Otto von GuerickeMagdeberg hemisphere

demonstration1654

Puy de D me Experiment-

Florin Perrier showed thatthe height of the column in

mercury barometer decreasedwith altitude, confirming a

prediction of his brother-in-law,Blaise Pascal (1623-1662)

1648

�

Galileo Galilei’s Syphon Experiment1638

Galileo Galilei(1564-1642)

measures limit ofoverhead water pump

1638

Robert Boyle publishes

1660

New Experiments Physio-Mechanical,touching the Spring of Air, and its Effects

Robert Boyle(1627-1691)

Vacuum, mercury barometer~1660

Mayow Apparatus ca. 1669

John Mayow (1641-1679)suggests that air may be

made up of two different gases1674

Gilles Personne de Roberval(1602-1675)

Void within a void experimentExpanding bladder experiment

1648

Otto von Guericke’sair pump

1672

Evangelista Torricelli(1608-1647)

Substitutes mercury for waterin overhead pump

1644

Jean Antoine NollettFalling bodies in a

vacuum experiment1743

Evangelista Torricellimercury barometer

1643

Boyle’s bell in a vacuum1660

Francis Hauskbeeshows that sound is nottransmitted in a vacuum

1705

1650 17001600

Gasparo Bertifirst vacuum produced(in water barometer)

~1640

Otto von GuerickeAir pump—

first vacuum produced~1640

Hero’stranslated to Italian by Aleotti

1547

Pneumatias

Santorre Santorro(1561-1636)

and Galileo independentlyinvent thermoscope formeasuring temperature

~1612

Johannes van Helmontdefines “gas” (Flemish = chaos)to mean an air-like substance

1620

Ferdinand II,Grand Duke of Tuscany,

invents liquid-in-glassthermometer

1641

Experiments by RichardTownley (1628-1707) andHenry Power (1623-1668)

establish PV law for expansion(later called Boyle’s Law or

Marriotte’s Law)1660

In response to Boyle’s ideas,Franciscu Linus (1595-1675)suggest the properties of a

vacuum is due to invisible thread-like“funiculus” that strive to hold

nearby objects together1660

Robert Boyle statesBoyle’s Law for

compression of gases1661

Edm Mariotte in France

(~1620-1684) independentlypublishes relation between

pressure and volume in

1676

�

On the Nature of Air

George Ernts Stahlintroduces idea ofphlogiston as theagent of burning

and rusting1697

Jean Picard observes“barometric light,” a glow

discharge induced by staticelectricity when a mercury

barometer is shaken1675

.

Hero of Alexandria writessummarizing

what is then known aboutsyphons, pumps, etc.

~150 B.C.E

Pneumatias

1500

Otto von Guericke(1602-1686)

Water barometer1654

Time Line Color Code Key

Related scientific developments

Cathode Ray Tube

Radio & electronics

Historical events

Vacuum gauges

Vacuum pumps

Captions

Vacuum tube development

Vacuum tube manufacturing

Jakob Hermann(1678-1733)

postulates that pressure isproportional to density and

to the square of the averagevelocity of the particles

in motion1716

Daniel Bernoulli(1700-1782)

First truly statisticaltreatment of kinetictheory of gasses

1728-1733

Anders Celsius(1701-1744)

suggests new temperaturescale. This scale is revised

in 1745 by Carl von Linn (1707-1778)

1742

�

Charles LawJacques-Alexandre Charlesestablishes that for a given

temperature change, differentgases expand the same amount

1787

—

Phlogiston theoryabandoned

1791

1725 1750 1775

Vacuum Time Line, 1500–1799

Rene Descartes(1596-1650)

in hissuggests that a vacuum

cannot exist1644

Principa Philosophiae

1799

Thomas A. Edison(1847-1931)

Karl F. Brauninvents the

Cathode Ray Tube1897

Sir William Crookes(1832-1919)

suggests that cathoderays are negativelycharged particles

1871

Sir William R. GroveFirst description of

sputtering phenomenon1852

Sir William Robert Grove(1811-1896)William Thompson

(Lord Kelvin)(1824-1907)

suggests absolutetemperature scale

1848

Wilhelm Conrad Roentgen(1845-1923)

creates the first X-Ray tube1898

Sir James Dewar, England(1842-1923)

Cryogenic pumping withliquid air cooled charcoal

1892

Thomas A. Edisonfirst observation of

thermionic emission in vacuum(“Edison effect”)

March 1883

Johann Heinrich Wilhelm Geissler(1815-1879)

Bonn, Germany, developsGeissler mercury vacuum pump,with which he produces the firstgood vacuum discharge tubes

(Geissler tubes)1855

Amedev Avogadro(1776-1856)

