Thiet Ke He Thong

Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc -------------------------------------------------------------------------------------------------------------------------------

1 Nhm 3 - KT C in t - K56

MC LC

LI M U ..................................................................................................................... 3

Chng I: Tng quan v MEMS v la chn trc .............................................................. 4

1. Tng quan v MEMS ................................................................................................ 4

2. Lch s pht trin ca MEMS ...................................................................................... 6

3. Tng quan v cc loi micro motor ............................................................................. 8

3.1. ng c s dng b kch hot tnh in kiu rng lc ........................................ 8

3.1.1 Nguyn l hot ng ............................................................................................. 8

3.1.2. Cu to ................................................................................................................ 9

3.1.3. ng dng ............................................................................................................. 9

3.1.4. u im, nhc im........................................................................................ 10

3.2. ng c s dng b kch hot nhit ....................................................................... 11

3.2.1. Cu to v nguyn l hot ng ca b kch hot nhit hot cold arm ........... 11

3.2.2. u im, nhc im........................................................................................ 12

3.2.3. ng dng ........................................................................................................... 12

3.3. Motor quay 2 chiu nhit ch V ............................................................................. 13

3.3.1 Cu to v nguyn l hot ng ca b kch hot nhit ch V .......................... 13

3.3.2 u im, nhc im........................................................................................ 14

3.3.3 ng dng ........................................................................................................... 14

4. xut m hnh ......................................................................................................... 15

Chng II : Tnh ton thit k ........................................................................................... 16

1. Nguyn l hot ng .................................................................................................. 16

2. Tnh ton vi ng c .................................................................................................. 16



ChngIII: Qu trnh ch to actuator nhit in .............................................................. 22

1. Cc Mask s dng trong qu trnh gia cng ............................................................ 22

2. Ch to bnh rng v dm: ...................................................................................... 24

3.Ch to 3 trc ti bnh rng v dm. ........................................................................... 28

5.Ch to thanh truyn th hai. ...................................................................................... 37

Chng IV:Kt Lun. ........................................................................................................ 43

Ti liu tham kho ............................................................................................................. 44



LI M U

Vi s pht trin ca khoa hc cng ngh trong nhng thp nin gn y, th k

XIX c coi l th k ca k nguyn s v cng ngh cao.Xu th tp trung v nhng

ngnh cng nghip cng ngh cao, k thut tinh vi chuyn mn t ng trong sn xut t

khu nghin cu ch to n bc cui cng hnh thnh sn phm. p ng nhng nhu

cu yu cu cao ca con ngi, cng nh ph hp vi s tt yu pht trin ca thi i

nn kinh t tri thc ngy cng hon thin v tin tin hn.

Trong ngnh khoa hc cng ngh cao th lnh vc vi c in t tuy mi pht trin

nhng c nhng ng gp to ln cho s pht trin khoa hc cng ngh ca ton nhn

loi, c bit ngnh micromotor ch trng rt nhiu cho nhng ci tin pht minh ng

dng su rng trong cc nghnh cng nghip, k thut iu khin t ng, t ng ha

cao thay th lao ng trc tip ca con ngi. c s gip ca ging vin chng em

chn ti : Vi ng c kiu nhit in lm ti nghin cu cho mn hc thit k

h thng vi c in t ca mnh.

Trong qu trnh hc tp v nghin cu, c s gip tn tnh ca thy ging

dy mn hc thit k h thng vi c in t gip chng em hon thnh ti nghin

cu ny. Tuy c nhiu c gng nhng khng trnh khi nhng sai st v hn ch cn

khc phc. V vy chng em rt mong c s ch bo ng gp kin t thy chng

em c th khc phc v hon thin hn ti m chng em nghin cu.

Cui cng chng em xin chn thnh cm n s quan tm ch bo tn tnh ca thy

PGS.TS.Phm Hng Phc gip chng em hon thnh ti ny !

Trn trng cm n

H Ni, ngy 16 thng 3 nm 2015



Chng I: Tng quan v MEMS v la chn trc

1. Tng quan v MEMS

Vo th k XX, cc thit b in t c tch hp vi s lng ngy cng ln, kch

thc ngy cng nh v chc nng ngy cng c nng cao. iu ny mang li s

bin i su sc c v mt cng ngh ln x hi. Vo cui nhng nm 50 ca th k XX,

mt cuc cch mng ho v cng ngh micro din ra v ha hn mt tng lai cho tt

c cc ngnh cng nghip. H thng vi c in t (Micro ElectroMechanical Systems)

vit tt l MEMS cng c ra i v pht trin trong giai on ny.

