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Introducing Purion H, a Scanned Spot Beam High Current Ion ... · Introducing Purion H, a Scanned Spot Beam High Current Ion Implanter Bo Vanderberg, Patrick Heres, Edward Eisner,
Ion Implantation Part I – Equipment€¦ · The major components of an ion implanter are listed here. They include: • Ion Generation and Extraction • Mass Analysis • Acceleration