MT5009 Analysing High-Tech Opportunities

New Generation MEMS Gas Sensor

Wu Bo A0056024RWang Xiaoxu A0055839RHuang Guozhu A0132443RGao Qianmei A0147219AZheng Jin A0129422L

Content of Presentation

1. Introduction

2. Important Dimensions of Performance & Cost for Gas Sensor

3. Tech Details of New Gen MEMS Gas Sensor

4. Future Possibilities & Challenges in Gas Sensor

5. Entrepreneurial Opportunities

6. Conclusion

1. Introduction- Gas Sensor

Gas pressure

Environment humidity

Gas type and concentration

Gas temperature

Gas Sensor Roadmap Micro/Nano level gas sensor Integrated with other ICs on the

same chip

MEMS sensor

hub

Process control industries

Life and working Environmental monitoring

Fire detection

Current Applications of Gas Sensor Alcohol breath tests

Poison gas detection

Grading of agro-products like coffee and spices

Food process and storage

Industrial emissions monitoring

Medical diagnosis

Future Applications of Gas Sensor Underwater gas detecting

Smartphone & Wearable devices

Detection of hazardous explosives

Improvements of New Generation MEMS Gas Sensor

▪System on Chip to support multi-gas detection

▪Higher Sensitivity

▪ Lower Power Consumption

▪Smaller sizeLower cost

Less material required

Easier mass production

Less manufacturing cost

Market Demand and Development Trend of Gas Sensors

2014-2021 Market Potential Demand Forecast of Gas Sensors in Different Applications

Lifetime and Application Comparison of Different Gas Sensor

*IR, Infra-red Sensor*MOS, Metal Oxide Semiconductor*ChemFET, Chemical Field-Effect Transistor

IR

Million USD

Infra-Red(IR) gas sensors could cover all types of applications with longer life time

2. Important Dimensions of Performance & Cost for Gas Sensor- Benchmarking & Comparison

Requirements for New Gen MEMS Gas Sensor Reliable and stable gas sensor for safety purpose. High performance on Sensitivity and accuracy. Super feature size for CMOS integration requirement. Good selective on different gases detection.

Safety battle to plug the leak Environment battle to avoid Volkswagen incident on 2015

HVAC control and monitor battle to create safe human environment

Personal mobile/wearable analysis for some special protection

Falling Cost & Increasing Sensitivity of Gas Sensors

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20

30

40

50

60

0

200

400

600

800

1000

1200

2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017

Gas sensors development trend

MEMS IR gas sensor immerged out in market but still single gas with big size and high cost

Tunable for Multi gases on good selectivity with wafer level packaging

Conventional gas sensor by chemical-electrical methods (single option)

Nano-level develop direction on NEMS gas sensor by new novel material introduced

Cost (USD $)

Co

st($

)

Sensitivity(PPM)

Sensitivity(PPM)

Cost (USD $)

Best Solution - On-Chip-Platform Sensor

Smaller Size & Lower Cost

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Single unit

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The trend of MEMS hub chipimmerged out which is integratedwith CMOS and supported by newsoftware.

MEMS level gas sensors will causepower consuming decreased andsensitivity, selective increasedsignificantly by different sensorsunited.

The total price will be droppeddown by mature mass productionfinally.

On-Chip-Photonics gas sensor non-dispersive IR Electrochemical

Size 1.5 mm × 2.0 mm × 0.9 mm ~ cm3 1 mm × 1 mm x Xmm

Price Below USD 10 Above USD 50 Above USD 50

Type Multi-gas detection Single gas detection Single gas detection

Sensitivity < 100 ppb < 50 ppm up to 100 ppb

Response time: < 5 s < 30 s < 5 s

Significant Stability Very stable Significant output drift overtime

Drift down 2% per month

EnvironmentalDependency

Environmental Independent Ambience and temperature dependent

Ambience and temperature dependent

Power consumption < 30 mW 120 ~ 600 mW < 30 mW

Others CMOS compatible, ultra-compact size, and good selectivity

High selectivity, but big package size

Simple, low cost, but very poor selectivity.

