nHT series Diffusion Pumps Product Brochure€¦ · Edwards is a world leader in the design,...

nHT SERIES HIGH-THROUGHPUT DIFFUSION PUMPS

edwardsvacuum.com

THE PARTNER OF CHOICEEdwards is a world leader in the design, technology and manufacture of vacuum pumps for industrial applications with over 100 years’ history.

We believe in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions. Using the most innovative and up-to-date modelling techniques, we can optimise the pumping configuration for customers to provide a system design giving the maximum performance in the most reliable and cost-effective way.

EDWARDS nHT Diffusion pumps

nHT SERIES NEXT-GENERATION HIGH-THROUGHPUT DIFFUSION PUMPSThe Edwards nHT series diffusion pumps provide stable high-throughput vacuum performance. Designed for optimum energy efficiency, flexibility and low maintenance, the nHT series is the ideal solution for a variety of demanding industrial applications.

ENERGY EFFICIENCYThe nHT series diffusion pumps have been designed for optimum heat transfer to the oil, resulting in faster heat-up times and a significant reduction in energy consumption. In addition, the use of the Energy Efficiency Controller (EEC) provides further reduction in power consumption – up to 30% without the loss of pumping performance.

Cut energy consumption by up to 30%

• 100% power during the warm-up phase

• 70% power on reaching the required oil temperature

• Further energy reduction with the use of standby mode

• USB interface and Ethernet connectivity

• Ease of operation and control

Energy Efficiency Controller


Optimised pumping speed and high throughput with good stability between 10-2 and 10-3 mbar – critical for many applications.

Performance and stability

Smart temperature control and on-board sensors as standard ensure minimum load with a longer lifetime for heaters and oil. Increased productivity through long maintenance intervals with non-wearing components and easy-to-change heater cartridges.

Reliability

Significant energy savings through innovative heating design providing faster warm-up time. When used with the Energy Efficiency Controller a further energy saving can be achieved – up to 30%.

Economy

Available in both ANSI and ISO flange options with voltage variants to cover global requirements. A broad range of accessories is available.

Flexibility

The Energy Efficiency Controller enables ease of use and operating convenience along with effective monitoring with USB and Ethernet interface.

Control

BENEFITS

ADVANTAGES• High-throughput pumping performance

• Energy efficiency

• Fast warm-up time

• High system uptime

• Easy to operate

• Low and simple maintenance

• Control capability via Energy Efficiency Controller (optional accessory)


APPLICATIONS

Metallurgy• Sintering, precision investment casting (PIC)

Heat treatment• Quenching, tempering, annealing

Welding• E-beam welding, plasma welding

Coating• Glass coating• Surface coating (plasma, spray, surface activation,

hard coating, reflective, decorative, plasma deposition)

• Roll/web coating, optical/ophthalmic coating, display coating

Vacuum drying

Research & development


High-precision jet assembly ensures high stability and consistent jet performance

Terminal box/Energy Efficiency Controller interface provides connectivity options for both the OEM and end-user

Converging backing coneincreases the critical backing pressure, enabling effective cross-over from the backing pump

Oil sight glass combined with a drain and fill port allows easy viewing and maintains oil level and quality

Innovative cartridge heating systemprovides optimum heat transfer into the oil resulting in faster heat-up times, reducing energy consumption

Ejector stageensures high-pressure pumping speed and greater resistance to pressure surges from the backing pump

Integrated cold capprevents fluid back migration to ensure a clean vacuum system

FEATURES


* Measures as per DIN 28 427

nHT10 nHT16 nHT20 nHT32 nHT35

ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO

Inlet connection 10˝ ANSI 320 ISO-K 16˝ ANSI 500 ISO-K 20˝ ANSI 630 ISO-K 32” ANSI 800 ISO-F 35˝ ANSI 1000 ISO-F

Backing connection 2˝ ANSI 63 ISO-K 3” ANSI 100 ISO-K 4˝ ANSI 160 ISO-K 6” ANSI 200 ISO-K 6” ANSI 200 ISO-K