H thng vi c in t -MEMS (Micro Electro Mechanical Systems) l h thng

tch hp cc phn t c kh, cm bin, b kch hot v cc cu kin in t c sn xut

bng cng ngh Micro. Hai dng sn phm chnh ca MEMS l sensor ( cm bin) v

actuator (b kch hot)

`

Hnh 1.1: Sn phm chnh ca MEMS

MEMS

Sensor Actuator

Lc Gia

tc

Vn

tc

gc

Nhit Nhit

p

in

Tnh

in

Hp

kim



Cng ngh vi c v ang tin xa hn nhiu so vi ngun gc ca n l cng

nghip bn dn. MEMS bao gm nhng cu trc vi c, vi sensor, vi chp hnh v vi in

t cng c tch hp trn cng mt chip (on chip). Cc linh kin MEMS thng c

cu to t silic. Mt thit b MEMS thng thng l mt h thng vi c tch hp trn mt

chip m c th kt hp nhng phn c chuyn ng vi nhng yu t sinh hc, ho hc,

quang hoc in. Kt qu l cc linh kin MEMS c th p ng vi nhiu loi li vo:

ho, nh sng, p sut, rung ng vn tc v gia tc...Vi cc u th: c th to ra nhng

cu trc c hc nh b tinh t v nhy cm c th, cho php tch hp cc mch in t

hp (IC) hoc cc cu trc khc nhau, ch to hng lot, lp li cao, c th l mt linh

kin n l hoc l mt thit b hon chnh, cng ngh vi c hin nay cho php to ra

nhng b cm bin (sensor), nhng b chp hnh (actuator) c ng dng rng ri trong

cuc sng. Cc b cm bin siu nh v rt tin ch ny thay th cho cc thit b o c

k, cng knh trc y. Song cng ngh MEMS mi ang giai on u ca n v

cn rt nhiu nhng nghin cu c bn hn, su hn.

B chp hnh ( dn ng, truyn ng Actuator) l cu trc bin i cc dng

nng lng c, quang, nhit, in t, ha hc, sinh hc thnh nng lng c hc, to ra

chuyn ng tng ng vi mt qu trnh iu kin. Kt qu ca mt qu trnh c th

l mt tc ng di dng: ngn cn, kp cht, ko y. c ng dng trong lnh vc t

ng ha trong cc quy trnh sn xut: motor, robot

V Micro Motor, c 2 loi ng c s dng 2 b kch hot in hnh l:

ng c s dng b kch hot tnh in (Kiu rng lc)

ng c s dng b kch hot nhit (B kch hot nhit ch V hoc b kch

hot nhit hot cold arm)



Cm bin p sut Cm bin gia tc Con quay vi c

Micromotor Vi gng ( Micromiror ) Vi vn chuyn

Hnh 1.2: Mt s ng dng ca MEMS

2. Lch s pht trin ca MEMS

- Thp k 50

+ 1954: Charles Smith tm ra hiu ng p in tr vt liu bn dn (Silicon - Si v

Germanium - Ge) .

+ 1958: Cm bin o bin dng (strain gauge - SG) tr thnh thng phm (hng

Honeywell) .

+ 12/1959: Richard P. Feymann c bi thuyt trnh ni ting Plenty of Room at the

Bottom cp tng vi ch to cc linh kin v thit b

- Thp k 60

+ 1962: Cng b cc nghin cu v n mn t ng hng vt liu si-lc trong qui

trnh ch to bng bn dn (Transistor).

+1967: Cng b cc kt qu nghin cu v n mn t d hng (anisotropic etching) v

n mn dng (etch-stop) vt liu si-lc.



+1967: Ra i cng ngh vi c b mt (surface micromachining).

+ 1969: Ln u tin, transistor bn dn FET c chto theo cng ngh MEMS.

- Thp k 70

+ 1977: Cm bin p sut kiu t c ch to ln u tin.

+ 1979: Cm bin gia tc silicon u tin c ch to.

- Thp k 80

+ 1984: Linh kin MEMS trn c s vt liu polysilicon c ch to ln u tin.

+ 1987: Thut ng MEMS chnh thc c a ra v c tha nhn ch v mt lnh

vc cng ngh mi, km theo l cc bin th tng ng, MICROSYSTEM s dng

chu u v MICROMACHINED Nht.

+ 1989: Vi ng c hot ng theo nguyn l tnh in cng c ch to thnh cng.

- Thp k 90

+ 1993: Cm bin gia tc vi c b mt chnh thc tr thnh thng phm.

+ 1995: M ra k nguyn ca cc linh kin MEMS y-sinh.

+ 1999: Mt lot cc thit b cng ngh tin tin cho cc qui trnh ch to n mn kh

su, ct gt bng laser, quang khc UV su (deep UV) c ch to gip ci thin cho

cc qu trnh ch to.

- Th k 21

+ 2000: Cc b chuyn mch quang dng si quang dn tr thnh thng phm v to

c doanh s ln.

