Integrated Molecular Beam Epitaxy System with …Integrated Molecular Beam Epitaxy System with...
Transcript of Integrated Molecular Beam Epitaxy System with …Integrated Molecular Beam Epitaxy System with...
Integrated Molecular Beam Epitaxy Systemwith Liquid Phase Epitaxy and Electrochemical Cell
Model: IMBE300-LPE-EC
TECHNIQUES: OPTIONS:
FEATURES:
200 Stronach Cres., London, Ontario, Canada N5V 3A1Tel. (519) 457-0878, Fax (519) 457-0836
E-mail: [email protected], Web: www.ocivm.com
• No need to transfer to another chamber for analysis after film growth
• Short switching time between deposition and surface science analysis
• Load-lock with transfer arm and sample storage
• Sample transfer compatibility with other systems: SPM and SEM
• X-Ray Photoelectron Spectroscopy (XPS)
• Reflection High Energy Electron Diffraction (RHEED)
• Thermal Desorption Mass Spectroscopy (TDS)
• Low Energy Electron Diffraction (LEED)
• Auger Electron Spectroscopy (AES)
• 7 Deposition Sources
• Liquid Phase Epitaxy (LPE)
• Cyclic Voltammetry
• Surface Preparation
with Thermal Annealing and Ion
Bombardment
X-RaySource
IONPump
X-Y-Z-RManipulator
Deposition Sources
VerticalTransfer
Load-Lock
Sample Transfer
Hemispherical Analyser
LPEReactor
Viewport
LEED-AES Spectrometer
ION Sputter Gun
Electrochemical Cell
Wobble StickRHEEDScreen