Avogadro’s LawAll gases have the samenumber of molecules in a

given volume regardless oftemperature or pressure

1811

—

Edison Effect

Electrical Indicator307,031—October 21, 1884

Thomas A. Edison files U.S.patent on carbon filament lightbulb

1879

Sir J.J. Thomson with his apparatus

Sir Joseph J. Thomsondiscovers the electron

(He called them “corpuscles”)1897

Sir Joseph John Thomson(1856-1940)

1850

Edison improves theSprengel-Geissler

recycling mercury pump1879

W. SutherlandGas-viscosity

gauge principle1897

Isaiah Davies“Roots” pump

1848

Hermann SprengelDevises mercury drop pump

1865

F.M. & P.H. RootsIndustrial Roots Blower Pump

1868

Robert W. BunsenWater Jet Pump

1870

Malignani Corp (Italy)Use of chemical gettering

(phosphorus)1896

FleussOil Piston Pump

1892

D.G. Fitzgeraldpatents the magnesium getter

for electric lamps1881

Pierre & Jacques Curiediscover the piezoelectric effect

1880American Institute ofElectrical Engineersholds first meeting

during the PhiladelphiaInternational Exhibition

1884

David Hughesexperiments with first “microphone”

using three nails1878

Clemens Winklerdiscovers first semiconductor

“Germanium”1886

William Einthovendevelops the

electrocardiogram1890

Thomas A. Edisonbuilds the “Pearl Street Plant”

to generate anddistribute electricity

1882

Thomas A. Edisonforms the

New York Edison Illuminating Company1880

Alexander G. Bellinvents telephone

March 1876

Thomas A. Edisoninvents phonograph

August 1877

G.R. Careyinvents the phototubeor photoelectric cell

1874

Sir William Crookes, Englandinvents the Crookes tube,

early form of the CRT1879

Sir William Crookes, EnglandPumping by

chemical getters1876

L. von BaboDevelops self-recycling

Sprengel pump1876

Heinrich R. Hertz discoverscathode rays can penetrate

thin metal sheets1892

Philipp E.A. Lenardadded to Hertz’s work oncathode rays penetrating

thin metal sheets1894

Albert Hessuses a Lenard tubeto study and mapmagnetic fields

1894

Wilhelm C. Roentgendiscovered X-Rays

1895

Elihu Thomsoncommercial medical

X-Ray machines1896

Jean B. Perrinproved cathode rays were

a stream of charged particles1895

Jonathan Zenneckimproves Braun’s CRT& adds the time base

deflection1889

Eugen Goldstein originatesthe term Kathoden-strahlen

(cathode rays)1876

Guglielmo Marconi transmitsa wireless signal for one mile

1895

Sir William Preeceduplicates Edison’s experiment

and makes quantitative measurements,presents results to Royal Society

March 26, 1885John Ambrose Flemingpresents a paper on the

“molecular shadow” to thePhysical Society of London

May 26, 1883

John Ambrose Flemingreports to the

Physical Society of Londonthat his “lamp” functioned as a rectifier.

March 27, 1896

H.G. McLeod, EnglandVolume compression,Mercury manometer

1874

1875

Vacuum Time Line, 1800–1899

Sir William CrookesVacuum pumping system

1870

Sir William Crookesperforms the Maltese

cross experiment1887

Vacuum apparatus for exhaustingEdison's electric lamps.

Based on Crookes' design.1880

1800

Law of Partial PressuresJohn Dalton (1766-1844)

1801

Joseph-Louis Gay-Lussac(1778-1850)

Gay-Lussac’s LawAt a given pressure, the change in

volume is proportional to the changein temperature

1802

—

John James Waterston(1811-1883)

introduces concept ofMean Free Path

1843

Karl Kronig(1822-1879)

suggests that gas moleculesin equilibrium travel in straight

lines unless they collide with something1856

Rudolf Clausius(1822-1888)

introduces idea of theMean Free Path of a

diffusing particle1858

Julius Pl cker demonstrated

that a magnetic field bendswhat later became known as

cathode rays1858

�

Roots Pumpinvented by brothers

Philander and Francis Roots1859

Hermann Sprengeldevises mercury

“drop pump”1865

J. W. Hittorfdemonstrates thatcathode rays travel

in straight lines,develops Hittorf tube

1869

C. F. Varleysuggests that cathode

rays are particles1871

George Johnstone Stoneyestimates the charge on

cathode ray particles(electrons)

1874

Eugen Goldstein observes“canal” rays (positive ions),

so called because theybored holes in the cathosde

of a discharge tube1886

Nikola Tesla(1856-1943)develops the

induction motor1888

George J. Stoneysuggests the name

“electron” for cathoderay particles

1891Sir William Ramsay

(1852-1916)isolates argon from air

1894

Cathode Ray Tube 1897

William Ramseyand M. W. Travers

discover neon1898

18901899

Irving LangmuirHigh-speed diffusionpump and all-metalcondensation pump

1916

Robert A. Millikan(1868-1955)

Awarded Nobel Prize in physicsfor measuring charge on electron

1923

Lee deForest(

invents the Triode (Audion)November 1906

1873–1961)