Pumping speed* Nitrogen <10-4 mbar l/s 3,000 6,800 10,000 21,000 30,000

Pumping speedArgon <10-4 mbar l/s 2,750 6,350 9,000 18,000 26,000

Pumping speedHelium <10-4 mbar l/s 4,500 9,500 17,000 30,000 42,000

Gas throughput mbar l/s 8 11 17 36 36

Operating range mbar < 10-1 to 10-7 < 10-1 to 10-7 < 10-1 to 10-7 <10-2 to 10-7 < 10-2 to 10-7

Ultimate pressure (Edwards 704) mbar < 5 x 10-7 < 5 x 10-7 < 5 x 10-7 < 10-6 < 10-6

Critical backing pressure (Edwards 704) mbar 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1

Heating power kW 3.6 7.2 10.8 21.6 21.6

Heating cartridges qty 3 6 9 18 18

Warm-up period min < 15 < 15 < 25 < 25 < 25

Weight kg 105 185 210 570 720

Recommended oil Edwards 704

Oil l 3.0–4.0 3.5–4.5 5.5–7.0 9.0–11.0 9.0–11.0

Recommended holding pump E2M40 E2M40 E2M40 E2M80 E2M80

Recommended backing pump nES200, E2M80, EDS200, EH1200

nES200, E2M175, EDS200, EH1200

nES300, E2M175, EDS300, EH1200

nES630, E2M275, GXS450, EH2600

nES630, E2M275, GXS450, EH2600

nHT series diffusion pumps

Voltage variantnHT10 nHT16 nHT20 nHT32 nHT35

ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO

380–415V, 230V (50 Hz/60 Hz) B31130400 B31132400 B31230400 B31232400 B31430400 B31432400 B31630400 B31632400 B31530400 B31532400

440–480V (50/60 Hz) B31130460 B31132460 B31230460 B31232460 B31430460 B31432460 B31630460 B31632460 B31530460 B31532460

nHT Series Accessories

Inlet valve B61130100 B61132100 B61230100 B61232100 B61430100 B61432100 B61630100 B61632100 B61530100 B61532100

Extended cold cap - B61233100 B61433100 B61633100 B61533100

Inlet baffle - B61234100 B61434100 B61634100 B61534100

Energy Efficiency Controller (EEC)

B61001100 (accessory cables not included)

Cooling fail switch 12284

Water flow monitor 500006623

TECHNICAL DATA

ORDERING INFORMATION


10-2 102 100 101 10-1

ls-1

100

1,000

10010-5 mbar10-4 10-3 10-2

0

0.01

0.1

1

10

100

10-1

mba

r ls-1

10,000

N2ArHe

N2ArHe

nHT101.

1. Pumping speed 2. Throughput

2.

10-2 102 100 101 10-1

ls-1

100

1,000

10010-5 mbar10-4 10-3 10-2

0

0.01

0.1

1

10

100

10-1

mba

r ls-1

10,000

N2ArHe

N2ArHe

nHT161. 2.


PERFORMANCE CURVES

nHT10 nHT16

10-2 102 100 101 10-1

ls-1

100

1,000

10010-5 mbar10-4 10-3 10-2

0

0.01

0.1

1

10

100

10-1

mba

r ls-1

10,000

100,000

N2ArHe

N2ArHe

nHT201. 2.


nHT20

10-2 102 100 101 10-1

10010-5 mbar10-4 10-3 10-2 10-1

N2ArHe

N2ArHe

nHT321. 2.

ls-1

100

1,000

0

0.01

0.1

1

10

100

mba

r ls-1

10,000

100,000


nHT32

10-2 102 100 101 10-1

10010-5 mbar10-4 10-3 10-2 10-1

N2ArHe

N2ArHe

nHT351. 2.