+ 2001: Pht trin MEMS nng lng ng dng lm b ngun in trong cc thit b di

ng.

+ 2002: nh du giai on cc linh kin MEMS c pht trin ng dng mnh m

trong lnh vc y-sinh lm cc b phn tch ha-sinh hon chnh siu nh nh h phn

tch DNA.



+ 2007: H thng vi vn chuyn (Microtransportation) c ch to .

Hnh 1.3: Micro motor rng lc

3. Tng quan v cc loi micro motor

3.1. ng c s dng b kch hot tnh in kiu rng lc

3.1.1 Nguyn l hot ng

Hnh 1.4: Tnh in kiu rng lc

B kch hot tnh in kiu rng lc c nguyn l hot ng nh sau: Khi ta t

vo 2 bn t c xp song song nh hnh v mt hiu in th th gia chng sinh ra lc

tnh in theo phng php tuyn, lc ny lm cho hai bn t b ht vo vi nhau.

Lc tnh in theo phng php tuyn Fn:

= 020

2

Trong :

A: Din tch phn rng lc (bn t) trng nhau, A = h.y0

, 0: Cc hng s in mi, h: B rng rng lc (bn t).

V: in p t, y0: Phn rng lc trng nhau.



3.1.2. Cu to

Cu to b kch hot tnh in kiu rng lc bao gm cc bn t in c xp

song song, an xen ln nhau (hnh v). Trong , c mt bn cc l bn cc c nh, bn

cc kia c th di ng c. Khi ta t vo 2 bn cc ny mt hiu in th V, th lc

tnh in sinh ra gia 2 bn cc s ht bn cc di ng v gn pha vi bn cc c nh.

trn bn cc di ng c th c gn vi cc thanh nhm truyn chuyn ng ra ngoi.

Hnh 1.5: Cu to tnh in kiu rng lc

3.1.3. ng dng

B kch hot nhit kiu rng lc c ng dng v ch to rt rng ri trong

nhiu lnh vc khc nhau nh: cng nghip, y sinh, . trn th gii, th cu trc truyn

ng tnh in kiu rng lc c ng dng t nhng nm 1989 l: Cho xc nh v

tr a cc u ln u tin ch to. Tip sau l vi ng c hot ng theo nguyn l

tnh in ( Rotary electrostatic micromotor) cng c ch to thnh cng.

Hnh 1.6: Vi cu trc ca ng c tnh in

Nm 2007: H thng vi vn chuyn (microtransportation) s dng b kch hot tnh in

kiu rng lc c ch to thnh cng.


10 Nhm 3 - KT C in t - K56

Hnh 1.7: Microtransportation

Hin nay, vic ch to micro motor s dng b kch hot tnh in kiu rng lc

t c mt s thnh tu nht nh. Trong tng lai ng dng ca micro motor s

ngy cng nhiu v quan trng hn do nhng u th vt tri ca cc chi tit kch thc

micro m cc chi tit kch thc thng khng th c. V vy, nghin cu v ch to

micro motor s l mt lnh vc khoa hc v cng nghip pht trin mnh m trong tng

lai.

Hnh 1.8: ng c quay mt chiu s dng b kch hot tnh in kiu rng lc

3.1.4. u im, nhc im

u im: Tiu hao nng lng thp, thch hp vi mch IC

Nhc im: Kt cu phc tp, cc bn t c xu hng b ht li vi nhau gy mt

cu trc t dn n d hng linh kin.


11 Nhm 3 - KT C in t - K56

3.2. ng c s dng b kch hot nhit

a) B kch hot dng s gin n b) B kch hot cp nhit ca cht kh , cht lng

c) B kch hot hot cold arm d)B kch hot dm ch V

Hnh 1.9: Cc b kch hot nhit( Electrothermal Actuator)

3.2.1. Cu to v nguyn l hot ng ca b kch hot nhit hot cold arm

Hnh 1.10: Thermal actuator hot cold arm (one hot arm)


12 Nhm 3 - KT C in t - K56

Cu to ca b kch hot nhit dng hot- cold arm c th hin nh hnh v. t

vo hai u ngm ca b kch hot mt hiu in th V, v trong cc thanh hot arm v

cold arm u c in tr sut m hot arm thng mng hn so vi cold arm, nn in tr

ca hot arm tr nn cao hn so vi cold arm. Khi mt dng in i qua hot v cold arm,

th nhit to ra trong hot arm ln hn nhit to ra trong cold arm. Dn n thanh hot arm

dn n v nhit ln hn cold arm, thanh hot arm c cu trc n hi gin ra y cong v

pha thanh cold arm, b kch hot chuyn ng. Khi hiu in th bng 0, lc ny nhit

trang cc thanh hot v cold arm tr v nhit mi trng, tr v v tr ban u, b

kch hot khng chuyn ng.

