Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett...

94
Session 3 Evaluation and Characterization Burn-in & Test Socket Workshop 2000

Transcript of Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett...

Page 1: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

Session 3

Evaluation andCharacterization

Burn-in & TestSocket Workshop2000

Page 2: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

COPYRIGHT NOTICE• The papers in this publication comprise the proceedings of the 2000BiTS Workshop. They reflect the authors’ opinions and are reproduced aspresented , without change. Their inclusion in this publication does notconstitute an endorsement by the BiTS Workshop, the sponsors, or theInstitute of Electrical and Electronic Engineers, Inc.

· There is NO copyright protection claimed by this publication. However,each presentation is the work of the authors and their respectivecompanies: as such, proper acknowledgement should be made to theappropriate source. Any questions regarding the use of any materialspresented should be directed to the author/s or their companies.

BURN-IN & TESTSOCKET WORKSHOP

Page 3: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

“A Method For Measuring And Evaluating Contact Resistance In Burn-inAnd Test Sockets”

Angelo GiaimoIBM Microelectronics

“Methodology For Characterizing RF Response Of Sockets And TestContactors”

Valts TreibergsPrimeYield Systems, Inc.

“Test And Burn-in Socket Evaluation For PBGA Devices”Zenon PodporaIBM Microelectronics

“Characterization Of High Performance Contactors For Production RDRAMChip-scale Package Test”Ken Karklin Francois Billaut Gary L. ChewAgilent Technologies Hewlett Packard Hewlett Packard

Presentations

Page 4: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

A Method for Measuring andEvaluating Contact

Resistance in Burn-in andTest Sockets

2000 Burn-in and Test Sockets Workshop

Angelo Giaimo

IBM Corporation

Page 5: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

2

AGENDAPROBLEM

• CHALLENGES IN CONTACT EVALUATIONMEASUREMENT THEORY REVIEW

• 2 POINT MEASUREMENTS• 4 POINT MEASUREMENTS

SOLUTION

• INTRODUCTION OF P4PM SYSTEM• HW/SW IMPLEMENTATION• SAMPLE DATA: OPENS/DELTAR

CONCLUSION

• REVIEW

Page 6: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

3

CHALLENGES IN CONTACTEVALUATION

• TIGHTER PITCH / LOWER CONTACTFORCE

• SHORTER CONTACTS / LOWCOMPLIANCE

• INCREASED PIN COUNT / HIGHRELIABILITY CONTACT

• TAKE MORE SAMPLE DATA PERTOUCHDOWN

Page 7: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

4

2 POINT MEASUREMENTS

• LEAST ACCURATE METHOD OFMAKING CONTACT RESISTANCEMEASUREMENTS.

• FIXTURE RESISTANCE CANNOT BENULLED OUT.

• EASIEST METHOD TO MAKEMEASUREMENTS

Page 8: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

5

2 POINT EXAMPLE

• Force Current I(f)• Measure Voltage V(s)• R(m) = V(s) / I(f)• R(m) = R(x) + R(L+) +

R(L-)• Sense Point Location• Measurement Error

Ω Ω

Ω

Page 9: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

6

4 POINT MEASUREMENTS

• Used when R(L) approaches R(x)• More-accurate method of making

contact resistance measurements.• Lead and Fixture bulk resistance can be

nulled out.• Wiring for multiple measurements can

get complex (4 points/contactmeasurement)

Page 10: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

7

4 POINT EXAMPLE

• Force I(f)• Measure V(s)• R(m) = V(s) / I(f)• R(m) = R(x)• Sense Point

Location givesaccuracy

• What if we relocatesense points?

Ω Ω Ω Ω

Ω

Ω

Page 11: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

8

PSEUDO 4 POINTMEASUREMENTS

• USES 2 POINT MEASUREMENTHWRE TO ACHIEVE 4 POINTMEASUREMENT ACCURACY.

• ACHIEVED BY “MOVING” THE SENSEPOINTS TO THE CONTACT, OR,

• REDUCING THE EFFECTIVE R(L+)AND R(L-) => ZERO

Page 12: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

9

P4PM SYSTEM THEORY

Ω Ω

Ω

ΩΩ

• Reduces R(L-) to 0by creating multiplereturn paths.(Hardware)

• Reduces R(L+) to 0by subtractingminimum values ona per-channel basis.(Software)

Page 13: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10

P4PM SYSTEM HARDWARE

• PC – FOR DATA STORAGE ANDSYSTEM CONTROL (IEEE 488 BUSS)

• PMU – FOR CONTACT RESISTANCEMEASUREMENT

• SWITCHING MATRIX – FOR DUT I/OPIN SELECTION

• CONTACTOR FIXTURE – CONNECTSSWITCHING MATRIX TO SOCKET

Page 14: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

11

P4PM SYSTEM

Page 15: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

12

P4PM SYSTEMIMPLEMENTATION

Page 16: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

13

P4PM OPERATION (+)

• SELECT RELAY.• +PATH IS THRU 1

PIN ONLY TOSHORTINGDEVICE.

• R(+) = R(F) + R(C)• STATISTICALLY

REMOVE R(F),LEAVING R(C).

