SW 12 mmLNFKF40SSL-316LFKF40SSL-316 40 55 12 114 84 SW 12 mm SW 12 mm
Air side Vacuumside
L2LRAADNOrder codeLiquid Liquid nitrogen
KF 2-way liquid feedthroughs, stainless steel 316L
for liquid for liquid nitrogen
Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths and connections on request.SW (Swagelok compatible adapters)
LNFKF402PP-316LFKF402PP-316 40 45 75 75 45 tube tubeLNFKF402PS-316LFKF402PS-316 40 45 103 75 73 tube SW 6 mmLNFKF402SP-316LFKF402SP-316 40 73 75 103 45 SW 6 mm tube
Air sideVacuumside
L4L3L2LDNOrder codeLiquid Liquid nitrogen
3
3-19www.vacom-vacuum.com
KF Components
KF Glass-to-metal connections
KF Glass-to-metal connections, Kodial/Pyrex®
Technical dataFlange stainless steel 304Tolerance RA ±1 mm, L ±3 mmBakeout temperature max. 200 °CBakeout rate 2 ... 3 K/min
Other lengths and designs on request.
KF16T13P-L137KF16T13 16 30 13KF25T19P-L137KF25T19 25 40 19KF25T25P-L137KF25T25 25 40 25KF40T25PKF40T25 40 55 25KF40T38PKF40T38 40 55 38
RAADNOrder codeKodial Pyrex®
KF Glass-to-metal connectors, quartz
Technical dataFlange stainless steel 304Tolerance RA ±1 mm, L ±3 mmBakeout temperature max. 200 °CBakeout rate 2 ... 3 K/minDesign metal-quartz transition
with intermediate glass
Other lengths and designs on request.
16KF16T13Q 30 13 14325KF25T19Q 40 19 15525KF25T25Q 40 25 16540KF40T25Q 55 25 16540KF40T38Q 50 38 175
DN LRAAOrder code
3
3-20 www.vacom-vacuum.com
KF Components
KF Viewports
KF Viewports with removable O-ring seal, borosilicate and quartz glass (fused silica, SiO2)
Technical dataDescription viewport with removable
O-ring seal (FKM)Connection type KF flangeHe leak rate < 1.0E-9 mbar l/sWindow material borosilicate glass
(Borofloat®33)or fused silica (Silux®)
Flange material stainless steel 304Frame material FKM, O-ringTransmission range ca. 0.4 m to 2 m
(Borofloat®33),ca. 0.3 m to 3 m(Silux®)
Temperature range up to 150 °C(aluminium frameup to 120 °C)
Coating anti-reflective coatingpossible
Option: flange, stainless steel 316L.
VPKF40Q-E-ZVPKF40B-E-Z 40 57 40 10 3.8VPKF50Q-E-ZVPKF50B-E-Z 50 77 50 10 3.8
L2LDADNOrder codeBorosilicate Quartz
KF Viewports with permanent joint, borosilicate glass
16VPKF16B-L 30 16 13 1.625VPKF25B-L 40 16 13 1.640VPKF40B-L 55 32 13 7.350VPKF50B-L 75 32 13 7.3
DN L2LDAOrder code
Technical dataDescription viewport with
permanent window-flange-connection
Connection type KF flangeHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Borofloat®33)Flange material stainless steel 304Frame material Kovar®Transmission range ca. 0.4 m to 2 mTemperature range to 150 °CMax. heating andcooling rate
3 K/min
3
3-21www.vacom-vacuum.com
KF Components
KF Seals
KF O-rings, elastomer
Chemically resistant KF O-rings, treated, FKM
The commonly used elastomer seals sufferirreversible damage in cor rosive environments andhave a short life cycle. Therefore VACOM developed
Vacuum baked KF O-rings, FKMThe ratioand the pumping speed has to be considered inorder to provide an ultrapure vacuum. The
Technical dataTemperature range -10 °C to 150 °C
* Option: low outgassing and clean roomproducts (= CRP) on request.
KF10VR-VBKF10VR-BEH 10 15KF16VR-VBKF16VR-BEH 16 18KF25VR-VBKF25VR-BEH 25 28KF40VR-VBKF40VR-BEH 40 42KF50VR-VBKF50VR-BEH 50 55
D2DNOrder codeFKM treated FKM vacuum baked*
3
3-22 www.vacom-vacuum.com
,
,
KF Components
KF Seals
KF O-rings, elastomer
Technical dataTemperature range NBR -10 °C ... 100 °CTemperature range FKM -10 °C ... 150 °CTemperature range MVQ -55 °C ... 200 °C
Other sealing materials on request
D2DNOrder codeNBR FKM MVQ
KF10VRKF10NR 10 15-KF16VRKF16NR 16 18KF16SRKF25VRKF25NR 25 28KF25SRKF40VRKF40NR 40 42KF40SRKF50VRKF50NR 50 55-
O-rings for KF centering rings.
KF Centering rings without O-rings, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L on request.
KF16CRS-316KF16CRS-304 16 17.2 16KF25CRS-316KF25CRS-304 25 26.2 25KF40CRS-316KF40CRS-304 40 41.2 40KF50CRS-316KF50CRS-304 50 52.2 50
D2DDNOrder codeSt. steel 304 St. steel 316L
KF Centering rings, stainless steel, without O-ring.
KF Blank centering rings without O-rings, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
16KF16CRBS-316 17.2 1625KF25CRBS-316 26.2 2540KF40CRBS-316 41.2 4050KF50CRBS-316 52.2 50
DN D2DOrder code
Closed KF centering rings made of stainless steel to introduce apertures, without O-ring.
3
3-23www.vacom-vacuum.com
KF Components
KF Seals
KF Edge seals
Technical dataTemperature rangealuminium
to 150 °C
Temperature range PTFE to 120 °CConnecting elements KF clamp chains
KF10/16TSKF10/16MS 16 32KF20/25TSKF20/25MS 25 42KF32/40TSKF32/40MS 40 57KF50TSKF50MS 50 77
DDNOrder codeAluminium PTFE
KF Centering rings, NBR
Technical dataTemperature range -10 °C to 100 °C
KF10SNCRKF10ANCR 10 12 10KF16SNCRKF16ANCR 16 17 16KF25SNCRKF25ANCR 25 26 25KF40SNCRKF40ANCR 40 41 40KF50SNCRKF50ANCR 50 52 50
D2DDNOrder codeAluminium Stainless steel
KF Centering rings, FKM
Technical dataTemperature range -10 °C to 150 °C
KF10SVCR-304KF10AVCR 10 12 10KF16SVCR-304KF16AVCR 16 17 16KF25SVCR-304KF25AVCR 25 26 25KF40SVCR-304KF40AVCR 40 41 40KF50SVCR-304KF50AVCR 50 52 50
D2DDNOrder codeAluminium Stainless steel 304
3
3-24 www.vacom-vacuum.com
KF Components
KF Seals
KF Centering rings, FKM, stainless steel 316L
Technical dataTemperature range -10 °C to 150 °COption low-outgassing or
with improvedchemical resistance(see page 3-22)
* Option: low outgassing and clean room products (= CRP) on request.
D2DDNOrder codeFKM FKM treated FKM vacuum baked
KF10SVCR-BEH-316KF10SVCR-316 10 12 10KF10SVCR-VB-316KF16SVCR-BEH-316KF16SVCR-316 16 17 16KF16SVCR-VB-316KF25SVCR-BEH-316KF25SVCR-316 25 26 25KF25SVCR-VB-316KF40SVCR-BEH-316KF40SVCR-316 40 41 40KF40SVCR-VB-316KF50SVCR-BEH-316KF50SVCR-316 50 52 50KF50SVCR-VB-316
KF Mesh centering rings, stainless steel 304
Technical dataTemperature range NBR -10 °C to 100 °CTemperature range FKM -10 °C to 150 °CMesh size 1 mmWire diameter 0.2 mm
KF16MCR1V-304KF16MCR1N-304 16 17 14KF25MCR1V-304KF25MCR1N-304 25 26 23KF40MCR1V-304KF40MCR1N-304 40 41 38KF50MCR1V-304KF50MCR1N-304 50 52 48
D2DDNOrder codeNBR FKM
KF Centering rings with sintered metal screen, stainless steel 303
Technical dataCentering ring stainless steel 303Sintered metal stainless steel 316LTemperature range 0 °C to 40 °CPore width 20 µmPressure difference 20 mbar at 0 °C
16KF16FMCRV-304 17 1525KF25FMCRV-304 26 2440KF40FMCRV-304 41 3950KF50FMCRV-304 52 49
DN D2DOrder code
Filtration of liquids and gases
3
3-25www.vacom-vacuum.com
KF Components
KF Seals
KF Outer centering rings, aluminium
Technical dataTemperature range NBR -10 °C to 100 °CTemperature range FKM -10 °C to 150 °C
KF16AZRVKF16AZRN 16 32 30KF25AZRVKF25AZRN 25 42 40KF40AZRVKF40AZRN 40 57 55KF50AZRVKF50AZRN 50 77 75
ADDNOrder codeNBR FKM
KF Trapped centering rings with retaining ring, NBR
Technical dataTemperature range -10 °C to 100 °COuter centering ring aluminiumRetaining ring stainless steel 304
16KF16TCRN-304 32 30 1625KF25TCRN-304 42 40 2540KF40TCRN-304 57 55 4050KF50TCRN-304 77 75 50
DN D2ADOrder code
KF Trapped centering rings with retaining ring, FKM
Technical dataTemperature range -10 °C to 150 °COuter centering ring aluminium / PTFERetaining ring stainless steel / PTFE
D2ADDNOrder codeAlu/Stainless steel 304 Alu/Stainless steel 316L PTFE/PTFE
KF16TCRV-316KF16TCRV-304 16 32 30 16KF16TVCRKF25TCRV-316KF25TCRV-304 25 42 40 25KF25TVCRKF40TCRV-316KF40TCRV-304 40 57 55 40KF40TVCRKF50TCRV-316KF50TCRV-304 50 77 75 50KF50TVCR
3
3-26 www.vacom-vacuum.com
KF Components
KF Seals
KF Reducing centering rings, aluminium
Technical dataTemperature range NBR -10 °C to 100 °CTemperature range FKM -10 °C to 150 °C
KF10/16AVRCRKF10/16ANRCR 16 10 17 10 12KF20/25AVRCRKF20/25ANRCR 25 20 26 20 22KF32/40AVRCRKF32/40ANRCR 40 32 41 32 34
D3D2DDN2DNOrder codeNBR FKM
KF Adapter centering rings, stainless steel 304
Technical dataTemperature range NBR -10 °C to 100 °CTemperature range FKM -10 °C to 150 °C
KF10/16SVRCR-304KF10/16SNRCR-304 16 10 17 10 12KF20/25SVRCR-304KF20/25SNRCR-304 25 20 26 20 22KF32/40SVRCR-304KF32/40SNRCR-304 40 32 41 32 34
D3D2DDN2DNOrder codeNBR FKM
3
3-27www.vacom-vacuum.com
KF Components
KF Connecting Elements
KF Clamp chains, polyamide
Technical DataType W Type WH
Temperature up to 60 °C to 100 °C (120 °C)Color black graySpec. resistance 1.0E12 Ohm cm 1.0E15 Ohm cmDielectric strength 26 kV/mm 27.5 kV/mmChain links polyamide 6
(30% glass fiber content)polyamide(35 % glass fiber)
Lock stainless steel andaluminium
stainless steel andaluminium
Bolt stanless steel stainless steelSuitable seals elastomer elastomer
WH16W16 16 51 22 18 48WH25W25 25 61 32 18 55WH40W40 40 76 47 18 59WH50W50 50 96 67 20 68
RLD2DDNOrder codeto 60 °C to 100 °C
KF Clamp chains,aluminium alloy
Technical dataTemperature range to 150 °CChain links AlMgSi1Lock stainless steelBolt stainless steelSuitable seals elastomer, aluminium, copper
Order code DN D D2 L R Closing moment[Nm]
XA16 16 51 22 18 45 2.5XA25 25 61 32 18 50 3.5XA40 40 76 47 18 61 5.0XA50 50 96 67 20 73 6.0
Please note the closing torque during over pressure applications.
3
3-28 www.vacom-vacuum.com
KF Components
KF Connecting Elements
Quick CF Clamp chains VaCFix®, stainless steel
Technical dataMaterial stainless steel,
non-magneticSuitable flanges QCF flanges
KF flangesSuitable seals metal edge seal
O-ring sealMounting with torque wrench
Order code DN D D2 R L Numberof links
SW Tighteningtorque [Nm]
Weight[g]
XS16 16 21 53 47 24 3 13 5 220XS40 40 46 82 67 24 4 15 9 430
Other dimensions in chapter Quick CF componentsOption: clean room products (= CRP) on request.Clean room compatible clamp chains require a higher tightening torque.
Quick CF Clamp chains for a quick and space-saving mounting of a KF flange connection
KF Bulkhead clamps, aluminium
16BHC16 50 38 11 7 yes25BHC25 60 48 11 7 yes40BHC40 75 63 11 7 yes50BHC50 95 83 12 7 yes16BHC16K 50 38 11 7 no25BHC25K 60 48 11 7 no40BHC40K 75 63 11 7 no50BHC50K 95 83 12 7 no
DN Incl. screwsL2LCDOrder code
Option: clean room compatible products (= CRP) on request.Used screws: ISO4017 M5, length 16 mm (BHC16-40), length 18 mm (BHC50)
3
3-29www.vacom-vacuum.com
KF Components
KF Connecting Elements
ISO Claw clamps, aluminium
16 - 50KFCDN #FehlerOrder code
50 91 3
DN C Number of required clamps
10 45 216 45 220 55 325 55 332 71 340 71 3
KF Clamp rings, aluminium
Technical dataTemperature range -10 °C to 150 °C
Option: clean room products (= CRP) on request.