Navy Receiver usingLee deForest diodes (Audion)

1906

Detection of Radio Waveswith Fleming Valve, an

instrument for convertingAlternating Electric Currents

into Continuous Currents803,684—November 7, 1905

Sir John Ambrose Flemingdevises the first practical

electron tube; the Fleming Valve (diode)c 1906

Edwin Howard Armstrong(1890–1954)

Invents Superheterodyne receiver1920

F. HolweckSpiral drum-type,

molecular drag pump1922

Wolfgang Gaede(1878–1945)

Sir John Ambrose Fleming(1849–1945)

Jean B. Perrin(1870-1942)

estimates value of Avogadro’snumber (and coins name)

1909

Lord Raleigh (John William Strutt)(1842-1919)

Nobel Prizes in both Physics(discovery of argon) and

Chemistry Studies of inertgaseous elements in air

1904

—

Albert Einstein(1879-1955)

Nobel Prize in Physicsfor photoelectric effect

1921

Lee deForestAudion detector

1910

German telephonerelay tube

(Leiben-Reiz)c 1910

Crystal Setc 1905

1901 1906 1911 1916 19211902 1907 1912 1917 19221903 1908 1913 1918 19231904 1909 1914 1919 1924

1900 1905 1910 1915 1920

Marcello PiraniPirani gauge (thermal

conductivity fromheated filament)

1906

Otto Von BaeyerTriode ionizationvacuum gauge

1909

W. Voege & RohnThermocouplevacuum gauge

1906

M. KnudsenRadiometer effect

vacuum gauge1910

O.E. BuckleyHot cathode ionizationgauge development

1916

A.J. DempsterMagnetic sector mass spectrometer

1918

Irving Langmuirgas filled

incandescentlamp1915

Irving LangmuirVibrating reed

(viscosity) gauge1923W. Kaufman

Helical Torricelli tubeturned by anelectric motor

1905

Wolfgang GaedeRotary mercury-sealed

mechanicalvacuum pump

1905

Cryosorption PumpJames Dewar

using activated charcoal andliquid air~1900

Wolfgang GaedeOil-sealed Vane

mechanicalvacuum pump

1905

Wolfgang Gaede’soil-sealed

vane pump1905

Pfeiffer Co.Rotary oil-sealed

mechanicalvacuum pump

1910

Wolfgang GaedeFirst theory andexperiment onmolecular-drag

pumping1912

Wolfgang GaedeBox Pump

Early 1920s

Wolfgang GaedeDiffusion pump

concept using Mercury1913

Robert A. MillikanMeasures charge on the

electron (oil drop experiment)1909-1912

W. D. CoolidgeX-Ray tube manufacturer

1915

W.D. CoolidgeHigh-voltage

x-ray tube1913

Irving Langmuir formulatesessential elements of

gas/surface interactions,structural dependence, etc. that

we now know as “Surface Science”1910-1920

S. Dushman40 KV vacuum rectifier

1913

Irving LangmuirGas filled

incandescent lamp1912–1913

H.M. FessendenHetrodyne receiver

1912

Irving LangmuirThoriated tungsten filaments

1920

Albert W. HullMagnetron tube

1921

Armstrong inventssuper-regenerative circuit

1918

KDKA transmits first licensedbroadcast almost a decade after“Doc” Herrold in San Jose, CA

1920

SeismographElectric

TypewriterElectric

Hearing Aid Airplane Vacuum Tube Fire ExtinguisherSound

BroadcastingTungsten Filament

Lamp Electric Razor Cigarette LighterElectric Washing

Machine SuperconductivityElectric

Heating Pad Geiger Counter TeletypeRadio Telephone

& Sonar Theory of Relativity Mustard GasElectric

Food Mixer Shortwave Radio Submachine Gun Lie Detector Muzak Bulldozer Portable Radio

Lee deForest Diode introduced

Lee deForestenables the vacuum

tube to functionas an amplifier

1912

Marconi files suitagainst Lee deForest

re: triode1914

ATT purchases licensefrom deForestAugust 1914

Western Electricpatents indirectlyheated cathode

1915

GE developsTungar rectifierDecember 1915

Edwin H. Armstronginvents the

regenerative circuit1911

“Doc” Herroldbegins first radiobroadcast servicein San Jose, CA

1911

M. von LaueNobel Prize in Physics

for x-ray diffractionfrom crystals

1914

K.M.G. SiegbahnNobel Prize in Physicsfor x-ray spectroscopy

1924W.H. Bragg & W.L. BraggNobel Prize in Physics

for crystal structure derivedfrom x-ray diffraction

1915

President Taft signsRadio Communications Act

giving priority to distress signals;prompted by Titanic disaster

August 16, 1912

First New York to San Franciscotelephone call using Western

Electric triode amplifiers1915

Navy use of Triode1907–1908

Arthur R. B. Wehneltdevelops the oxide coated

hot cathode CRT1903–1904

Harris J. Ryandeveloped magnetic

deflection CRT’s1903

Dieckmann/Glage/Rosing/Campbell-Swinton

propose the use of the Braun tubeto display television images

1906–1911

A. Dufour develops ahigh-voltage continuouslypumped CRT and records

directly on photographic plates1913

John B. Johnson/H. J. Van der Bijldevelops the first commercialCRT (Western Electric 224-A)

