Tadin for Process and Equipment Optimization Back Start Feb. 2008 Last view All rights reserved to...

Tadin for Process and Equipment Optimization

All rights reserved to Tadin – Tal Advanced Instruments Ltd. [email protected], www.tadin.co.il 1

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by better utilizing their production assets

helping our customers

to increase profitabilityto increase profitability

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Good tools Good tools make good wafersmake good wafers

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The basic concept:The basic concept:



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Excursions:Excursions: The big killer The big killer

Dumping off your ‘good’ wafers - Dumping off your ‘good’ wafers - the most painful loss.the most painful loss.

It often comes in lot of lots,It often comes in lot of lots, ……and it’s unpredictable! (?)and it’s unpredictable! (?)

Most excursions are predictable !!Most excursions are predictable !!

Tadin can predict many of them !!Tadin can predict many of them !!

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Are Excursions really unpredictable???Are Excursions really unpredictable???



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EExcursion xcursion PPreventionrevention by Real Real-time vigilance

Tadin’s Technology:Tadin’s Technology:

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Integrated Process and Machine Monitoring and Analysis SystemWith real-time process watchdog and built-in historical analysis tools.

Can perform independently or be integrated into a networked system.



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All tools have built-in Excursion Prevention.Why add external system?

Tools are generic, process is not final, future problems are unknown.

Fact: Specific untreated ‘killers’ are detected late in production.

Tool manufacturers are slow to change.

The tool computers are overloaded with control tasks – Can not handle high rate real-time data analysis.

Engineers need flexibility and control over EP.

Many malfunctions are control dependent – redundancy is needs.

There are some good reasons:

EP requires expertise: Not tool manufacturers’ core business

.

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Data are directly collected from sensors.

Data are also collected from SECS or files.

The Tadin EP data source flexibility: The Tadin EP data source flexibility:

Data can be collected from in-situ metrology tools

Tadin can collect data from various sources, at various rates and levels, depending on the tool, EP requirement, specific problems, etc.

Data can be collected from boards, connectors, etc.

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Example: ProGuard on VDF* yellow areas by Tadin

TadinStatus Panel

StationController

StationController

StationController

StationController

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BlockController

SECS to / from Host

COM4

COM5COM6COM7

DataBackups

Isolation layer

TadCenter

Network users

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w.w.w users

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Tadin LAN

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* Kokusai Vertron-III



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TadCenter

Tool SECS

to SC

MachineIntrfce

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Typical Modules

Loader

Pro

Gu

ard

Ma

ste

r

Typical Wet Station

ProGuard Tadin

General. Module

Tadin Hub

Example: Tadin EP system on Wet Stations

Fab LAN

Local Users

Remote Users

W.W.W.

Fab HostDatabase

SecSpyRS232

Tadin internal multi-drop network

More Stations

More Stations

More Stations

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Tadin’s Tool Status Annunciator Panel

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Absolute time scales

Currentrecipe

SECSstatus

Currentmachine

History: minimum one year, 0.1 Sec. Resolution.

Binary

channels

Events

Analog channels bar-

graphs

Alarm message

Some Real-time

data

Current time

Alarm status

Cursors’

information

And much more….

Typical history screen with analog and binary data display and real-time data

channels can be displayed simultaneously

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Typical history screen:Novellus C1 with analog and binary data display and real-time data



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Machine RT active Mimics,

with Excursions

display

RT Lot & Recipe

History search by Time, Lot, Recipe,

Event, …..

Replay historical

data

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Real-time Graphs and Mimics, History ReplayHere: MRC Eclipse



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EP: On-line, real-time process and machine watchHere: Mattson Aspen asher

(Machine: Mattson Aspen Asher)

Typical examples of the EP

watchdog system:

Analog Pressure value

Rate of

pump-down

MFC flow ramp

Rate of End-point

MFC Flow

End-point stabilization

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Time alarm. In this example: Automatic real-time process timing checks

EP: On-line, real-time process and machine watch

(Machine Tegal etcher)


watchdog system:

Timing

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In this example: Automatic real-time process sequence checks

EP: On-line, real-time process and machine watch

Machine: Eaton NV-10 HC Ion Implanter

Excursion checking is active at all times

Auto-learn and check machine sequences and combinations.