16KF16C 62 42 1625KF25C 72 52 1640KF40C 90 70 1650KF50C 113 90 20
DN LD2DOrder code
KF Clamp rings, stainless steel
Technical dataTemperature range -10 °C to 125 °C
16KF16CLR 5025KF25CLR 6340KF40CLR 7650KF50CLR 100
DN DOrder code
KF Clamp rings for metal seals, aluminium
Technical dataTemperature range to 200 °C
16KF10/16MSCA 52 1825KF20/25MSCA 75 2040KF32/40MSCA 90 2350KF50MSCA 115 28
DN LDOrder code
3
3-30 www.vacom-vacuum.com
KF Components
KF Connecting Elements
KF Clamp rings for metal seals, stainless steel 304
Option: clean room products (= CRP) on request.
16KF10/16MSC-304 44 22 1725KF20/25MSC-304 64 32 1840KF32/40MSC-304 82 47 1850KF50MSC-304 112 62 20
DN LD2DOrder code
3
3-31www.vacom-vacuum.com
www.vacom-vacuum.com
3
3-32
ISO Components
IntroductionThe ISO-KF standard for clamp connections (DIN 28404, ISO 1609) is the standard connection for vacuum pipes starting from the nominal diameter DN63 and larger used in fine and high vacuum. The various possibilities of connection between two flanges are shown in the following figures:
Functional Principle
Figure 1: Connection with claw clamps
ISO-K: Two single flanges are connected with the help of claw clamps. The flanges have a groove on the back in which the claw clamps are hooked which press the flanges together. Such as KF connections there is a sealing with centering ring and O-ring between the flanges. Mostly an additional trapped centering ring is used which produces an assembly with constant distance.
Technical drawings are merely for information. Drawings do not indicate the applied manufacturing process.
www.vacom-vacuum.com
3
3-33
ISO Components
Introduction
Figure 2: Connection with screws
ISO-K flanges with holes are called ISO-F flanges and the sealing is the same as for ISO-K flanges. Both flanges can be easily combined with each other. An ISO-K flange can be transformed into a rotatable ISO-F flange by means of a rotatable bolt ring with retaining ring. Screws hold the flanges together.
Figure 3: Combination ISO-K / ISO-F
ISO-F flanges are commonly used for wall mounting or with gate valves. An ISO-K flange can be fastened thereon with the help of claw clamps. Claw clamps are available for tapped blind holes as well as for through bolt holes.
Further combination possibilities
It is possible to connect the flanges without a centering ring if the o-ring lies in a groove on the flange. But claw clamps with mated length have to be used in this case.
www.vacom-vacuum.com
3
3-34
ISO Components
ISO Flange ISO Centering ring
Introduction
Dimensions of ISO-K Flanges and ISO-K Centering rings
Nominal diameter 63 80 100 160 200 250 320 400 500 630A 95 110 130 180 240 290 370 450 550 690
D 70 83 102 153 213 261 318 400 501 651
D2 66 / 70 81 / 83 100 / 102 150 / 153 200 / 213 250 / 261 318 400 501 651
RA 70 / 76 85 / 89 104 / 108 154 / 159 204 / 219 254 / 267 324 406 508 660
L 12 12 12 12 12 12 17 17 17 22
L2 8 / 6 8 / 6 8 / 6 8 / 6 8 / 6 8 / 6 10 10 10 15
L3 8 8 8 8 8 8 12 / 14 12 / 14 12 / 14 12 / 14
L4 3.9 3.9 3.9 3.9 3.9 3.9 5.6 5.6 5.6 5.6
L5 5.3 5.3 5.3 5.3 5.3 5.3 7 7 7 7
Number of clamps 4 4 4 4 6 6 8 8 12 12
Number of claw clamps 4 8 8 8 12 12 12 16 16 20
Claw clamp size M8 x 35 M8 x 35 M8 x 35 M10 x 40 M10 x 40 M10 x 40 M12 x 50 M12 x 50 M12 x 50 M12 x 55
Number of screws 4 8 8 8 12 12 12 16 16 20
Screw size M8 x 40 M8 x 40 M8 x 40 M10 x 50 M10 x 50 M10 x 50 M12 x 60 M12 x 60 M12 x 60 M12 x 70
All dimensions in mm, unless otherwise stated, are only for orientation purposes.
Dimensions ISO-F Flanges and ISO-F Centering rings
Nominal diameter 63 80 100 160 200 250 320A 130 145 165 225 285 335 425
D 70 83 102 153 213 261 318
D2 66 / 70 81 / 83 100 / 104 150 / 153 200 / 213 250 / 261 318
RA 70 / 76 85 / 89 104 / 108 154 / 159 204 / 219 254 / 267 / 273 324
L 12 12 12 16 16 16 20
L2 8 / 6 8 8 / 6 8 / 6 8 / 6 8 / 6 10
L3 8 8 8 8 8 8 12
L4 3.9 3.9 3.9 3.9 3.9 3.9 5.6
L5 5.3 5.3 5.3 5.3 5.3 5.3 7
Number of screws 4 8 8 8 12 12 12
Screw size M8 x 40 M8 x 40 M8 x 40 M10 x 50 M10 x 50 M10 x 50 M12 x 60
Bolt circle [mm] 110 125 145 200 260 310 395
All dimensions in mm, unless otherwise stated, are only for orientation purposes.
www.vacom-vacuum.com
3
3-35
ISO Components
Materials
Fields of Application
O-Rings / Edge seals Centering rings / sup-port rings
Flanges Components / Tubes
NBR (O-Ring)FKM (O-Ring)MVQ (O-Ring)
Aluminium (edge seal)
Aluminium Stainless steel 1.4301
Stainless steel 1.4301Stainless steel 1.4404
Stainless steel 1.4301Stainless steel 1.4404Stainless steel 1.4435Stainless steel 1.4541Stainless steel 1.4571
MaterialsComponents and seals
Pressure range[mbar]
Leak rate[mbar l/s]
Recommendedconnecting element
Stainless steel with elastomer seal 1.0E-7 to 1500 1.0E-9 ISO-K with claw clamp or wall clamp
Stainless steel with metal sealing 1.0E-9 to 1500 < 1.0E-9 ISO-K with clamp chain or ISO-F with nuts
ISO Components
ISO Flanges
ISO-K Claw clamp blank flanges, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63BK-316ISO63BK-304 63 95 70 12ISO80BK-316ISO80BK-304 80 110 83 12ISO100BK-316ISO100BK-304 100 130 102 12ISO160BK-316ISO160BK-304 160 180 153 12ISO200BK-316ISO200BK-304 200 240 213 12ISO250BK-316ISO250BK-304 250 290 261 12ISO320BK-316ISO320BK-304 320 370 318 17-ISO400BK-304 400 450 400 17-ISO500BK-304 500 550 501 17-ISO630BK-304 630 690 651 22
LDADNOrder codeStainless steel 304 Stainless steel 316L*
ISO Blank flanges, conical, stainless steel 304
With ISO and Quick CF clamp chains mountable
63KF63BS-304 87 70 580KF80BS-304 114 83 12100KF100BS-304 134 102 12
DN LDAOrder code
ISO-F Blank flanges, stainless steel
Option: stainless steel 316L.Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63FBK-304 130 110 9 1280ISO80FBK-304 145 125 9 12100ISO100FBK-304 165 145 9 12160ISO160FBK-304 225 200 11 16200ISO200FBK-304 285 260 11 16250ISO250FBK-304 335 310 11 16320ISO320FBK-304 425 395 14 20
DN LD2DAOrder code
3
3-36 www.vacom-vacuum.com
ISO Components
ISO Flanges
ISO-F Chamber flanges, stainless steel
Technical dataFlange stainless steel 316LO-ring FKMScrews DIN 7964KE, A2Temperature range -10 °C to 150 °CApplication wall mounting
40ISOF40KAM-316 100 80 12 M663ISOF63KAM-316 130 110 12 M8100ISOF100KAM-316 165 145 12 M8160ISOF160KAM-316 225 200 12 M10
DN MLDAOrder code
ISO-K Welding flanges, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63B70-316ISO63B70-304 63 95 70 66 70 12 8ISO63B76-316ISO63B76-304 63 95 70 70 76 12 6ISO80B85-316ISO80B85-304 80 110 83 81 85 12 8ISO80B89-316ISO80B89-304 80 110 83 83 89 12 6ISO100B104-316ISO100B104-304 100 130 102 100 104 12 8ISO100B108-316ISO100B108-304 100 130 102 102 108 12 6ISO160B154-316ISO160B154-304 160 180 153 151 154 12 8ISO160B159-316ISO160B159-304 160 180 153 153 159 12 6ISO200B204-316ISO200B204-304 200 240 213 200 204 12 8ISO200B219-316ISO200B219-304 200 240 213 213 219 12 6ISO250B254-316ISO250B254-304 250 290 261 250 254 12 8ISO250B267-316ISO250B267-304 250 290 261 261 267 12 6ISO320B324-316ISO320B324-304 320 370 318 318 324 17 10-ISO400B406-304 400 450 400 400 406 17 10-ISO500B508-304 500 550 501 501 508 17 10
L2LRAD2DADNOrder codeStainless steel 304 Stainless steel 316L
3
3-37www.vacom-vacuum.com
ISO Components
ISO Flanges
ISO-K Bored flanges with reinforced tubulation, stainless steel 316L
160ISO160S154-316 180 153 150 154 12 12 20200ISO200S204-316 240 213 200 204 12 12 20250ISO250S254-316 290 261 250 254 12 12 20320ISO320S324-316 370 318 318 324 17 17 25
DN L3L2LRAD2DAOrder code
Option: clean room products (= CRP) made of stainless steel 316L on request.
Reinforced ISO-K Flanges for welding to components, to reduce welding distortion
ISO Bored flanges, conical, stainless steel 304
With ISO and Quick CF clamp chains mountable
63KF63B63-304 87 70 63 580KF80B76-304 114 83 76 12100KF100B102-304 134 102 102 12
DN LRADAOrder code
ISO-F Bored flanges, stainless steel 304
Option: stainless steel 316L.Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63F70-304 130 110 9 70 12 7080ISO80F85-304 145 125 9 83 12 85100ISO100F104-304 165 145 9 102 12 104160ISO160F154-304 225 200 11 153 16 154200ISO200F204-304 285 260 11 213 16 204250ISO250F254-304 335 310 11 261 16 254320ISO320F324-304 425 395 14 318 20 324
DN LRAD3D2DAOrder code
3
3-38 www.vacom-vacuum.com
ISO Components
ISO Flanges
ISO Rotatable bolt rings with retaining ring, stainless steel 304
Option: clean room products (= CRP) on request.
63ISO63R-304 130 110 9 95 12 480ISO80R-304 145 125 9 110 12 8
100ISO100R-304 165 145 9 130 12 8160ISO160R-304 225 200 11 180 16 8200ISO200R-304 285 260 11 240 16 12250ISO250R-304 335 310 11 290 16 12320ISO320R-304 425 395 14 371 20 12
DN LD3D2DAOrder code
ISO Replacement retaining rings for rotatable bolt rings, stainless steel 304
Option: clean room products (= CRP) on request.
3ISO63RR-304 ISO63R3ISO80RR-304 ISO80R3ISO100RR-304 ISO100R5ISO160RR-304 ISO160R5ISO200RR-304 ISO200R5ISO250RR-304 ISO250R5ISO320RR-304 ISO320R
L Accessories forOrder code
ISO-K-F Flange caps, plastics
63ISO63CAP 1080ISO80CAP 10
100ISO100CAP 10160ISO160CAP 10200ISO200CAP 1250ISO250CAP 1320ISO320CAP 1
DN Pack sizeOrder code
3
3-39www.vacom-vacuum.com
ISO Components
ISO Components
ISO Tube, 1m length, stainless steel
Other lengths on request.Quality according to DIN 11850/11866 on requestSurface finishinside Ra < 0.8 µmweld seam area Ra < 1.6 µm
Technical dataDelivery conditions according to DIN EN 10217-7Lengthwise weldedWeld seam factor 1.0Inside and outside pickled
R316-70x2.0-1R304-70x2.0-1 63 66 70R316-85x2.0-1R304-85x2.0-1 80 81 85R316-104x2.0-1R304-104x2.0-1 100 100 104R316-154x2.0-1R304-154x2.0-1 160 150 154R316-204x2.0-1R304-204x2.0-1 200 200 204
RARIDNOrder codeSt. steel 304 St. steel 316L
ISO-K Claw clamp tubulations (half nipples), stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L on request.Other lengths and tube sizes on request.Option: stainless steel 304.
63ISO63TU-100-76-316 95 7663ISO63TU-100-70-316 95 7080ISO80TU-100-89-316 110 8980ISO80TU-100-85-316 110 85
100ISO100TU-100-108-316 130 108100ISO100TU-100-104-316 130 104160ISO160TU-100-159-316 180 159160ISO160TU-100-154-316 180 154200ISO200TU-100-219-316 240 219200ISO200TU-100-204-316 240 204250ISO250TU-100-219-316 290 267250ISO250TU-100-254-304 290 254320ISO320TU-100-324-316 370 324
DN RAAOrder code
ISO-K Straight connectors (full nipples), stainless steel 316L
Option: clean room products (= CRP) on request.Other lengths and stainless steel 304 on request.