Page 17: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

14

P4PM OPERATION (-)

• -PATH IS THRUN-1 UNSELECTEDRELAYS

• IF N IS LARGE,R(-) => ZERO

• V(-) => ZERO

Page 18: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

15

SYSTEM SOFTWARE I

• DATA COLLECTION:• SAVED BY CHANNEL, READING, JOB,

TESTER AND FIXTURE; DATE & TIME.• CALCULATIONS:

• MINVALUE PER CHANNEL PER JOB• UPDATE MINVALUE FILE. (MULTIPLE

MINVALUE FILES FOR DIFFERENTTESTERS AND FIXTURES)

• R(C)=(READING-MINVALUE)/I(F)

Page 19: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

16

SYSTEM SOFTWARE II

• R(C)• AVERAGE R(C)• OPEN PINS• THRESHOLD

VALUES

• TABLE / GRAPH• BY PIN

LOCATION• BY MODULE• BY JOB• BY SOCKET

Page 20: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

17

OPENS EXAMPLE

• LOW YIELD –INTERMITTENTSOCKET

• 50 CYCLE TEST• GRAPH SHOWS

FREQUENCY OFFAILED PINS

Page 21: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

18

R(C) EXAMPLE

• TO SHOW R(C)VARIATIONSACROSS SOCKET

• SINGLE READINGOR STATISTICALREADINGSACROSS SOCKET.(MIN/MAX/AV)

Page 22: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

19

MEASUREMENT ERROR

• NOTE: ALL MEASUREMENTS AREBASED ON MINVALUE = 0 R(C)

• TRY TO INSURE THAT R(-) x I(F) ISLESS THAN LSB OF PMU ORDESIRED RESOLUTION.

• LOW I/O SOCKETS PRONE TOERROR DUE TO FEWER RETURNPINS.

Page 23: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

20

CONCLUSION

• DESCRIBED CHALLENGES• REVIEWED 2 AND 4 POINT

MEASUREMENTS• INTRODUCED P4PM SYSTEM• SHOWED IMPLEMENTATION HW/SW• EXAMPLE WITH SAMPLE DATA• MEASUREMENT ERROR

Page 24: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

PrimeYield Systems, Inc.

Methodology forCharacterizing RF Responseof Sockets and TestContactors

Theory & Basic TechniquesUsing Readily Available

Tools

Valts Treibergs

Page 25: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 2PrimeYield Systems, Inc.

Topics• Transmission Line Basics

– Impedance– Inductance and Capacitance– Frequency Domain

Response• Reflection• Transmission

• Tools and Fixturing– Vector Network Analyzer– Air Coplanar Probes– Printed Circuit Board

Considerations• Measurement Techniques• Results

Page 26: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 3PrimeYield Systems, Inc.

• A transmission line is used to transfer AC signals withminimum power loss efficiently from one device to another– At low frequencies (wavelengths >> structure size), voltage and

current are not dependent on time

– At high frequencies (wavelengths ≈ or << structure size),characteristic impedance (Z0) must be matched, voltage isdependent on time

Transmission Line Basics

Page 27: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 4PrimeYield Systems, Inc.

Transmission Line BasicsCharacteristic Impedance Z0

• In a lossless transmission line, thephysical geometry alone defines aconstant quantity: the CharacteristicImpedance (Z0)

• Z0 is a function of geometry of theconductors and the dielectricproperties of the structure

• The unit of impedance is the ohm (Ω)

• The time delay or electrical length ofthe transmission line is td (seconds)

• The lossy transmission line includesseries inductance and shuntcapacitance with resistances

L

C

CLZ =0

LCtd =

L R

G C

Page 28: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 5PrimeYield Systems, Inc.

Transmission Line BasicsImpedance Z as a Vector Quantity

• Since a transmission line carriesan AC signal, impedanceinherently is a vector quantity - ithas magnitude and phase

• The real part of the vector isresistance (R) and is 0

• The imaginary part of the vectoris reactance (X)– Reactance takes two forms -

Inductive(XL) and Capacitive(XC)

• f = frequency (Hz), ω = angularfrequency (rad/s)

X

Imaginary Axis

+j

R

θ

|Z|

Z (R,X)

θ∠=+= ZjXRZ

LLX L ωπ == f2CC

X C ωπ1

f21 ==

INDUCTIVE: jX>0

CAPACITIVE: jX<0

Page 29: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 6PrimeYield Systems, Inc.

Transmission Line BasicsExtracting L and C

• OPEN CIRCUIT– Essentially zero current is

flowing through L and R– Capacitive reactance is

dominant– Capacitance is expressed in

Farads (F)

• SHORT CIRCUIT– Essentially all current bypasses

C and G– Inductive reactance is

dominant– Inductance is expressed in

Henrys (H)

SHORT

L R

G CZSHORT

OPENOPENOPEN CjG

Zω+

= 1

L R

G C OPENZ0PEN

+<<+

OPENOPENOPENOPEN CjG

LjRω

ω 1

SHORTSHORTSHORT LjRZ ω+=

Page 30: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 7PrimeYield Systems, Inc.

Transmission Line BasicsSockets and Contactors as Transmission Lines

• Sockets and contactors do not have a single characteristic impedance becauseof the mechanical requirements and different materials

• Transitions in impedance result in signals passing through the contactor to bepartially reflected back to the source of the signal

REFLECTION(A/R)

•ReflectionCoefficient (Γ,ρ)

•Impedance (R+jX)

•Return Loss

•SWR

•S11, S22

TRANSMISSION(B/R)

•TransmissionCoefficient (Τ,τ)

•Insertion Phase

•Insertion Loss

•Group Delay

•S21, S12R

B

A

Page 31: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 8PrimeYield Systems, Inc.

