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    EE141

    MetricsEECS 115: Intro VLSI Design

    MOS Transistor Review1

    EECS 115: Intro. VLSI DesignECS 115: Intro. VLSI Design

    MOS Transistor ReviewMOS Transistor Review

    Fadi J. Kurdahi

    EECS Dept.

    UCI

    [Adapted from Rabaeys Digital Integrated Circuits, Copyright 2003 Prentice Hall/Pearson]

    {Adapted from Mary Jane Irwin, Penn State]

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    MetricsEECS 115: Intro VLSI Design

    MOS Transistor Review2

    Overview of Last Lectureverview of Last Lecture Digital integrated circuits experience exponential

    growth in complexity (Moores law) and performance

    Design in the deep submicron (DSM) era creates new

    challenges

    Devices become somewhat different

    Global clocking becomes more challenging

    Interconnect effects play a more significant role

    Power dissipation may be the limiting factor

    Our goal in this class will be to understand and design

    digital integrated circuits in the deep submicron era

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    MetricsEECS 115: Intro VLSI Design

    MOS Transistor Review3

    Goal of this chapteroal of this chapter Present intuitive understanding of device

    operation Introduction of basic device equations

    Introduction of models for manualanalysis Introduction of models for SPICE

    simulation Analysis of secondary and deep-sub-

    micron effects Future trends

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    MetricsEECS 115: Intro VLSI Design

    MOS Transistor Review4

    Semiconductorsemiconductors Pure semiconductors have low and equal

    concentrations ofelectrons and holes lowelectrical conductivity

    Si has 4 valence electrons Phosphorous, arsenic, etc.. Have 5 electrons provide one free electron

    Silicon doped w/these material becomes n-type

    Dual argument applies for trivalent material(e.g. Boron, gallium) p-type

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    MetricsEECS 115: Intro VLSI Design

    MOS Transistor Review5

    The Diodehe Diode

    n

    p

    p

    n

    B ASiO2

    Al

    A

    B

    Al

    A

    B

    Cross-section of pn-junction in an IC process

    One-dimensionalrepresentation diode symbol

    Mostly occurring as parasitic element in Digital ICs

    Doped

    w/acceptor

    impurities

    (e.g. Boron).Mostly Holes

    Doped

    w/donor

    impurities

    (e.g.

    Phosphorus).Mostly

    Electrons

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    MOS Transistor Review6

    Depletion Regionepletion Regionhole diffusion

    electron diffusion

    p n

    hole drift

    electron drift

    ChargeDensity

    Distance

    x+

    -

    Electrical

    xField

    x

    PotentialV

    W2-W1

    0

    (a) Current flow.

    (b) Charge density.

    (c) Electric field.

    (d) Electrostaticpotential.

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    Forward Biasorward Bias

    x

    p n 0

    n p 0

    - W 1 W 20

    p

    n

    (W

    2

    )

    n - r e g i o np - r e g i o n

    L p

    d i f f u s i o n

    Typically avoided in Digital ICs

    P region potential raised wrt N region

    More electrons diffuse n->p, holes p->n

    Current flow p->n

    hole diffusionelectron diffusion

    p n

    hole drift

    electron drift

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    Reverse Biaseverse Bias

    x

    pn0

    np0

    -W1 W20

    n-regionp-region

    diffusion

    The Dominant Operation Mode

    n region potential raised wrt p region

    Less electrons diffuse n->p, holes p->n

    Mostly drift Current flows p->n: very small

    hole diffusionelectron diffusion

    p n

    hole driftelectron drift

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    Review: Diodeeview: Diode The ideal diode equation (for both forward and reverse-

    bias conditions) isID = IS(e

    VD

    / T 1)

    where VD is the voltage applied to the junction

    a forward-bias lowers the

    potential barrier allowing

    carriers to flow across the

    diode junction a reverse-bias raises the

    potential barrier and the

    diode becomes nonconducting

    T = kT/q = 26mV at 300K

    IS is the saturation current of the diode

    +

    -

    VD

    -0.5

    0.5

    1.5

    2.5

    -1 -0.75 -0.5 -0.25 0 0.25 0.5 0.75 1

    ID

    (mA)

    VD (V)

    Diode Animation

    http://www-g.eng.cam.ac.uk/mmg/teaching/linearcircuits/diode.htmlhttp://www-g.eng.cam.ac.uk/mmg/teaching/linearcircuits/diode.html
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    Diode Currentiode Current

