Observation of interfacial atomic steps during silicon oxidation

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© 1989 Nature Publishing Group

Transcript of Observation of interfacial atomic steps during silicon oxidation

Page 1: Observation of interfacial atomic steps during silicon oxidation

© 1989 Nature Publishing Group

Page 2: Observation of interfacial atomic steps during silicon oxidation

© 1989 Nature Publishing Group

Page 3: Observation of interfacial atomic steps during silicon oxidation

© 1989 Nature Publishing Group

Page 4: Observation of interfacial atomic steps during silicon oxidation

© 1989 Nature Publishing Group