ReflectionReflection Coefficient

0

0

ZZZZΦ

VV

L

L

incident

reflected

+−=∠==Γ ρ

• Γ is a complex quantity, and ρ isthe magnitude portion, Φ is thephase angle

• Z0 is system impedance• ZL is device impedance• Γ is a function of frequency• The Smith Chart maps rectilinear

impedance onto the polarreflection plane– Circles are constant

resistance– Arcs are constant reactance– ZL=Z0 is chart center - perfect

load– ZL= is at 0° - OPEN– ZL= 0 is at 180° - SHORT

10 ≥≥ ρ

dB )log(20 ρ−=loss Return0≤loss Return

ρρ

−+=

11

SWR 1≥SWR

( )( )Γ−

Γ+=11

0ZZL

Page 32: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 9PrimeYield Systems, Inc.

TransmissionTransmission Coefficient

φτ∠==Τincident

dtransmitte

VV

• Τ is a complex quantity, and τ is themagnitude portion, φ is the insertionphase angle

• Τ is a function of frequency• If |Vtransmitted|<|Vincident|, you have

attenuation or insertion loss• Insertion loss is a measure of the

frequency bandpass characteristicsof the transmission line

• Device bandwidth is commonlydefined as the frequency where theinsertion loss attains 1dB or 3dB

• Differentiating the phase responsegives group delay, or electricallength, td in seconds over frequency

τlog20−=loss Insertion0≤dB)( loss Insertion

10

8

6

4

2

0

0.0 2.5 5.0 7.5 10.0

Frequency (GHz)

Inse

rtio

n Lo

ss (d

B)

Page 33: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 10PrimeYield Systems, Inc.

Tools and Fixturing Required forRF Measurements

• Vector Network Analyzer– HP 8510C and HP 8720D VNA families are common– Must be capable of full 2-port error correction and calibration

• Air Coplanar Probes– Available in many different configurations from different

manufacturers ‘off the shelf’

• Calibration Substrate– Must have calibration data for VNA to be used

• PC Boards Designed to Simulate Contactor in Use• Probing Station• Data Analysis Software

• Patience

Page 34: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 11PrimeYield Systems, Inc.

The Vector Network AnalyzerCapabilities Needed for Contactor Characterization

• Full 2-Port S-parametermeasurements– S21 or S12 needed for bandwidth

measurements– S11 or S22 needed for reflection,

capacitance and inductancemeasurements

• Be Capable of SOLT VectorCalibration and Error Correction

• Frequency of VNA Must Be GreaterThan That of Desired MeasuredValues

• Time Domain Capability– Can be very useful in troubleshooting

set-ups HP 8510C Vector Network Analyzer

Page 35: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 12PrimeYield Systems, Inc.

G S G G S S G

Air Coplanar Probes• Probes available with different

coaxial connectors (SMA, K,3.5mm, 2.4mm, etc.)

• Match connector withextension cable of VNA

• Probes available to 1250micron pitch

• Probe mounts must bematched to probing stationmanipulator

• PROBES ARE VERYDELICATE!!! NOT ENGAGED ENGAGED

Page 36: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 13PrimeYield Systems, Inc.

ACP Calibration Standard Substrate

• Precision alumina substratewith calibration structures forACP probing– SOLT (Short, Open, Load,

Through) structures

• Calibration constants for VNA– Floppy disk, tape, or hardcopy

constants

• Calibration standard shouldmatch probes used

• Substrate may also haveadditional structures to beused for calibrationverification

SHORT

OPEN

LOAD

THRU

Page 37: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 14PrimeYield Systems, Inc.

Printed Circuit BoardsPeripherally Leaded Contactors

• Contactor footprint pattern mustadhere to manufacturer’srecommended layout

• Keep additional signal traces to aminimum length (.010”) [.25mm]max beyond contactor

• PCB can be 1-sided• Consider end contacts as well as

mid-array contacts• 1 Required structure:

– Thru /OPEN / SHORT• Optional SHORT structure for S22

SHORT• Place ground wherever possible• Gold plating is best, no

soldermask

ENDSHORT

ENDOPEN/

SHORT/THRU

MIDOPEN/

SHORT/THRU

MIDSHORT

SOCKETOUTLINE

GROUND

(OPTIONAL)

Page 38: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 15PrimeYield Systems, Inc.

Printed Circuit BoardsArea Array Sockets

• Socket footprint pattern must adhere tomanufacturers recommended layout

• Signal traces are plated through vias• Use thinnest PCB possible to keep signal

length short• PCB must be 2-sided• Consider corner, edge, and mid-array

contacts• 2 Required structures for each:

– Short– Through

• Open measurements made on bare PCBor dummy pads

• Gold plating recmmended, nosoldermask

GROUND

SIGNAL - SHORT

SIGNAL - THRU (OPEN)

Page 39: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 16PrimeYield Systems, Inc.

MP-10

Probing Station

• Choose or build a probing stationwith generous X, Y, Z travel of boththe manipulators and the opticalmicroscope

• Probing stations designed forwafer probe may not be suitable- often not enough Z travel

• Manipulators should be compatible with probemounting holes

• Area array ‘THRU’ measurements need some customfixturing so that one probe can be mounted beneaththe PCB, or so that both probes can be mountedhorizontally

• Both wide and narrow field microscopes are useful• Cables to VNA must be long enough to easily reach

the probes

Page 40: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 17PrimeYield Systems, Inc.

