www.adnano-tek.com

Pulsed Laser Deposition Laser Heating Manipulator

PLD-18L

UHV Deposition System

FBBEAR system control software is a multifunctional

software to control the whole PLD system, i.e. Manipula-

tor rotation speed, heating program, target revolution, etc.

FBBEAR’s Deposition wizard make it hassle free to save

your experimental recipe, and fully automatize the depo-

sition processes. In addition, it also allow data logging in

order to review past deposition parameters. FBBear also

allows data processing and analysis.

Established in USA since 2007, AdNaNoTek Corporation is the rising leader in ultrahigh vacuum

(UHV) technologies and solutions provider. We specialize in the design and manufacture of state-of

-the-art and fully customizable UHV systems.

Our UHV deposition systems are guaranteed to deposit extremely high quality thin films in terms of

uniformity and purity. With our vast experience in UHV deposition technology, and consistent in-

teraction with our customers: we are sure that we will continue to improve and optimize our prod-

ucts, and be the leading UHV deposition systems provider around the globe.

ABOUT COMPANY

Contact us

TEL: 886-2-22982594

FAX: 886-2-22984812

CHINA MOBILE:+8618362958206

EMAIL: kevin@dualsignal.com.tw

alvin@dualsignal.com.tw

Website: http://www.adnano-tek.com/

3422 Old Capitol Trail,

Wilmington,

DE 19808, USA

We excel in manufacturing fully

customizable UHV systems, such as:

Molecular Beam Epitaxy System (MBE)

Magnetron Sputtering

E-Beam Evaporator

Ion Beam Deposition System (IBD)

Atomic Layer Deposition (ALD)

Integrated UHV Systems

Laser Heating System

FBBEAR SYSTEM CONTROL SOFWARE

P L D - 1 8 S P E C I F I C A T I O N

F E A T U R E

AdNaNotek’s optical trail combined with optical stages and lens is designed for easy adjust-ment and control. The optical cabinet cover have protective plate to avoid any damaged caused by the excimer laser. The optical cabinet has large room inside so the optical system can be modified easily (i.e. change the incident angle, add beam splitters for multi-plume application, etc).

O P T I C A L T R A I L

AdNaNoTek’s Laser MBE (PLD - 18L) system can deposit thin-film with extremely high quality

and a great repeatability. This system allows the target manipulator to rotate and sweep to maxim-

ize the usage of target material. The target position can also be adjusted up and down to optimize

target to substrate distance. And with its special architecture, in-vacuum target exchange can also

be done smoothly.

It is designed with multifunctional coating tool extension compatibility, which allows the system

to be installed with a variety of deposition components, such as effusion cells, sputtering source, e

-beam source, etc. It is also installed with Laser Heating system which can heat up the substrate

>1200°C even in oxygen-/nitrogen-rich atmosphere, while eliminating substrate contamination

due to out-gassing. Finally, FBBEAR control software, provides automated process control, com-

plete data logging, and precise parameter tuning which allows user to have easy operation and reli-

able experimental repeatability.

● 18-inch spherical SS316L chamber

● Base pressure: 5E-10torr

● 1-in sample

● 4-axis manipulator with laser heater

● Heating temperature >1200°C (in 1 atm O2/O3 process gas)

● 6 1-in (or 3 2-in) planetary target holder

● Magnet protected laser viewports

● Turbo pump with rough pump

● Metal leak valves and full range vacuum gauge

● High pressure RHEED system (in-situ epitaxy monitoring)

● Computer with full system control software

● Load-lock with vacuum pumps and gauges

● Large space and additional ports for versatile extensions

1 8 ” U H V P L D C H A M B E R

T A R G E T T R A N S F E R

L A S E R H E A T I N G S Y S T E M

● Laser power: 200W, and Laser wavelength: 980nm ● Working space: up to 1-inch sample ● XYZR 4-axis movement ● ±5° substrate tilt ● Heating temperature > 1200°C (oxygen-/nitrogen-compatible) ● ±1°C temperature stability ● PID temperature control ● Pneumatic substrate shutter ● Real-time temperature monitor by pyrometer ● State-of-the-art and easy operation computer software control

O P T I O N A L U N I T S

Due to the large space and additional ports available, PLD-18 can be installed with a variety of deposition components ● O2/N2 plasma source ● Optical component for excimer laser ● Pre-annealing heating system in load lock ● Lead glass covered for each viewports ● Mechanical particle filter ● Plume manipulation system ● Residue gas analyzer ● Single/dual mask system with z-motion

● Ion beam cleaning/etching ● Pressure control system: upstream, downstream ● Thickness monitor ● Large scale substrate coating mechanism Any specific parts that you need in your experiment can be integrated to PLD-18

H I G H P R E S S U R E R H E E D

F U L L Y S H I E L D E D T A R G E T

SYSTEM

INTRODUCTION