On-Chip-Platform Gas Sensor – Superior Performance

Important Dimensions of On-Chip-Platform Gas Sensor

Potential Improvement

Large size (~ cm3) => Smaller size (~ mm3)

High cost (40 ~ 800 US$) => Lower cost (<10 US$)

Potential Market to Take over

Conventional hybrid NDIR gas sensor in consumer electronics

Potential Customers to Fulfil

Globalfoundies, Bosch, P&G, etc(i.e.Singapore leader ship on MEMS research)

High Level Architecture Design

Conventional hybrid optical gas sensor (NDIR gas sensor) On-Chip-Platform scale gas sensor solution

3. Tech Details of New Gen MEMS Gas Sensor- Wafer level and package level MEMS gas sensor

New Gen MEMS Gas Sensor

New Generation MEMS Gas

Sensor

3. 3D Packaging

Technology

1. MEMS Universal Platform

(Wafer Level)

2. IC Integration

New MEMS IR Sensor – Future Development Direction

Thermal-conduct

Electrochemical

Metal oxide

IR sensor

Size Sensitivity

High

Low

Power consumption

Lifetime

New IR MEMS sensor

Price

Multi-gas detection on a single-chip

Various sensors RH, temperature, humidity…

Broad-band tunable filter, switch, MMI …

Light Source:LED, laser chip, black-body, SLED…

Detector: Thermopile, PD.

CO2, CO, NO2, CH4, Hydrocarbons, VOCs…

High sensitive sensing block

Technology 1: MEMS + Photonic=> New MEMS IR gas sensor (wafer level)

Working Principle of New MEMS IR Gas Sensor

Gas sample

Si3N4

+ -

Step 1• LED generate the IR. The feature size and power will

be reduced down significantly.

Step 2• IR ray can be tuneable as the range of wavelength to

detect the target gases.

Step 3• IR ray has less loss by waveguide design and will be

propagation by absorbing the target gas.

Step 4

• The photo detector sensitive materials can detect the spectrum of evanescent wave on feedback of dark current

Step 5• The current signal will be converted into Digital that

to be transmitted for system

Technology 2: System on Chip Design with New MEMS IR Gas Sensor

Separate Sensors with System(CMOS)

One chip Integrated with Humidity, Temperature, RF Sensors & IC System

Technology 3: 3D Advanced Packaging (wafer level) on New MEMS IR Gas Sensor

Novel Wafer level IR sensor PackagingWith Hermetically Sealed Si Cap wafer

Solder ballTSI or TGISubstrateWith Getter layer

Silicon filter/lensSilicon CapIR sensor Wire

Polymeric Die attach

Vacuum

Wafer level Hermetic seal

PassiveComponents

Passives

Terminal

TO-5 and FR4 substrate

Silicon filter/lens

Metal cap

IR sensor

Wire

Polymeric Die attach

Inert/vacuumenvironment

Solder seal ring

Solder attach

Sealant

Conventional IR Gas Sensor Module

Cheaper cap materials (Silicon)

Miniaturized feature size

Better process-ability

Lower price (wafer level packaging)

Reliability increased(by hermetic vacuum

seal)

Packaging as back end technology is to make all chips including CMOS soldered on the same print board assembly which works for devices.

Advantages of New MEMS IR Gas Sensors

Gas sensor size scaled down to

1mm

Sensitivity is below 50PPb

Multi gases sensing covered from Toxic gases,

combustion gases, even VOC.

Price will be dropped down to 10 dollars in next

several years

4. Future Possibilities & Challenges in Gas Sensor

Future Possibilities

• Nano-scopic devices of less than 100nm (NEMS)

• New Material (e.g. Graphene, CNTs, etc.)Smaller Size

• Special Configuration Requirements (e.g. crucial environmental conditions, military applications, etc)

• Integration with IoT

Customized Design

Smaller Size - From MEMS to NEMS

Nanoelectromechanical systems(NEMS) is aimed to scale downsensor size to below 100nmlevel.

