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NNCI: Southeastern Nanotechnology Infrastructure Corridor (SENIC)

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National Nanotechnology Coordinated Infrastructure (NNCI)

16 NNCI Sites13 Partners 17 States

68 Facilities>2000 Tools

NSF Funded2015 - 2020

www.nnci.net

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NNCI Network NNCI Sites Mean (Min – Max)

Unique Facility Users 13,110 819 (158 – 1,660)

Unique External Users 3,37925.8%

211 (51 – 662)26.6% (13.0% - 47.0%)

Industry Users 1,870 117 (26 – 277)External Academic Users 1,365 85 (11 – 443)Average Monthly Users 5,001 313 (43 – 797)New Users Trained 5,271 329 (58 – 695)Facility Hours 1,006,764 62,923 (5.4k – 185k)

External Facilities Hours 228,44122.7% 14,278 (879 – 27.7k)

Hours/User 77 70 (34 – 140)

NNCI Year 3 User Statistics (10/2017-09/2018)

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What is SENIC? http://senic.gatech.edu

Partnership of two major & modern nanotechnology centers in thesoutheastern US:

• Institute for Electronics and Nanotechnology (IEN), an Interdisciplinary Research Institute & former NNIN site at the Georgia Institute of Technology (GT)

• Joint School of Nanoscience and Nanoengineering (JSNN),an academic collaboration betweenNorth Carolina A&T State University (NCA&T) and University of North Carolina, Greensboro (UNCG)

GT-IEN Marcus Nanotechnology Building

JSNN Building @ Gateway Univ. Res. Park

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Marcus Nanotechnology Building @ Georgia Tech

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SENIC Focus Areas & Usage Statistics

SENIC Year 3(10/17-09/18)12 months

Total Users 1,311Internal Users 1,048External Users 263 (20%)Avg. Monthly Users 546New Users Trained 386

Total Hours 99,118Hours/User 76

# of Tools 300+# of Staff 37

• Top-down (up to 200 mm wafers & 300 mm panels)and bottom-up micro/nano-fabrication

• Advanced microscopy and surface analysis

• Analytical chemistry

• Materials testing

• Nanobiology

+ Staff Expertise

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Example: GT-IEN Micro/Nanofab. Facility

Hours 3/18–2/19

Optomec Aerosol Jet 200 3,255Cambridge Plasma ALD 1 3,148CVD FirstNano SiGe Furn. 2,936Nanoscribe 3D Litho. 2,592Heidelberg MLA150 2,404Denton E-beam Ev. 2,159Tystar Mini Tube 1 1,878Tystar Mini Tube 2 1,815Denton Discovery Sp. 1,290Vision RIE 1 1,214

Hours 3/18–2/19

Cambridge Plasma ALD 2 1,178Hitachi S4700 FE-SEM 1,174Tystar Poly Furnace 3 1,090STS AOE ICP 1,069Karl Suss MA-6 TSA 996CHA E-beam Ev. 2 953Unifilm Sputterer 894Oxford End-Point RIE 838Unaxis PECVD 826Woollam Ellipsometer 789

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Example: GT-IEN Materials Charact. Facility

Hours 3/18–2/19

Pananalytical Empyrean 3,251Hitachi SU8230 FE-SEM 2,691FEI Nova 200 FIB/SEM 2,669Thermo K-Alpha XPS 2,454Hitachi HD2700 TEM 2,203Pananalytical MRD XRD 2,149Pananalytical Alpha-1 XRD 2,073Hitachi HT7700 TEM 1,797Zeiss Ultra60 FE-SEM 1,727Renishaw Raman Spectr. 1,627

Hours 3/18–2/19

Hitachi SU8010 FE-SEM 1,408FEI Tecnai F30 TEM 1,389Veeco AFM 1,175Tescan Mira FE-SEM 1,122Agilent Nanoindenter 1,039Hysitron TriboIndenter 894IONTOF SIMS 894LEO 1530 SEM 603Kratos XPS 595JEOL 100 CX-II TEM 534

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What Type of Data is Monitored or Recorded?

1. Facility data: T, %RH, exhaust, N2 & other bulk gases, scrubber, …Main Goal: Safe & efficient operation of facility

2. Facility/tool use data: user information, tool/facility hours Main Goal: User billing & usage tracking

3. Process data: tool parameters; in-situ monitoringMain Goal: Safe and reliable operation of tool; easier maintenance

4. Output data: tool parameters; characterization dataMain Goal: Research data for user

• Limited analysis of data from different sources

• Limited real-time analysis of data for process optimization, preventive maintenance

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SENIC User Facility “Challenges”

• Users– More users with “non-traditional” background

requiring more tool/process training– More users that spend less time (on average) in facilities– More demand for “remote work” done by staff

• Tools & Processes– More non-conventional tools: material growth, 3D nanoprinting,

aerosol and inkjet printing– More new materials & processes that need to be evaluated– More users on individual tools with individual processes

• In Summary: More diverse user base & more diverse tool, material and process base

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http://www.nnci.nethttp://senic.gatech.eduhttp://www.ien.gatech.eduhttp://jsnn.ncat.uncg.edu

Thank You!

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