63ISO63SC-316 9580ISO80SC-316 110
100ISO100SC-316 130160ISO160SC-316 180200ISO200SC-316 240250ISO250SC-316 290
DN AOrder code
3
3-40 www.vacom-vacuum.com
ISO Components
ISO Components
ISO-K Straight connectors with lateral KF ports, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63SC4016K-316 95 80 60 88100ISO100SC4016K-316 130 75 75 108160ISO160SC4016K-316 180 100 100 138
DN LSL3SL2AOrder code
ISO-K Tubulated reducing adapters, conical, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L on request.
80ISO80R63/CO-304 63 110 95 83 70100ISO100R63/CO-304 63 130 95 102 70100ISO100R80/CO-304 80 130 110 102 83160ISO160R63/CO-304 63 180 95 153 70160ISO160R100/CO-304 100 180 130 153 102
DN D2DA2ADN2Order code
ISO-K Tubulated reducing adapters, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths on request.
ISO100R63-316ISO100R63-304 100 63 130 95 50ISO160R63-316ISO160R63-304 160 63 180 95 50ISO160R100-316ISO160R100-304 160 100 180 130 50ISO200R100-316ISO200R100-304 200 100 240 130 90ISO250R100-316ISO250R100-304 250 100 290 130 90
LA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
3
3-41www.vacom-vacuum.com
ISO Components
ISO Components
ISO-K to KF Adapters, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.Other lengths on request.
SK063025-316SK063025-304 63 25 95 40SK063040-316SK063040-304 63 40 95 55SK063050-316SK063050-304 63 50 95 75SK100040-316SK100040-304 100 40 130 55
A2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
ISO-K to KF Adapters, conical, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L on request.
63SK063040/CO-304 40 95 55 7063SK063050/CO-304 50 95 75 70 5280SK080040/CO-304 40 95 55 8380SK080050/CO-304 50 95 75 83 51100SK100040/CO-304 40 130 55 102100SK100050/CO-304 50 130 75 102 52
DN D2DA2ADN2Order code
ISO-K to CF Adapters, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.Option: stainless steel 316L.
63SA063063-304 63 114 95100SA100063-304 63 152 95100SA100100-304 100 152 130160SA160100-304 100 203 130160SA160160-304 160 203 180
DN A2ADN2Order code
3
3-42 www.vacom-vacuum.com
32
39
39
ISO Components
ISO Components
ISO-K Elbows 90°, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63E-316ISO63E-304 63 95 88 sweptISO80E-316ISO80E-304 80 110 98 sweptISO100E-316ISO100E-304 100 130 108 sweptISO160E-316ISO160E-304 160 180 138 mitredISO200E-316ISO200E-304 200 240 178 mitred
DesignSLADNOrder codeStainless steel 304 Stainless steel 316L*
ISO-K Tees, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63TE-316ISO63TE-304 63 95 176 88ISO80TE-316ISO80TE-304 80 110 196 98ISO100TE-316ISO100TE-304 100 130 216 108ISO160TE-316ISO160TE-304 160 180 276 138ISO200TE-316ISO200TE-304 200 240 356 178ISO250TE-316ISO250TE-304 250 290 416 208
SLLADNOrder codeStainless steel 304 Stainless steel 316L*
3
3-43www.vacom-vacuum.com
ISO Components
ISO Components
ISO-K Unequal tees, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO100TE63-316ISO100TE63-304 100 63 130 95 216 107ISO160TE63-316ISO160TE63-304 160 63 180 95 276 130ISO160TE100-316ISO160TE100-304 160 100 180 130 276 131
SLLA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
ISO-K to KF Reducing tees, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63TE25-316ISO63TE25-304 63 25 95 40 204 79ISO63TE40-316ISO63TE40-304 63 40 95 55 204 76ISO100TE40-316ISO100TE40-304 100 40 130 75 260 111
SLLA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
3
3-44 www.vacom-vacuum.com
ISO Components
ISO Components
ISO-K 4-way crosses, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63X-316ISO63X-304 63 95 176 88ISO80X-316ISO80X-304 80 110 196 98ISO100X-316ISO100X-304 100 130 216 108ISO160X-316ISO160X-304 160 180 276 138ISO200X-316ISO200X-304 200 240 356 178ISO250X-316ISO250X-304 250 290 416 208
SLLADNOrder codeStainless steel 304 Stainless steel 316L*
ISO-K Unequal 4-way crosses, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO100X63-316ISO100X63-304 100 63 130 95 114 108ISO160X63-316ISO160X63-304 160 63 180 95 260 138ISO160X100-316ISO160X100-304 160 100 180 130 262 138
SLLA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
3
3-45www.vacom-vacuum.com
ISO Components
ISO Components
ISO-K to KF Reducing crosses, stainless steel
* Option: clean room products (= CRP) made of stainless steel 316L on request.
ISO63X25-316ISO63X25-304 63 25 95 40 204 58ISO63X40-316ISO63X40-304 63 40 95 55 204 76ISO100X40-316ISO100X40-304 100 40 130 55 260 95
SLLA2ADN2DNOrder codeStainless steel 304 Stainless steel 316L*
ISO-K 6-way crosses, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L on request.Option: stainless steel 304.
63ISO63XX-316 95 176 8880ISO80XX-316 110 196 98
100ISO100XX-316 130 216 108160ISO160XX-316 180 276 138200ISO200XX-316 240 356 178250ISO250XX-316 290 416 208
DN SLLAOrder code
3
3-46 www.vacom-vacuum.com
ISO Components
ISO Flexible hoses
ISO-K Flexible hoses, stainless steel 304
Technical dataMaterial stainless steel 304Dynamic bending radii acc. to EN ISO 10380Base load 10,000 cycles
Option: stainless steel 316L.Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63FX25-304 95 250 20063ISO63FX50-304 95 500 20063ISO63FX75-304 95 750 20063ISO63FX100-304 95 1000 20080ISO80FX25-304 110 250 24080ISO80FX50-304 110 500 24080ISO80FX75-304 110 750 24080ISO80FX100-304 110 1000 240100ISO100FX25-304 130 250 290100ISO100FX50-304 130 500 290100ISO100FX75-304 130 750 290100ISO100FX100-304 130 1000 290160ISO160FX25-304 180 250 400160ISO160FX50-304 180 500 400160ISO160FX75-304 180 750 400160ISO160FX100-304 180 1000 400
DN Bendingradius
LAOrder code
Components
ISO-K Hydroformed bellows connectors, stainless steel 304
Technical dataFlange st. steel 304Bellow st. steel 316L / 316TiTolerance L ±5 mm
Option: stainless steel 316L.Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63FXB-304 95 112 13080ISO80FXB-304 110 112 130
100ISO100FXB-304 130 112 130160ISO160FXB-304 180 192 220200ISO200FXB-304 240 180 200250ISO250FXB-304 290 180 200320ISO320FXB-304 370 155 200
DN LLminAOrder code
3
3-47www.vacom-vacuum.com
ISO Components
ISO Viewports
Viewports with removable O-ring seal on ISO-K Flange, flange mounting with clamps
Technical dataHe leak rate < 1.0E-9 mbar l/sWindow material borosilicate glass
(Borofloat®33)or fused silica (Silux®)
Flange material stainless steel 304Transmission range ca. 0.4 m to 2 m
(Borofloat®33),ca. 0.3 m to 3 m(Silux®)
Temperature range up to 150 °C(aluminium frameup to 120 °C)
Coating anti-reflective coatingpossible
Option: flange, stainless steel 316L.
VPISOK63Q-E-ZVPISOK63B-E-Z 63 98 70 14 3.8VPISOK100Q-E-ZVPISOK100B-E-Z 100 133 102 13 5VPISOK160Q-E-ZVPISOK160B-E-Z 160 183 153 17 9VPISOK200Q-E-ZVPISOK200B-E-Z 200 243 200 17 9
L2LDADNOrder codeBorosilicate glass Quartz glass
Viewports with removable O-ring seal on ISO-K flange, wall mounting with clamps
Technical dataHe leak rate < 1.0E-9 mbar l/sWindow material borosilicate glass
(Borofloat®33)or fused silica (Silux®)
Flange material stainless steel 304Transmission range ca. 0.4 m to 2 m
(Borofloat®33),ca. 0.3 m to 3 m(Silux®)
Temperature range up to 150 °C(aluminium frameup to 120 °C)
Coating anti-reflective coatingpossible
Option: flange, stainless steel 316L.
VPISOK63Q-EVPISOK63B-E 63 98 70 12 3.8VPISOK100Q-EVPISOK100B-E 100 133 102 12 5VPISOK160Q-EVPISOK160B-E 160 183 153 15 9VPISOK200Q-EVPISOK200B-E 200 243 200 19 13
L2LDADNOrder codeBorosilicate glass Quartz glass
3
3-48 www.vacom-vacuum.com
ISO Components
ISO Viewports
Viewports with removable O-ring seal on ISO-F flange, wall mounting with screws
Technical dataHe leak rate < 1.0E-9 mbar l/sWindow material borosilicate glass
(Borofloat®33)or fused silica (Silux®)
Flange material aluminium, anodizedTransmission range ca. 0.4 m to 2 m
(Borofloat®33),ca. 0.3 m to 3 m(Silux®)
Temperature range up to 150 °C(aluminium frameup to 120 °C)
Coating anti-reflective coatingpossible
VPISOF63Q-EVPISOF63B-E 63 130 70 12 3.8VPISOF100Q-EVPISOF100B-E 100 165 102 12 5VPISOF160Q-EVPISOF160B-E 160 225 153 16 9VPISOF200Q-EVPISOF200B-E 200 285 200 16 9
L2LDADNOrder codeBorosilicate glass Quartz glass
Viewports with permanent joint, borosilicate glass
63VPISOK63B-L 95 49 14 3.5100VPISOK100B-L 130 65 16 3.5160VPISOK160B-L 180 90 18 6200VPISOK200B-L 240 135 18 8250VPISOK250B-L 290 135 18 8
DN L2LDAOrder code
Technical dataHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Corning 7056)Flange material stainless steel 304Frame material Kovar®Transmission range ca. 0.4 m to 2 mTemperature range to 150 °CMax. heating andcooling rate
3 K/min
3
3-49www.vacom-vacuum.com
ISO Components
ISO Seals
ISO O-rings, elastomer
Technical dataTemperature range -10 °C to 150 °C
* Option: low outgassing and clean room products (=CRP) on request.
ISO63VR-VBISO63VR-BEH 63 76 5.3ISO80VR-VBISO80VR-BEH 80 88 5.3ISO100VR-VBISO100VR-BEH 100 107 5.3ISO160VR-VBISO160VR-BEH 160 158 5.3ISO200VR-VBISO200VR-BEH 200 209 5.3ISO250VR-VBISO250VR-BEH 250 253 5.3ISO320VR-VBISO320VR-BEH 320 330 7
LDDNOrder codeFKM treated FKM vac. baked*
Chemically resistant ISO O-rings, treated, FKM
The commonly u sed ela stomer seals s ufferirreversible d amage in cor rosive environments andhave a short life cycle. Therefore VACOM developed
The rate between the residual gas contaminationand the pumping speed has to be considered inorder to provide an ultrapure vacuum. The
Vacuum baked ISO O-rings, FKM
3
3-50 www.vacom-vacuum.com
,
,
ISO Components
ISO Seals
ISO O-rings, elastomer
Technical dataTemperature range NBR -10 °C ... 100 °CTemperature range FKM -10 °C ... 150 °CTemperature range MVQ -55 °C ... 200 °C
LDDNOrder codeNBR FKM MVQ
ISO63VRISO63NR 63 76 5.3ISO63SRISO80VRISO80NR 80 88 5.3ISO80SRISO100VRISO100NR 100 107 5.3ISO100SRISO160VRISO160NR 160 158 5.3-ISO200VRISO200NR 200 209 5.3-ISO250VRISO250NR 250 253 5.3-ISO320VRISO320NR 320 330 7-
O-rings for ISO centering rings.
ISO Centering rings, NBR
Technical dataTemperature range -10 °C to 100 °C
Larger nominal diameters on request.
ISO63SNCR-304ISO63ANCR 63 70 68 8 3.9 5.3ISO80SNCR-304ISO80ANCR 80 83 81 8 3.9 5.3ISO100SNCR-304ISO100ANCR 100 102 100 8 3.9 5.3ISO160SNCR-304ISO160ANCR 160 153 150 8 3.9 5.3ISO200SNCR-304ISO200ANCR 200 213 210 8 3.9 5.3ISO250SNCR-304ISO250ANCR 250 261 258 8 3.9 5.3ISO320SNCR-304ISO320ANCR 320 318 315 14 5.6 7
L3L2LD2DDNOrder codeAluminium Stainless steel
3
3-51www.vacom-vacuum.com
ISO Components
ISO Seals
ISO Outer ring, aluminium
63ISO63SCRT/01 9480ISO80SCRT/01 109100ISO100SCRT/01 128160ISO160SCRT/01 179200ISO200SCRT/01 239250ISO250SCRT/01 287
DN AOrder code
Outer ring, aluminium profile, with stainless steel spring to fix O-rings on ISO centering rings.