3.2.2. u im, nhc im

u im: Kt cu n gin, d thit k, khi hot ng cn in p u vo thp

Nhc im: Hot ng da vo s thay i nhit v dn n ca vt liu

lm dm. Km nhy hn kt cu tnh in.

3.2.3. ng dng

Hin nay cc ng c quay, tnh tin s dng b kch hot nhit hot cold arm

ang c nghin cu, thit k v ch to rng ri trong nhiu lnh vc. Di y l mt

s m hnh ng c s dng b kch hot nhit hot cold arm ca i hc Texas

Christian, M.

Hnh 1.11: Micro motor tnh tin 2 chiu s dng b kch hot nhit hot cold arm


13 Nhm 3 - KT C in t - K56

Hnh 1.12: Micro motor quay s dng b kch hot hot cold arm

3.3. Motor quay 2 chiu nhit ch V

3.3.1 Cu to v nguyn l hot ng ca b kch hot nhit ch V

Hnh 1.13: B kch hot nhit ch V

Trong b kch hot nhit ch V (hnh v), dm V c kch thc b rt nh hn so

vi chiu di L ( L 100.b ). t hiu in th dng xung (f) vo hai u ca b kch

hot nhit ch V. Lc hiu in th gia hai u ngm l V, dm mnh c in tr sut

do s nng ln v c s gin n v nhit . Cng gn v pha ngm th dm ch V cng

gin n nh v pha u ngm nhit gn nh bng vi mi trng nn s gin n l

khng ng k. Cng xa pha ngm th s gin n cng ln ko theo dm y tnh tin v

pha trc. Lc hiu in th gia hai u ngm l 0, lc ny nhit trong dm ch V

bng vi nhit mi trng do dm ch V s dch chuyn v v tr ban u ko theo

dm y cng tr v v tr ban u.


14 Nhm 3 - KT C in t - K56

3.3.2 u im, nhc im

u im: Kt cu n gin, d thit k, khi hot ng cn in p u vo thp.

Nhc im: Hot ng da vo s thay i nhit v dn n ca vt liu

lm dm. Km nhy hn kt cu tnh in.

3.3.3 ng dng

M hnh ca mt s ng c s dng b kch hot nhit ch V:

Hnh 1.14: Cu to vi ng c (Hi ngh c hc KT 9/4/2014)

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 2, JUNE 2001

Hnh 1.15:Vi ng c s dng b kch hot nhit ch V


15 Nhm 3 - KT C in t - K56

Trong thc t hin nay cc ngnh khoa hc v cng nghip v MEMS pht

trin ln tm cao, t c nhiu thnh tu ng k nhng lnh vc v Micro motor c

bit l micro motor s dng b kch hot nhit ch V ang l vn kh mi m, cha

pht trin xng tm vi nhng u vit m b kch hot ny mang li. V vy, nhm chng

em mnh dn chn ti Tnh ton, thit k v ch to Motor nhit in 1 chiu

ch V. Nhm mc ch chnh l gii thiu quy trnh thit k mt Motor theo quy trnh

MEMS vi b kch hot nhit ch V.

4. xut m hnh

Da vo yu cu l ch to motor quay hai chiu nhit ch V v s tham kho cc

kt cu trc . Nhm chng em thng nht tng ca m hnh nh sau :

Hnh 1.15: M hnh cu trc

M hnh gm 2 dm ch V, 2 thanh dn truyn v 2 bnh rng n khp vi nhau


16 Nhm 3 - KT C in t - K56

Chng II : Tnh ton thit k

1. Nguyn l hot ng

H thng kch hot ch V t vung gc theo hai phng Ox v Oy , 1 thanh ko v 1

thanh y lm cho c cu culit gn trn bnh rng chuyn ng, ko theo h thng bnh

rng chuyn ng.

u im:

Nguyn l hot ng n gin.

Nhc im:

Kt cu kh cng knh.

Chuyn ng lc ca cult c hin tng git khi chuyn ng vi tn s ln.

2. Tnh ton vi ng c

Hnh 2.1: Cu trc dm ch V


17 Nhm 3 - KT C in t - K56

Phng trnh truyn nhit trong cc dm ch V:

- 2

2

20

d Tk J

dx

(1) (Trch ti liu 3)

Trong :

T l nhit ti v tr x

k l h s dn nhit ca vt liu

l in tr sut ca dm, J l mt dng in

Nghim ca phng trnh trn c biu din nh sau :

- 2 2

2 2 2 2 2 2 2

1 1( )

AL ALAx Ax

r AL AL AL AL

B B e B eT x T e e

A A e e A e e

(2)

