Semiconductor statistics Transportsoktyabr/NNSE508/NNSE508...Summary of carrier statistics in...
Transcript of Semiconductor statistics Transportsoktyabr/NNSE508/NNSE508...Summary of carrier statistics in...
NNSE 508 EM Lecture #11
1
Lecture contents
• Semiconductor statistics
• Transport
NNSE 508 EM Lecture #11
2 Statistics of carriers: General
Electron concentration in the energy range
E to E+dE close to the conduction band
minimum:
Total electron concentration in the
conduction band
1exp
2)(
21
32
23*
Tk
EE
dEEEmdEEn
B
F
Ce
cE
B
F
Ce
Tk
EE
dEEEmn
1exp
221
32
23*
Tk
EEx
B
C
Tk
EE
B
CFc
0
2123
32
23*
1exp
2
cB
e
x
dxxTk
m
0
2123
2
*
1exp
2
22
c
Be
x
dxxTkm
General equation for carrier concentration
(effective density of states) x (Fermi integral of ½ order): )(2/1 cCNn
)()()( EfENEn cElectron concentration at the energy E
(Density of states) x (distribution function):
NNSE 508 EM Lecture #11
3 Statistics of carriers: General
The same is true for holes in
the valence band:
Effective density of states of electrons (or holes)
0
2123
2
*
1exp
2
22
V
Bh
x
dxxTkmp
)(2/1 VVNp
)(2/1
Concentration of
mobile (band) carriers
Fermi level
position
One-to-one correspondence
NNSE 508 EM Lecture #11
4 Statistics of carriers: Non-degenerate system
If all the C.B. energies are far
from Fermi level:
EC – EF >> kBT (> 3 kBT) :
)(2/1 VVNp
21exp0
21
0
21)(
0
21ccc edxxeedxxe
x
dxx xx
c
1exp cx
0
21
1exp
2
cC
x
dxxNnGeneral equation:
Tk
EE
B
CFc
Tk
EENn
B
CFC exp
Tk
EENp
B
FVV exp
Tk
EEx
B
C
Concentration of band carriers
Non-generate system: General case:
)(2/1 cCNn
2exp iB
g
VC nTk
ENNnp
Definition of intrinsic carrier concentration
NNSE 508 EM Lecture #11
5
Carriers in intrinsic semiconductors
Fermi level position in
intrinsic semiconductor
NNSE 508 EM Lecture #11
6 Effective mass approximation
)()()(2 0
2
rErrVrVm
pii
One-electron Schrödinger equation with
weak and slow varying perturbation Vi
(Effective mass approximation):
Small perturbation of periodicity: shallow impurities,
most of “hand-made” structures,
external forces
And as usual build a solution as a wave
packet of Bloch wavefunctions : )()()(
,
ruekcr nkikr
kn
n
Bloch wave packet:
With dimensions in real
and k-space 0
1a
kr
)()()( 0 rurFr
iV
Large perturbation of periodicity other bands need to
be considered: deep impurities
Depending on sign of the perturbation, the top-
most or bottom-most state splits from the band :
NNSE 508 EM Lecture #11
7
Example of EMA: Hydrogen-like impurity (donor)
Solution for energy :
r
erVi
2
)(
Hydrogen-like impurity = shallow impurity
Schrödinger equation for Hydrogen atom with
effective mass and screened Coulomb potential:
)()()(*2
22
rFEErFr
e
m
pC
22222
4 11*1
2
*
nm
mRy
n
meEd
BB
a
r
a
rF exp1
)(213
Envelope function of the ground state :
*
0
20
2
m
m
emaB
For donors in GaAs (m*=0.07m: and = 12.6 ):
Effective Ry* :
Ry* =6.6 meV, aB = 91 A
From Yu and Cordona, 2003
NNSE 508 EM Lecture #11
8
Donors
Shallow donors: - usually group V elements in Si and Ge (P, As, Sb)
- group IV elements on group III sublattice in III-V’s (Si, Sn in GaAs)
- group VI elements on group V sublattice in III-V’s (S, Te, Se in GaAs)
NNSE 508 EM Lecture #11
9
Acceptors
+
B
Shallow acceptors: - usually group III elements in Si and Ge (B, Al, Ga, In)
- group II elements on group III sublattice in III-V’s (Be, Mg, Zn in GaAs)
- group IV elements on group V sublattice in III-V’s (C, Si, Ge in GaAs)
Group IV impurities in III-V’s are often amphoteric.
