Millimeter-Wave Photonic Techniques: Part I-Photonic Generation of
Product Presentation ExciStarTM M - 100 - Photonic … · Product Presentation ExciStarTM M - 100...
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Product Presentation ExciStar TM M - 100 Compact Size – Big Performance TuiLaser AG UK agents: Photonic Solutions PLC www.psplc.com NEW! 15 mJ @ 157 nm 250 mJ @ 248 nm
Transcript of Product Presentation ExciStarTM M - 100 - Photonic … · Product Presentation ExciStarTM M - 100...
Product Presentation
ExciStarTM M - 100Compact Size – Big Performance
TuiLaser AGUK agents:Photonic Solutions PLC
www.psplc.com
NEW!15 mJ @ 157 nm250 mJ @ 248 nm
TuiLaser is the leading manufacturer of compact excimer lasers
Design objectives
– Compact setup– Economical investment– High stability– Wide application range
ExciStarTM M features include
– Corona PreionizationHigh energy stability with a standard deviation (1 σ) < 2 %Highly homogeneous beam profile, no hot spots
– Magnetic Assist Switch for a long thyratron life time (reduces the peak current load)– Simple and safe operation because of a series of automated check systems and fully
automated gas handling routines, including vacuum pump– Stand alone system – no separate PC for controlling necessary– Alternative remote control via RS 232 (= optical interface) and Windows software greatly
assist both the research user and the system integrator– Optional: Energy Stabilization Monitor
A Special Light Source for a Wide Range of ApplicationsOur Customers Choose TuiLaser’s UV Light Sources Because They Know They Can Count On Their Reliability And Stability
TuiLaser is the leading manufacturer of compact excimer lasers
High Energy Stability as an Effect of the Corona Preionizationmeasured @ 193 nm @ 20 Hz
Energy stability < 1 %!
ExciStar M: Energy / Energy Stability vs. Charging Voltage @ 20 Hz @ 193 nm
0
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24 25 26 27 28 29 30Charging Voltage in kV
Ene
rgy
in m
J
0%
1%
2%
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4%
Ene
rgy
Sta
bilit
y (1
Sig
ma)
Energy in mJ
Energy Stability (1 Sigma, 100 Pulses)
TuiLaser is the leading manufacturer of compact excimer lasers
Long Dynamic Gas Lifetime > 3 Million Shotsmeasured @ 193 nm @ 20 Hz
Gas Lifetime
3 Million Pulses
ExciStar M: Repetition Rate 20 Hz, Energy stabilized @ 80 mJ (193 nm)
0
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0 1 2 3Number of Shots in Million
Cha
rgin
g V
olta
ge in
kV
;P
ower
in W
0%
2%
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10%
Ene
rgy
Sta
bilit
y (1
Sig
ma)
Charging Voltage in kV
Pow er in W
Energy Stability (1 Sigma, 100 Pulses)
TuiLaser is the leading manufacturer of compact excimer lasers
Window Lifetime > 120 Million Shotsmeasured @ 193 nm @ 100 Hz @ 29 kV
0 20 40 60 80 100 1200
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En
ergy
in m
J
Number of Shots in Million
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Energy Energy Stability
Ener
gy S
tabi
lity
in %
(1 S
igm
a)
Extraordinary high
energy stability < 2 %
TuiLaser is the leading manufacturer of compact excimer lasers
0 30 60 90 120 1500
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En
ergy
in m
J
Pulses in million
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Ener
gy s
tabi
lity
in %
Window Lifetime > 150 Million Shotsmeasured @ 248 nm @ 100 Hz @ 29 kV
New gasfill every
~ 6 million pulses
Outstanding high
energy stability < 2 %
TuiLaser is the leading manufacturer of compact excimer lasers
Charging Voltage vs. Energy / Energy Stability
0
50
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22 23 24 25 26 27 28 29 30
Voltage in kV
Ener
gy in
mJ
0
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Ener
gy s
tabi
lity
in %
High Energy Stability as an Effect of the Corona Preionizationmeasured @ 248 nm @ 10 Hz
Energy stability < 2 %!
