MPI - Halbleiterlabor für Physik und für extraterrestrische Physik R. Hartmann SDW 2005 Taormina...
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Transcript of MPI - Halbleiterlabor für Physik und für extraterrestrische Physik R. Hartmann SDW 2005 Taormina...
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
A pnCCD detector system forhigh speed optical applications
Robert Hartmann 1 , Hubert Gorke 2 ,Norbert Meidinger 3 , Heike Soltau 1 and Lothar Strüder 3
1) PNSensor GmbH, Römerstraße 28, 80803 München, Germany 2) Forschungszentrum Jülich, Leo-Brandt-Straße, 52428 Jülich, Germany3) Max-Planck-Institut für extraterrestrische Physik, Giessenbachstraße, 85741 Garching, Germany
Semiconductor Detector Workshop 2005 Taormina / June 19 – 24, 2005
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
• Principles of pnCCD
• Optical properties
• Detector format and geometry
• Readout and data acquisition
• Measurements and Performance
• Summary and outlook
Overview
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Fully depleted 3-phase CCD Back side illuminated Cooled to -40º C .. -80º C (typ.) Small detector capacitance ≈ 25 fF
→ low noise
Principles of the pnCCD One integrated FET per channel Channel-Parallel-CCD
→ fast readout p-implanted registers High radiation hardness
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
• Principles of pnCCD
• Optical properties
• Detector format and geometry
• Readout and data acquisition
• Measurements and Performance
• Summary and outlook
Overview
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
pnCCD for optical applications
back illuminated detector unstructured entrance window results in a homogeneous responsitivity
application of an ultra-thin rectifying implant leads to a high
QE in the blue and UV region
easy to apply an anti-reflective coating
entire detector volume of 450µm is radiation sensitive high quantum efficiency in the red and NIR region
fringing effects are negligible
small detector capacitance high signal to noise ratio
• highest electric field at readiation entrance side narrow PSF
back illuminated detector unstructured entrance window results in a homogeneous responsitivity
application of an ultra-thin rectifying implant leads to a high
QE in the blue and UV region
easy to apply an anti-reflective coating
entire detector volume of 450µm is radiation sensitive high quantum efficiency in the red and NIR region
fringing effects are negligible
small detector capacitance high signal to noise ratio
• highest electric field at readiation entrance side narrow PSF
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Measured and modelled reflectivity of CCD entrance window
: Measured data
: Model of Si-SiOx-SiO2
: Model of pure Si-SiO2
Interface
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Internal quantum efficiency
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Measurement of optical response at room temperature
Reflectivity of Silicon resp. Si/SiO2 ≈ 30%
Use layer stack of SiO2/Si3N4 as ARC
Technology allows to taylor responsitivity over a wide wavelength range
Technological compatible ARC:
High QE in visible, maximum at 580nmOptimum QE in NIR regionBlue and UV optimized (50% @ 300nm)
Standard entrance window,consisting of a thin SiO2 layer
Optimized for CsI(Ti) scintillator readout (λ = 548nm)
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
150 mm Wafer of recent fabrication
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Fringing effects due to multiple light reflection between detector front and back side
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
• Principles of pnCCD
• Optical properties
• Detector format and geometry
• Readout and data acquisition
• Measurements and Performance
• Summary and outlook
Overview
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Schematic layout of 51 m CCD with double-side readout
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
51m pnCCD with a double-sided readout,mounted onto a ceramic substrate
image area = 13.0×13.5 mm2
chip area = 16.0×31.0 mm2 51 m pixel size
256×264 pixel plus 2×4 “light insensitive” columns readout transfer to both sides
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Performance overview
- 55º C for all measurements aboveOperating temperature
2000, 3000, 4000fps : 2.3 e¯ (rms)Transfer binning (×2, ×3, ×4)
70 Mpixel/s , split on 8 readout nodesPixel rate
Normal mode → < 500fps : 1.8 e¯ (rms)
Fast mode → 1000fps : 2.3 e¯ (rms)Readout noise
70 dBDynamic output range
Normal mode: 15 μs/row, i.e. 500fps
Fast mode: 6.5 μs/row, i.e. 1000fps Readout time
100 %Fill factor
> 105 e¯ / pixelCharge handling capacity
≈ 1 · 10-5 → total charge loss < 0.15 %CTI
25 μs/image (split to both detector sides)Fast transfer time
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Brief overview
• Principles of pnCCD
• Optical properties
• Detector format and geometry
• Readout and data acquisition
• Measurements and Performance
• Summary and outlook
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
CAMEX Amplification- and Readout-Chip
• Multi-correlated double-sampling filtering (MCDS)• Signal processing of all channels in parallel (132)• Serialized readout parallel to analogues signalprocessing• Selectable gains and operating modes• Electronic noise contribution less than 1 e-
• Readout-speed per node up to 10MHz (i.e. 6.6µs per line on two readout nodes)
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Data acquisition and real-time correction 1000 frames / sec. 264 lines / frame 264 pixel / line 70 Mpixel / sec. !!! 140 MB/sec.