1913

L.T. Jones/H. G. Taskerdemonstrates electrostaticfocusing in a magnetically

deflected CRT1924

Guglielmo Marconi transmitsa wireless signal from England

to North America1901

W.C. RoentgenNobel Prize in Physics for

discovery of x-rays.1901

Guglielmo Marconi &Carl F. Braun

Nobel Prize in Physics forwireless telegraphy.

1909

Pilipp Eduard Anton von LenardNobel Prize in Physics for

cathode rays.1905

E. WeintraubMercury arc lamp and rectifier

1902

P. Cooper-HewittFluorescent lamp

1901

Poulsen Wireless/Federal Telegraph Co.

founded1909

RadiotronUV-200, UV 201

Nov 1920

McCandless Lamp Coproduces tubes for deForest

Triode producedSold business to

Westinghouse in 1914

1906–19161907–1014

Western Electricbegins production

of biased tubes for AT&T(Type M/101A first)

1915

GE beginsproduction of

Pliotrons (triode)1915

Edison & Swan Co.Produces round valves

and Fleming valvesfor Marconi Co.in Great Britain

1915

British Thomson Houston begins productionof triodes including “R” valve for military

Marconi Co. in Great Britain1916

Siemens & Halske developType “A” vacuum tube—about50,000 produced in Germany

1916

Tubular Audion developedby Cunningham

Lee deForest followsApril 1916

October 1915

ATT purchases patentrights for triode from deForest

Lee deForest kept rights foramateur and experimental use

March 1917

Marconi/deForest/Moorheadreach agreement on patents

1919

AEG-Telefunken developsstandardized tubesfor radio reception(EVN94, EVN129)

in Germany1914

AEG-produces 250 RE11’sper day for war effort

in Germany1918

Long distance telephonerepeaters put into use

in France—much behind U.S.1920

Osram/G.E. Begins productionof “R“ valves in Great Britain

1916

WE develops VT-1 & VT-2for Signal Corps

Goes into high production1917

Lee deForest Radio Telephone &Telegraph company

makes VT-21 and CF-185 tubesfor the U.S. Government

1917

Moorhead Laboratories,San Francisco beginsproduction of SE-1444

for U.S. NavyRate of 50,000

per month claimed1918

GE produces YB-11918

Allied Radio founded1922

Lee deForestCo produces DV/DLseries vacuum tube

1923–1926

Radiotron WD-111922

First Flemingpatent expired

Nov 1922First Lee deForest

patent expiredJan. 1924

F. LowensteinNegative Bias Patent

1,231,764—July 3, 1917

Marconi IP5011 Tube detector

1919

G. MarconiVacuum coherer (used as a detector)

1898–1905

Lee deForest's Space Telegraph879,532—February 18. 1908

Vacuum Time Line, 1900–1924

Joseph J. ThompsonNobel Prize in PhysicsConduction of electricity

through gases1906

—

Georges Claude(1870-1960)

builds first neon lamp~1902

Georges Claudedemonstrates neon lamp

in public1910

Radio Corporationof America founded

1919

First neon advertisingsign in U.S.

1923

Edison’s National Phonographcompany uses sputter coating

to produce phonographcylinder masters

1903

Brigadier General David Sarnoff(1881-1971)

Irving Langmuir

Holding Thyratron Tubeinvented by Albert W. Hull

(1881-1957)

1927

Scanning ElectronMicroscope prototype:

SEMID. McMullan

1948

Saul Dushman

Pioneer vacuum scientist(1883–1954)

William W. Hansen

Inventor of themicrowave cavity

(1909–1949)

Twin triodes12AU7, 12AX7, 12AT7

(and other glass mini tubes)1948

First TransimissionElectron Microscope

Ernst Ruska1931

—

Sir Charles Oatley(1904-1996)

Co-developer ofscanning electron

microscope1948

Philo T. Farnsworth

L. MalterMulti-stage, self-fractionating

diffusion pump1937

1926 1931 1936 1941 19461927 1932 1937 1942 19471928 1933 1938 1943 19481929 1934 1939 1944 1949

1925 1930 1935 1940 1945 1950

First generalpurpose computer

Vacuum tubememory forcomputers

A.R. Olsen & L.L HirstCapacitancemanometer

1929

F.M. PenningCold-cathode,

ionization gauge1937

Wayne B. NottinghamProposal of soft x-ray,

pressure measurement limit1947 Hipple, Sommer & Thomas

Omegatron1949

Wolfgang GaedeGas Ballast Pump

1935

Kenneth C.D. HickmanFractionating oil diffusion

pump and fluids1935

M. SiegbahnDisk-type,

molecular drag pump1926

Owen W. Richardson(1879-1959)

