5.2 Principles of Chemical Vapor Deposition

Figure 5.1

Figure 5.2

Figure 5.3

5.3 Experimental Approach

5.3.1 Chemical Vapor Deposition (CVD)

5.3.2 Chemical Vapor Condensation (CVC)

Figure 5.4

5.3.3 ParticlePrecipitationAided Chemical Vapor Deposition

Figure 5.5

Figure 5.6

5.3.4 Catalytic Chemical Vapor Deposition

Figure 5.7

5.4 Examples of Nanostructured Materials

5.4.1 Semiconductor Quantum Dots

5.4.1.1 Temperature Dependencies

Figure 5.8

5.4.1.2 Variation with AsH3 Partial Pressure

Figure 5.9

5.4.1.3 Variation with Surface Structure

n

Figure 5.10

Figure 5.11T T

5.4.2 Ceramic Nanostructured Materials

5.4.2.1 Oxides

Figure 5.12

5.4.2.2 Carbides

Figure 5.13

Figure 5.14

Figure 5.15

5.4.2.3 Nitrides

Figure 5.16

x y

x y

5.4.3 Carbon Nanotubes

5.4.3.1 Dense Substrate

Figure 5.17

Figure 5.18

5.4.3.2 Porous Substrate

Figure 5.19

Figure 5.20

Figure 5.21

5.4.3.3 UltraFine Powder Substrates

5.4.4 Diamond

5.4.4.1 Kinetic Approach

5.4.4.2 Formation Mechanism

5.4.4.3 Enhancement of Diamond Formation

Figure 5.22

Figure 5.23

Figure 5.24

5.5 Summary

References