ISO Centering rings, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63CRS-316 70 68 8 3.9100ISO100CRS-316 102 100 8 3.9160ISO160CRS-316 153 150 8 3.9200ISO200CRS-316 213 210 8 3.9250ISO250CRS-316 261 258 8 3.9320ISO320CRS-316 318 315 14 5.6
DN L2LD2DOrder code
ISO Centering rings, stainless steel, without O-ring.
ISO Centering rings, stainless steel 316L, unslotted
Option: clean room products (= CRP) made ofstainless steel 316L on request.
63ISO63CRSU-316 70 68 8 3.980ISO80CRSU-316 83 81 8 3.9100ISO100CRSU-316 102 100 8 3.9160ISO160CRSU-316 153 150 8 3.9
DN L2LD2DOrder code
ISO Centering rings, stainless steel, unslotted, without O-ring.
3
3-52 www.vacom-vacuum.com
ISO Components
ISO Seals
ISO Centering rings, FKM
Technical dataTemperature range -10 °C to 150 °C
Larger nominal diameters on request.
ISO63SVCR-304ISO63AVCR 63 70 68 8 3.9 5.3ISO80SVCR-304ISO80AVCR 80 83 81 8 3.9 5.3ISO100SVCR-304ISO100AVCR 100 102 100 8 3.9 5.3ISO160SVCR-304ISO160AVCR 160 153 150 8 3.9 5.3ISO200SVCR-304ISO200AVCR 200 213 210 8 3.9 5.3ISO250SVCR-304ISO250AVCR 250 261 258 8 3.9 5.3ISO320SVCR-304ISO320AVCR 320 318 315 14 5.6 7
L3L2LD2DDNOrder codeAluminium Stainless steel 304
ISO Centering rings, FKM, stainless steel 316L
Technical dataTemperature range -10 °C to 150 °C
* Option: low outgassing and clean room products (= CRP) on request.
L3L2LD2DDNOrder codeFKM* FKM treated FKM vacuum baked*
ISO63SVCR-BEH-316ISO63SVCR-316 63 70 68 8 3.9 5.3ISO63SVCR-VB-316ISO80SVCR-BEH-316ISO80SVCR-316 80 83 81 8 3.9 5.3ISO80SVCR-VB-316ISO100SVCR-BEH-316ISO100SVCR-316 100 102 100 8 3.9 5.3ISO100SVCR-VB-316ISO160SVCR-BEH-316ISO160SVCR-316 160 153 150 8 3.9 5.3ISO160SVCR-VB-316ISO200SVCR-BEH-316ISO200SVCR-316 200 213 210 8 3.9 5.3ISO200SVCR-VB-316ISO250SVCR-BEH-316ISO250SVCR-316 250 261 258 8 3.9 5.3ISO250SVCR-VB-316ISO320SVCR-BEH-316ISO320SVCR-316 320 318 315 14 5.6 7ISO320SVCR-VB-316
3
3-53www.vacom-vacuum.com
ISO Components
ISO Seals
ISO Centering rings with outer ring, NBR
Technical dataTemperature range -10 °C to 100 °C
Larger nominal diameters on request.
ISO63SNCRT-304ISO63ANCRT 63 94 70 8 3.9 5.3ISO80SNCRT-304ISO80ANCRT 80 109 83 8 3.9 5.3ISO100SNCRT-304ISO100ANCRT 100 128 102 8 3.9 5.3ISO160SNCRT-304ISO160ANCRT 160 179 153 8 3.9 5.3ISO200SNCRT-304ISO200ANCRT 200 239 213 8 3.9 5.3ISO250SNCRT-304ISO250ANCRT 250 287 261 8 3.9 5.3ISO320SNCRT-304ISO320ANCRT 320 358 318 14 5.6 7
L3L2LD2DDNOrder codeAlu/Alu Alu/Stainless steel
ISO Centering rings with outer ring, FKM
Technical dataTemperature range -10 °C to 150 °C
L3L2LD2DDNOrder codeAlu/Alu Alu/Stainless steel 304 Alu/Stainless steel 316L
ISO63SVCRT-304ISO63AVCRT 63 94 70 8 3.9 5.3ISO63SVCRT-316ISO80SVCRT-304ISO80AVCRT 80 109 83 8 3.9 5.3ISO80SVCRT-316ISO100SVCRT-304ISO100AVCRT 100 128 102 8 3.9 5.3ISO100SVCRT-316ISO160SVCRT-304ISO160AVCRT 160 179 153 8 3.9 5.3ISO160SVCRT-316ISO200SVCRT-304ISO200AVCRT 200 239 213 8 3.9 5.3ISO200SVCRT-316ISO250SVCRT-304ISO250AVCRT 250 287 261 8 3.9 5.3ISO250SVCRT-316ISO320SVCRT-304ISO320AVCRT 320 358 318 14 5.6 7ISO320SVCRT-316ISO400SVCRT-304ISO400AVCRT 400 446 400 14 5.6 7ISO400SVCRT-316ISO500SVCRT-304ISO500AVCRT 500 535 501 14 5.6 7--ISO630AVCRT 630 691 651 14 5.6 7-
3
3-54 www.vacom-vacuum.com
ISO Components
ISO Seals
ISO Mesh centering rings, stainless steel, FKM
Technical dataTemperature range -10 °C to 150 °CMesh size MCRV 4 mmMesh size MCR1V 1 mmWire diameter MCRV 0.9 mmWire diameter MCR1V 0.3 mm
ISO63MCR1VISO63MCRV 63 70ISO100MCR1VISO100MCRV 100 102ISO160MCR1VISO160MCRV 160 153
DDNOrder codeMCRV MCR1V
ISO Connecting elements
ISO Clamp chains, aluminium
Technical dataTemperature range to 150 °CChain links AlMgSi1Lock stanless steelBolt stanless steelSuitable flanges conical ISO flangeSuitable seals elastomer
63XA63 112 77 78 2080XA80 144 103 107 34
100XA100 164 123 113 34
DN LRD2DOrder code
3
3-55www.vacom-vacuum.com
ISO Components
ISO Connecting Elements
QCF Clamp chains VaCFix®, stainless steel
63XS63 73 121 89 28 5 19 32 980100XS100V 117 176 117 41 6 24 38 2540
DN Weight[g]
Tightening torque[Nm]
SWNumber oflinks
LRD2DOrder code
Other dimensions in part Quick CF componentsOption: clean room products (= CRP) on request.Clean room compatible clamp chains require a higher tightening torque.
XS63 XS100V
Technical dataMaterial stainless steel,
non-magneticSuitable flanges QCF flanges
conical ISO flangesSuitable seals metal edge seal
O-ring sealMounting with torque wrench
Set of hex head screws, for ISO flanges with through-holes, stainless steel
Technical dataScrew ISO 4014, 4017, A2Nut ISO 4032, A2Washer ISO 7089, A2
Order code DN Number of bore holes
Screw size
FK-ISO63 63 4 M8 x 40 mmFK-ISO80 80 8 M8 x 40 mmFK-ISO100 100 8 M8 x 40 mmFK-ISO160 160 8 M10 x 50 mmFK-ISO200 200 12 M10 x 50 mmFK-ISO250 250 12 M10 x 50 mmFK-ISO320 320 12 M12 x 60 mm
3
3-56 www.vacom-vacuum.com
ISO Components
ISO Connecting Elements
ISO Double claw clamps, aluminium
63 - 100ISO63/100DCA M8 50 28 22160 - 250ISO160/250DCA M10 51 34 23320 - 500ISO320/500DCA M12 67 50 36
DN LminLmaxLMOrder code
Double claw clamps usable with centering ring
ISO Double claw clamps
* Option: clean room products (= CRP) on request.
ISO63/250DCSSISO63/250DCMS 63 - 250 M10 60 27 16ISO320/500DCSSISO320/500DCMS 320 - 500 M12 76 37 27-ISO630DCMS 630 M12 86 46 36
LminLmaxLMDNOrder codeMild steel, zinc plated Stainless steel*
Double claw clamps usable with centering ring
3
3-57www.vacom-vacuum.com
ISO Components
ISO Connecting Elements
ISO Claw clamps
* Option: clean room products (= CRP) on request.
L3L2LMDNOrder codeAluminium Mild steel, zinc plated Stainless steel*
ISO63/100WCMSISO63/100WCA 63 - 100 M8 35 23 14ISO63/100WCSSISO160/250WCMSISO160/250WCA 160 - 250 M10 35 23 14ISO160/250WCSSISO320/500WCMSISO320/500WCA 320 - 500 M12 50 30 20ISO320/500WCSSISO630WCMS- 630 M12 59 40 25ISO630WCSS
Claw clamps for tapped holes usable with centering ring
ISO Claw clamps, with nuts
ISO63/100WCNISO63/100WCNA 63 - 100 M8 45 23 14ISO160/250WCNISO160/250WCNA 160 - 250 M10 50 23 14ISO320/500WCNISO320/500WCNA 320 - 500 M12 60 30 20
L3L2LMDNOrder codeAluminium Mild steel, zinc plated
Claw clamps for through bolt holes usable with centering ring
ISO Claw clamps, mild steel, zinc plated
63 - 100ISO63/100WCO M8 30 19 10150 - 250ISO160/250WCO M10 35 19 10320 - 500ISO320/500WCO M12 45 30 15
DN L3L2LMOrder code
Claw clamps for ground plates usable with O-ring without centering ring.
3
3-58 www.vacom-vacuum.com
3
www.vacom-vacuum.com 3-59
CF Components
IntroductionThe generation of ultra high vacuum (UHV) makes great demands on the material and connections. Therefore, the CF standard was created in the UHV technology (ISO/TS 3669-2:2007).
CF flanges are manufactured from circular blanks of stainless steel on CNC machines. Rotatable flanges are bipartite and consist of an inner part with the seal face and an outer part with the bolt holes. CF flanges have an annular groove on the vacuum side for the reception of the gasket and a knife-edge.
Sealing is achieved by means of a flat gasket of oxygen-free (OFHC) copper because of the low leak rate and high bakeout temperature necessary for UHV technology. This gasket can be used generally only once due to the plastic deformation by the knife-edge.
Fastening is achieved by bolts which must be tightened uniformly crosswise in order to avoid any kind of distortion. Such flange connections have a leak rate of < 1.0E-11 mbar l/s and are bakeable up to 450 °C.
Functional principle CF
New and time-saving – the Quick CF Connection for HV to XHV
Quick CF (QCF) components and the appropriate clamp chains VaCFix® are developed by VACOM. They combine the sealing principle of ConFlat® flanges (knife-edge according to ISO / TS 3669-2) with the chain lock principle of KF connections.
QCF components can be assembled quick, easy and also space saving. They can be connected to all existing vacuum systems by adapters. The CF-QCF adapters offer the possibility to use the QCF connection on existing UHV vacuum systems and remain at all times flexible and supplier independent.
The demands of the UHV technology regarding a leak rate of <1.0E-11 mbar l/s and a bakeout temperature of the flange connection up to 350 °C are fulfilled and proven by independent tests. Usually used copper gaskets can be used for all nominal diameters. This also emphasizes the flexibility and supplier independence.
Our VaCFix® Clamp chains are also applicable for the connection of KF and conical ISO flanges.
Functional principle QCF
3
www.vacom-vacuum.com3-60
CF Components
Introduction
Dimensions
VACOM provides CF flanges and components of the dimensions DN10 to DN400 according to ISO / TS 3669-2:2007. These flanges are fully interchangeable with ConFlat® and CF flanges of other manufacturers.
Please consider that the ASTM standard as well as individual standards of institutions are also available in the market. Please add in case of requests of CF components of the sizes (DN25, DN50, DN75, DN125) and nominal diameters from DN250 the size and the number of required bolts and the necessary copper gasket.
Dimensions of CF Flanges
Commonly used materials
Nominal diameter OD Thickness OD Cu gasket Bolt circle Number ofscrews
DN10 25 (1”) 6 13 18 6 x M3
DN16 34 (1.33”) 7.6 21 27 6 x M4
DN25 54 (2.12”) 11.5 33 41 4 x M6
DN40 70 (2.75”) 13 48 59 6 x M6
DN50 86 (3.38”) 16 61 72 8 x M8
DN63 114 (4.5”) 17.5 82 92 8 x M8
DN75 117 (4.62”) 17.5 91 102 10 x M8
DN100 152 (6”) 20 120 130 16 x M8
DN125 171 (6.75”) 21 141 152 18 x M8
DN160 203 (8”) 22 171 181 20 x M8
DN200 254 (10”) 25 222 232 24 x M8
DN250 305 (12”) 25 272.7 284 32 x M8
DN275 337 (13.5”) 28 294 306 30 x M10
DN300 368 (14.5”) 28 326 338 32 x M10
DN350 419 (16.5”) 28 376 389 36 x M10
DN400 470 (18.5”) 28 424 438 40 x M10
All dimensions in mm, unless otherwise stated, are only for orientation purposes.