Split on 4 DAQ boards á 17.5 Mpixel / sec. 2×14 bit flash-ADC
Pipelined data processingin fast FPGA processor forreal-time data correctionand reduction
Output of 1st CCD line is available with a latency time < 40 s
constructing frame MIP and cluster analysis latency ~ 1.2 msec
Example for a SH detector:
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Overview Camera Controller
cPCI-BusFib
er
Inte
rface
AD
C-M
od
ul 3
AD
C-M
od
ul 4
Seq
uen
cer
PS
-Con
trol
Front-End-Boards(incl. clock-drivers)
CAMEX
pnCCD-Chip
Power-Supplies
30 in total, free-to-ground,
PC controlable, incl. monitor
Linux PC
2 2 32
AD
C-M
od
ul 2
2
AD
C-M
od
ul 1
2
19’’ cratedouble height
80 MB/s300m
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Sequenzer 1 … 4 ADC-Boards á 2 ADCsOptical InterfaceSpare for Voltage Controller
Data acquisition electronic system
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Overview
• Principles of pnCCD
• Optical properties
• Detector format and geometry
• Readout and data acquisition
• Measurements and Performance
• Summary and outlook
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Spectroscopic soft X-ray performance of pnCCD
Operating Temperature = -55° C Overall noise contribution : 2.3 e-
All events reconstructed FWHM for singles: 45eV
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Low and uniform noise performance66×264 pixel, ⅛ of 51m CCD (“worst” section)• 1 of 4 output nodes on one readout side• image plus storage area• operating temperature = -55°C• “1000fps” - timing scheme
Mean noise = 2.3 electrons (rms)98.8% of all pixel exhibit less than 2.7 e- noise100% are below 3.1 e-
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Repetively readout of n lines with signal
merely transfer with no readout lines w/o signal
readout of next n lines
and so on …
40×40 SH with 5×5 Pixel:
1kHz → 1.3kHzframe rate
Increase readout speed for dedicated applications
.
.
.
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MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Conclusion
pnCCDs exhibit a high quantum efficiency from the optical to NIR region
device with 256×264 (13.0x13.5mm2) image size and a double side readout was successfully tested for a frame rate of 1000 fps
total readout noise of 2.3e- (RMS) was achieved in this mode at an operating temperature of -55ºC
binning in transfer direction allows 2kHz, 3kHz, ... frame rates with same noise figures due to very low leakage current
low and homogeneous noise performance over entire area (no bright or hot pixel, even at higher temperatures)
optical photon counting possible down to ≈ 8 γ/pixel
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005
Back to the beginning
Long term stability of pnCCD detector aboard XMM-Newton (1999):
Total area = 36cm2 all 12 Sub-CCDs are still operating same operating parameters (T = -90°C) quantum efficiency unchanged noise performance unchanged slight radiation damage as expected: CTI
FWHM after 5 years in orbit:
Al-K (1.5 keV): 110 eV → 111 eVMn-Kα (5.9 keV): 155 eV → 160 eV
← 6 cm
→
MPI - Halbleiterlabor für Physik und für extraterrestrische Physik
R. HartmannSDW 2005Taormina21.06.2005