Vi cc thng s ban u c ly theo tiu chun

rT =200C Nhit phng

2

2(2 ) O

UB

L k ,

2A B , L=1000 m , U=30V, =4.10-6 , 3 01,25.10 / C

1200o m , k=1,5.10-4 W/ m K

Thay vo ta c :

29

6 2 4

305.10

(2.1000.10 ) .1200.1,5.10B

=> A2=B ; =1,25.103 => A=2500;

=>2

800B

A

2

2 2

2

2 2

10.07585818003

10.9241418201

AL

AL AL

AL

AL AL

e

e e

e

e e


18 Nhm 3 - KT C in t - K56

(3)

=> 0ax ( 1000) 396mT T L C

Hnh 2.2: Phn b nhit vi dch chuyn

Ta i tnh chuyn v ca dm:

Hnh 2.3: S tnh chuyn v dm

Coi - h s gin di l hng s ta c gin di ca dm V l:

1 2 1 2

2

0

[T(x)-T ] [ . ]

L

AL AL

r

C C C CBL dr L e e

A A A A A

(4)

0.001250000000 -0.001250000000( ) : 820.0000000 -60.68654402 -739.3134561x xT x e e


19 Nhm 3 - KT C in t - K56

2 2

1 22 2 2 2 2 2

1 1,

AL AL

AL AL AL AL

B e B eC C

A e e A e e

Thay s ta c:

=1,03 mL

Chuyn v ca dm y : ( gc chn 20 )

(4)2 2 2( ) os sinD L L L c L

(5)

6 2 6 2 2 0 6 0((1000 1,03).10 ) (1000.10 ) os (2 ) (1000.10 ).sin(2 )

22,33

c

m

- dch chuyn tng hp ca thanh y khi c cu hot ng :

Trong mt chu k quay ca vi ng c, im t ca thanh y trn bnh rng s di

chuyn ht qung ng bng chu vi ca vng trn cha im t , ng thi di

chuyn ht khong dch chuyn ca thanh dm do tc ng ca dm ch V gy ra , tc l

:

2 2R D

7,11D

R m

Lc y trn dm ch V

Hnh 2.5: S lc dm ch V


20 Nhm 3 - KT C in t - K56

Lc sinh ra do bin dng nhit trn dm ch V:

b

LF EA EA

L

(6)

Vi: E l m un n hi ca vt liu silicon ( chn E =169 GPa)

A l din tch mt ct ngang ca dm V

Lc sinh ra trn dm y theo quy tc tng hp lc :

9 6 6 0

er

1,032 sin . os 2.5.169.10 .(6.10 ).(30.10 ). .sin(2 )

1000

10,33( )

th mal

LF nEA c

L

mN

(7)

n : s cp dm

Lc ma st ca bnh rng vi nn :

6 2 5 102329 188 10 10 0 38 9 8 10ms ms

F V N . . . .( . ) . . , , . ( ) (8)

Phng trnh cn bng lc: er 0th mal msF F F (9)

Suy ra: erth mal msF F F

erth malF >> msF nn ta b qua lc ma st.

-Tnh ton cc momen trn bnh rng

Momen m dm y tc dng tm quay ca bnh rng:

3 6 7

er er15 10 7 11 10 1 07 10

th mal th malM F R N m . . . , . , . ( . ) (10)

- Momen cn trn bnh rng.

Suy ra: 9 6 132 94 10 188 10 5 5 10c

M Fms R . , . . . , . (Nm)

Trong :

Fms_ Lc ma st ca bnh rng vi nn.

R_Bn knh ca khp tc ng quay bnh rng.


21 Nhm 3 - KT C in t - K56

Phng trnh cn bng moment:er 0th mal cM M M (11)

Suy ra: erth mal cM M M

Ta thy erth malM >> Mc nn bnh rng quay c vi cc thng s dm y v kch

thc nh tnh.

-Vn tc quay ca bnh rng

Ta c vn tc di ca bnh rng

Dv

t

(12)

Vi :

D =22,33 m

t l thi gian t lc dm y chm khp trn bnh rng n lc n y ht hnh trnh

22,33 m. Ta c th coi thi gian ny gn bng thi gian cp in vo dm V. Ngun cp

50 hz nn ly t=0,01s

Suy ra:

6322 33 10 2 233 10

1 0 01

2

Dv m s

f

, ., . ( / )

,. (13)

=> v

wR

;

Vi R l khong cch t tm bnh rng n tm ca trc

=>

3

6

2,233.10314,1(rad/ s)

7,11.10w


22 Nhm 3 - KT C in t - K56

ChngIII: Qu trnh ch to actuator nhit in

Hnh 3.1. Actuator nhit in.

1. Cc Mask s dng trong qu trnh gia cng

gia cng vi ng c nh yu cu, ta s dng 4 mask nh sau

+ Mask 1: To cu trc bnh rng v cc dm kch hot nhit ch V.

