Spectral Measurement Solutions for Industry and Research · model (CGGIJM-GH) covers the region...
Transcript of Spectral Measurement Solutions for Industry and Research · model (CGGIJM-GH) covers the region...
Spectral Measurement Solutions forIndustry and Research
• Fluorescence Spectroscopy
• Gas Analysis
• Plasma Process Monitoring
• Film Thickness Measurement
• Photoluminescence Measurement
• Quantum Yield Measurement
• Fluorescence Lifetime Measurements
• Time-Resolved Spectroscopy
• Time-Resolved Absorption
Spectrum Analysis
Hamamatsu Photonics offers a comprehensive range of products for spectroscopic applications,
covering the UV, Visible and Infrared regions for Industrial, Analytical, Research and OEMs. Our
solutions range from mini-spectrometers and large steady-state spectrometers to gated CCD
spectrometers and ultra-fast streak cameras. All products are built in-house and we can offer
standard or customized component and system based solutions.
Applications include:
Compact CCD-Spectrometers
The compact spectrometers of the PMA series are multichannel
spectrographs that can deliver up to 50 full spectra per second,
each with more than 1000 spectral channels. The devices can be
easily operated with any PC, come fully calibrated and require no
special know-how from the user. They are also used as OEM
devices in industrial environments.
Industrial end-users / Industrial OEM / Research
Plasma Process Monitoring
The Multiband Plasma Monitor (MPM) is a compact device for
the real-time monitoring of plasma etch processes in
semiconductor fabrication and other industrial plasma
applications. It combines sensitive multichannel optical emission
spectroscopy (OES) hardware with extremely powerful data
analysis software and can be operated via a network.
Applications include advanced endpoint control, in-situ detection
of abnormal plasma phenomena, optimization of new processes,
continuous monitoring of chamber condition, optimization of
cleaning cycles, and others.
CCD/CMOS Image Sensors for Spectroscopy
Hamamatsu offers a wide range of advanced image sensors
for spectral measurement applications covering a broad
wavelength range from UV to NIR. In addition to offering
different window materials and filter combinations, we also
offer custom parts on request.
The range of image sensors includes Back-thinned CCDs (for
UV-VIS-NIR), Front-illuminated CCDs (for VIS-NIR), CMOS and
InGaAs (NIR), offering the following features:
Amp array
PPS(passive-pixel sensor)
APS(Active-pixel sensor)
CMOS
S10453 seriesS11637/S12198 series
S1011X series, S390X,S8377/S8378 series
S11638S11639
Binning
RG (resistive gate)
Interline
CCD
S7030 series, S10420-01 series,S10140 series, S11071 series
S11155-2048-01S11156-2048-01
S11151-2048
IR-enhanced S11490
Type Type No. Main Features
Type Type No. Main Features
UV
UV
UV
IR
UV
UV
UV
Highresp.
Highresp.
Highresp.
Highresp.
Highresp.
Highspeed
Highspeed
Highspeed
Highspeed
WDR GLR
GLR
GLR
5V
5V
5V
ES
ES
ES
Lowcost
Lowcost
WDR TEcooled
GLRWDRGLR
GLRWDR GLR
GLRWDR
UV Sensitivity NIR Sensitivity High Sensitivity High-speed Wide dynamic range Good linearity
+5 V single power supply Electronic shutter function TE-cooled type available Low cost
PRELIMINARY FOR OCT
PRELIMINARYBURIED TYPE
PRELIMINARY
• High Quantum Efficiency
• Low noise
• High S/N
• High linearity
• Wide dynamic range
• High-speed readout
Industrial end-users / Industrial OEM
Film Thickness Measurement The Optical NanoGauge is a thickness measurement system based on
spectral interferometry. It operates by purely optical, non-contact,
non-destructive means. The product excels by its high precision
and sensitivity as well as robust use of integrated multiple
analysis methods. We can offer configuration for macro as well
as micro measurements. These features make the product
applicable to a very wide range of materials and applications.
Laboratory / Research
Compact and low cost mini-spectrometers
These are thumb-sized, ultra-compact spectrometer heads developed
by our advanced MOEMS technology. A CMOS image sensor integrated
with an entrance slit is combined with a grating formed on a convex
lens by nano-imprint. They have a package that is easy to be mounted
on a circuit board, so it can be used like a sensor. Features include:
• Thumb size: 27.6mm x 13mm x 16.8mm
• Weight: 9g
• Spectral response range:
340 nm to 750 nm (C10988MA-01)
640 nm to 1050 nm (C11708MA)
• Spectral resolution:
14 nm (C10988MA-01)
20 nm (C11708MA)
• Installation into mobile measurement
equipment
Hamamatsu offers various types of mini-spectrometers designed for
spectral detection in the ultraviolet to the near infrared region – 200
nm – 2550 nm. These include compact and low-cost models, high-
sensitivity models (containing a back-thinned CCD image sensor), and
cooled models with low noise.