Measurement Techniques• Perform full 2-Port VNA calibration using ACP

substrate to desired frequency• Transmission Measurements (2 Port)• Reflection Measurements (1 Port)

– Both OPEN and SHORT circuit measurementsneeded

• Measurement Configurations:– Peripherally leaded contactors– Area array contactors

• Save each measurement electronically as rawdata

• Analyze the data in a spreadsheet or on the VNA

Page 41: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 18PrimeYield Systems, Inc.

Transmission MeasurementsPeripherally Leaded Sockets

• Place Port 1 probe atoutside contactor as closeas possible on THRUstructure (.010” max fromcontactor)

• Place Port 2 probe oncorresponding contactwhere actual DUT wouldengage

• Measure end- and mid-arraycontacts

• Save S21 and S12 data

END(S-G)

MID (G-S-G)

PORT 1PORT 2

Page 42: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 19PrimeYield Systems, Inc.

Reflection MeasurementsPeripherally Leaded Sockets

• OPEN MEASUREMENTS– Place Port 1 probe at outside contactor

as close as possible on THRU structure(.010 “ max from contactor)

– Remove or raise Port 2 probe a minimumof 3X contact tip height

– Measure end- and mid-array contacts– Save S11 data

• SHORT MEASUREMENTS– Port 2 probe is removed– Place shorting plate on contact tips

where actual DUT would engage– Place Port 1 probe at outside contactor

as close as possible on THRU structure(.010” max from contactor)

– Measure end- and mid-arraycontacts

– Save S11 data

END(S-G)

MID (G-S-G)

PORT 1

PORT 2

PORT 1

SHORTINGPLATE

END(S-G)

MID (G-S-G)

SHORTING PLATE

SHORTING PLATE

Page 43: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 20PrimeYield Systems, Inc.

Transmission MeasurementsArea Array Contactors

• Fixture contactor and PCB on its side inprobing station

• Precompress contacts if necessary• Place Port 2 probe at opposite side of

PCB via on THRU structure• Place Port 1 probe on corresponding

contact where actual DUT wouldengage

• Measure corner, edge, and mid arraycontacts

• Save S21 and S12 data• THIS IS THE MOST DIFFICULT

FIXTURING. PROBES MUST BEMOUNTED FIRMLY ANDACCURATELY. USE AN EXTERNALMICROSCOPE FOR MANEUVERING.

EDGE (G-S-G)

CORNER(G-S)

MID (G-S-G)

TOP OFSOCKET

PORT 1

PORT 2PCB W/ THRU VIAS ONSIGNAL AND GROUND

Page 44: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 21PrimeYield Systems, Inc.

Reflection MeasurementsArea Array Sockets

• For OPEN measurements, use abare PCB or PCB with dummy pads

• For SHORT measurements, use asolid copper plate or shortingstructures on the PCB

• Fixture contactor and PCB normallyor on its side in probing station

• Precompress contacts if necessary• Port 2 probe is not needed• Place Port 1 probe on

corresponding contact where actualDUT would engage

• Measure corner, edge, and midarray contacts

• Save S11 data

EDGE (G-S-G)

CORNER(G-S)

MID (G-S-G)

TOP OFSOCKET

OPEN

SHORT

PCB W/ OPEN STRUCTURESOR BARE PCB

PORT 1

PORT 1

PCB W/ SHORT STRUCTURESOR SOLID COPPER

Page 45: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 22PrimeYield Systems, Inc.

Results (Crunching the Numbers)• VNA data files contain real and imaginary

reflection and transmission coefficients of allfrequency points (or time domain increments)tested for S11, S21, S12, and S22

• Data files generated by the VNA can be importedinto a spreadsheet program such as Microsoft®Excel

• The following can be automatically calculated:Insertion loss, phase, deviation from linear phase,electrical delay, impedance, capacitance,inductance, return loss, VSWR, etc.

• Standard log-mag, real and polar plots of all of theabove can be generated, including Smith Chartswith full marker capability

Page 46: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 23PrimeYield Systems, Inc.

ResultsExample - PrimeYield Systems .8mm QFP Contactor

• Contactor was cut away for fixture development• A PCB was constructed as described earlier• 800µµµµm air coplanar probes were chosen (G-S-G)• THRU, OPEN, and SHORT configuration frequency and

time domain data was recorded to 15 GHz on a HP 8510CVNA.

• All data analyzed and displayed in Excel

OPEN measurement

SHORT measurement

THRU measurement

Page 47: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 24PrimeYield Systems, Inc.