Any deviation will generate an alarm.


watchdog system:

Sequence

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Tool Performance Monitoring & Evaluation

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RF ‘ON’ defines actual process time 6 consecutive lots defined by cursors

TadiGuard measures and calculates:

Intrinsic Equipment Efficiency (IEE)

Wafers per Hour

Number of Wafers

Time for 6 consecutive lots:



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On-the-fly Statistical Process Control and predictionIn this example: Western Electric Rules Chart for Rate-of-pumpdown

Machine: Mattson Aspen asher

The Control limits are automatically calculated and set

A distribution

graph is displayed

SPC parameters are

displayed. Some can be

modified.

Standard SPC functions are immediately available

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On-the-fly statistical process control and prediction

Machine: Tegal 903 Etcher

Historical process-time trend

Process-time predictionViolation

Prediction in wafers and

time.

Current time Future

In this example: Process time trend and prediction

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On-the-fly SPC and prediction

Machine: Tegal 903 Etcher

Process-time Histogram

In this example: Process time distribution histogram

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Advanced Process and machine Historical AnalysisTypical AMAT Centura CVD One Chamber’s critical parameters signature data analysis

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Using cursors to measure, calculate

and analyze process and

machine

Using cursors to measure,

calculate and analyze process

and machine

Machine: AMAT Centura



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Advanced Process and machine Historical AnalysisPressure instability in AMAT Centura causing low yield, non-uniform unstable process

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Max Pressure14.1 PSI at 22:18

Min Pressure1.17 PSI at 10:58

Typical 24-hours cycle. Note pressure time-

dependence.



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Special real-time checks and alarm conditionsTypical set-up of special alarm conditions. In this example, monitoring of asher end-point

Machine: Mattson Aspen asher

End-point signal

Stability detected. Process complete.

Complex

alarm

checking

conditions

setup

Alarm message and

event recording

parameters

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Detection of RF Arcing and historical Overlay analysisOverlay: Single and multi-channel overlay analysis, tool matching, etc.

Repetitive overlaid pattern.

Can use analog or binary trigger

point

The number of patterns.

Can set any time span

Can be used for RT EP and for

historical analysis

RF arcing clearly shown

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Waterfall Overlay and Correlation

Basic patternWaterfall overlay

Up to 4 additional

synchronized parameters

Calculated results

The dispersal within each pattern (Sd)

All extracted points’ values

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Data CorrelationX-Y parameter Correlation: Any predefined parameter can be correlated With

any other parameter

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Dependence between

parameters is clearly shown!

The X-Y parameters calculated correlation



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3 Parameters Dependence & CorrelationX-Y-Z parameter Correlation: Any 3 parameters can be inter-correlated

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The X-Y-Z parameters

calculations results

Rotate the X-Y-Z for clarity



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Vacuum Analysis: Calculate system parameters

Net Outgas flowNet Leak

flow

Calculated parameters:Net leakNet outgasVolumeUltimate pressure prediction

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Vacuum Analysis: Calculate system parameters

Calculate net

pumping speed at

pump’s port

Calculate and draw graph of net pumping

speed at pump’s port

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Utilities: Calibrations and Calibration-checksCalibrate Flow, Pressure, Temp, etc. Perform routine Calibration checks.

Typical calibration curve generated and

used by the TadiGuard.

Graphs can be imported and exported.

The graph’s information

The calibration table

The graph can be edited and modified

Graph smoothing tools

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Machine: Eaton NV-10

Machine MimicsUser defined machine real-time mimics

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Tools to show wafers’ status and counts

Vacuum systems and beam

status shown



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And many more performance enhancing features like:And many more performance enhancing features like:

Full event loggingMacros and ShortcutsX-Y displaysHistory by Activity MapPassword systemSoftware filter

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And many user and tool customized systems and features…….



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by better utilizing their by better utilizing their production assetsproduction assets

helping our customersto increase profitabilityto increase profitability

Tadin for Process and Equipment Optimization Back Start Feb. 2008 Last view All rights reserved to...

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