Nobel Prize in Physics forThermionic phenomena,

Richardson's Law1928

Cecil R. BurchGas diffusion pump usinglow-vapor pressure oils

1928

Cecil R. Burch & BancroftOil diffusion pump

1930

Kenneth C.D. HickmanLow-pressuresynthetic oils

1929

C.M. Van AttaDiffusion pump speed

>100 liter/sec.1937

RCA9 original tubes in metal family

1935

Mahn & MecalfPaper on Velocity Modulated

Electron Tubes1936

UHF oscillator usingacorn tube

1941

Varian brothers join SperryCorp. in Long Island, NY

1940

Harold S. Blackdiscovers

negative feedback1927

Heintz & Kauffmanvs. RCA

tube patent litagation

Kenjiro Takayanagidemonstrates a gas focusedoscillograph CRT to display

television images1927

Vladimir K. Zworykin files apatent on the kinescope. He

later developed the iconoscope.1929

A.H. ComptonNobel Prize in Physics for

scattering of x-rays by electrons.1927

Manfred von Ardennedemonstrates an all

electronic television in Berlin1929

Alan B. Du Montfounds the

Du Mont Laboratories1931

Alan B. Du Montbegins applying CRT’s

to television1932

John L. Bairddemonstrates a 700 linehigh resolution television

1935

World’s first regular TVbroadcasting by BBC in England

electronic system by EMI1936

RCA & Du Montdemonstrates televisionat the NY World’s Fair

1939

525-line NTSC systemapproved by FCC

for commercial B &W TV1941

F.C. Williams describes use ofCathode Ray Tube as a digital

memory storage device1948

Philo T. Farnsworthdemonstrates an

all-electronic television systemin San Francisco

1927

Arcturus founded1927

Perryman TubeManufacturer founded

1929

National Union and ChampionTube Manufacturers founded

1930

Radar set using magnetronbuilt by British

September 1940

First RCA ACfilament tubeRCA UX-226Sept. 1927

First US screengrid tube

RCA UX-222Oct. 1927

Landmark UX 280rectifier introduced

(produced for over 50 years)May. 1927

6.3V becomes standardfor AC & DC filaments

1934

First beam powertetrode – 6L6

1936

Metal tubeintroduced by RCA – 6L7

1935

First electron ray(magic eye) tube

introduced by RCA – 6E51935

GE starts to manufacturereceiving tubes after

5½ year absence1935

First button base 1.4 Vminiature tube 1R5

1940

G.E. 6E5“Magic Eye” tube

1934

FarnsworthElectron Multiplier

1929

FarnsworthImage Dissector

1926

Twin triodes6SN7, 7F8

1945

National Unionproduced first

tubes for car radios1931

RCA Radiotron Coformed to build tubes

takes over Harrison plantJan 1930

Mercury vaporrectifier 82, 83

1932

Westinghouse announcedMercury-arc rectifier

(Ignitron)1933

Atwater Kent3 tube receiver

1930

McMurdo Silver15 tube console receiver

1937Complete amateur (ham)radio station—1 tube receiver

& 1 tube transmitter1929

Late night DXwith a 1 tube receiver

1930

Peter DebyeNobel Prize in Chemistry

for diffraction of x-raysand electrons in gases.

1936

James ChadwickNobel Prize in Physics

for the neutron.1935

Ernest O. LawrenceNobel Prize in Physics

for invention of Cyclotron.1939

Hewlett-Packardpartnership begins on $538.

1938

Paul Eislerperfects the

printed circuit board1942

Rudi Kompfnerfirst traveling wave tube

Oxford University1942

ENIAC computerdeveloped at Univ. of Penn.

It used 18,000 vacuum tubes.1943

Oskar Heilpatents the

field effect transistor(but did not work)

1935

E. H. Armstrongannounces frequency

modulation1933

Model B KlystronVarian brothers first working klystron

Stanford University1937

John Randall and Harry Bootdevelop the magnetron

at Birmingham UniversityFeb. 21, 1940

Sir Henry Tizardbrings cavity magnetron to U.S.