+ Mask 2: To cu trc trc trn cc dm V v trn bnh rng


23 Nhm 3 - KT C in t - K56

+ Mask 3 : To cu trc ca tay quay 1 v gi .

+ Mask 4: To cu trc ca tay quay 2


24 Nhm 3 - KT C in t - K56

2. Ch to bnh rng v dm:

Bc 1: Chun b tm wafer v ph cht cm quang photoresist:

Chun b tm wafer. Tm wafer dng trong qu trnh ch to l tm silicon trn

lp cch in SOI ( Silicon OnInsulating layer). Tm wafer gm c 3 lp chnh:

Hnh 3.2 Cu trc tm wafer

Lp Si c b dy 30 m .

Lp SiO2 c b dy 4 m .

Lp Silicon nn c b dy 450 m .

Trc khi gia cng cn a tm wafer vo bung sch ra cc tp cht trn

b mt bng cch dng dung dch axeton cng nghip ra trong vng 5 pht. Sau

ra li bng nc sch. Tip theo ra bng hn hp dung dch 2 4 2 2H SO H O

t l 4:1 (nc Piraha). Sy kh loi b m trn b mt nhit 100-200.

Photoresist l mt cht cn quang c tnh nhy sng dng .Trc khi ph

photoresist ta tin hnh ph mt lp ha cht OPA tng cng kh nng kt

dnh gia b mt tm wafer v cht photoresist sau a tm wafer ln my

quay tc cao gi cht v quay vi tc vi nghn vng/pht photoresist

vng u trn b mt tm wafer .Thc hin sy kh s b lm bay hi c trong

photoresist

Bc 2: Qu trnh quang khc ch to bnh rng v dm:


25 Nhm 3 - KT C in t - K56

a mask cha hnh nh ca bnh rng v dm v tm wafer vo my quang

khc thc hin qu trnh chp chiu.

Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s

c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy

bc tip theo, vng khng b chiu sng chnh l lp cu trc ca bnh rng v

dm.

Sau khi c quang khc dng cht ra NMD3( dng cho photoresist dng)

ra b phn photoresist b phn hy. Sau thc hin sy kh phophoresist cng hon

ton ta c hnh nh nh sau:

Bc 3: Qu trnh n mn kh hot ha su (DRIE)

u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca

kh SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi


26 Nhm 3 - KT C in t - K56

silicon v to thnh sn phm bay ln, ng thi ta nhit. Sn phm ca phn ng

bay ln s c mt thit b ht ra ngoi.

Cc phn ng l:

Cc phn ng phn ly Cc phn ng Ion ha

6 5e SF SF F e 6 5 2e SF SF F e

5 4e SF SF F e 6 3 2 2e SF SF F F e

4 3e SF SF F e 4 3 2e SF SF F e

Cc phn ng thu c:

6 5e SF SF F

4 3e SF SF F

4 3 2e SF SF F e

Flo t do t qu trnh phn ly s n mn silicon:

1iF iFx xS F S vi x:=1..3.

Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to thnh

mt lp bo v. Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph, kh

6SF s c mt n v y, khi c mt n th lung tia plasma khng c tc dng,

cn c xung y th c thng c lp nha bo v c to thnh, ch gi li

thnh bn. Cc qu trnh lp i lp li to nn mt thnh bc rt nh. Qu trnh n

mn ch dng li khi gp b mt SiO2


27 Nhm 3 - KT C in t - K56

Bc 5: Loi b cht cm quang:

loi b lp photoresist ta dng dung dch Remover 106 ra lp

photoresist. Sau sy kh chip.

Hnh 34.3:M hnh dm v bnh rng actuator nhit in:


28 Nhm 3 - KT C in t - K56

3.Ch to 3 trc ti bnh rng v dm.

Bc 1: Ph cht cm quang :

Trc khi ph photoresist ta tin hnh ph mt lp ha cht OPA tng

cng kh nng kt dnh gia b mt chi tit v cht photoresist. Sau a chi

tit ln my quay tc cao gi cht v quay vi tc vi nghn vng/pht

photoresist vng u trn b mt chi tit .Thc hin sy kh s b lm bay hi

c trong photoresist.

Bc 2: Qu trnh quang khc ch to trc trn bnh rng v dm:

a mask cha hnh nh ca trc v chi tit vo my quang khc thc hin

qu trnh chp chiu.


c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy v

ra tri hnh thnh cc l phc v cho qu trnh to trc.


29 Nhm 3 - KT C in t - K56


ra b phn photoresist b phn hy. Sau thc hin sy kh phophoresist

cn li cng hon ton ta c hnh nh nh sau:

Bc 3: Qu trnh phun ph silic:

Tin hnh ph mt lp silic ln b mt ca chi tit va c to thnh bc 2.