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    Models for Manual Analysisodels for Manual Analysis

    VD

    ID = IS(eVD/T 1)

    +

    VD

    +

    +

    VDon

    ID

    (a) Ideal diode model (b) First-order diode model

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    Junction Capacitanceunction Capacitance

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    Diffusion Capacitanceiffusion Capacitance

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    Secondary Effectsecondary Effects

    25.0 15.0 5.0 5.0VD (V)

    0.1

    ID(

    A)

    0.1

    0

    0

    Avalanche Breakdown

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    Diode Modeliode Model

    ID

    RS

    CD

    +

    -

    VD

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    SPICE ParametersPICE Parameters

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    Review: Design Abstraction Levelseview: Design Abstraction LevelsSYSTEM

    GATE

    CIRCUIT

    VoutVin

    CIRCUIT

    VoutVin

    MODULE

    +

    DEVICE

    n+

    S D

    n+

    G

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    What is a Transistor?hat is a Transistor?

    VG S

    V T

    Ro n

    S D

    A Switch!

    |VGS|

    An MOS Transistor

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    MOS Transistors -OS Transistors -Types and Symbolsypes and Symbols

    D

    S

    G

    D

    S

    G

    G

    S

    D D

    S

    G

    NMOS Enhancement NMOS

    PMOS

    Depletion

    Enhancement

    B

    NMOS with

    Bulk Contact

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    The MOS Transistorhe MOS TransistorPolysilicon

    Aluminum

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    The NMOS Transistor Cross Sectionhe NMOS Transistor Cross Sectionn areas have been doped with donorions

    (arsenic) of concentration ND - electrons

    are the majority carriers

    p areas have been doped with acceptor

    ions (boron) of concentration NA - holes

    are the majority carriers

    Gate oxide

    n+

    Source Drain

    p substrate

    Bulk (Body)

    p+ stopper

    Field-Oxide

    (SiO2)n+

    Polysilicon

    Gate

    L

    W

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    Switch Model of NMOS Transistorwitch Model of NMOS TransistorGate

    Source

    (of carriers)

    Drain

    (of carriers)

    | VGS |

    | VGS | < | VT | | VGS | > | VT |

    Open (off) (Gate = 0) Closed (on) (Gate = 1)

    Ron

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    Switch Model of PMOS Transistorwitch Model of PMOS TransistorGate

    Source

    (of carriers)

    Drain

    (of carriers)

    | VGS

    |

    | VGS | > | VDD | VT | | | VGS | < | VDD |VT| |

    Open (off) (Gate = 1) Closed (on) (Gate = 0)

    Ron

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    Threshold Voltage Concepthreshold Voltage ConceptS D

    p substrate

    B

    GVGS

    +

    -

    n+n+

    depletion

    regionn channel

    The value of VGS where strong inversion occurs is called

    the threshold voltage, VT

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    The Threshold Voltagehe Threshold VoltageVT = VT0 + (|-2F + VSB| - |-2F|)

    where

    VT0 is the threshold voltage at VSB = 0 and is mostly a function of the

    manufacturing process

    Difference in work-function between gate and substrate material, oxide

    thickness, Fermi voltage, charge of impurities trapped at the surface,dosage of implanted ions, etc.

    VSB is the source-bulk voltage

    F = -Tln(NA/ni) is the Fermi potential(T = kT/q = 26mV at 300K is thethermal voltage; NA is the acceptor ion concentration; ni 1.5x1010 cm-3 at

    300K is the intrinsic carrier concentration in pure silicon)

    = (2qsiNA)/Cox is the body-effect coefficient (impact of changes inVSB) (si=1.053x10

    -10F/m is the permittivity of silicon; Cox = ox/tox is the gateoxide capacitance with ox=3.5x10-11F/m)

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    The Threshold Voltagehe Threshold Voltage

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    The Body Effecthe Body Effect

    0.4

    0.45

    0.5

    0.55

    0.6

    0.65

    0.7

    0.75

    0.8

    0.85

    0.9

    -2.5 -2 -1.5 -1 -0.5 0

    VBS (V)