Dimensions of QCF Flanges
Nominal diameter ODThickness
OD Cu gasketBlank flange Bored flange
DN16 30 6.5 9 21
DN40 55 6.5 9 48
DN63 87 7.5 11 82
DN100 134 14.0 19 120
Flanges Components / tubes Seals VaCFix® Clamp chainsStainless steel 1.4301Stainless steel 1.4404 (on request)Stainless steel 1.4429-ESU (on request)
Stainless steel 1.4301Stainless steel 1.4404Stainless steel 1.4435Stainless steel 1.4571
FKMOFHC copperOFHC copper silver platedOFHC copper annealedAluminium
non-magnetic stainless steel
3
www.vacom-vacuum.com 3-61
CF Components
Advantages of the QCF Flange connection
Comparison of the QCF Connection with the Mounting of Conventional CF Flanges
Nominal diameter QCF CFDN16 24 35
DN40 24 61
DN63 28 80
DN100 41 90
Required space / freedom of mounting
Assembly time
Nominal diameter QCF CFDN16 30 seconds 3 minutes
DN40 30 seconds 3 minutes
DN63 40 seconds 4 minutes
DN100 80 seconds 6 minutes
Exploded drawing assembly parts VaCFix® Clamp chain XS100V
Up to 90 % less assembly time are a huge advantage for flange connections which have to be opened often.
Ideal UHV-suitable quick connection principle for the use in radioactive environment – the use of QCF connections reduce the risk of exposure of the assembly staff.
Components with QCF flange can be mounted like rotatable flanges in any angular position.
VaCFix® Clamp chains can be mounted easy and fast even with limited space conditions.
QCF Components were successfully tested by independent institutes for operating temperatures from -270 °C to 350 °C.
VaCFix® Clamp chains are also perfectly suited for the mounting of stress-sensitive flange components such as viewports and feedthroughs because the clamp chains ensure a very uniform contact pressure when using a torque wrench.
Copper gaskets can be used up to three times in case of defined torque increase.
CF CFQCF
< 75 % less assembly time Convince yourself: www.vacom-vacuum.com
Ca. 50 % less space required – easy assembly even when space is limited
New in our product portfolio are UHV valves, measurement instrumentation, feedthroughs, edge welded bellows and viewports with QCF connections, which you can find at QCF Components and in the respective catalogue chapters. The extension of the QCF product range enables you to include also QCF connections already in the planning where the new QCF technology shall be used.
CF Components
CF Flanges
CF Blank flanges, fixed, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Flanges according to ASTM E2734/E2734M-10 on request.Option: with tapped holes
LDADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
F10-316- 10 25 3.3 6-F16-316- 16 34 4.3 7F16-316LNSF40-316F40-304 40 70 6.7 13F40-316LNSF63-316F63-304 63 114 8.4 17F63-316LNSF100-316F100-304 100 152 8.4 20F100-316LNSF160-316F160-304 160 203 8.4 22F160-316LNSF200-316F200-304 200 254 8.4 24F200-316LNSF250-316F250-304 250 305 8.4 25F250-316LNSF300-316F300-304 300 368 10.8 28F300-316LNSF350-316F350-304 350 419 10.8 28F350-316LNSF400-316F400-304 400 470 10.8 28F400-316LNS
Quick CF Blank flanges, conical, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
LADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
QCF16-316QCF16-304 16 30 6.5QCF16-316LNSQCF40-316QCF40-304 40 55 6.5QCF40-316LNSQCF63-316QCF63-304 63 87 7.5QCF63-316LNSQCF100-316QCF100-304 100 134 14QCF100-316LNS
3
3-62 www.vacom-vacuum.com
CF Components
CF Flanges
CF Blank flanges, rotatable, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Flanges according to ASTM E2734/E2734M-10 on request.Option: with tapped holes
LDADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
F10R-316- 10 25 3.3 6-F16R-316- 16 34 4.3 7F16R-316LNSF40R-316F40R-304 40 70 6.7 13F40R-316LNSF63R-316F63R-304 63 114 8.4 17F63R-316LNSF100R-316F100R-304 100 152 8.4 20F100R-316LNSF160R-316F160R-304 160 203 8.4 22F160R-316LNSF200R-316F200R-304 200 253 8.4 24F200R-316LNSF250R-316F250R-304 250 305 8.4 25F250R-316LNSF300R-316F300R-304 300 368 10.8 28F300R-316LNSF350R-316F350R-304 350 419 10.8 28F350R-316LNSF400R-316F400R-304 400 470 10.8 28F400R-316LNS
CF Double sided blank flanges, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
F16DB-316LNSF16DB-304 16 34 7F40DB-316LNSF40DB-304 40 70 13F63DB-316LNSF63DB-304 63 114 17F100DB-316LNSF100DB-304 100 152 20F160DB-316LNSF160DB-304 160 203 22
LADNOrder codeSt. steel 304 St. steel 316LN-ESR
3
3-63www.vacom-vacuum.com
CF Components
CF Flanges
CF Bored flanges, fixed, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Flanges according to ASTM E2734/E2734M-10 on request.Option: with tapped holes
L2LDRAADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
F10B10-316- 10 25 10 9 6 3-F16B19-316- 16 34 19 16 7 4.8F16B19-316LNSF40B41-316F40B41-304 40 70 41 38 13 4.8F40B41-316LNSF40B42-316F40B42-304 40 70 42 38 13 4.8F40B42-316LNSF63B63-316F63B63-304 63 114 63 61 17 7.9F63B63-316LNSF63B70-316F63B70-304 63 114 70 66 17 7.9F63B70-316LNSF100B101-316F100B101-304 100 152 101 98 20 9.5F100B101-316LNSF100B104-316F100B104-304 100 152 104 100 20 9.5F100B104-316LNSF160B152-316F160B152-304 160 203 152 149 22 9.5F160B152-316LNSF160B154-316F160B154-304 160 203 154 150 22 9.5F160B154-316LNSF200B204-316F200B204-304 200 254 204 200 25 9.5F200B204-316LNSF250B254-316F250B254-304 250 305 254 250 25 12.7F250B254-316LNSF300B306-316F300B306-304 300 368 306 300 28 12.7F300B306-316LNSF350B356-316F350B356-304 350 419 356 350 28 12.7F350B356-316LNSF400B406-316F400B406-304 400 470 410 406 28 12.7F400B406-316LNS
Quick CF Bored flanges, conical, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
L2LRADADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
QCF16B19-316QCF16B19-304 16 30 16 19 10 8QCF16B19-316LNSQCF40B38-316QCF40B38-304 40 55 35 38 10 8QCF40B38-316LNSQCF40B41-316QCF40B41-304 40 55 38 41 10 8QCF40B41-316LNS-- 63 87 61 63 11 10QCF63B63-316LNS-- 63 87 63 70 11 10QCF63B70-316LNSQCF100B101-316QCF100B101-304 100 134 96 101 19 17QCF100B101-316LNSQCF100B104-316QCF100B104-304 100 134 100 104 19 17QCF100B104-316LNS
3
3-64 www.vacom-vacuum.com
CF Components
CF Flanges
CF Bored flanges, rotatable, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Flanges according to ASTM E2734/E2734M-10 on request.Quick CF flanges can you find on page 3-91Option: with tapped holes
L2LDRAADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
F10RB10-316- 10 25 10 9 6 3-F16RB19-316- 16 34 19 16 7 4.8F16RB19-316LNSF40RB41-316F40RB41-304 40 70 41 38 13 4.8F40RB41-316LNSF40RB42-316F40RB42-304 40 70 42 38 13 4.8F40RB42-316LNSF63RB63-316F63RB63-304 63 114 63 61 17 7.9F63RB63-316LNSF63RB70-316F63RB70-304 63 114 70 66 17 7.9F63RB70-316LNSF100RB101-316F100RB101-304 100 152 101 98 20 9.5F100RB101-316LNSF100RB104-316F100RB104-304 100 152 104 100 20 9.5F100RB104-316LNSF160RB152-316F160RB152-304 160 203 152 149 22 9.5F160RB152-316LNSF160RB154-316F160RB154-304 160 203 154 150 22 9.5F160RB154-316LNSF200RB204-316F200RB204-304 200 253 204 200 25 9.5F200RB204-316LNSF250RB254-316F250RB254-304 250 305 254 250 25 12.7F250RB254-316LNSF300RB306-316F300RB306-304 300 368 306 300 28 12.7F300RB306-316LNSF350RB356-316F350RB356-304 350 419 356 350 28 12.7F350RB356-316LNSF400RB406-316F400RB406-304 400 470 410 406 28 12.7F400RB406-316LNS
CF Double sided bored flanges, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Option: radial connections
F16D16-316LNSF16D16-304 16 34 13 7F40D38-316LNSF40D38-304 40 70 38 13F63D66-316LNSF63D66-304 63 114 66 17F100D100-316LNSF100D100-304 100152100 20F160D150-316LNSF160D150-304 160203150 22
LDADNOrder codeSt. steel 304 St. steel 316LN-ESR
3
3-65www.vacom-vacuum.com
CF Components
CF Flanges
CF Welded flanges, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16F16WF16-316 41 16 1240F40WF38-316 70 38 2163F63WF66-316 114 66 20
100F100WF100-316 154 100 20160F160WF160-304 204 160 20
DN LDAOrder code
Flanges with tapped holes for flush welding to tubes of the same diameter A
CF Reducer flanges, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
-ZL016010-316 16 10 34 9 M3 10-ZL040010-304 40 10 70 9 M4 13ZL040016-316LNSZL040016-304 40 16 70 16 M4 13ZL063016-316LNSZL063016-304 63 16 114 16 M4 17ZL063040-316LNSZL063040-304 63 40 114 38 M6 17ZL100040-316LNSZL100040-304 100 40 152 38 M6 20ZL100063-316LNSZL100063-304 100 63 152 66 M8 20ZL160040-316LNSZL160040-304 160 40 203 38 M6 22ZL160063-316LNSZL160063-304 160 63 203 66 M8 22ZL160100-316LNSZL160100-304 160 100 203 100 M8 22ZL200100-316LNSZL200100-304 200 100 254 100 M8 25ZL200160-316LNSZL200160-304 200 160 254 150 M8 25ZL250100-316LNSZL250100-304 250 100 305 100 M8 28ZL250160-316LNSZL250160-304 250 160 305 150 M8 28
LMDADN2DNOrder codeStainless steel Stainlees steel 316LN-ESR
Orientation of bolt circle according to ISO 9803-2:2007
3
3-66 www.vacom-vacuum.com
CF Components
CF Flanges
Quick CF to CF Reducer flanges, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
ZL040016QCF-316LNSZL040016QCF-304 40 16 55 16 12 M4ZL063040QCF-316LNSZL063040QCF-304 63 40 87 38 16 M6ZL100016QCF-316LNSZL100016QCF-304 100 16 134 16 14 M4ZL100040QCF-316LNSZL100040QCF-304 100 40 134 38 14 M6ZL100063QCF-316LNSZL100063QCF-304 100 63 134 66 19 M8
MLDADN2DNOrder codeStainless steel 304 Stainlees steel 316LN-ESR
CF Flange caps, plastics
16CF16CAP 1040CF40CAP 1063CF63CAP 10
100CF100CAP 10160CF160CAP 10200CF200CAP 1250CF250CAP 1300CF300CAP 1
DN Pack sizeOrder code
Quick CF Flange caps, plastics
Packing unit 10 pieces
16QCF16CAP40QCF40CAP63QCF63CAP
100QCF100CAP
DN #FehlerOrder code
3
3-67www.vacom-vacuum.com
CF Components
CF Components
CF Tubes, 1m length, stainless steel
Other lengths on request.Quality according to DIN 11850/11866 on requestSurface finishinside Ra < 0.8 µmweld seam area Ra < 1.6 µm
Technical dataDelivery conditions according to DIN EN 10217-7longitudinally weldedweld seam factor 1.0inside and outside pickled
R316-19x1.5-1R304-19x1.5-1 16 16 19R316-41x1.5-1R304-41x1.5-1 35 38 41R316-70x2.0-1R304-70x2.0-1 63 66 70R316-104x2.0-1R304-104x2.0-1 100 100 104R316-154x2.0-1R304-154x2.0-1 160 150 154R316-204x2.0-1R304-204x2.0-1 200 200 204
RARIDNOrder codeSt. steel 304 St. steel 316L
CF Tubulations, rotatable, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Other lengths and nominal diameter on request.Option: with tapped holes, with fixed flanges, stainless steel 316L
-TU10R-30-10-316 10 30 30 10TU16R-38-19-316LNSTU16R-38-19-304 16 34 38 19TU40R-63-41-316LNSTU40R-63-41-304 35 70 63 41-TU63R-105-63-304 63 114 105 63TU63R-105-70-316LNSTU63R-105-70-304 63 114 105 70-TU100R-135-101-304 100 152 135 101TU100R-135-104-316LNSTU100R-135-104-304 100 152 135 104-TU160R-167-152-304 160 203 167 152TU160R-167-154-316LNSTU160R-167-154-304 160 203 167 154TU200R-167-204-316LNSTU200R-167-204-304 200 254 167 204
RALADNOrder codeStainless steel Stainlees steel 316LN-ESR
3
3-68 www.vacom-vacuum.com
CF Components
CF Components
Quick CF Flanges with tubulation, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16TU16QCF-38-19-304 30 38 1940TU40QCF-63-41-304 55 63 4163TU63QCF-105-70-316LNS 87 105 70
100TU100QCF-135-104-304 134 135 104
DN RALAOrder code
CF Straight connectors, stainless steel, 1 flange rotatable
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.Option: with tapped holes, with fixed flanges,stainless steel 316L
16SC16R-316 34 7640SC40R-304 70 12663SC63R-304 114 210
100SC100R-304 152 270160SC160R-304 203 334200SC200R-304 254 334
DN LAOrder code
Quick CF Connection, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16SC16QCF-304 30 7640SC40QCF-304 55 12663SC63QCF-316LNS 87 210100SC100QCF-304 134 270
DN LAOrder code
3
3-69www.vacom-vacuum.com
CF Components
CF Components
CF Tubulated reducing adapters, small flange rotatable, stainless steel 304
Option: with tapped holes, with fixed flanges,stainless steel 316LOption: clean room products (= CRP) made ofstainless steel 316L on request.Other lengths on request.