An advantage to integrate withCMOS which is less than 15nmand compatible with existingCMOS line for mass productionin the future.

Graphene is a single or few atomic layer(s) of carbon, possessing exotic properties such as ultra-high carrier mobility, high thermal conductivity, ultrahigh stiffness and strength.

New Material - Graphene

Graphene Reduces the baseline stabilization time to a few seconds Greatly reduces cross-sensitivity and enhances selectivity of gases Enables ultra-low power consumption for portable handheld devices Reduce the size

• Special Configuration Requirements• Gas detection under crucial environment• Deep sea gas sensing• Outer space application

• Integration with IoT• Industry automation with gas sensing• Smart building gas sensing

Customized Design

▪ Immature Material Technology▪ High R&D Cost

▪ Lack in manufacturing technology

▪ Lack in back-compatibility▪ Unwillingness to switch

Potential Challenges

5. Entrepreneurial Opportunities

Entrepreneurial Opportunities for New Gen MEMS Gas Sensor

• Manufacturers and Equipment suppliers for new gen MEMS gas sensor

• New generation of gas sensing device

• Integration between new MEMS gas sensor and smart devices

Hardware

• Program for MEMS gas sensor designhouse

• Development of apps and analytic software to analyze gas data

Software

• Big data storage and analysis serviceService

Entrepreneurial Opportunities for New Gen MEMS Gas Sensor in Various Industries

New Gen MEMS Gas

Sensor -Everywhere

FoodIndustry

Offshore & Chemical Industry

Environment

Medicare

Wearables & Smartphone

Security & Military

Opportunities in Food Industry Smart Fridge

▪ Monitoring food conditions, e.g. freshness, spoilage

Robotic arm for fruit plucking

▪ Automatically pluck the ripe fruits by sensing odour

Gas sensor for food processing

▪ Sort out rotten fruits or food by mechanical hand on auto-production

Food warehouse & fruit garden monitoring service

▪ Odour monitoring system with big data analysis

Opportunities in Offshore & Chemical Industry Smart helmet / smart mask

▪ Identification of toxic gas or waste in offshore and construction site

Gas leak detector sensor

▪ Monitoring gas or chemical transport routine under water or underground

▪ Find new gas mine under water or underground

Opportunities in Environment Gas sensor for environment control

▪ Air quality monitoring

▪ Testing ground water for odours

▪ Analysis of fuel mixtures

▪ Identification of household odours

▪ Monitoring industrial emissions and waste

Opportunities in Medicare Respiratory disease diagnosis tool▪ Diagnose respiratory infections such as

pneumonia▪ Diagnostic tool for lung cancer

Kidney disease diagnosis tool▪ Diagnose kidney disease by distinguishing

traces of blood in urine samples

Artificial-electronic nose▪ Reproduce smell sensitivity for patients

Healthcare monitoring service▪ Analyse patients’ breath and providing

professional consultation and monitoring service for them

Opportunities in Wearables & Smartphone New generation of wearable devices with built-in MEMS gas sensor,

e.g. Smart glass, Smart watch

Built-in MEMS gas sensor in smartphone and UAV

Gas sensing accessories / attachments for smartphone

Apps for smartphone to analyze gas / odour data

Opportunities in Security & Military Military gas sensor (“Electronic dog nose”)

▪ Detection of hazardous chemicals and explosives

e.g. Triangulate the location of bombs to within a few metres of theirlocation in less than a few seconds through electronic nose andcomputer system

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6. CONCLUSION

Conclusion New generation MEMS gas sensor with following improvements:

▪ Smaller size

▪ Lower cost

▪ Faster response

▪ Better sensitivity

▪ Longer life time

New materials such as Graphene, and customized design will be availableto be integrated with MEMS gas sensor in the future.

New generation MEMS gas sensor technology enables wider opportunitiesand application in various industries.

ANY QUESTION?