    VT(

    V)

    q VSB is the substrate bias

    voltage (normally positive for n-

    channel devices with the body

    tied to ground)

    q A negative bias causes VT to

    increase from 0.45V to 0.85V

    q Can use this trick to help withpower consumption reduces

    leakage currents (but slows down

    the gate)

    q

    VSB always has to be largerthan 0.6V in an NMOS device;

    otherwise the source-body diode

    becomes forward biased

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    Transistor in Linear Moderansistor in Linear ModeS

    D

    B

    G

    n+n+

    Assuming VGS > VT

    VGS VDS

    ID

    x

    V(x)- +

    The current is a linear function of both VGS and VDS

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    Voltage-Current Relation: Linearoltage-Current Relation: LinearModeode

    For long-channel devices (L > 0.25 micron)

    When VDS VGS VTID = kn W/L [(VGS VT)VDS VDS

    2/2]

    where

    kn = nCox = nox/tox = is the process transconductanceparameter(n is the carrier mobility (m2/Vsec))

    kn = kn W/L is the gain factorof the device

    For small VDS, there is a linear dependence between VDS

    and ID, hence the name resistive orlinearregion

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    Transistor in Saturation Moderansistor in Saturation ModeS

    D

    B

    G

    VGS VDS > VGS - VT

    ID

    VGS - VT- +n+ n+

    Pinch-off

    Assuming VGS > VT

    VDS

    The current remains constant (saturates).

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    Voltage-Current Relation:oltage-Current Relation:Saturation Modeaturation Mode

    For long channel devices

    When VDS VGS VTID = kn/2 W/L [(VGS VT)

    2]

    since the voltage difference over the induced

    channel (from the pinch-offpoint to the source)

    remains fixed at VGS VT

    However, the effective length of the conductive

    channel is modulated by the applied VDS, so

    ID = ID (1 + VDS)

    where is the channel-length modulation (varies

    with the inverse of the channel length)

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    Long Channel I-V Plot (NMOS)ong Channel I-V Plot (NMOS)

    0

    1

    2

    3

    4

    5

    6

    0 0.5 1 1.5 2 2.5

    I D( A

    )

    VDS (V)

    X 10-4

    VGS = 1.0V

    VGS = 1.5V

    VGS = 2.0V

    VGS

    = 2.5V

    Linear Saturation

    VDS = VGS - VT

    Q u a d ra ticd e p e nd e nce

    NMOS transistor, 0.25um, Ld = 10um, W/L = 1.5, VDD = 2.5V, VT = 0.4V

    cut-off

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    Current-Voltage Relationsurrent-Voltage RelationsLong-Channel Deviceong-Channel Device

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    Long Channel I-V Plot (NMOS)ong Channel I-V Plot (NMOS)

    0

    1

    2

    3

    4

    5

    6

    0 0.5 1 1.5 2 2.5

    I D( A

    )

    VDS (V)

    X 10-4

    VGS = 1.0V

    VGS = 1.5V

    VGS = 2.0V

    VGS

    = 2.5V

    Linear Saturation

    VDS = VGS - VT

    Q u a d ra ticd e p e nd e nce

    NMOS transistor, 0.25um, Ld = 10um, W/L = 1.5, VDD = 2.5V, VT = 0.4V

    cut-off

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    A model for manual analysismodel for manual analysis

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    Short Channel Effectshort Channel Effects

    0

    10

    0 1.5 3

    (V/m)

    n

    ( m/ s )

    sat =105

    Constant

    velocity

    Constant mobility(slope = )

    q For an NMOS device with L of .25m, only a couple of voltsdifference between D and S are needed to reach velocity

    saturation

    c=

    q Behavior of short channel device mainly due to

    q Velocity saturation

    the velocity of the

    carriers saturates due

    to scattering (collisions

    suffered by thecarriers)

    5

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    Voltage-Current Relation:oltage-Current Relation:Velocity Saturationelocity Saturation

    For short channel devicesLinear: When VDS VGS VT

    ID = (VDS) kn W/L [(VGS VT)VDS VDS2/2]

    where

    (V) = 1/(1 + (V/cL)) is a measure of the degreeof velocity saturation

    Saturation: When VDS = VDSAT VGS VTIDSat = (VDSAT) kn W/L [(VGS VT)VDSAT VDSAT2/2]

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    Velocity Saturation Effectselocity Saturation Effects

    q VDSAT < VGS VT so

    the device enters

    saturation before VDSreaches VGS VT and

    operates more often in

    saturation

    For short channel devices

    and large enough VGS VT

    q IDSAT has a linear dependence wrt VGS so a reduced

    amount of current is delivered for a given control

    voltage

    0

    10

    Short

    channel

    devices

    VDSAT VGS-VT

    VGS = VDD

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    Short Channel I-V Plot (NMOS)hort Channel I-V Plot (NMOS)