ResultsExample - PrimeYield Systems .8mm QFP Contactor

Bandwidth - Insertion Loss

• Calculated from S21 and S12 THRUmeasurements

• -1 dB at 5.75 GHz

• -3 dB at > 15 GHz

• Data contains PCB parasitics

Electrical Delay

• Calculated from S21 and S11 THRUmeasurements

• 47.81 ps delay

• Stable, linear behavior to 6.00 GHz

• Data contains PCB parasitics

INSERTION LOSS (dB)

4.0

3.0

2.0

1.0

0.0

0.00 3.00 6.00 9.00 12.00 15.00

Frequency (GHz)

Inse

rtio

n L

oss

(d

B)

S-12

S-21

MARKERSS-21GHz dB

-0.09231.0

-0.34513.0

-0.18902.0

-0.78005.0

-1.05.75-3.015.00

-0.0724

MARKERSS-12GHz dB1.0

-0.31913.0-0.17312.0

-0.75415.0-1.05.78

-3.015.00

.8mm PL, SHORT BEAM, G-S-G THRU

12/21/99 15:01

Zo= ΩΩΩΩ50

ELECTRICAL DELAY

0.0

10.0

20.0

30.0

40.0

50.0

60.0

70.0

80.0

90.0

100.0

0.00 3.00 6.00 9 .00 12.00 15.00

Frequency (GHz )

Gro

up D

elay

(ps)

S-21

S-12

NOTE: DELAYCALCULATED TO dB INS ERTION

.8mm PL, SHORT BEAM, G-S-G

12/21/99 15:01

AV ERAGEDELAY S-21:

(TO GHz)4 7.819 5 ps

5.75

4 7.798 4 ps

AV ERAGEDELAY S-12:

(TO GHz)5.78

-1 0

T HRUZo= ΩΩΩΩ50

Page 48: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 25PrimeYield Systems, Inc.

ResultsExample - PrimeYield Systems .8mm QFP Contactor

Capacitive Reactance

• Calculated from S11 OPENmeasurement

• 1.26 pF at 1.0 GHz

• 1.41 pF at 2.0 GHz

• 1.78 pF at 3.0 GHz

• Resonance seen atapproximately 5 GHz

• Data contains PCB parasitics

CAPACITANCE

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

4.5

5.0

0.00 1.00 2.00 3.00 4.00 5.00

Frequency (GHz)

Cap

aci

tanc

e (p

F

S-11

.8mm PL, SHORT BEAM, G-S-GO PEN

MARKERSS-11GHz C (pF)

1.26361.0

1.77953.01.41332.0

13 .02955.0

12/ 21/99 14:01

Zo= ΩΩΩΩ50

RESONANCE: 5.04

SMITH CHART - REFLECTION

S-1 1

MARKE RSS-11 (open) (short)GHz Z (R+jX) Ω Ω Ω Ω C (pF) L (nH)

1. 97-j12 9.8 01. 0

3. 02. 0

5. 0

1 2/21/9 9 1 4:0 1

.8mm PL, SHORT BEAM, G-S-G

OPEN

1.1 9-j1.5 2

1.09 -j2 9.9 21.16 -j5 6.9 2

Zo= ΩΩΩΩ5 0

1.2 63 61.4 13 31.7 79 5

1 3.0 29 5

-2 1 294 2- 4.5 80 9- 1.5 95 3

- 0.0 48 2

Page 49: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 26PrimeYield Systems, Inc.

ResultsExample - PrimeYield Systems .8mm QFP Contactor

Inductive Reactance

• Calculated from S11 SHORTmeasurement

• 2.03 nH at 1.0 GHz

• 2.22 nH at 2.0 GHz

• 2.71 nH at 3.0 GHz

• Resonance seen at approximately5 GHz

• Data contains PCB parasitics -probably most influential

INDUCTANCE

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

10.0

0.00 1.00 2.00 3.00 4.00 5 .00

Frequency ( GHz )

Ind

uc

tan

ce

(n

H

S-11

.8mm PL, SHORT BEAM, G-S-GSHORT

MARKE RSS-11GH z L(nH)

2.02521. 0

2.708 63. 02.21592. 0

18.180 65. 0

12/ 9/99 14:0 1

Zo= ΩΩΩΩ5 0

RESONANCE: 5.00

SMITH CHART - REFLECTION

S-11

M ARKERSS-11 (open) (short)GHz Z (R+jX)Ω Ω Ω Ω C (pF) L (nH)

0.76+j12.341.0

3.02.0

5.0

12/9/99 14:01

.8mm PL, SHORT BEAM, G-S-G

SHOR T

624.95+j 571.16

2.48+j50.801.24+j27.53

Zo= ΩΩΩΩ50

-13.2393--1.0470

-0.0254

202522.21592.7086

18.1806

Page 50: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

BiTS 2000 27PrimeYield Systems, Inc.

References / Bibliography• M. Honda: The Impedance Measurement Handbook, Hewlett-Packard 1989• Fabrio Zanella and Mark Galius: Optimizing Signal Integrity in High Speed PCB

Connectors, Electronic Packaging and Production, April 1993• Understanding the Fundamental Principles of Vector Network Analysis, Hewlett-

Packard, Application Note 1287-1• William Hayt, Jr.: Engineering Electromagnetics, Mcgraw-Hill 1958,1967, 1974• Donald Dearholt: Electromagnetic Wave Propoagation, McGraw-Hill 1973• Howard Johnson, Martin Graham: High-Speed Digital Design, Prentice Hall, 1993• Obtain S-Parameter Data from Probe, MicroSim design Source Newsletter, April

1994• S-Parameter Techniques for Faster, More Accurate Network Design, Hewlett-

Packard, Application Note 95-1• 8 Hints for Making Better Network Analyzer Measurements, Hewlett-Packard

Application Note 1291-1• David Ballo: Network Analyzer Basics, from ‘Back to Basics Seminar’, Hewlett-

Packard 1998• David Dascher: Measuring Parasitic Capacitance and Inductance Using TDR,