Mini-spectrometers can be used in diverse applications including
chemical analysis, colour measurement, environmental measurement
as well as process control on production lines. Hamamatsu also
provides OEM models designed for installation into portable
measuring devices.
The mini-spectrometers cover a wide spectral
response range and provide:
• High-precision measurements
• High throughput
• Ease of use
• Flexibility in measurement setups
• Compact size
• USB connectivity
• Bundled software package
(DLL, device driver, and sample software)
Ultra-compact spectrometers C10988MA-01
and C11708MA for VIS and SW-NIR
Research
Quantaurus Series
The Quantaurus series are compact instruments for measuring the properties of
photoluminescent materials. The new Quantaurus-Tau measures fluorescence lifetimes
as short as 100 ps and the new Quantaurus-QY measures quantum yields faster and
easier than the traditional relative method. The combination of these two instruments
enables a comprehensive characterization of light emitting materials such as fluorescent
probes, LED phosphors, organic metal complexes, OLED materials and quantum dots.
The Quantaurus series can be used to analyse materials in thin film, powder, solid or
liquid form. Liquid samples can be cooled down to -196°C.
The new Quantaurus-QY, based on the established technology of our C9920-02 system, is
a compact instrument for measuring the photoluminescence quantum yield of light
emitting materials. It performs absolute measurements and does not require known
reference standards, as typically needed for the traditional relative method.
Operation is simple and intuitive and the system is fully software controlled. A motorized
mono-chromator allows for easy choice of excitation wavelengths. The ultrasensitive CCD
sensor records the full emission spectrum. The dedicated software offers various analysis
functions including absolute quantum yield measurements, excitation wavelength
dependence, photo-luminescence spectra, photoluminescence excitation spectra, and
calculation of colour co-ordinates.
The Quantaurus-QY comes in two versions featuring different wavelength ranges. The
standard model (C11347-11) covers wavelengths from 300 nm to 950 nm and the NIR
model (C11347-12) covers the region from 400 nm to 1100 nm.
The Quantaurus-Tau is a compact system for routine measurements of fluorescence
lifetimes from sub-nanoseconds to milliseconds with single-photon-counting sensitivity.
Seven pulsed LEDs allow for sample excitation from 280 nm to 630 nm. The two available
models cover a spectral range from 300 nm to 800 nm (C11367-11) and from 380 nm to
1030 nm (C11367-12). As the whole system is software controlled, operation is simple
and intuitive. The dedicated software includes a variety of measurement and analysis
functions and allows fitting of up to 5 exponentials. Furthermore, Quantaurus-Tau
features optional add-ons for performing phosphorescence measurements.
Research
Streak Systems
Several commercial systems are available dedicated for
fluorescence emission measurements, allowing measurements
from the sub-ps to the ms domains.
Just like in conventional photon-counting, the streak method also
records single photons, giving excellent measurement statistics
and large dynamic range, which is important for good data
analysis. Unlike other methods, however, a streak system can
count photons even when there are many photons in a single
fluorescence pulse and records all wavelengths simultaneously.
Recent systems have been even further improved in terms of
repetition rates and sensitivity, complying with even the most
demanding applications.
Many different models cover a wide spectral range from the UV to
the NIR (115 to 1650 nm).
Streak technology has been established for many years as a high-end method for time-resolved spectroscopy.
Streak-based systems offer two major benefits: the unsurpassed temporal resolution, reaching into the sub-ps domain, and
the "2-dimensionality" of the method, yielding superior detection efficiency.
Ultra-Fast Lifetime
Spectrofluorometers
The PicoXspeC system is a streak-based fluorescence spectroscopy
system with sample excitation in the X-ray regime, which is made
possible by employing a special X-ray source emitting short X-ray
pulses of only a few tens of picoseconds duration.
This allows the study of materials used for scintillation and similar
applications without using radioactive substances for excitation.
The system is very compact and fits easily on a table top.
Picosecond X-ray Induced Fluorescence System
www.hamamatsu.com
Main Products
Compact CCD-Spectrometers
Plasma Process Monitoring
CCD/CMOS Image Sensors for Spectroscopy
Film Thickness Measurement
Compact and low cost mini-spectrometers
Ultra-compact spectrometers C10988MA-01 and C11708MA
for VIS and SW-NIR
Quantaurus Series
Quantaurus-QY / Quantaurus-Tau
Streak Systems
Ultra-Fast Lifetime Spectrofluorometers
Picosecond X-ray Induced Fluorescence System
June 2014