    0

    0.5

    1

    1.5

    2

    2.5

    0 0.5 1 1.5 2 2.5

    I D(A)

    VDS (V)

    X 10-4

    VGS = 1.0V

    VGS = 1.5V

    VGS = 2.0V

    VGS = 2.5V

    Line a rd e p e

    nd e nce

    NMOS transistor, 0.25um, Ld = 0.25um, W/L = 1.5, VDD = 2.5V, VT = 0.4V

    Early Velocity

    Saturation

    Linear Saturation

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    MOS ID-VGSS Characteristicsaracter st cs

    I D( A)

    q Linear (short-channel)

    versus quadratic (long-channel) dependence of

    ID on VGS in saturation

    q Velocity-saturation

    causes the short-

    channel device to

    saturate at substantially

    smaller values of VDS

    resulting in a substantialdrop in current drive

    (for VDS = 2.5V, W/L = 1.5)

    0

    1

    2

    3

    4

    5

    6

    0 0.5 1 1.5 2 2.5VGS (V)

    long-channel

    quadratic

    short-channellinear

    X 10-4

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    Short Channel I-V Plot (PMOS)hort Channel I-V Plot (PMOS)

    -1

    -0.8

    -0.6

    -0.4

    -0.2

    0

    0-1-2

    I D(A)

    VDS

    (V)

    X 10-4

    VGS = -1.0V

    VGS = -1.5V

    VGS = -2.0V

    VGS = -2.5V

    PMOS transistor, 0.25um, Ld = 0.25um, W/L = 1.5, VDD = 2.5V, VT = -0.4V

    q All polarities of all voltages and currents are reversed

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    A unified modelunified modelfor manual analysisor manual analysis

    S D

    G

    B

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    Simple Model versus SPICEimple Model versus SPICE

    0 0.5 1 1.5 2 2.50

    0.5

    1

    1.5

    2

    2.5x 10

    -4

    VDS

    (V)

    ID(

    A)

    VelocitySaturated

    Linear

    Saturated

    VDSAT=VGT

    VDS=VDSAT

    VDS=VGT

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    Transistor Modelransistor Modelfor Manual Analysisor Manual Analysis

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    The MOS Current-Sourcehe MOS Current-SourceModelodel

    VT0(V) (V0.5) VDSAT(V) k(A/V2) (V-1)

    NMOS 0.43 0.4 0.63 115 x 10-6 0.06

    PMOS -0.4 -0.4 -1 -30 x 10-6 -0.1

    S D

    G

    B

    ID

    ID = 0 for VGS VT 0

    ID = k W/L [(VGS VT)VminVmin2/2](1+VDS)

    for VGS VT 0

    with Vmin = min(VGS VT, VDS, VDSAT)

    and VGT = VGS - VT

    q Determined by the voltages at the four terminals and

    a set of five device parameters

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    The Transistor Modeled as a Switchhe Transistor Modeled as a Switch

    0

    1

    2

    3

    4

    5

    6

    7

    0.5 1 1.5 2 2.5

    VDD (V)

    Req

    (O hm)

    x105

    S DRon

    VGS VT

    VDD(V) 1 1.5 2 2.5

    NMOS(k) 35 19 15 13

    PMOS (k) 115 55 38 31

    (for VGS = VDD,

    VDS = VDDVDD/2)

    Modeled as a switch with

    infinite off resistance and a

    finite on resistance, Ron

    q Resistance inversely

    proportional to W/L (doubling

    W halves Ron)

    q For VDD>>VT+VDSAT/2, Ron

    independent of VDD

    q Once VDD approaches VT,

    Ron increases dramatically

    Ron (for W/L = 1)

    For larger devices

    divide Req by W/L

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    MOS CapacitancesOS CapacitancesDynamic Behaviorynamic Behavior

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    Dynamic Behavior of MOSynamic Behavior of MOSTransistorransistor

    DS

    G

    B

    CGDCGS

    CSB CDBCGB

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    The Gate Capacitancehe Gate Capacitance

    tox

    n+ n+

    Cross section

    L

    Gate oxide

    xd xd

    L d

    Polysilicongate

    Top view

    Gate-bulkoverlap

    Source

    n+

    Drain

    n+W

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    Gate Capacitanceate CapacitanceS D