Hewlett-Packard Journal, 1996

Page 51: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000

Test and Burn-in Socket Evaluation for PBGA Devices

2000 Burn-in and Test Socket Workshop

Zen PodporaIBM Microelectronics

Contacting Systems Engineering

Page 52: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 2

Objectives

• Socket selection / evaluation parameters

• Socket design considerations for socket developers

• Possible consequences of poor socket selection

Page 53: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 3

Agenda

Intro to sockets• Basic functions of test and burn-in sockets• Typical socket structure

Selection process• Defining operating conditions and restrictions• PBGA device - socket interface considerations• Socket lead - DUT board interface considerations• Electrical parameters evaluation

Conclusion• Significance of device - socket match

Page 54: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 4

Basic functions of test andburn-in sockets

• Device housing andalignment

• Electrical connectionfrom DUT to device

• Heating / cooling of thedevice

Page 55: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 5

Typical socket structure

• Body

• Contact capture plates

• Alignment plate

• Device clampingmechanism

• Thermal managementcomponents

Plunger

Alignment plateSocket body

Contactpins

Pin captureplate

PBGA device

PCB

Page 56: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 6

Defining operating conditionsand restrictions

• Environment– Temperature, humidity, vibration, pressure

• Socket size restrictions– Number of sockets per board, height

restrictions

• Handling– Auto / manual, actuation force, ease of

automation

Page 57: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 7

Defining operating conditionsand restrictions

• Electrical requirements– Current, voltage, electrostatic discharge, test

signals speed

• Socket life expectancy– Load / unload cycles, hours of burn-in, number of

compressions

• IC device lead damage– Tolerable damage to package lead inflicted by

socket contact

Page 58: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 8

PBGA device – socketinterface

• Geometriccompatibility– Solder sphereócrown, cup, pinch

• Alignment– Utilize solder sphere

to align product tosocket contact

PBGA device

Socket leads

Page 59: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 9

PBGA device – socketinterface

• Contact force

– Sufficient topenetrate metaloxides and maintainsolid electricalconnection

– Depends on ; contactshape, base andsurface materials,wiping actionInches

0.0500.0400.0300.0200.0100.000

Grams

50

4540

35

3025

20

1510

5

0Operating range

Force deflection curve

Page 60: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 10

PBGA device – socketinterface

• Ball damage

– Usually generousamount of damageallowed if solderballs are reflowprior to furtherprocessing

Ball damage area

Page 61: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 11

PBGA device – socketinterface

• Solder transferonto socketleads

– Wiping less effective– Higher contact

resistance

Solder contamination

Page 62: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 12

PBGA device – socketinterface

• Socket wear andmaintenanceconsiderations

– Can contacts becleaned easily andeffectively

– How often cleaningis need

– Can single contactbe replaced

Debris from PBGA devices

Page 63: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 13

PBGA device – socketinterface

• Productcontamination

– From priorprocessing

– From handling

Contamination from prior process

Page 64: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 14

Socket lead – DUT board padinterface

• Mounting– Surface mount– Pin-thru-hole (PTH)

(soldered)• Geometric

compatibility– Board pad ó spear,

crown, dome, cup– PTH ó solder tail

length, diameterDUT board pads

Socket leads

Page 65: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 15

Socket lead – DUT boardinterface

• Board pad damage

– Excessive wiping– Excessive force– Aggressive contact

shape– Insufficient / inferior

pad metallurgy

Pad damage from socket leads

Page 66: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 16

Electrical parameters

• Contact resistance– Contactor pin + device lead and pin

connection + pin and DUT board connection

• Inductance– Single contactor pin from end to end

• Capacitance– Between two adjacent pins

Page 67: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 17

Electrical parameters

• Impedance– Single pin over frequency range

• Attenuation– 1dB signal loss through contactor pin

• Propagation delay– Time delay through single contactor pin

Page 68: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 18

Significance of device – socket match

• Product damage

• Yield loss

• Loss of production capacity

• Increased cost of ownership– Maintenance / pin replacement– Additional test / burn-in hardware

Page 69: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

02/27/2000 2000 Burn-in and Test Sockets Workshop 19

Significance of device – socket match

• Higher product cost

• Production / delivery delays

• Customer dissatisfaction

• Loss of business

Page 70: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

Characterization of highperformance contactors forproduction RDRAM chip-

scale package test.

2000 Burn-in and Test Sockets Workshop

Francois BillautHewlett Packard

Geary Chew Hewlett Packard

Ken Karklin Agilent Technologies

Page 71: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

2

Agenda / Outline

• Background of need driven by RDRAM• Overall evaluation methodology• High frequency evaluation• Mechanical evaluation• Impact to CSP assembly and reliability• Applications testing• Key Learnings• Conclusions

Page 72: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

3

New Requirements of High SpeedMemory Final Test• Much Higher Data Rates

– RDRAM data rates to1Gbs+

• New Package Technology– CSP– DRAM Mfg specific variations

• Support Lowest Cost of Test– Device Yield, Device Assembly– Overall Contact reliability– parallelism, contactor cost

Page 73: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

4

Application Environment

• Rambus direct memoriesfrom all major DRAMmanufacturers world wide– Multiple CSP variations

• Agilent 95000 High SpeedMemory Series Tester

• Delta Castle Mx32Handler– x16 and x32 DUTs– -30C to 120C

Page 74: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

5

Highlights of Evaluation Methodology(Technical Portions)