Bc 4: Ph cht cm quang m:


cng kh nng kt dnh gia b mt chi tit v cht photoresist. Sau a chi

tit ln my quay tc cao gi cht v quay vi tc vi nghn vng/pht

photoresist vng u trn b mt chi tit .Thc hin sy kh s b lm bay hi

c trong photoresist.


30 Nhm 3 - KT C in t - K56

Bc 5: Qu trnh quang khc:

a mask cha hnh nh ca trc v chi tit vo my quang khc thc hin

qu trnh chp chiu.

Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s c

chiu sng chuyn hnh nh ln nn, vng chiu sng s khng b phn hy v

ra tri hnh thnh mt trc

Sau khi c quang khc dng cht ra xylen ( dng cho photoresist m) ra

b phn photoresist b phn hy. Sau thc hin sy kh phophoresist cn li

cng hon ton ta c hnh nh nh sau:


31 Nhm 3 - KT C in t - K56

Bc 6: Qu trnh n mn kh hot ha su (DRIE):

u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca

kh SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi

silicon v to thnh sn phm bay ln, ng thi ta nhit. Sn phm ca phn ng

bay ln s c mt thit b ht ra ngoi.

Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to

thnh mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn

ph, kh 6SF s c mt n v y, khi c mt n th lung tia plasma khng c

tc dng, cn c xung y th c thng c lp nha bo v c to thnh, ch

gi li thnh bn. Cc qu trnh lp i lp li to nn mt thnh bc rt nh. Qu

trnh n mn ch dng li khi gp b mt PSG.


32 Nhm 3 - KT C in t - K56

loi b lp photoresist m v dng ta dng dung dch Remover 106 ra

lp photoresist. Sau sy kh chi tit.

Hnh 3.4:M hnh 3 trc aturator nhit in.


33 Nhm 3 - KT C in t - K56

4.Ch to thanh truyn th nht v gi .

Bc 1: Ph lp hy sinh v lp silic cn to hnh:

Ta chn vt liu lm lp hy sinh l PSG. PSG kt ta bo gic trn nn khng

phng, b n mn bi dung dch 49% HF m khng nh hng ti cu trc silic.

chn gia PSG v silic ca dung dch n mn ny rt ln ( 105 ).

Lp PSG c to thnh trn b mt silic qua kt ta kh ha ( CVD). Qu

trnh sy bin cc lp SiO2 c sn trong mi trng oxi ha giu photpho ( PH3

hay POCl3 ) thnh PSG.

Sau khi ph lp hy sinh ta tip tc ph lp 1 lp silic ln trn lp hy sinh PSG ny.

Ph silic :

Bc 2: Ph cht cm quang photoresist dng ln nn silic :


cng kh nng kt dnh gia b mt silic v cht photoresist sau a khi ln

my quay tc cao gi cht v quay vi tc vi nghn vng/pht


34 Nhm 3 - KT C in t - K56

photoresist vng u trn b mt tm wafer .Thc hin sy kh s b lm bay

hi c trong photoresist.

Bc 3: Qa trnh quang khc ch to tay chuyn 1 v gi :

a mt n cha hnh nh ca tay chuyn v khi va to vo my quang khc

thc hin qu trnh chp chiu.



bc tip theo, vng khng b chiu sng chnh l lp cu trc ca tay chuyn.


ra b phn photoresist b phn hy. Sau thc hin sy kh .


35 Nhm 3 - KT C in t - K56


u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca kh

SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi silicon v to

thnh cn phm bay ln, ng thi ta nhit. Sn phm ca phn ng bay ln s c mt

thit b ht ra ngoi.


mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph, kh 6SF s

c mt n v y, khi c mt n th lung tia plasma khng c tc dng, cn c xung

y th c thng c lp nha bo v c to thnh, ch gi li thnh bn. Cc qu trnh

lp i lp li to nn mt thnh bc rt nh. Qu trnh n mn ch dng li khi gp b mt

PSG.


36 Nhm 3 - KT C in t - K56

Bc 5: Loi b photoresist v n mn bc bay HF:

loi b lp photoresist ta dng dung dch Remover 106 ra lp photoresist.

sau sy kh.

n mn bc bay bng dung dch 49%HF nhm n mn lp PSG nm di cc

thit k sau khi n mn kh.

t Actuator ln gi, nung nng HF nng 49% ln 30-40 . Khi axit s

bc hi mnh lit ln khi v s n mn lp PSG gia trong cc rnh vi tc 240

nm/pht .

Cc sn phm kh to ra c ht ra ngoi. Sau qu trnh bc bay HF Actuator s

c sy kh.


37 Nhm 3 - KT C in t - K56

Hnh 3.4: M hnh aturator nhit in sau khi hon thnh bc 5.