40TA040016R-304 16 70 34 7063TA063016R-304 16 114 34 7063TA063040R-304 35 114 70 70100TA100040R-304 35 152 70 70100TA100063R-304 63 152 114 70160TA160063R-304 63 203 114 127160TA160100R-304 100 203 152 127
DN LA2ADN2Order code
CF to Quick CF Adapters, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16QCFA16-304 30 34 5040QCFA40-304 55 70 6063QCFA63-304 87 114 90100QCFA100-304 134 152 100
DN LA2AOrder code
CF to KF Adapters, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.Option: stainless steel 304, other variations
16KA016016-316 16 34 30 3640KA040016-316 16 70 30 3640KA040025-316 25 70 40 3640KA040040-316 40 70 55 5063KA063025-316 25 114 40 5063KA063040-316 40 114 55 50
DN LA2ADN2Order code
3
3-70 www.vacom-vacuum.com
CF Components
CF Components
CF to ISO-K Adapters, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Option: stainless steel 304, other variations
63SA063063-304 63 114 95100SA100063-304 63 152 95100SA100100-304 100 152 130160SA160100-304 100 203 130160SA160160-304 160 203 180
DN A2ADN2Order code
CF to VCR Compatible adapters, stainless steel
female male
Technical dataFlange stainless steel 304 (DN16 of 316L)Adapter stainless steel 316L
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
F16VCR6M-316F16VCR6F-316 16 34 4.6 36 1/4"F16VCR13M-316F16VCR13F-316 16 34 10.1 41 1/2"F40VCR6M-304F40VCR6F-304 40 70 4.6 41 1/4"F40VCR9M-304F40VCR9F-304 35 70 7.1 46 3/8"F40VCR13M-304F40VCR13F-304 40 70 10.1 46 1/2"F40VCR19M-304F40VCR19F-304 40 70 15.7 53 3/4"F40VCR25M-304F40VCR25F-304 40 70 22 58 1"
RZLDADNOrder codeFemale Male
VCR Compatible gaskets, stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
without retainerVCR-1/4-SEAL-316UHP 1/4"without retainerVCR-1/2-SEAL-316UHP 1/2"
with retainerVCR-1/4-SEAL-RT-316UHP 1/4"with retainerVCR-1/2-SEAL-RT-316UHP 1/2"
Design RZOrder code
Flat gaskets with or without retainer for sealing VCR compatible connections
3
3-71www.vacom-vacuum.com
CF Components
CF Components
CF to Swagelok compatibe adapters, metric, stainless steel
Technical dataFlange stainless steel 304
(DN16 of 316L)Adapter stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16F16SWA6M-316 34 4.8 38 616F16SWA8M-316 34 7.9 44 816F16SWA10M-316 34 7.9 44 1040F40SWA6M-304 70 4.8 43 640F40SWA8M-304 70 6.4 47 840F40SWA10M-304 70 7.9 49 10
DN RMLDAOrder code
CF to Swagelok compatibe adapters, imperial, stainless steel
Technical dataFlange stainless steel 304
(DN16 316L)Adapter stainless steel 316L
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16F16SWA7-316 34 4.8 38 1/4"40F40SWA7-304 70 4.8 43 1/4"40F40SWA9-304 70 7.1 48 3/8"40F40SWA13-304 70 10.4 52 1/2"
DN RZLDAOrder code
CF Elbows 90°, 2 flanges rotatable, stainless steel
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Components with fixed flanges on request.
EL16R-316LNSEL16R-316 16 34 38EL40R-316LNSEL40R-304 40 70 63EL63R-316LNSEL63R-304 63 114 105EL100R-316LNSEL100R-304 100 152 135EL160R-316LNSEL160R-304 160 203 167EL200R-316LNSEL200R-304 200 254 203
SLADNOrder codeSt. steel St. steel 316LN-ESR
3
3-72 www.vacom-vacuum.com
CF Components
CF Components
Quick CF Elbows 90°, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16EL16QCF-304 30 3840EL40QCF-304 55 6363EL63QCF-316LNS 87 105100EL100QCF-304 134 135
DN SLAOrder code
CF Tees, 2 flanges rotatable, stainless steel
Option: fixed flange, stainless steel 316LOption: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
TE16RS-316LNSTE16RS-316 16 34 76 38TE40RS-316LNSTE40RS-304 40 70 126 63TE63RS-316LNSTE63RS-304 63 114 210 105TE100RS-316LNSTE100RS-304 100 152 270 135TE160RS-316LNSTE160RS-304 160 203 334 167TE200RS-316LNSTE200RS-304 200 254 406 203-TE250RS-304 250 305 450 225
SLLADNOrder codeStainless steel 304 Stainless steel 316LN-ESR
Orientation of bolt holes according to ISO 9803-2
Quick CF Tees, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16TE16QCF-304 30 76 3840TE40QCF-304 55 126 6363TE63QCF-316LNS 87 210 105
100TE100QCF-304 134 270 135
DN SLLAOrder code
3
3-73www.vacom-vacuum.com
CF Components
CF Components
CF Unequal tees, 2 flanges rotatable, stainless steel 304
40UTE040016RS-304 16 70 34 126 6063UTE063040RS-304 40 114 70 210 77100UTE100040RS-304 40 152 70 270 95100UTE100063RS-304 63 152 114 270 95160UTE160063RS-304 63 203 114 334 120160UTE160100RS-304 100 203 152 334 120
DN SLLA2ADN2Order code
Option: fixed flange, stainless steel 316LOption: clean room products (= CRP), stainless steel 316L on request.
Orientation of bolt holes according to ISO 9803-2
CF 4-way reducing crosses, 2 flanges rotatable, stainless steel 304
40UX040016RS-304 16 70 34 126 12063UX063040RS-304 40 114 70 210 154
100UX100063RS-304 63 152 114 270 190160UX160063RS-304 63 203 114 334 240200UX200100RS-304 100 254 152 406 290
DN L2LA2ADN2Order code
Option: fixed flange, stainless steel 316LOption: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
Orientation of bolt holes according to ISO 9803-2
3
3-74 www.vacom-vacuum.com
CF Components
CF Components
CF 4-way crosses, 2 flanges rotatable, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Option: fixed flange, stainless steel 316L
X16RS-316LNSX16RS-316 16 34 76X40RS-316LNSX40RS-304 40 70 126X63RS-316LNSX63RS-304 63 114 210X100RS-316LNSX100RS-304 100 152 270X160RS-316LNSX160RS-304 160 203 334X200RS-316LNSX200RS-304 200 254 406-X250RS-304 250 305 450
LADNOrder codeStainless steel 304 Stainlees steel 316LN-ESR
Orientation of bolt holes according to ISO 9803-2
Quick CF 4-way crosses, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16X16QCF-304 30 76 3840X40QCF-304 55 126 6363X63QCF-316LNS 87 210 105100X100QCF-304 134 270 135
DN SLLAOrder code
3
3-75www.vacom-vacuum.com
CF Components
CF Components
CF Cluster flanges, stainless steel 304
100CF3P-304 40 3 152 70 135 208 11.9°160CF4P-304 40 4 203 70 167 250 13°
DN RSLA2ANumber ofports
DN2Order code
Option: stainless steel 316LOption: clean room products (= CRP) made of stainless steel 316L/316LNS on request.Other constructions on request.
CF 6-way crosses, 3 flanges rotatable, stainless steel
Option: fixed flange, stainless steel 316LOption: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
-XX16RS-316 16 34 76XX40RS-316LNSXX40RS-304 40 70 126XX63RS-316LNSXX63RS-304 63 114 210XX100RS-316LNSXX100RS-304 100 152 270XX160RS-316LNSXX160RS-304 160 203 334XX200RS-316LNSXX200RS-304 200 254 406-XX250RS-304 250 305 450
LADNOrder codeStainless steel 304 Stainless steel 316LN-ESR
Orientation of bolt holes according to ISO 9803-2
3
3-76 www.vacom-vacuum.com
CF Components
CF Components
Quick CF 6-way crosses, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16XX16QCF-304 30 76 3840XX40QCF-304 55 126 6363XX63QCF-316LNS 87 210 105
100XX100QCF-304 134 270 135
DN SLLAOrder code
CF Cubes, stainless steel
Technical dataRectangularity 0.1 mmParallelism 0.1 mm
Option: stainless steel 316LOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other designs on request.
CUBE16-316LNSCUBE16-304 16 15.8 35CUBE40-316LNSCUBE40-304 40 38 70CUBE63-316LNSCUBE63-304 63 64 114CUBE100-316LNSCUBE100-304 100 102 152CUBE160-316LNSCUBE160-304 160 152 203CUBE200-316LNSCUBE200-304 200 200 254
LDDNOrder codeSt. steel 304 St. steel 316LN-ESR
3
3-77www.vacom-vacuum.com
CF Components
CF Flexible Hoses
CF Flexible hoses, 1 flange rotatable, stainless steel 304
Technical dataFlange stainless steel 304Hose stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.Option: fixed flange, stainless steel 316L
16FX16CF25R-304 34 250 5816FX16CF50R-304 34 500 5816FX16CF75R-304 34 750 5816FX16CF100R-304 34 1000 5840FX40CF25R-304 70 250 13040FX40CF50R-304 70 500 13040FX40CF75R-304 70 750 13040FX40CF100R-304 70 1000 13063FX63CF25R-304 114 250 20063FX63CF50R-304 114 500 20063FX63CF75R-304 114 750 20063FX63CF100R-304 114 1000 200100FX100CF25R-304 152 250 400100FX100CF50R-304 152 500 400100FX100CF75R-304 152 750 400100FX100CF100R-304 152 1000 400
DN Bendingradius
LAOrder code
CF Hydroformed bellows, 1 flange rotatable, stainless steel 304
Technical dataFlange stainless steel 304Bellow stainless steel 316TiTolerance L ±5 mm
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16FXB16R-304 34 110 7440FXB40R-304 70 175 15063FXB63R-304 114 240 230100FXB100R-304 152 250 230160FXB160R-304 203 270 240
DN LminLAOrder code
3
3-78 www.vacom-vacuum.com
CF Components
CF Quick Access Doors
CF Quick access doors with and without exchangeable viewport, stainless steel/aluminium
with viewportDN63CF - DN200CF
without viewportDN40CF - DN300CF
with viewportDN250CF, DN300CF
Technical dataMounting with allen head screwsMax. bakeout temperature 120 °CFlange stainless steel 304Door frame aluminium, anodizedDoor sealing FKMViewport Borofloat®Leak rate < 1.0E-9 mbar l/s
Suitable screws see page 3-80.Please find technical data on viewports in chapter 7 Vacuum Optics.