ApplicationsEvaluation DUT Pass

BandRetest

Repeatability

ElectricalHP8510

WearMechanical

K-Mapping Mech X-Talk

CSP Reliability/Assembly Impact

CSP Stress Solder Ball Damage

Rc vs.Insertions

=Covered in BiTS Presentation

Page 75: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

6

Contactors Evaluated

Contactor Characteristics

Type I- Technology: pogo pins with floating plate- Stiffness of contact pins: spring loaded pogo pins- Shape of top of pogo pin: crown (not axisymmetric)- Ball/pin type of contact: indentation

Type II- Technology: S-shape pins floating in elastormer- Stiffness of contact pins: friction + elastomeric layer- Shape of top of contact: inclined plane- Ball/pin type of contact: 45 degree friction

Type III- Technology: rigid contact pins with no floating plate- Stiffness of contact pins: SMM constrained- Shape of top of contact pin: tube (axisymmetric)- Ball/pin type of contact: indentation

Page 76: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

7

RF Evaluation• HP 8510C: parameter measurement• MDS simulation

– First pass results:• All technologies >5GHz -3dB bandwidth (BW)• Basic circuit model developed for all technologies

– First pass BW did not correlate with applicationresults

Page 77: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

8

RDRAM Ball-out vs. surrogate DUT(for bandwidth testing to -3dB)

• Measurabledifference inbandwidthdepending onground pinproximity andpopulation

GND PIN

RDRAM Clock Pin

All others

Typical DRDRAM 144mb CB Pin Out First Pass Surrogate DUT effective Pin out

GND PIN

Evaluated Pins

Page 78: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

9

Mechanical Evaluation

• Simulation ofmechanicalenvironment:– Delta Castle Chuck– Thermal

• Critical Tools:– Instron– Custom Tooling

2nd stage spring

1st stage spring

CHUCK

Delta Castle Mx 32 Chuck

Wear, K-Mapping, Mechanical X-Talk Test Setup

Page 79: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

10

What a CSP sees: Load v. displacement

• Type I Contactors + Handler Chuck

-3000

-2500

-2000

-1500

-1000

-500

0-160 -140 -120 -100 -80 -60 -40 -20 0

extension (mil)

load

(g

)

chuck only

chuck+contactor

chuck + contactor+ csp

contactor+CSP

O

AB

C

D

E

F

G

H

Chuck first spring

Chuck second spring

Floating plate spring

Page 80: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

11

K-Mapping: Understanding the Load onindividual Balls• Instron + Contactor + Surrogate DUT

DISPLACEMENT L (MIL.)

LOA

D P

(gf.)

L2,P2

K = P2 - P1 L1 - L2

L,P

P2

L2

P

L1L1, P1

P1L

Spring length: long ---------------------------short (compressed)

Page 81: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

12

K-mapping Results

• Type I ContactorsPlot of Type I Run #5

-2500

-2000

-1500

-1000

-500

0

500

-25-24-23-22-21-20-19-18-17-16-15-14-13-12-11-10-9-8-7-6-5-4-3-2-1012

5ozall0.dat5ozall5.dat5ozall5a.dat

BC

DE

A

Page 82: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

13

P lo t o f T y p e II # 5

y = 7 1 .3 6 x - 8 8 0 .6 4

y = 5 1 8 .3 6 x + 4 3 8 .6 9

-1 6 0 0

-1 4 0 0

-1 2 0 0

-1 0 0 0

-8 0 0

-6 0 0

-4 0 0

-2 0 0

0

2 0 0

-8-7-6-5-4-3-2-1012

D is p la c e m e n t (m il.)

A

C

D

E

B

K-mapping Results (Continued)

• Type II Contactors

Page 83: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

14

K-mapping Results (Continued)

• Type III Contactors

Type III Run 3common point 1000g @ -2.2 mil.

y = 1343.77x + 1960.79

y = 682.06x + 465.68

-3500

-3000

-2500

-2000

-1500

-1000

-500

0-5-4-3-2-101

Displacement (mil.)

gf3apyall0.dat

3apyall0a.dat

3apyall2.dat

3apyall2a.dat

3pyall4.dat

3pyall4a.dat

3pyall5.dat

3pyall5a.dat

3pyall5c.dat

3pyall5d.dat

3pyall5e.dat

Series12

Series13

Linear (Series12)

Linear (Series13)

K=1344/74 pins = 18 g/mil

K=682/74=9.2 g/mil

D

C

A

B

Page 84: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

15

Mechanical X-Talk

• Determine movement of contact based ondepression of adjacent contact– Metric of sensitivity to ball size/placement variation– Data is first step towards interconnect Cpk Model

Load Cell

CONTACTOR

UNDER TEST

Tooling Adapter

Instron

Full array package

Selected bumps

Adjacent bumps

Selected & Adjacent

bumps

Cross head

Page 85: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

16

Mechanical X-Talk

• Basic Methodology

Load CellLoad Cell Load Cell

#B

LOA

D

DISPLACEMENT

#A

LOA

D

DISPLACEMENT

#A+B cal. Vs act.

LOA

DDISPLACEMENT

Page 86: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

17

Mechanical X-Talk -- ResultsComparing Type I, II, III

-50

-40

-30

-20

-10

0

10

-8-7-6-5-4-3-2-101

Displacement

Load(gf.)

15 gf . load

Type3

Type I,Type 2

<5 gf for Type 3

~10 gf for Type 2

Type3-1 mil.

Type I,Type 2

- 1 mil.