Sept. 6, 1940

Percy Spencer of Raytheon Co.designed the laminated anode

magnetron which increased production

Bardeen, Brattain, and Shockleydemonstrate the first

semiconductor amplifier (transistor)1947

Patent 2,535,035 — October 3, 1950

Super MusicAmplifierCable TelevisionTransistorENIAC Computer

All-electronicCalculating DeviceNuclear Reactor

TelevisionAdvertising

RCA demonstratesColor Television

ElectricCarving Knife

First WorkingComputer to

Use Binary Code

Binary CircuitRadio telescope

Fluorescent LightingHelicopterVHF Electronic

TelevisionRadarElectron MicroscopeCar Radio

Electric GuitarFM Radio

StereophonicRecordingCyclotron

B&W TelevisionQuartz Clock

All-electric JukeboxTape Recorder

Liquid-fuel rocketTalking Movies

CommercialFax Service

Electro-encephalogram V-2 Rockets Microwave Oven

Vacuum Time Line, 1925–1950

Daniel Alpert Bayard-Alpert gauge1950

Alfred O.C. Nier, et al.Mass spectrometerhelium leak detector

1943

James Franck andGustav Hertz

Nobel Prize in PhysicsLaws governing

collision betweenelectron and atom

1925

——

Loewe 3NF vacuum“integrated circuit”

1926

Irving LangmuirNobel Prize in Chemistry

Surface Chemistry1932

——

Harold UreyNobel Prize in Chemistry

Discovery of deuterium1934

——

Ernest O. LawrenceNobel Prize in Physics

The Cyclotron1939

—

published by Saul Dushman1949

Scientific Foundation of Vacuum Techniques

Erwin W. M ller invents

Field Electron Microscope thatimages individual atoms

1950

�

Siemens TransmissionElectron Microscope

Max Knoll and Ernst Ruska1938

—

Varian Klystron (VA-842)This liquid-cooled, multicavityradar klystron was the largest

documented production klystron1959

Varian VA-126High-power traveling

wave tube1962

Ross AikenCRT for aircraft and 14” Thin CRT tube

1960

William Shockley celebratesNobel Prize

1956

Nuvistor developed1960

Ted Hoff, inventor of the 4004Intel introduces 4004,

the first Microprocessorused in Busicom

calculator(2-inch wafers)

November, 1971

Busicom calculator

Intel 4004Microprocessor Die

Lewis D. Hall, R.L. Jepsen & J.C. HelmerVacion (sputter-ion) pump based onPenning discharge—all electronic

pump made surface science possible1957

1951 1956 1961 1966 19711952 1957 1962 1967 19721953 1958 1963 1968 19731954 1959 1964 1969 1974

1955 1960 1965 1970 1975

Robert T. Bayard &Daniel Alpertinvent triode

fine-wire collectorIonization Gauge with

1950

Beck & BrisbaneInverted, cold-cathode

magnetron gauge1952

J.P. Hobson & Paul A. RedheadUHV Inverted magnetron,

cold-cathode gauge1958

Wolfgang PaulQuadrupole Mass Filter

1953

J.W. BeamsSpinning-rotor

gauge (viscosity)1960

J.M. LaffertyHot-cathode magnetron,

ionization gage1961

First practical capacitancemanometer MKS Instruments, Inc.

1961

2000 ft space chamberU.S. Air Force

3

1960

E-13 torr, XHV vacuum chamber(2 ft. diameter) using cryogenic

traps and bafflesNational Research Corp.

helium-cooled

1960

P.A. RedheadExtractor gauge

1966

J.C. Helmer & W.H. HaywardBent-beam (Helmer) gauge

1966

First use of quadrupolemass spectrometer asresidual gas analyzer

1960W.M. Brubaker, P. Michael Uthe, & Robert Finnigan

First commercial quadrupole mass spectrometerresidual gas analyzer EAI

1964

First commercial monopoleresidual gas analyzer

General Electric1964

J.K. Fremereyspinning rotorvacuum gauge

at Jülich1972

R.G. HerbEvapor-Ion pump with titanium

sublimation and ionization1950

Willi BeckerTurbomolecular

Pump1958

First of a series of amateur orientedvacuum articles in Scientific American

1958

Introduction of ‘modern’Vacsorb cryosorption pump

Varian1958

Varian Assoc. Inc.1000 liter/secVacIon Pump

1960

Varian Assoc. Inc.Very large sorption pumps for

roughing large chambers1961

NASACryo-pumps for

Space Simulation andsemiconductor fabrication

1975

R.G. HerbGetter-Ion pump

1953

Ring Getter withU-shaped cross section(used in vacuum tubes)

1952

P. Della PortaNon-evaporable Getter

~1950s

R. HerbOrbitron pump with

electron-impact Ti sublimation1955

Committee onVacuum Techniques

(later the AVS)holds its firstsymposium

1953

A.M. Gurewitsch& W. F. Westendorf

Single cell sputter ion pump1954

W. BeckerMulti-stage turbine(turbo-molecular)

pump concept1955

Mars HablanianAxial flow, automotive (thin-bladed)

supercharger at high vacuumShowed air compressors make good vacuum

pumps, confounding existing theory1957

C.H. Kruger & A.H. ShapiroStatistical theory of

turbo-molecular pumping1961

K.H. MirgelVertical uni-directionalturbomolecular pump

1969

RCA demonstratedthe shadow mask

color TV tube1950

Robert Noyce & Gordon Moorefounded Intel

July 1968

The Fairchild Eightfounders of

Fairchild Semiconductor1957

Low energy electron diffraction(LEED) image from nickel

Varian1962

Integrated circuitFairchild Semiconductor

1962

First silicon transistorTexas Instruments

1954

William Shockley,John Bardeen, andWalter H. Brattain

Nobel Prize in Physicsfor discovery

of transistor effect1956

“Moore’s Law” appears inMagazineElectronics

April 1965“The amount of information storable on a given

amount of silicon has roughly doubledevery year since the technology was invented.”