QAD40BK-AL-304- 40 80 103 38 - 34QAD63BK-AL-304QAD63VP-AL-304 63 124 149 63 57 30QAD100BK-AL-304QAD100VP-AL-304 100 165 194 100 95 33QAD160VP-AL-304QAD160VP-AL-304 160 241 216 150 146 35QAD200BK-AL-304QAD200VP-AL-304 200 297 274 200 195 43QAD250BK-AL-304QAD250VP-AL-304 250 360 305 250 150 53QAD300BK-AL-304QAD300VP-AL-304 300 410 368 305 150 53
LD4D3D2DDNOrder codewith viewport without viewport
The quick connection system enables a fast access to ports and chambers
3
3-79www.vacom-vacuum.com
CF Components
CF Quick Access Doors
Allen head bolt sets for CF quick access doors, stainless steel
Technical dataAllen head bolts ISO 4762, A2Nut ISO 4032, A2Washer ISO 7089, A2
Order code DN Number of bore holes
Screw size
FK-QAD40 40 6 M6 x 30 mmFK-QAD63 63 8 M8 x 40 mmFK-QAD100 100 16 M8 x 40 mmFK-QAD160 160 20 M8 x 45 mmFK-QAD200 200 24 M8 x 45 mmFK-QAD250 250 32 M8 x 45 mmFK-QAD300 300 32 M10 x 60 mm
Mounting on CF flange
Allen head bolt sets for CF quick access doors, stainless steel, silver plated
Technical dataAllen head bolts ISO 4762, A2
Order code DN Number of bore holes
Screw size
FK-QAD40-SG-A 40 6 M6 x 12 mmFK-QAD63-SG-A 63 8 M8 x 16 mmFK-QAD100-SG-A 100 16 M8 x 20 mmFK-QAD160-SG-A 160 20 M8 x 20 mmFK-QAD200-SG-A 200 24 M8 x 30 mmFK-QAD250-SG-A 250 32 M8 x 30 mmFK-QAD300-SG-A 300 32 M10 x 30 mm
Mounting on chamber wall with tapped holes
3
3-80 www.vacom-vacuum.com
CF Components
CF Liquid Feedthroughs
CF 1-way liquid feedthroughs, stainless steel
for liquid for liquid nitrogen
SW (Swagelok compatible adapter)Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
LNF16PP-316LF16PP-316 16 34 60 55 tube 6 mm tube 6 mmLNF16PS-316LF16PS-316 16 34 75 55 tube 6 mm SW 6 mmLNF40PP-304LF40PP-304 40 70 65 55 tube 6 mm tube 6 mmLNF40PS-304LF40PS-304 40 70 80 55 tube 6 mm SW 6 mmLNF40PPL-304LF40PPL-304 40 70 75 65 tube 12 mm tube 12 mmLNF40PSL-304LF40PSL-304 40 70 95 65 tube 12 mm SW 12 mm
Atmosphereside
Vacuumside
L2L1ADNOrder codeLiquid Liquid nitrogen
CF 2-way liquid feedthroughs, stainless steel 304
for liquid for liquid nitrogen
SW (Swagelok compatible adapter)Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
LNF402PP-304LF402PP-304 65 85 95 55 tube 6 mm tube 6 mmLNF402PS-304LF402PS-304 80 85 110 55 tube 6 mm SW 6 mmLNF402SP-304LF402SP-304 65 100 95 70 SW 6 mm tube 6 mmLNF402SS-304LF402SS-304 80 100 110 70 SW 6 mm SW 6 mm
Atmosphereside
Vacuumside
L4L3L2L1Order codeLiquid Liquid nitrogen
3
3-81www.vacom-vacuum.com
CF Components
CF Glass-to-Metal Connections
CF Glass-to-metal connections, Pyrex®
Technical dataFlange stainless steel 304Tolerance RA ±1 mm, L ±3 mmBakeout temperature max. 200 °CBakeout rate 2 ... 3 K/minGasket OFHC copper,
vacuum annealed
16T13P 34 13 10440T25P 70 25 10440T38P 70 38 10463T64P 114 64 190
DN LDAOrder code
CF Glass-to-metal connections, quartz
Technical dataFlange stainless steel 304Tolerance RA ±1 mm, L ±3 mmBakeout temperature max. 200 °CBakeout rate 2 ... 3 K/minGasket OFHC copper,
vacuum annealedDesign metal-quartz transition
with intermediate glass
16T13Q 34 13 14340T25Q 70 25 16540T38Q 70 38 165
DN LDAOrder code
3
3-82 www.vacom-vacuum.com
CF Components
CF Viewports
CF Viewports with permanent joint, borosilicate glass, Kovar® sleeve
16VPCF16B-L 34 16 12.7 1.540VPCF40B-L 70 38 12.7 363VPCF63B-L 114 63 17.4 3.5100VPCF100B-L 152 90 19.9 6160VPCF160B-L 203 136 22.3 8
DN L2LDAOrder code
Technical dataHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Corning 7056)Flange material stainless steel 304LTransmission range ca. 0.4 m to 2 mMax. heating andcooling rate
3 K/min
Magn. permeability (r) >> 1.07Frame material Kovar®Max. temperature 350 °C
Quick CF Viewports with permanent joint, borosilicate glass
40VPQCF40B-L 55 25 12 2,563VPQCF63B-L 87 49 17 2,5100VPQCF100B-L 134 65 14 3.5
DN L2LDAOrder code
Technical dataHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Corning 7056)Flange material stainless steel 304
Kovar®Transmission range 400 … 2,500 nmMax. bakeout temperature 350 °CMax. heating andcooling rate
3 K/min
VaCFix® Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench.Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughsand viewports).
3
3-83www.vacom-vacuum.com
CF Components
CF Viewports
CF Viewports with permanent joint, borosilicate glass, tantalum sleeve
16VPCF16B-K-NM 34 16 12.7 1.540VPCF40B-K-NM 70 32 12.7 363VPCF63B-K-NM 114 63 17.4 3.5
100VPCF100B-K-NM 152 90 19.9 6160VPCF160B-K-NM 203 136 22.3 8
DN L2LDAOrder code
Technical dataHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Corning 7056)Flange material stainless steel 316LNTransmission range ca. 0.4 m to 2 mMax. heating andcooling rate
3 K/min
Magn. permeability (r) < 1.005Frame material tantalumMax. temperature 120 °C
CF Gaskets
D2
8.5163963101152203254
CF copper gaskets,silver plated
CF copper gaskets,silver plated,
vacuum annealed-
CUA16SPCUA40SPCUA63SPCUA100SP
CF coppergaskets
CF copper gaskets,vacuum annealed
CU10* - -CU16* CUA16 CU16SPCU40* CUA40 CU40SPCU63* CUA63 CU63SPCU100* CUA100 CU100SP
DN
10164063100
CF Copper gaskets, OFHC
D
CUA160SPCU160 CUA160 CU160SP 160CUA200SPCU200 CUA200 CU200SP 200CUA250SPCU250 CUA250 CU250SP 250
Material
Bakeout temperature
Vickers hardness
Suitable flangesPacking unit
OFHC copper
450 °C
13.4214882
120171222
272.7
ca. 70 HV10(vacuum annealed coppergaskets ca. 40 HV10)
Technical data
CF flangeQCF flange5 pieces* 10 pieces
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
3
3-84 www.vacom-vacuum.com
CF Components
CF Gaskets
CF Blank copper gaskets, OFHC
Technical dataMaterial OFHC copperVickers hardness ca. 70 HV10Bakeout temperature 450 °CSuitable flanges CF flanges
Quick CF flanges
Option: clean room products (= CRP) on request.
16CUB16-1 2140CUB40-1 4863CUB63-1 82100CUB100-1 120
DN DOrder code
CF Aluminium gaskets, EN AW-1050
Technical dataMaterial EN AW 1050Suitable flanges CF flanges
Quick CF flanges
40AL40-AD48.2-ID39 48 3963AL63-AD82.4-ID63 82 63
100AL100-AD120.5-ID101 120 101160AL160-AD171.3-ID152 171 152
DN D2DOrder code
CF Gaskets, FKM
Technical dataTemperature range -10 °C to 150 °CSuitable flanges CF flanges
Quick CF flanges
Option: low outgassing and clean room products(= CRP) on request.
-VGF10 10 13.4 7 -VGL16VGF16 16 21 16 22VGL40VGF40 40 48 37 49VGL63VGF63 63 82 63 83VGL100VGF100 100 120 101 121VGL160VGF160 160 171 152 172VGL200VGF200 200 222 202 223VGL250VGF250 250 272.7 254 274
D3D2DDNOrder codeFlat profile L profile
For multiple use
3
3-85www.vacom-vacuum.com
CF Components
CF Connecting ElementsWeprovide
CF Flange kits, hex-head
Order code DN Flangethickness
Number of bore holes
Screw size
FK-CF16 16 7.6 6 M4 x 20FK-CF40 40 13 6 M6 x 35FK-CF63 63 17.5 8 M8 x 45FK-CF100 100 20 16 M8 x 50FK-CF160 160 22 20 M8 x 55FK-CF200 200 25 24 M8 x 60
For the connection of two CF flanges with through bore-hole
CF Flange kits, hex-head, silver plated
Order code DN Flangethickness
Number of bore holes
Screw size
FK-CF40-A 40 13 6 M6 x 35FK-CF63-A 63 17.5 8 M8 x 45FK-CF100-A 100 20 16 M8 x 50FK-CF160-A 160 22 20 M8 x 55FK-CF200-A 200 25 24 M8 x 60
For the connection of two CF flanges with through bore-hole
3
3-86 www.vacom-vacuum.com
CF Components
CF Connecting Elements
CF Flange kits, hex-head, with plate nuts, stainless steel
Order code DN Flangethickness
Number of bore holes
Screw size
FK-CF16-PN 16 7.6 6 M4 x 20FK-CF40-PN 40 13 6 M6 x 35FK-CF63-PN 63 17.5 8 M8 x 45FK-CF100-PN 100 20 16 M8 x 50FK-CF160-PN 160 22 20 M8 x 55FK-CF200-PN 200 25 24 M8 x 60
For the connection of two CF flanges with through bore-hole
CF Flange kits, hex-head, for tapped flanges, silver plated
Order code DN Flangethickness
Number of bore holes
Screw size
FK-CF16-G-A 16 7.6 6 M4 x 16FK-CF40-G-A 40 13 6 M6 x 25FK-CF63-G-A 63 17.5 8 M8 x 40FK-CF100-G-A 100 20 16 M8 x 45FK-CF160-G-A 160 22 20 M8 x 50FK-CF200-G-A 200 25 24 M8 x 55
For the connection of a CF-flange with through bore holes and a CF flange with tapped holes
CF Flange kits, hex-head, for tapped flanges, silver plated
Order code DN Flangethickness
Number of bore holes
Screw size
FK-CF16-SG-A 16 7.6 6 M4 x 12FK-CF40-SG-A 40 13 6 M6 x 20FK-CF63-SG-A 63 17.5 8 M8 x 30FK-CF100-SG-A 100 20 16 M8 x 30FK-CF160-SG-A 160 22 20 M8 x 35FK-CF200-SG-A 200 25 24 M8 x 35
Flange kits with other connecting elements or of other materials on request. In addition, we provide a range of screws, nutsand washers with and without vent holes for HV and UHV systems.
For the connection of a CF-flange with through bore holes and a CF flange with tapped holes
3
3-87www.vacom-vacuum.com
CF Components
CF Connecting Elements
CF Plate nuts, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Packing unit 25 pieces.
16PN16-304 20 13 7 M4 radius40PN40-304 41 29 11 M6 radius63PN63-304 51 35 12 M8 radius100PN100-304 44 25 12 M8 straight160PN160-304 44 28 12 M8 straight200PN200-304 45 30 13 M8 straight250PN250-304 41 28 13 M8 straight
DN DesignGML3L2LOrder code
Plate nuts allow quick and space-saving mounting of CF flanges
CF Horse shoe plate nuts, stainless steel 304
Option: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Scope of delivery with screws and washers.
16PN16HS-304 34 21 640PN40HS-304 70 46 863PN63HS-304 113 72 12100PN100HS-304 152 110 12160PN160HS-304 203 162 12
DN LD2DOrder code
CF Thread lubricant
MoS2TL100Material #FehlerOrder code
For easier loosening of screws after bake out.
3
3-88 www.vacom-vacuum.com
CF Components
CF Connecting Elements
Quick CF Clamp chains VaCFix®, stainless steel
16XS16 21 53 47 24 3 13 5 22040XS40 46 82 67 24 4 15 9 43063XS63 73 121 89 28 5 19 32 980
100XS100V 117 176 117 41 6 24 38 2540
DN Weight[g]
Tightening torque[Nm]
SWNumber oflinks
LRD2DOrder code
Option: clean room products (= CRP) on request.Clean room compatible clamp chains require a higher tightening torque.
XS16 - XS63 XS100V
Technical dataMaterial stainless steel,
non-magneticSuitable flanges QCF flanges
KF flangesconical ISO flanges
Suitable gakets copper gasketsaluminium gasketsFKM gaskets
Mounting with torque wrenchAccessories spare parts
(eye screw, nut)
Quick CF Clamp chains for a quick and space-saving mounting of a UHV flange connections.
3
3-89www.vacom-vacuum.com
www.vacom-vacuum.com
3
QCF Components
Quick CF (QCF) components and the appropriate clamp chains VaCFix® allow a quick assembly in UHV. They combine the sealing principle of ConFlat® flanges (knife-edge according to ISO / TS 3669-2) with the simple mounting principle of clamp chains.
QCF components can be assembled quick, easy and also space saving. They can be connected to all existing vacuum systems by adapters. The CF-QCF adapters offer the possibility to use the QCF connection on existing UHV vacuum systems and remain at all times flexible and supplier independent. Usually used copper gaskets can be used for all nominal diameters.
The demands of the UHV technology regarding a leak rate of <1.0E-11 mbar l/s and a bake-out temperature of the flange connection up to 350 °C are fulfilled.
VaCFix® Clamp chains are also applicable for the connection of KF and conical ISO flanges.
Sealing principle QCF flange with VaCFix® clamp chain
Exploded drawing of assembly parts VaCFix® Clamp chain XS100V
Introduction
The Quick CF Connection for HV to UHV / XHV
Up to 90 % less assembly time are a huge advantage for flange connections which have to be opened often.
Ideal UHV-suitable quick connection principle for the use in radioactive environment – the use of QCF connections reduce the risk of exposure of the assembly staff.
Components with QCF flange can be mounted like rotatable flanges in any angular position.
VaCFix® Clamp chains can be mounted easy and fast even with limited space conditions.
QCF Components were successfully tested by independent institutes for operating temperatures from -270 °C to 350 °C.
VaCFix® Clamp chains are also perfectly suited for the mounting of stress-sensitive flange components such as viewports and feedthroughs because the clamp chains ensure a very uniform contact pressure when using a torque wrench.
Copper gaskets can be used up to three times in case of defined torque increase.
Functional principle QCF
3-90
www.vacom-vacuum.com
3
3-91
QCF Components
Comparison of the QCF Connection with the Mounting of Conventional CF Flanges
Orientation of boreholes – rotatable/fixed flanges
QCF flanges have no screw holes. Thus, the orientation of the bolt circle is not applicable during welding. Rotatable flanges are not necessary.
Sealing principle / sealing material
Same sealing principle (ISO 3669-2) and same standard copper gasket as conventional CF connection.
Independence offlange systems
By using QCF-CF adapters the most suitable connection system for the specific requirements can be used combined.
Non-magneticflange connection
VaCFix® Clamp chains are non-magnetic, in connection with QCF flanges made of stainless steel 1.4429 a UHV flange connection with a magnetic permeability < 1.005 can be created.
