Advisor: Prof. C.H. LiuUNIVERSAL CONCEPT FOR FABRICATING ARBITRARY SHAPED IPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING ACCURATELY CONTROLLED SURGICAL DEVICESReporter: sang-chung yang()MEMS2007 Page:32Gou-Hua Feng and Ri-Hong ChenDepartment of Mechanical Engineering, National Chung Cheng University

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IntroductionWorking principleFabricationTestingResultsConclusions

Outline

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IntroductionRef: JiannJiann-Liang Chen MD, PhD Ref: Gou-Hua Feng 10cm0.5~1cm

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tNafionIPMCRef: Yung Yuen CORef: Gou-Hua Feng IntroductionIPMC:Ionic polymer metal composites

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Working principleWorking principle of an IPMC transducer: (Left) No voltage is applied. (Right) Voltage isapplied to cause IPMC bending.Ref: Byungkyu Kim et al,2003 R:reaction forceE:youngs modulusI:inertiamax:maximum deplacement at tipL:length of IPMC V=0V=5

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FabricationIPMC fabrication method 1Process flow diagrams for fabricatingIPMC transducers with MEMS parallel processing spirit.

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IPMC fabrication method 2Fabrication process flow diagram for the production of IPMC transducers Its different compare to method1.Ref: Gou-Hua Feng et al, 2007 Fabrication2.Apply Wax1.Substrate3.Deposit parylene-c4.Remove wax5.Pattern PR6.Spray Nafion7.Remove parylene8.Deposit Pt9.Immersion into NaOH10.After 3 hours

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FabricationPhotograph of negative photoresist JSR-made micromold array on bulk-micromachined SiN diaphragms.Photograph of diluted Nafion solution sprayed to fill up the micromolds

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(Top) Individual devices of IPMC transducers with platinum electrodes simultaneously formed on top and bottom surfaces. (Bottom right) Cross-sectional view of the device with a clear edge that no short-circuits occur. (Bottom left) A newly developed device with varied thicknessFabrication

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TestingExperimental setup for measuring displacement of actuated IPMC transducers.Experimental setup for measuring force output of the device with a high-resolution (0.01 mN) electronic balance.

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Relationship between the displacement and frequency.Results

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ResultsResults of instantaneous maximum output force vs. applied voltage for 0.5, 1, and 1.5 Hz.

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Demonstration of the IPMC transducer gripping a flexible tube (Left: Front view; Bottom right: side view).Results

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IPMC ?IPMC IPMC

Conclusions

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IntroductionRef: Ref: Byungkyu Kim et al,2003

0.01mN