SLAC Linear Acceleratorinvented by William Hansen,

developed by Edward Ginzton (pictured),and completed under the

direction of Dr. Wolfgang Panofsky1966

Intel introduces1103, the first DRAM

October, 1970

8008, the first 8-bitmicroprocessorAugust, 1972

Allied Radio sold toTandy became part

of Radio Shack1970

Varian Clinac x-ray machine forcancer radiation therapy

1963

William R. WheelerUHV (CF) metal-gasket

captured step-seal1961

FirstVol. 1, No.1, Sept./Oct.

JVST,

1964

Compactron developed(multipurpose tubes for TV)

1955Nixie Indicator Tubes

1957

Zenith shuts downLansdale, PA unit

1975

Sylvania buysPhilco Taiwan TV plant

1975

North American Phillipsacquires 85% ofMagnavox Co.

1975M-type Carcinotrons(voltage tuned microwave

oscillators) developed1952

British & Japanesebegin using Traveling

Wave Tubes forradio relay systems

1951

IBM 709 computerlast major vacuum tube computer,

used magnetic core memory1958

Ampexvideo tape recorder

1958

IBM 7090 computerfirst transistor computer,

1959

Post-it NoteGene Splicing

Compact DiskLandsat

Word Processor

Dot Matrix PrinterLiq. Crystal Display

Space StationDaisy-wheel Printer

Floppy Disk

Computer MouseComputer With

Integrated CircuitsCoronary Bypass

Handheld CalculatorFuel Injection

for Automobiles

BASIC(computer language)

Dolby Sound LabPort.Video RecorderTouch Tone PhoneAudio Cassette

Fiber Tip PenHalogen Lamp

ElectrocardiographInternal Pacemaker

External PacemakerIntegrated Circuit

ModemFortranICBM

ComputerHard Disk

Field Ion MicroscopeOptic Fiber

Synthetic Diamond

SiliconPhotovoltaic cell

(solar power)DNA

Radial Tire

Telephone-answeringMachinePower SteeringCredit Card

Instant Color FilmNavigation Satellite

Videodisc

Arpnet (proto internet)Bar-code Scanner

Unix

Atari Video game“Pong” Introduced

1972

Altair 8800 Computerintroduced

1975

Integrated circuit patentRobert Noyce

2.981,877 April 25, 1961

Leybold CompanyRoots vacuum pump mfg.

1955

Vacuum Time Line, 1951–1975

Integrated circuit patentJack S. Kilby

3,138,744 June 23, 1964

AVS becameincorporated

October 19, 1953

Magnetically focusedelectron beam gun

Leslie Holland1951

—

Vacuum Deposition of Thin Filmsby Leslie Holland published

1956

Erwin W. M ller invents

Field Ion Microscopeimages individual atoms

1956

�

L.L. Levenson, Norman Milleronand D.H. Davis compute vacuumconductances using Monte Carlo

simulations1960

Gas laser invented1960

Radio-frequencysputter depositionG.S. Anderson et al.

1962

—

The Physical Basisof Ultra-high Vacuum

by Paul A. Redhead, J.P. Hobsonand E.V. Kornelson

published1968

A.Y. Cho, et al.Molecular-beam epitaxy

1968

—

Charles W. Hanks

270 bent-beam

electron-beam gunevaporation source

1968

—

�

Commercial scanningelectron microscope

Cambridge Instruments, U. K.1970

—

Peter ClarkeCylindrical and conical

magnetron sputterdeposition sources

1971

—

John ChapinPlanar Magnetron sputter

deposition source1974

—

Cambridge InstrumentCompany (England)-

Stereoscan SEMprototype

1965

Video Game1990s

Time magazineselects microcomputer

as “Machine of the Year”1983

Hard disk drive for PC(Seagate & Shugart)

1980

Steve Jobs & Steve WozniakFound Apple Computer

April 1976

Zhores I. Alferof (1930-)and Herbert Kroemer (1928-)

Nobel Prize in PhysicsHeterojunction transistor,

solid state laser2000

——

Ernst August Friedrich Ruska(1906-1988)

Nobel Prize for transmissionelectron microscope

1986

Bill Gates1977

Gerd Binnig & Heinrich RohrerNobel Prize in Physics for

scanning tunneling microscopy1986

1976 1977 1978 1979 1981 1986 1991 19961982 1987 1992 19971983 1988 1993 19981984 1989 1994 1999

