Download - SDL Series - kashiyama.com

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Kashiyama Industries, Ltd.

(+1)[email protected]

(+82)31-678-1500

(+86)21-3895-4599

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e-catalog SDL_JP_EN 2019.09

7.5E-04 7.5E-03 7.5E-02 7.5E-01 7.5E+00 7.5E+01 7.5E+02

1.0E+00

1.0E+01

1.0E+02

1.0E+03

1.0E+04

1.0E+05

1.0E+06

1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05

Inlet Pressure[Torr]

Pum

ping

Spe

ed[L

/min

]

Inlet Pressure[Pa]

SDL12E60 SDL20E60

SDL36E60

S-P Curve

Major products

*1) Without N2 purge.

* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.

SDL12E50/60 SDL20E60

25,000 40,000

3Phase AC200-220V, 380-480V

645 800

1020×520×1050

0.8

Spec. / Products

Max. pumping speed[L/min] *1

Ultimate pressure [Pa] *1

Supply voltage (50/60Hz）

Mass [kg]

Dimensions[mm] L×W×H

SDL36E60

60,000

920

1370×850×1295

Pumps for solvent evacuation are also lined-up

01FEATURE

Available to large size wafer & FPD

Large capacity availableby combination.Larger than 150kL/minalso available on demand.

02FEATURE

Shorter cycle-time

Large capacity aroundatm. pressure canachieve high speedpumping best for largeL/L chamber.

SeriesSeriesSDLSDL