TuiLaser is the leading manufacturer of compact excimer lasers
Typical Beam Profile (@ 193 nm)
The curves show the intensity profile along the corresponding lines
Vertical dimension ~ 15 mm (FWHM), top hat
Horizontal dimension ~ 4 mm (FWHM), Gaussian5 mm
14 mm
Homogeneous Beam ProfileOne Of TuiLaser‘s Strength Is An Unmatched Excellent Beam Profile Because Of Ongoing Developments In Excimer Laser Technique
TuiLaser is the leading manufacturer of compact excimer lasers
Typical Beam Profile (@ 248 nm)
The curves show the intensity profile along the corresponding lines
Vertical dimension ~ 15 mm (FWHM), top hat
Horizontal dimension ~ 5 mm (FWHM), Gaussian
Homogeneous Beam ProfileOne Of TuiLaser‘s Strength Is An Unmatched Excellent Beam Profile Because Of Ongoing Developments In Excimer Laser Technique
TuiLaser is the leading manufacturer of compact excimer lasers
• The ExciStarTM M incorporates years of technological improvements resulting in that compact excimer laser. This sustainable, highly trusty and affordable ExciStarTM M meets the requirements for material processing, micromachining, Fiber Bragg Grating writing, laser ablation, pulsed laser deposition, all kinds of spectroscopy, and a variety of their challenges
• The ExciStarTM M benefits fromCorona Preionization, magnetic assist switch, metal / ceramic tube technology
to minimize costs,to optimize lifetimes andto maximize stability.
Your Competitive Advantage with our Highly Developed Technology Building The Best UV-Light-Sources Is Our Job – Making It Even Better Is Our
Obsession!
TuiLaser is the leading manufacturer of compact excimer lasers
ExciStar M 1)
Laser Medium F 2 ArF KrF XeCl XeF
Wavelength 157 nm 193 nm 248 nm 308 nm 351 nm
Tube Design
Preionization Technique
Energy max. 15 mJ 150 mJ 250 mJ 100 mJ 150 mJ
Average Power max. 1.4 W 15 W 25 W 10 W 15 W
Repetition Rate max.
Pulse Duration
Energy Stability
Beam Dimensions 4 mm x 7 mm (FWHM)
Beam Divergence < 1.5 mrad x 1.5 mrad (FWHM)
Dynamic Gas Lifetime (pulses) 3) 3.5 million 3 million 6 million 6 million 3 million
Window Service (pulses) 2),3) 120 million 120 million 150million 130 million 120 million
Tube Service (pulses) 2),3)
Dimensions (LxWxH)
Weight
Gas pressure (absolute)
Laser Tube Volume
Cooling
Ambient Tempearature
Electrical1) All specifications are typical data and subject to change without notice in order to provide the best product possible2) Pulses between service intervals (replacement if required). 3) Laser operates at 50% of max. energy
12 Liter
Air cooled (water cooling optional)
15 °C to 32 °C (59 °F to 90 °F), not condensing
190 V - 240 V, 50 Hz - 60 Hz, 1000 VA, 16 A, single phase or two phases
1270 mm x 380 mm x 870 mm
190 kg
6000 hPa
σ < 2 % (Standard Deviation)
4 mm x 15 mm (FWHM)
< 1 mrad x 2 mrad (FWHM)
500 million
CeraTube TM midi
Corona Preionization
100 Hz
20 ns (FWHM)
SpecificationsA Global Semiconductor Customer Comments, That „TuiLasers lasers have
solid specs that are backed up by quantitative data...“
TuiLaser is the leading manufacturer of compact excimer lasers
Your UK Contact for Further InformationYou Want To Go Further. You Need A Partner That Can Go The Distance Together With You!
Thank
you
Photonic Solutions PLC40 Captains Road
Unit A2/A3Edinburgh, EH17 8QF
Tel: 0131 664 8122Fax: 0131 664 8144E-mail: [email protected] www.psplc.comThank you! Thank you!
