Microstructure analysis by high quality FIB technique...Microstructure analysis by high quality FIB...
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Microstructure analysis by high quality FIB technique / Best Technical Support Contribution Award Awardee Tomoyo Nakao ( Nagoya University, Advanced Characterization Nanotechnology Platform) Overview The sample processing method using FIB is a key technology for observing microstructure. Until now, microstructural analysis of various samples has been conducted mainly by orthogonal FIB-SEM. In this presentation three topics were selected as follows; three-dimensional structure observation of biological samples using FIB-SEM Cut & See technique, cross-sectional observation of alloy particles for next-generation solder, and Ir nanopillar structure analysis. 3D observation of biological samples using FIB-SEM Cut&See technique TEM sample preparation using FIB High Voltage Electron Microscope Laboratory, Institute of Materials and Systems for Sustainability Nagoya University Tomoyo Nakao FIB, FIB - SEM, 3D, EDS, TEM, STEM TEM sample preparation using an Argon ion beam (a) (a) (b) Gaイオン方向 面B 面A (b) (c) (d) Carbon depo. Ag Sn Cu EDS Map (e) (c)
Transcript of Microstructure analysis by high quality FIB technique...Microstructure analysis by high quality FIB...
Microstructure analysis by high quality FIB technique
/ Best Technical Support Contribution Award
Awardee Tomoyo Nakao (Nagoya University, Advanced Characterization Nanotechnology Platform)
Overview
The sample processing method using FIB is a key technology for observing microstructure. Until now, microstructural analysis of various samples has been conducted mainly by orthogonal FIB-SEM. In this presentation three topics were selected as follows; three-dimensional structure observation of biological samples using FIB-SEM Cut & See technique, cross-sectional observation of alloy particles for next-generation solder, and Ir nanopillar structure analysis.
3D observation of biological samples using FIB-SEM Cut&See technique TEM sample preparation using FIB
High Voltage Electron Microscope Laboratory, Institute of Materials and Systems for SustainabilityNagoya UniversityTomoyo Nakao
FIB, FIB-SEM, 3D, EDS, TEM, STEM
TEM sample preparation using an Argon ion beam
(a)
(a) (b) Gaイオン方向
面B
面A
(b) (c) (d)Carbon depo.
Ag
Sn
Cu
EDS Map(e)
(c)
![Microstructure Characterization of Cr(N,C) Coating ... · The thin foils for transmission electron microscopy were prepared using standard Focused Ion Beam (FIB) technique [4]. The](https://static.fdocuments.net/doc/165x107/5fc637ca83f31c12d37f836c/microstructure-characterization-of-crnc-coating-the-thin-foils-for-transmission.jpg)
