Micormachine: #2 (Oct. 9)

１． Various applications of micromachines- Information input- Information output- Telecommunications- Medicine- Biotechnology- Precise measurement- Power generation- Others

2. Health information system using wearable sensors

                                             

Invention of Integrated Circuits by Jack Kilby

http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

The First IC

In 1958, at Dallas R&D Center if Texas Instruments7/16 x 1/7 (inch)2 On a germanium substrate

http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

Micromotor

Microphone

Fingerprint Sensor

Shigematsu et al, NTT Labs.

Fingerprint Sensor

Thermal Machining

Schematic Structure SEM

Miniature Display Using Micromirrors

Fast mirror -- 550 m minor axisDriven at resonance (6.2 kHz)

Slow mirror -- driven at videorefresh rate of 20 Hz

R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

Micro Display for Virtual Reality

R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

Telecommunication ： Optical Switch

Structure of Optical Switch

M. Makihara, et al., J. Lightwave Tech. Vol. 17. No. 1, pp. 14-18, 1999.

Medicine ： Micro Syringe

OKa, et al., Kagawa University

Silicon wafer

Optical fiber

Needle made of SiO2

800 m

Micro Gas Flow Sensor

Response time ： 2 msResolution ： 1 mm/secSmall size ： 1.7 mm2

Sensing range ： 0 ～ 10 ， 0 ～ 30 m/secLow power consumption ： Battery operated

Micrograph of Micro Gas Flow Sensor

Sensor Heater Sensor

SEM of Micro Gas Flow Sensor

Micro Gas Sensor

H. Baltes, et al., IEEE Spectrum, September, pp. 35-38, 1998.

DMD Pixel Structure

Projection Display Using DMD

Surface-Conduction Emitter Display

Watch: Typical Wearable Instrument

- Usually people are not aware of wearing- Attached on human skin- Works continuously- Linked to time information

- Other wearable things: ring, glasses

→Air pressure, altitude, water depth

Pressure Sensor

Silicon Silicon

Vacuum Vacuum

Wearable Pulse Oximeter

Non-invasive and real-time measurement of oxygen concentration in blood

C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.

Liquid Injection Device

C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.

Microfluid Device Using Si and Plastic

Source: Ministry of Public Management, Home Affairs, Posts and Telecommunications

AgricultureEnvironment

Medicine, Health Security Disaster Prevention

Others

Images of Sensor Network Applications

Sensing

Analog and digitalsignal processing

RF transceiver

Sensing

Analog/digitalsignal processing

RF transceiver

Sensing

Analog/digitalsignal processing

RF transceiver

Sensing

Analog/digitalsignal processing

RF transceiver

Sensing

Analog/digitalsignal processing

RF transceiver

Sensing

Analog/digitalsignal processing

RF transceiver

Network module

(Sensor module)

(Sensor module)

(Sensor module)(Sensor module)

(Sensor module)

InternetWirelesslink

PC

N-interfacer(Sensor module)

Ubiquitous Sensor Network Concept

SRAM

Powerregulator

RFtransceiver

chipset

Oscillator

RFcontroller

ADC

Base boardRS232C

Powerregulator

USB

Ether

PC

Sensor

MPU

Battery

Base board

RF board

Battery

Optional

303.825 MHz

(a) (b)

Block Diagrams

Sensor module (Ni3)

Network module

Sensor Network Using Ni3

腕時計のケースに入れた Ni3

Eyeball movement sensor

Rheometer

Cardiograph

Acceleration sensor

Vibration

Pulseoxymeter

Vital data, Warning

Skin thermometry sensorSkin conductivity sensorBody-movement- accelerometerMicro vibration accelerometer

Wearable PC (with a built-in PHS ）

Electroencephalograph

Send information by radio

（ admission, secure communication ）

Feet pressure sensor

Server for wearable PC

Internet

Information browserfor cliants

Health care system

Medical institutions

Fire stations

Vital data management systemMuscle-sound sensor

・ Dispersion to different kinds of instruments・ Security・ General purpose search 　　　 engine・ accumulation and management of vital data

・ correlation analysis of actions, living bodies, and environmental information・ management of attributed data about actions and health

Healthcare System Using Wearable Sensors

Current Status of Wearable Sensors