NNSE 508 EM Lecture #11
10 Adding impurities: Extrinsic semiconductors
Simple impurity with two charge
states, e.g. simple donor:
d0 d+ + e,
Total donor concentration:
Concentration of neutral (filled with
electron) and ionized donors:
d0 has a degeneracy factor g
Ratio of neutral to charged donors:
g=2 for simple donors and
g=4 for simple acceptors
Ionization ratio for donors
and acceptors:
1
1)(
Tk
EEFD
B
F
e
Ef)(0
dFDdd EfgNN
FDdd gfNN 1
Tk
EE
FD
FD
d
d B
dF
gegf
gf
N
N
1
0
0ddd NNN
Tk
EE
d
d
d
B
dF
egN
N
1
1
Tk
EE
a
a
a
B
Fa
egN
N
1
1
NNSE 508 EM Lecture #11
11
Extrinsic semiconductors: no compensation
da NpNnIn extrinsic semiconductors charge neutrality
condition includes ionized impurities ( instead of n
= p in intrinsic semiconductors):
When impurity of one type (say donors) are present:
Then general equation for Fermi level (needs to be
solved for degenerate semiconductors) :
And in non-degenerate case ( – ionization energy):
or
Fermi level position
(non-degenerate) using
What happens with Fermi level if semiconductors contains impurities?
npifNNpn dd ;
Tk
EEN
eg
N
B
cFc
Tk
EE
d
d
B
dF2/1
1
n
eN
ng
N
Tk
cd
d
B
d
1
114
2 1
1
n
Nnn d Tk
d
c B
d
eg
Nn1with
Tk
EENn
B
CFC exp 11
4
2ln
1
1
n
N
N
nTkEE d
cBCF
NNSE 508 EM Lecture #11
12
Extrinsic semiconductors: no compensation
At high temperatures (kBT > d ) , for
At low temperatures, for
Fermi level
and concentration
Carriers are “freezing out”
Fermi level position in n-Ge
(uncompensated)
Cd
dBdCF
Ng
NTkEE ln
22
dd Nnor
n
N,1
4
1
Tk
d
Cd B
d
eg
NNn
2
14
1n
Nd
dNn
NNSE 508 EM Lecture #11
13 Extrinsic semiconductors with compensation
(results for a non-degenerate case)
At high temperatures, for
What is the accuracy of assumption ?
For n-type material:
For p-type material:
At low temperatures, for
Fermi level
and concentration
Add
ABdF
NNg
NTkEE ln
AdA NNNn ,
Tk
d
C
A
Ad B
d
eg
N
N
NNn
ANn1
Ad NNn
14
2
1
1
nN
nNN
A
Ad and
np
NNSE 508 EM Lecture #11
14
Doped semiconductors: Temperature dependence
Carrier concentration vs. temperature
curve has 3 distinct regions (4 regions in
compensated semiconductor)
Typical dependence for Si
NNSE 508 EM Lecture #11
15
Strong degeneracy, i.e. Fermi level lies in the
conduction (or valence) band:
Carrier concentration:
Substituting Fermi function by
step function (good for )
Finally:
Which is similar to simple metal
Strong non-degeneracy: metals again
CF
B
FC EEorTk
EE1exp
)(2/1 cCNnTk
EE
B
CFc
Tk
EE
C
c
C
B
CF
dxxNx
dxxNn
0
21
0
21 2
1exp
2
TkEE BCF 3
23
3
4
Tk
EENn
B
CFC
NNSE 508 EM Lecture #11
16 Summary of carrier statistics in semiconductors
Importance of doping:
Intrinsic
n-type
p-type
Si Resistivity
Undoped 2 x 105 -cm
Doped w/ 1015
As atoms/cm35 -cm
1015 As atoms/cm3 in 5x1022 Si atoms/cm3
5 order of magnitude resistivity change
due to 1 in 50 million impurities !
