L-10 SEM TEM

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    Thanks for your patience

    Electron Microscopy for Material

    Characterization

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    Outline

    Introduction to Electron Microscopy

    Why Electron Microscopy came in existence?

    Physical Principle Involved Components of Electron Microscope

    Comparison of LM, TEM and SEM

    Scanning Electron Microscope -Overview

    Transmission Electron Microscope Overview

    Disadvantages

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    Introduction to Electron Microscopy For imaging of nanoscale objects

    Electron microscopes uses electrons instead of

    photons

    Electrons have a much shorter wavelength than

    photons

    Observe matter with atomic resolution

    Two general types of electron microscopes:1.Scanning Electron Microscope (SEM)

    2.Transmission Electron Microscope (TEM)

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    Magnifications achievable by the different microscopes

    Variation in magnifications achieved by optical,scanning and transmission electron microscope

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    Comparison of Transmission and Scanning

    Electron Microscopic images

    The electron range increases with beam energy.

    Fig.e.g.. The internal structure of the Au deposits examined athigh electron beam energies in SEM and TEM.

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    Incident high KeV electron beam

    Auger Electrons

    Characteristic

    X-Rays

    BremstrahlungSecondary & Backscattered

    Electrons for SEM

    Visible Light

    Direct Beam for TEM

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    SEM

    Electron beam is focused and scanned over thesample surface

    Secondary electrons or back scattered electrons and

    characteristic x-rays from each point of interaction is

    collected by the detector2-D image of spatial distribution of these signals are

    mapped.

    TEMTransmitted electron beam (through sample) forms

    an enlarged image.

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    Instrumentation of Electron Microscope

    Source

    Condenser lens

    Objective lens

    Projector lens (TEM)

    Suitably prepared specimen

    Metallic coating for SEM - conducting

    Thin section for TEM - transmission

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    Condenser Lens

    Collects light to direct it at the small area of theobject.

    It makes the object brighter (better contrast). Enables to control the angle at which the

    illumination reaches the object.

    Converge the light beam on object or canilluminate it with parallel rays.

    Condenser aperture: controls the area ofspecimen to be illuminated.

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    Comparison of LM, TEM and SEM

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    The Scanning Electron Microscope

    Produces a 3-dimensional image of specimenssurface features

    The interactions of the electrons with surface are

    registered, and electrons reflected from surface

    create image.

    Electron beam is scanned back and forth over

    the specimen, imaging only one point at a time.

    PE energy is kept relatively low (1-30 keV) to

    limit the interaction volume in the specimen so

    high sensitivity to surface composition (cannot

    penetrate far into the sample).

    Can be used for thicker specimens

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    Electron Beam Interaction

    Primary electrons generate low energysecondary electrons, emphasize the topographicnature of the specimen

    Primary electrons backscattered produces

    images with a high degree of atomic number(Z) contrast

    Ionized atoms can relax by electron shell-to-shell transitions, which lead to either X-rayemission or Auger electron ejection.

    The X-rays emitted are characteristic of theelements in the top few m of the sample.

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    Scanning Electron Microscopy (SEM) &

    Energy-dispersive X-ray Microanalysis

    (EDAX)

    Impinging electrons interact with the samplesmolecular composition.

    The energy of the impinging electrons is inproportion to the type of electron interactiongenerated from the sample.

    A series of measurable electron energiesproduced are analyzed -creates a spectrum of

    the unique elements .

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    SEM

    Fig. Schematic presentation of SEM

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    Range of Applications of SEM

    Classification of materials

    Failure and defect analysis

    Examination of surface morphology (including

    stereo imaging) Analysis and identification of surface and

    airborne contamination

    Powder morphology, particle size and analysis

    Cleaning problems and chemical etching

    Welding and joining technology

    Paints and coating failures

    Identification and elimination of corrosion andoxidization problems.

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    Applications of SEM

    Fig. The image is of the surfaceof a metal stamper.

    Fig.Fracture section through a pellet oftungsten powder sintered and then

    sputter coated with an alloy of osmiumand ruthenium.

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    EDAX analysis

    Fig.Intermetallic particles from an aluminium alloy and

    EDAX analysis of an Al-rich intermetallic phase.

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    The Transmission Electron Microscope

    Characterization of materials crystal structure

    and microstructure simultaneously by

    diffraction and imaging techniques.

    Electrons scatter when they pass through thin

    sections of a specimen

    Denser regions in specimen, scatter more

    electrons and appear darker

    Transmitted electrons (those that do not

    scatter) are used to produce image

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    TEM

    Fig. Transmission Electron Microscope

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    Common Modes ofOperation of TEM

    Bright Field (BF) Microscopy

    Selected Area Diffraction

    Dark Field (DF)

    Weak Beam (Special case of DF)

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    Bright field & Dark field Image

    Select Direct Beam Select Scattered Electrons

    Resultant Image Resultant Image

    Bright-Field Image Dark-Field Image

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    TEM Images

    Fig. Bright Field & Dark field images

    of a grain in TEM

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    TEM Sample Preparation

    Bulk ceramics

    Mechanical grinding, Polishing, Focused ion

    thinning

    Metals

    Mechanical Grinding, Polishing,Electrolytic thinning

    Organic MaterialsFreeze drying, Ultramicrotomy (cryo)

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    Diffraction Pattern In TEM

    Electrons through specimen are diffracted

    according to Bragg's law,

    n = 2d sin ,

    forming a diffraction pattern.

    Diffraction pattern is Fourier transform of the

    periodic crystal lattice. Information on the periodicities in the lattice,

    and hence the atomic positions.

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    Diffraction pattern in TEM

    Diffraction pattern :

    The planar section of the reciprocal lattice

    perpendicular to beam direction. Also the zone of planes appearing as spots in the

    pattern.

    Different types:

    1. Kikuchi Patterns2.Convergent-Beam Electron Diffraction (CBED)

    3. Ring Patterns

    4.Spot Patterns

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    Diffraction Pattern in TEM

    Ring

    Pattern

    Kikuchi

    Pattern

    Spot

    PatternCBED

    Pattern

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    Imaging in TEM

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    Disadvantages of EM

    Larger ,expensive and destructive technique.

    Some materials are sensitive to electron beam

    radiation, resulting in a loss of crystallinity and mass

    (TEM).

    Sample may be damaged by the electron beam,

    particularly in the case of biological materials.

    Field of view is relatively small- the region analysedmay not be characteristic of the whole sample.

    Sample preparation is very time consuming, sample

    dimension small .