    G

    CGC

    S D

    G

    CGC

    S D

    G

    CGC

    Cut-off Resistive Saturation

    Most important regions in digital design: saturation and cut-off

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    Gate Capacitanceate Capacitance

    WLCox

    WLCox

    2

    2WLCox

    3

    CG C

    CG C S

    VDS

    /(VG S

    -VT)

    CGC D

    0 1

    CG C

    CG C S = CG C DCGC B

    WLCox

    WLCox

    2

    VG S

    Capacitance as a function of VGS(with VDS = 0)

    Capacitance as a function of thedegree of saturation

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    Measuring the Gate Capeasuring the Gate Cap

    2 1.52 12 0.5 0

    3

    4

    5

    6

    7

    8

    9

    103 10

    2 16

    2

    VGS (V)

    VGS

    Gate

    Capacitance

    (F)

    0.5 1 1.5 22 2

    I

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    EE141 MetricsEECS 115: Intro VLSI Design MOS Transistor Review54

    Diffusion Capacitanceiffusion Capacitance

    B ottom

    Side wall

    Side wall

    C hannel

    SourceN D

    C hannel-stop implantNA 1

    SubstrateNA

    W

    xj

    LS

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    Junction Capacitanceunction Capacitance

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    Linearizing the Junctioninearizing the JunctionCapacitanceapacitance

    Replace non-linear capacitance bylarge-signal equivalent linear capacitance

    which displaces equal chargeover voltage swing of interest

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    EE141 MetricsEECS 115: Intro VLSI Design MOS Transistor Review57

    Capacitances in 0.25apacitances in 0.25 mCMOS processMOS process

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    Other (ther (Submiconubmicon ) MOSMOSTransistor Concernsransistor Concerns Velocity saturation Subthreshold conduction

    Transistor is already partially conducting for voltages below VT

    Threshold variations

    In long-channel devices, the threshold is a function of thelength (for low VDS)

    In short-channel devices, there is a drain-induced threshold

    barrier lowering at the upper end of the VDS range (for low L)

    Parasitic resistances resistances associated with the

    source and drain contacts

    Latch-up

    S

    G

    D

    RS RD

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    Subthreshold Conductanceubthreshold Conductance

    0 0.5 1 1.5 2 2.5

    I D(A)

    VGS (V)

    10-12

    10-2

    Subthresholdexponential

    region

    Quadratic region

    Linear region

    VT

    q Transition from ON to

    OFF is gradual (decaysexponentially)q Current roll-off (slope

    factor) is also affected by

    increase in temperature

    S = n (kT/q) ln (10)(typical values 60 to 100

    mV/decade)

    q Has repercussions in

    dynamic circuits and for

    power consumptionID ~ IS e(qV

    GS/nkT) where n 1

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    Sub-Threshold Conductionub-Threshold Conduction

    0 0.5 1 1.5 2 2.510

    -12

    10-10

    10-8

    10-6

    10-4

    10-2

    VGS

    (V)

    ID(

    A)

    VT

    Linear

    Exponential

    Quadratic

    Typical values for S:60 .. 100 mV/decade

    The Slope Factor

    ox

    DnkT

    qV

    DC

    CneII

    GS

    += 1,~0

    S is VGS for ID2/ID1 =10

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    Subthresholdubthreshold ID vsvs VGSS

    VDS from 0 to 0.5V

    ID = IS e(qV

    GS/nkT) (1 - e (qVDS/kT))(1 + VDS)

    Subthresholdt res o vsvs

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    ID VDSS

    VGS from 0 to 0.3V

    ID = IS e(qV

    GS/nkT) (1 - e (qVDS/kT))(1 + VDS)

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    Threshold Variationshreshold VariationsVT

    L

    Long-channel threshold Low VDS threshold

    Threshold as a function of

    the length (for low VDS)

    Drain-induced barrier lowering

    (for low L)

    VDS

    VT

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    Summary of MOSFETummary of MOSFETOperating Regionsperating Regions

    Strong Inversion VGS >VT

    Linear (Resistive) VDS

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    Parasitic Resistancesarasitic Resistances

    W

    LD

    Drain

    Draincontact

    Polysilicon gate

    DS

    G

    RS RD

    VGS,eff

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    Latch-upatch-up