ls-1

100

1,000

0

0.01

0.1

1

10

100

mba

r ls-1

10,000

100,000


nHT35


480

200

300

172

407

788

152

nHT10 ISO nHT10 ANSI

ANSI 10“

788

172

300

200

480

3706885295

359

95

320 ISO-K

63 ISO-KANSI 2”

6885295

359

7074

471

341.5

300

42.5 o

20o

25o

2.5o

471

341.5

300

42.5 o

20o

25o

2.5o

70

4x 19

120.5 PCD

362 PCD 12x 24

552

200

300

265

597

1092

191


ANSI 16“

1092

265

300

200

480

550

88116

610

652

130

500 ISO-K

100 ISO-KANSI 3”

98116

610

652

60o

610

420

300

68

102

33.5 o

15o

15o

60o

610

420

30068

102

33.5 o

15o

15o

152.5 PCD

4x 19

nHT10

nHT16

DIMENSIONS


1292

458

300

200

636

68

30° 33°462

635

300

15° 15°15°

6907397111

584

651

180

152,6

636

200

300

457

700

1292

230

30068

33°30°

15° 15°15°

3°20x 18=360

32

462

635

19


ANSI 20“630 ISO-K

160 ISO-K ANSI 4”

4897111

584

8 x Ø 19

nHT20

nHT32


ANSI 32“800 ISO-F

200 ISO-K ANSI 6”

Ø920

1740

674

500

56102

116

901

738

Ø1000

Ø965

738

901 67

450

020

4

1740

Ø1000

15 1515

1031

598

30068

33

30

56102

116

204

816

15 1515

1031

598

30068

33

30

8x 45

Ø18

816

8 x Ø 19

241


SERVICE AND SUPPORTThe nHT series diffusion pumps are designed with a number of features that enable routine maintenance to be conducted, ensuring optimum performance and safe operation. Scheduled routine maintenance shall include activities deemed beneficial to the continued performance and longevity of the product. All work must be completed by suitably trained personnel. Before any maintenance operations are carried out, the pump must be isolated from the electrical supply and vacuum system.

Our field service teams carry out essential maintenance, repair and commissioning service at your site. We can also assist site staff in performing routine maintenance.

We offer original spares kits for the nHT series diffusion pumps. This enables your maintenance team to start work with all the materials they need to complete the job successfully, saving time, reducing cost and extending the life of your product.


ANSI 35“1000 ISO-F

200 ISO-K ANSI 6”

Ø1120

1832

801

500

56102

116

908

808

1515

15

68

30

33

1073

640

1,932x 11,25

Ø14

300

Ø213

Ø1000

Ø1060

808

908 80

150

020

4

1832

Ø1000

2,128x 12,9

Ø23

15 1515

1073

640

30068

33

305610

211

6

204

8 x Ø 19

241

nHT35


edwardsvacuum.com

Part of the Atlas Copco Group

Publication Number: 3602 402 0 01 © Edwards Limited 2020. All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited.

Whilst we make every effort to ensure that we accurately describe our products and services, we give no guarantee as to the accuracy or completeness of any information provided in this brochure.

Edwards Ltd, registered in England and Wales No. 6124750, registered office: Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK.

GLOBAL CONTACTS

EMEAUK +44 1444 253 000 (local rate) 08459 212223Belgium +44 1293 60 3350France +33 1 4121 1256Germany 0800 000 1456Italy + 39 02 48 4471Israel + 972 8 681 0633Russia +7 495 933 55 50 Ext. 1800/1803 +8 800 775 80 99

ASIA PACIFICChina +86 400 111 9618India +91 20 4075 2222Japan +81 47 458 8836Korea +82 31 716 7070Singapore +65 6546 8408Taiwan +886 3758 1000

AMERICASUSA +1 800 848 9800 Brazil +55 11 3952 5000

nHT series Diffusion Pumps Product Brochure€¦ · Edwards is a world leader in the design,...

Documents

Transcript of nHT series Diffusion Pumps Product Brochure€¦ · Edwards is a world leader in the design,...