~14 gf for Type 1

LOA

D

DISPLACEMENT

RECOMMENDED

MAXIMUM

UNACCEPTABLE

Contactor Relative Mech X Talk Results

Type I Linear

Type II Some

Type III Most

Page 87: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

18

Solder Ball Damage

• Methodology:– Start w/ re-flowed part, weigh the part– Multiple (10) Insertions @ 90C– Weigh the part + SEM observations

Contactor Mark on the solder ball Location

Type I 4 triangular indentations Between the side and the top

Type II Flat Scrub On the side

Type III Portion of circle Sometimes at the top of the ball

Page 88: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

19

Solder Ball Damage (continued)• Ball Damage Conclusions Results :

• Missing Solder had quantity had to be estimated /calculated geometrically from SEM results

– In all cases, <1% solder loss after 10 insertions• NO impact to CSP assembly -- from ANY technology

– Marks in “no damage zone” inconsequential• Cosmetic/placement differences in marks• After 10 insertions, only Type II contactor had

measurable quantities of solder

Page 89: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

20

CSP Reliability Impact

• Concern:– Depending on the

spring characteristicsof the contactor, theremay be an impact tothe long term lifetimeof the CSP devicedue to the stressimpact of testinsertions

-2

0

2

4

6

8

10

12

14

16

0 0.25 0.5 0.75 1 1.25 1.5 1.75 2

Position (inch)

Vel

oci

ty (

inch

/sec

)

standard, v=5, acc=200

fast, v=12.5, acc=425

Series3

Platten starts moving Platten travels at constant velocity

Platten decelerates

-2

0

2

4

6

8

10

12

1.500 1 .540 1.580 1.620 1.6 60 1.700

Position (in)

Ve

loci

ty (

in/s

ec) standa rd, v=5in/sec , ac c=200in/s2

fa st, v=12.5in/sec , acc =425in /sec

slo w ,v=2in/sec,acc =1 00in /sec

Impact the CSP/Pins: v ~ 5”/sec

Page 90: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

21

CSP Reliability Impact (continued)

• Methodology:– FEA– Determine difference in in-

service conditions vs.insertion conditions

– Tessera CSP type modeled(though there were variationsin customer applications

– Entire CSP considered,focus on strain of copperlead

under thermal cycling (N no insertion)

Loading of the CSPGlobal model>>> displacement field of the lead

In service conditionsinclude the PC boardthermal cycling

Insertion conditionsthermal loading (90C)mechanical loading (pin contact)

Drop in reliability is defined by

c

b

bo

1

1insertionno

i

insertionno

insertionafter *N

n-1

NN

Drop

−−==

εεεε

Input data for the model- reliability of mountedCSPs- number of insertions (ni)- fatigue ductility exponent: b: between -0.5 and -0.7- fatigue strength exponent: c: between -0.05 and -0.12

b

b

bo

1

1insertionno

i

insertionno

insertionafter *N

n-1

NN

Drop

−−==

εεεε (small strain range)

(large strain range)

Calculation of the additionalstrain in the copper leadLocal model>>> max strain in the lead:εo

Calculation of the additionalstrain in the copper leadLocal model>>> max strain in the lead :ε1

Bonding of the copper leadLocal model>>> max strain in the lead :εb

Page 91: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

22

CSP Reliability Impact (continued)

FEA Local ModelPrincipal Stress ICu Lead:Tessera Type CSPThermal Load + Insertion Load

Deformed Shape, Global Model,Themal & Mechanical Loads.Note Local deformation abovebumps due to loading

Page 92: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

23

CSP Reliability Impact (continued)

• Critical Assumptions– Failure mode is in the copper lead– Coffin-Mason approach, relating plastic strain

range to the fatigue life of the part– Add to this: Modeled insertion strain

• Conclusions:– 18% strain level during insertion– 18.1% strain level during in-service conditions– None of the technologies are detrimental to fatigue

life of the part

Page 93: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

24

Significant Learnings and Conclusions• Bandwidth test setup should simulate application• K-mapping instructive on loads on CSP vs. Contactor

Technology in application environment• Mechanical X-talk potentially a significant contributor to false

failures due to opens– Applies where high ball diameter variation is significant

• Solder ball damage:– What’s your real requirement for assembly?

• CSP reliability:– Insertion less traumatic than typical thermal cycle

• Mechanical Capability:– CSP contacting capable across multiple Contactor technologies

Page 94: Burn-in & Test Socket Workshop 2000 Session 3 · Agilent Technologies Hewlett Packard Hewlett Packard Presentations. A Method for Measuring and Evaluating Contact Resistance in Burn-in

10/11/99IEEE BiTS WorkshopFebruary 27, 2000

Characterization of high performance contactors forproduction RDRAM chip-scale package test.

25

Acknowledgements

Steve Chaikin, Agilent Technologies, CaliforniaSemiconductor Test Division, Santa Clara, California

Jian Miremadi, Hewlett Packard Company, ProductGenerations Solutions Technology Center, Palo Alto,California

Cecil Dowdy, Agilent Technologies, EPS Timing Division,Santa Clara, California

Judy Glazer, Hewlett Packard Company, ProductGenerations Solutions Technology Center, Palo Alto,California

Rob Lawson, Hewlett Packard Company, ProductGenerations Solutions Technology Center, Palo Alto,California

Jeff Davis, Agilent Technologies, CaliforniaSemiconductor Test Division, Santa Clara, California