1980 1985 1990 1995 2001

IBM introduces itsPersonal Computer

August 1981

Adam Osborne introducesthe portable Osborne 1

1981

Commodore 64 introducedbest-selling computer

model of all time1982

Apple Lisawith icons and mouse

January 1983

Court breaks up AT&Tclearing the way for

competition inlong distance

1984

Apple Macintosh1984

IBM introducesPS/2 and OS/2

1987

Compaq makes 1 millionth PCand Microsoft ships the

1-millionth copy of Windows1987

Microsoft introducesWindows 3.0

1990

Linux is born1991

Apple IntroducesPowerBook

1991

iMac from Apple1998

Microsoft releasesWindows 95

1995

Apple introducesthe Apple II Computer

1977

Microsoft founders Bill Gates &Paul Allen sign partnership in

Albuquerque, NM1977 Radio Shack TRS 80

introduced1980

Large non-evaporablegetter panel

1976

Daniel G. Bills andPaul C. Arnold

Convection Pirani gauge1977

Edwards introducedthe dry pump for the

semiconductor industry1985

Osaka Vacuum Ltd.Compound Molecular Pump

1980

First issue of“The Bell Jar”

vacuum for the amateurJanuary 1992

8086 industry standard16-bit microprocessor.

It had 29,000 transistorsand a clock speed of 4.77 Mhz

(4-inch wafers)June 1978

Intel introduces the 16 MHz80386 32-bit microprocessor.

1985

8087 first mathcoprocessor introduced

June 1980

80286 high performance16-bit microprocessor

6 MHz clock speed(6-inch wafers)

March 19826-inch wafers

fabricated successfullyDecember 1983

1.2 million-transistorIntel 80486™ processor

It runs at 25 MHzApril 1989

First 8 inchwafers produced

April 1992

Intel introducesPentium™ processor

(8-inch wafers)March 1993

The first West CoastComputer Faire takes

place in San Francisco, CA1977

CURRENT GLASS VACUUM TUBE MANUFACTURERS

Shuguang Electrical Factory No. 1

Amperex

Reflector Corp, SaratovRyazan Plant of Electronics, RyazanSRPC Istok, MoscowSvetlana Electronic Devices, St. PetersburgUlyanov, UlyanovskVokhod, Kaluga

AVVT, PragueKR Enterprise, PragueJJ Electronic, PragueTeslovak, Cadca

Fritztronics, Randolph, MAGE/Sylvania (RCA), MarylandMU, Oceanside, CARichardson Electronics, LaFox, ILTriton Services ETD, Gaithersburg, MDWestrex Corporation, Kansas City, MO

El Electronic Industries, Nis, Serbia

China

France

Russia

Slovakia, Czech Republics

USA

Yugoslavia

RCA closes Harrison, NJreceiving tube plantSylvania takes over

Nuvistor lineApril 30, 1976

Vacuum tube productionends for all practical purposes

in most Western EuropeanCountries and the US.

1977

The last major vacuum tubeproduction line was shut down

(Raytheon)1986

Hans Georg DehmeltNobel Prize in Physics for use of

Penning Trap to study charged particles1989

Wolfgang PaulNobel Prize in Physics for

Paul Trap for charged particles1989

150 ft. diameter dish forradar and communications

Stanford University

WE 215A vacuum tubemanufacture shutdown 1981

1919–1981

Viking I & IIon Mars

1976land

K.M. SiegbahnNobel Prize in Physics

for high resolutionelectron spectroscopy

1981

Nicolaas Bloembergenand Arthur L. SchawlowNobel Prize in Physicsfor laser spectroscopy

1981

Apple IIFiber-optic

Communications

Rubik’s Cube24-bit

microprocessor Gene TransferMS-DOSIBM PC

Clone of IBMPersonal Computer Digital Audiotape

Doppler RadarPositron Microscope

Digital AnsweringMachine

Crystal HolographMemory

Channel tunnelopens

Antimatter createdin a labWeb TV

Gas-poweredFuel Cell

Ink Jet PrinterVHS system forVideo Recording Test Tube Baby

Global PositioningSystem by Satellite

High-definitionTelevision

Vacuum Time Line, 1976–2001

The Earth, in a vacuum,from space

Question:What will

happen next?

Question:What will

happen next?

© 2001 AVS Research: Perham FoundationRevisions and corrections based oncomments from Exhibit attendees andAVS Education/History committee members.

Revision date: September 2001.

AVS West1265 El Camino Real, Suite 109Santa Clara, CA 95050Phone: 408-246-3600

Intel images courtesy of Intel Corp.

www.avs.org

Jack St. Clair Kilby(1923- )

Nobel Prize in PhysicsIntegrated Circuit

2000

—

Time Line Color Code Key

Related scientific developments

Cathode Ray Tube

Radio & electronics

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Captions

Vacuum tube development

Vacuum tube manufacturing