5.Ch to thanh truyn th hai.

Bc 1: Ph lp hy sinh v lp silic cn to hnh:

Ta chn vt liu lm lp hy sinh l PSG. PSG kt ta bo gic trn nn khng

phng, b n mn bi dung dch 49% HF m khng nh hng ti cu trc silic.

chn gia PSG v silic ca dung dch n mn ny rt ln ( 105).

Lp PSG c to thnh trn b mt silic qua kt ta kh ha ( CVD). Qu

trnh sy bin cc lp SiO2 c sn trong mi trng oxi ha giu photpho ( PH3

hay POCl3 ) thnh PSG

Sau khi ph lp hy sinh ta tip tc ph lp 1 lp silic ln trn lp hy sinh PSG ny.


38 Nhm 3 - KT C in t - K56

Ph silic :

Bc 2: Ph cht cm quang photoresist dng ln nn silic :


cng kh nng kt dnh gia b mt silic v cht photoresist sau a khi ln

my quay tc cao gi cht v quay vi tc vi nghn vng/pht

photoresist vng u trn b mt tm wafer .Thc hin sy kh s b lm bay

hi c trong photoresist.


39 Nhm 3 - KT C in t - K56

Bc 3: Qa trnh quang khc ch to tay chuyn 2:

a mt n cha hnh nh ca tay chuyn v khi va to vo my quang khc thc

hin qu trnh chp chiu.



bc tip theo, vng khng b chiu sng chnh l lp cu trc ca tay chuyn.


ra b phn photoresist b phn hy. Sau thc hin sy kh


40 Nhm 3 - KT C in t - K56


u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca kh

SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi silicon v to

thnh cn phm bay ln, ng thi ta nhit. Sn phm ca phn ng bay ln s c mt

thit b ht ra ngoi


mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph, kh 6SF s

c mt n v y, khi c mt n th lung tia plasma khng c tc dng, cn c xung

y th c thng c lp nha bo v c to thnh, ch gi li thnh bn. Cc qu trnh

lp i lp li to nn mt thnh bc rt nh. Qu trnh n mn ch dng li khi gp b mt

PSG


41 Nhm 3 - KT C in t - K56

Bc 5: Loi b photoresist v n mn bc bay HF:

loi b lp photoresist ta dng dung dch Remover 106 ra lp photoresist.

sau sy kh.

n mn bc bay bng dung dch 49%HF nhm n mn lp PSG nm di cc

thit k sau khi n mn kh.

t Actuator ln gi, nung nng HF nng 49% ln 30-40 . Khi axit s

bc hi mnh lit ln khi v s n mn lp PSG gia trong cc rnh vi tc 240

nm/pht .

Cc sn phm kh to ra c ht ra ngoi. Sau qu trnh bc bay HF Actuator s

c sy kh.


42 Nhm 3 - KT C in t - K56

Hnh 4.5:M hnh sau khi hon thnh


43 Nhm 3 - KT C in t - K56

Chng IV:Kt Lun

Qua thi gian tm hiu v cc lnh vc vi c in t chng em c nhng hiu bit nht

nh v ngnh m mnh ang theo hc, thng qua bi tp ln chng em t c kt

mt s kt qu nht nh:

Mt s k nng lm vic nhm

xut tng thit k c mt c cu micro motor

Tm hiu v cc phng gia cng MEMS

Tuy nhin bn cnh nhng g t c chng em vn cn nhiu thiu st

Kh nng ng dng c cu vo thc t cn hn ch

Vic tnh ton cc kch thc cn hn ch cha tht chnh xc

nh hng pht trin:

Tip tc hon thin c cu

Ti u ha.

Gim hiu in th vo tit kim nng lng.


44 Nhm 3 - KT C in t - K56

Ti liu tham kho

1. TS.Nguyn Nam Trung , C s cng ngh vi c in t v vi h thng , Nh xut

bn khoa hc k thut H Ni 2001.

2. PGS-TS. Phm Hng Phc , Bi ging mn hc Nhp mn vi c in t v

Thit k h thng vi c in t , B Mn C S Thit K My V Robot, Vin

C Kh, i hc Bch Khoa H Ni.

3. Nguyn Tun Khoa, Slide Tnh ton cc h dn ng trong MEMS.

4. TS.Trng c Phc, Slide bi ging CAD/CAM/CNC II, i hc Bch Khoa H

Ni.

5. Nguyn Tin Dng, Bo co Hi ngh c hc KT 9-4-2014_Nguyn Tin Dng.

6. Vin k s in, in t, Bo co JOURNAL OF

MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 2, JUNE 2001

7. Ti liu hc Solidworks v phn mn khc c t hc trn Youtube.

Thiet Ke He Thong

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