Materials
Dimensions QCF Flanges
Nominal diameter ODThickness
OD Cu gasketBlank flange Bored flange
DN16 30 6.5 9 21
DN40 55 6.5 9 48
DN63 87 7.5 11 82
DN100 134 14.0 19 120
CF
Nominal diameter QCF CFDN16 24 35
DN40 24 61
DN63 28 80
DN100 41 90
Required space / freedom of mounting
Assembly time < 75 % less assembly time Convince yourself: www.vacom-vacuum.com
Ca. 50 % less space required - easy assembly even when space is limited
New in our product portfolio are UHV valves, measurement, feedthroughs, edge welded bellows and viewports with QCF connections, for which you can find detailled inforamtion in the respective catalogue chapters. The extension of the QCF product range enables you to include QCF connections already in the planning where the new QCF technology shall be used.
CFQCF
Nominal diameter QCF CFDN16 30 seconds 3 minutes
DN40 30 seconds 3 minutes
DN63 40 seconds 4 minutes
DN100 80 seconds 6 minutes
Flanges Components / tubes Gaskets VaCFix® Clamp chainsStainless steel 1.4301Stainless steel 1.4404 (on request)Stainless steel 1.4429-ESU (on request)
Stainless steel 1.4301Stainless steel 1.4404Stainless steel 1.4435Stainless steel 1.4571
FKMOFHC copperOFHC copper silver platedOFHC copper annealedAluminium
non-magnetic stainless steel
Quick CF Components
Quick CF Flanges
Quick CF Blank flanges, conical, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
LADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
QCF16-316QCF16-304 16 30 6.5QCF16-316LNSQCF40-316QCF40-304 40 55 6.5QCF40-316LNSQCF63-316QCF63-304 63 87 7.5QCF63-316LNSQCF100-316QCF100-304 100 134 14QCF100-316LNS
Quick CF Bored flanges, conical, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
L2LRADADNOrder codeStainless steel 304 Stainless steel 316L Stainless steel 316LN-ESR
QCF16B19-316QCF16B19-304 16 30 16 19 9 8QCF16B19-316LNSQCF40B38-316QCF40B38-304 40 55 35 38 9 8QCF40B38-316LNSQCF40B41-316QCF40B41-304 40 55 38 41 9 8QCF40B41-316LNS-- 63 87 61 63 11 10QCF63B63-316LNS-- 63 87 63 70 11 10QCF63B70-316LNSQCF100B101-316QCF100B101-304 100 134 98 101 19 17QCF100B101-316LNSQCF100B104-316QCF100B104-304 100 134 100 104 19 17QCF100B104-316LNS
3
3-92 www.vacom.de
Quick CF Components
Quick CF Flanges
Quick CF to CF Adapters, stainless steel
Option: clean room products (= CRP) made of stainless steel 316L/316LNS on request.
ZL040016QCF-316LNSZL040016QCF-304 40 16 55 16 12 M4ZL063040QCF-316LNSZL063040QCF-304 63 40 87 38 16 M6ZL100016QCF-316LNSZL100016QCF-304 100 16 134 16 14 M4ZL100040QCF-316LNSZL100040QCF-304 100 40 134 38 14 M6ZL100063QCF-316LNSZL100063QCF-304 100 63 134 66 19 M8
MLDADN2DNOrder codeStainlees steel 304 Stainlees steel 316LN-ESR
QCF to CF reducing flange
Quick CF Flange caps, plastics
Packing unit 10 pieces.
16QCF16CAP40QCF40CAP63QCF63CAP
100QCF100CAP
DN #FehlerOrder code
Quick CF Fittings
Quick CF Tubulation (half nipples), stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16TU16QCF-38-19-304 30 38 1940TU40QCF-63-41-304 55 63 4163TU63QCF-105-70-304 87 105 70
100TU100QCF-135-104-304 134 135 104
DN RALAOrder code
3
3-93www.vacom.-vacuum.com
Quick CF Components
Quick CF Fittings
Quick CF Straight connectors (full nipples), stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16SC16QCF-304 30 7640SC40QCF-304 55 12663SC63QCF-304 87 210100SC100QCF-304 134 270
DN LAOrder code
Quick CF to CF Adapters, stainless steel 304
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.Other lengths on request.
16QCFA16-304 30 34 5040QCFA40-304 55 70 6063QCFA63-304 87 114 90100QCFA100-304 134 152 100
DN LA2AOrder code
Quick CF Elbows 90°, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16EL16QCF-304 30 3840EL40QCF-304 55 6363EL63QCF-304 87 105100EL100QCF-304 134 135
DN SLAOrder code
Quick CF Tees, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16TE16QCF-304 30 76 3840TE40QCF-304 55 126 6363TE63QDF-304 87 210 105
100TE100QCF-304 134 270 135
DN SLLAOrder code
3
3-94 www.vacom.de
Quick CF Components
Quick CF Fittings
Quick CF 4-way crosses, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16X16QCF-304 30 76 3840X40QCF-304 55 126 6363X63QCF-304 87 210 105100X100QCF-304 134 270 135
DN SLLAOrder code
Quick CF 6-way crosses, stainless steel
Option: stainless steel 316L, 316LNSOption: clean room products (= CRP) made ofstainless steel 316L/316LNS on request.
16XX16QCF-304 30 76 3840XX40QCF-304 55 126 6363XX63QCF-304 87 210 105
100XX100QCF-304 134 270 135
DN SLLAOrder code
Quick CF Viewports
QCF Viewports with permanent joint, borosilicate glass
40VPQCF40B-L 55 25 12 2.563VPQCF63B-L 87 49 17 2.5100VPQCF100B-L 134 65 14 3.5
DN L2LDAOrder code
Technical dataHe leak rate < 1.0E-10 mbar l/sWindow material borosilicate glass
(Corning 7056)Flange material stainless steel 304Frame material Kovar®Transmission range ca. 400...2500 nmMax. bakeout temperature 350 °CMax. heating andcooling rate
3 K/min
VaCFix® Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench.Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughsand viewports).
3
3-95www.vacom-vacuum.com
Quick CF Components
Optical Fiber Feedthroughs on Quick CF Flanges
Optical fiber feedthroughs on QCF flanges
DN16QCFQCF16-SM1310-FCAPC-1 1DN40QCFQCF40-SM1310-FCAPC-1 1DN63QCFQCF63-SM1310-FCAPC-2 2DN100QCFQCF100-SM1310-FCAPC-3 3
Flange Number of couplingsOrder code
Other combinations of optical fiber feedthroughs on Quick CF flanges on request.
Please find technical data on optical fiber feedthroughs in chapter 7 Vacuum Optics.
SUB-D Feedthroughs on Quick CF Flanges
SUB-D feedthroughs on QCF flanges
DN40QCFQCF40-SUBD-9-DE-CE-SSG 9DN63QCFQCF63-SUBD-15-DE-CE-SSG 15DN63QCFQCF63-SUBD-25-DE-CE-SSG 25
DN100QCFQCF100-SUBD-50-DE-CE-SSG 50
Flange Number of contactsOrder code
Further feedthroughs on Quick CF flanges on request.
VaCFix® Clamp chains ensure a very uniform contact pressure on the Quick CF flanges when using a torque wrench.Thus, the Quick CF connection is perfectly suited for the mounting of stress-sensitive flange components (feedthroughsand viewports).Please find technical data on electrical feedthroughs in chapter 4 Electrical Feedthroughs.
3
3-96 www.vacom.de
Quick CF Components
Edge Welded Bellows with Quick CF Flanges
Edge welded bellows with QCF flanges
Larger strokes for edge welded bellows withQuick CF flanges on request.
DN16QCFEWB16QCF-10 10DN40QCFEWB40QCF-10 10DN63QCFEWB63QCF-10 10
DN100QCFEWB100QCF-10 10
Flange StrokeOrder code
By using Quick CF flanges and VaCFix® clamp chains for mounting, the connecting pieces of the edge welded bellows canbe designed very short.Please find technical data on edge welded bellows in chapter 9 Edge Welded Bellows.
UHV Angle Valves with Quick CF Flanges
UHV angle valve with QCF flanges
DN16QCF7AVM-16QCF-MV-S 105 38DN40QCF7AVM-40QCF-MV-S 160 63DN16QCF7AVP-16QCF-MV-S 105 38DN40QCF7AVP-40QCF-MV-S 154 63
Connection SLHOrder code
Manually operated angle valve with Quick CF flanges for UHV applicationPlease find technical data on valves in chapter 12 Vacuum Valves.
3
3-97www.vacom-vacuum.com
Quick CF Components
Total Pressure Measurement with Quick CF Flanges
ATMION® Compact wide range gauge (Bayard-Alpert / Pirani)
ATMION® CompactATC40QLE DN40QCFATMION® Compact (ProfiBus DP)ATC40QPLE DN40QCF
Description Vacuum connectionOrder code
Active vacuum meter with hot cathode ionisation gauge and Pirani, atmosphere to UHV, optional external display, setpoint,serial interface, optional ProfiBus DP interfacePlease find technical data and other designs in chapter 5 Total Pressure Measurement.
BARION® XHV Bayard-Alpert gauge with X-ray compensation
BARION® XHVBATXQ-40Q DN40QCFDescription Vacuum connectionOrder code
Passive hot cathode ionization gauge, fine vacuum to XHV, replaceable filamentsPlease find technical data and other designs in chapter 5 Total Pressure Measurement.
3
3-98 www.vacom.de
Quick CF Components
Quick CF Gaskets
D2
8.5163963101152203254
CF copper gaskets,silver plated
CF copper gaskets,silver plated,
vacuum annealed-
CUA16SPCUA40SPCUA63SPCUA100SP
CF coppergaskets
CF copper gaskets,vacuum annealed
CU10* - -CU16* CUA16 CU16SPCU40* CUA40 CU40SPCU63* CUA63 CU63SPCU100* CUA100 CU100SP
DN
10164063100
Quick CF Copper gaskets, OFHC
D
CUA160SPCU160 CUA160 CU160SP 160CUA200SPCU200 CUA200 CU200SP 200CUA250SPCU250 CUA250 CU250SP 250
Material
Bakeout temperature
Vickers hardness
Suitable flangesPacking unit
OFHC copper
450 °C
13.4214882
120171222
272.7
ca. 70 HV10(vacuum annealed coppergaskets ca. 40 HV10)
Technical data
CF flangesQCF flanges5 pieces* 10 pieces
The below-mentioned gaskets (copper, aluminium and FKM flat gaskets) are identical with those for CF components.The use of standard copper gaskets according to ISO3669-2 for CF flanges is an important advantage for Quick-CFflange connections.
Option: clean room compatible products (= CRP) made of stainless steel 316L/316LNS on request.
Quick CF Blank copper gaskets, OFHC
Technical dataMaterial OFHC copperVickers hardness ca. 70 HV10Bakeout temperature 450 °CSuitable flanges CF flanges
Quick CF flanges
Option: clean room products (= CRP) on request.
16CUB16-1 2140CUB40-1 4863CUB63-1 82100CUB100-1 120
DN DOrder code
3
3-99www.vacom-vacuum.com
Quick CF Components
Quick CF Gaskets
Quick CF Aluminium gasket, EN AW-1050
Technical dataMaterial EN AW 1050Suitable flanges CF flanges
Quick CF flanges
40AL40-AD48.2-ID39 48 3963AL63-AD82.4-ID63 82 63
100AL100-AD120.5-ID101 120 101
DN D2DOrder code
Quick CF Flat gaskets, FKM
Technical dataTemperature range -10 °C to 150 °CSuitable flanges CF flanges
Quick CF flanges
Option: low outgassing and clean room products(= CRP) on request.
16VGF16 21 1640VGF40 48 3763VGF63 82 63
100VGF100 120 101
DN D2DOrder code
For multiple use
3
3-100 www.vacom.de
Quick CF Components
Quick CF Clamp Chains VaCFix®, Stainless Steel
QCF Clamp chains VaCFix®, stainless steel
16XS16 21 53 47 24 3 13 5 22040XS40 46 82 67 24 4 15 9 43063XS63 73 121 89 28 5 19 32 980
100XS100V 117 176 117 41 6 24 38 2540
DN Weight[g]
Tightening torque[Nm]
SWNumber oflinks
LRD2DOrder code
Option: clean room products (= CRP) on request.Clean room compatible clamp chains require a higher tightening torque.
XS16 - XS63 XS100V
Technical dataMaterial stainless steel,
non-magneticSuitable flanges QCF flanges
KF flangesconical ISO flanges
Suitable gaskets copper gasketsaluminium gasketsFKM gaskets
Mounting with torque wrenchAccessories spare parts
(eye screw, nut)
Quick CF Clamp chains for quick and space-saving mounting of UHV flange connections.
Heating jackets for Quick CF clamp chains VaCFix®
Heating jackets for QCF clamp chains VaCFix®
Fiberglass sleeve with perfect fit and heat transfer for QCF connectionsPlease find technical data in chapter 8 Heating Solutions.
Option: clean room products (= CRP) made of PTFE on request.
BAKE-GS-QCF16BAKE-PTFE-QCF16 XS16 50BAKE-GS-QCF40BAKE-PTFE-QCF40 XS40 90BAKE-GS-QCF63BAKE-PTFE-QCF63 XS63 130BAKE-GS-QCF100BAKE-PTFE-QCF100 XS100V 200
Power [W]Accessoriesfor
Order codeto 250 °C to 450 °C
3
3-101www.vacom-vacuum.com