• Electronic properties are extremely
sensitive to impurities, defects, fields,
stresses …
• Fermi level determines static carrier
concentrations
• General equations can be simplified in
non-degenerate and strongly degenerate
cases
link to Java applets http://jas.eng.buffalo.edu
NNSE 508 EM Lecture #11
17 Electron transport: General considerations
• Drude model again: Motion in real space = thermal motion + drift + scattering
• Motion in wavevector space: inside a band valley (unless intervalley scattering is involved)
• Current density is proportional to drift velocity of carriers
and gives Ohm’s law:
• For semiconductor containing both
electron and holes:
denvJ
dJ env en
*
e
m
m
en
m
een
e
m
*
2
he pne
–drift mobility
NNSE 508 EM Lecture #11
18
Scattering mechanisms
In low electric fields
• ionized impurities
• acoustic phonons
– Deformation potential
– Piezoelectric
In high electric fields
• optical phonons
• intervalley scattering
At high concentrations
• carrier-carrier scattering
To understand how these mechanisms affect mobility one needs to
consider dependence (E)
Mathiessen’s rule for relaxation time:
...
11111
niiiopacm
NNSE 508 EM Lecture #11
19 Conductivity effective mass
• For non-degenerate conduction band minimum ( -
point):
• Indirect conduction band minimum: effective mass
will depend on direction!
– For example: Si along [100] direction:
– Conductivity effective mass of Si [100] electrons::
• Valence band maximum: need to add up
contributions of light and heavy holes:
• Conductivity effective mass of holes
tlc mmm
21
3
11*
mme
*
2 2
2 2 26 6
m mn ex ey ez
l t
e en nJ J J J
m m
mhhh
lh
lhhhlhp e
m
p
m
pJJJ 2
2323
2121
*
11
hhlh
hhlh
hh
hh
lh
lh
v mm
mm
m
p
m
p
pm
Effective masses and low field mobilities at room temperature:
NNSE 508 EM Lecture #11
20 Temperature dependence of mobility
Mobility in n-Si
From Yu and Cordona, 2003,
and Shur, 2003
Mobility in p-Si
Mobility in n-GaAs Relaxation time m depends on energy!
LO phonon scattering
Intravalley acoustic phonon
scattering + (2TA+LO)
intervaley phonon scattering
NNSE 508 EM Lecture #11
21
High field electron transport
Hot electrons transfer energy into thermal
vibrations of the crystal lattice (phonons).
Such vibrations can be modeled as harmonic
oscillations with a certain frequency, ph .
The energy levels of a harmonic oscillator
are equidistant with the energy difference
between the levels equal to
Two types of phonons scatter electrons
differently: acoustical (slow) and optical (fast):
Hence, process for a hot electron can be
represented as follows. The electron
accelerates in the electric field until it
gains enough energy to excite optical phonon:
phphE
meVE optopt 40
kTE acac
NNSE 508 EM Lecture #11
22
Intervalley scattering in high electric field
GaAs has an L valley just 0.29 eV higher than
-valley
At high fields electrons can be transferred
into L-valleys. The conductivity will
depend on concentrations and mobilities
of electrons in both valleys:
Model for dependence of drift velocity on
electric field in GaAs
From Shur, 2003
LLNNe
NNSE 508 EM Lecture #11
23 Diffusion and drift of carriers
• If we increase or decrease carrier
concentration in some region of a sample,
the carriers will tend to diffuse to return to
equilibrium
• Diffusion is described by the first Fick’s
law:
Electron diffusion current
Hole diffusion current
• If electric field (weak) is applied:
Total electron current
Total hole current
neDJ nn
peDJ pp
(Flux of particles)= -(Diffusion coef.) x (gradient of concentration)
neDneJ nnn
peDpeJ pop
NNSE 508 EM Lecture #11
24 Einstein relation
At equilibrium condition (no total current)
diffusion current is equal to drift current:
For nondegenerate semiconductor:
Carrier concentration is changing in the
electric field (r):
Gradient of electron concentration is :
And substituting, obtain Einstein relation:
0neDne nn
Tk
EENn
B
CFC exp
Tk
xenxn
B
)(exp)( 0
Tk
enx
Tk
enn
BB
)(
EF
EC
Drift flux
Diffusion flux
e
TkD B
*
e
m
m
e