Industrial Microscopes - Nikon USA and parts Precision molds FPD Display devices Semiconductors...
Transcript of Industrial Microscopes - Nikon USA and parts Precision molds FPD Display devices Semiconductors...
En
Specifications and equipment are subject to change without any notice or obligationon the part of the manufacturer. April 2005. ©2000-05 NIKON CORPORATION
This brochure is printed on recycled paper made from 40% used material.
WARNINGTO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS
CAREFULLY BEFORE USING YOUR EQUIPMENT.
Printed in Japan (0504-05)T Code No. 2CE-KWFH-7
www.nikon.com/
Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331, Japan
NIKON CORPORATION
NIKON INSTECH CO., LTD.Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku,Kawasaki, Kanagawa 210-0005, Japanphone: +81-44-223-2175 fax: +81-44-223-2182 http://www.nikon-instruments.jp/eng/
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Industrial Microscopes LV150/150A/100D
Industrial Microscopes
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A modular microscopy system for breadth and depth
• Printer heads• Micro sensors
• Optical switches• GMR heads for HDD
• Medium/small PCB• FPC
• Interposer substrates
• Bare wafers• Lithography process• Probe, test processes
• Post-dicing
• Macromolecules, monomeric materials• Organic/inorganic materials
• Polymers • Thin film• Magnetic materials
• Crystals • Metallugraphy
• Precision molds • LCD, color filters• Polarizing filters
• Organic EL
• CCD • CMOS• LCOS • DMD
• LF/TAB • WL-CSP• QFP • SIP• BGA, CSP, FC
VersatilityVersatility
Versatility
Extend your vision
Optical performance
Improved performance
Extendyour
vision
Extendyour
vision
Opticalperformance
Opticalperformance
BasicPerformance
Improvedperformance
• OA equipment parts• Cell phones, PDAs, DSC, PC parts
• Automobiles, aeronautics
MEMS
PCB
Casts and parts
Precision molds FPD Display devices
Semiconductors Materials Packages
Versatility 5
Extensive range of industrial stages andaccessoriesUsers can select suitable models based on sample and stagestroke. All stages are highly durable with triple-plate design.
Dia base unit for diascopic illumination In the Eclipse LV series, the LV-DIA Dia Base is available fordiascopic illumination OEM use. Users can now take fulladvantage of the modular design. A UN2 transformer is usedfor the power supply.
The modular design of the Eclipse LV series
allows an unprecedented level of versatility. The
Eclipse LV series offers flexibility that enables it
to cover a wide variety of products and
applications, extending from development and
quality control to inspection in the manufacturing
process. Users will recognize the superb
performance of the Eclipse LV series when
inspecting semiconductors, FPD, packages,
electronics substrates, materials (material
science), medical devices, cast/metallic/ceramic
parts, precision molds, MEMS, telecommuni-
cations devices, and a wide variety of other
samples.
Versatility
Accepts taller samplesThe maximum sample height can be increased to 82mm from47mm by inserting the LV-CR Column Riser 35 between themain body and arm of the microscope. This feature is usefulfor viewing the surfaces of precision molds, optical materialsand other thick samples.
Non-Nikon stages (LV150 or LV150Aonly) Use of non-Nikon stages, such as the Suruga Seiki B23-60CR,in combination with the LV-SUB Substage 2 allows themicroscope to handle taller samples of up to 116.5 mm,thereby enabling the observation of fiber ends and othertools.
With column riserWithout column riser
Combination of LV-150 with LV-SUB Substage 2and Suruga Seiki B23-60CR stage
82mm47mm
Modular design
LV150 standard combination
Appropriate holder and substage are selected based onsample and stage combination.
Compact industrial stage: LV-S32 3x2 StageThe newly designed LV-S32 3x2 is a compact stage forindustrial microscopes. Its triple-plate design ensures
durability, stability and ease ofuse, even when heavy samplessuch as metallic materials areobserved. The standard glassplate makes this stage suitablefor episcopic and diascopicillumination.
An example of LV-DIA Dia Base built into a taped sample inspection system
LV-DIA Bia BaseLV-S6 6x6 Stage Stroke: 150 x 150 mm
LV-S64 6x4 StageStroke: 150 x 100 mm
L-S6WH Wafer Holder 6(for LV-S6 6x6 Stage)
L-S6PL ESD Plate (for LV-S6 6x6 Stage)
LV-S32PL ESD Plate (for LV-S32 3x2 Stage)
LV-S32SGH Slideglass Holder(for LV-S32 3x2 Stage)
LV-SUB Stage (exclusive for LV150/LV150A)
LV-SUB Substage 2 (exclusive for LV150/LV150A)
LV-S32 3x2 Stage Stroke: 75 x 50 mm
Tape-suctionsection
Roll-out section Roll-in section
Tape-transportsection
Stage section
Exte
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Opt
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form
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Optical PerformanceExtend your vision
A wide variety of observation methods is available with the Eclipse LV series. Observations with first-order
compensator, UV polarizing, and epi-fluorescence observations with UV excitation, in addition to brightfield,
darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and double-beam
interferometry are all possible. Two new light sources also have been developed: high-intensity, low power-
consumption 12V-50W halogen light source and adjustable high-intensity mercury-fiber light source.
Field Aperture Shutter UV-cut diaphragm diaphragm filter
BF Any diameter Any diameter Open Insert
DF Open Open Open Insert
FL1 Any diameter Any diameter Open —
FL2 Any diameter Any diameter Open —
Universal epi-illuminator: LV-UEPIThe LV-UEPI universal epi-illuminator enablesbrightfield, darkfield, simple polarizing and DICobservations. Field and aperture diaphragms areautomatically opened when the observation is switchedfrom brightfield to darkfield, and return to their originalposition when switched back to brightfield.
High-intensity 12V-50W halogenlight source:
LV-LH50PC PrecenteredLamphouseAlthough the LV-LH50PC Precentered Lamphouseis 12V-50W, the brightness is equivalent to orhigher than that of 12-100W types. The low power-consumption halogen light source contributes tothe compact design of the microscope while alsobeing friendly to the environment. Focus drift dueto heat from the illuminator is substantiallyreduced.
Universal epi-illuminator 2: LV-UEPI2The LV-UEPI2 universal episcopic illuminator isequipped with advanced optics suited to a wide variety ofobservation methods—brightfield, darkfield, DIC and epi-fluorescence—and automatically sets optimalillumination in accordance with the field and aperturediaphragm, shutter, and filters, including diffuser andND. This design enables the operator to concentrate onthe observation.
Auto optimal illuminationselection
• Brightfield• Darkfield• Simple polarizing• DIC
• Brightfield• Darkfield• Simple polarizing• Observation with first-order compensator• UV polarizing epi-fluorescence• DIC• Epi-fluorescence (UV excitation possible)
CFI60 LU Plan Fluor EPI series
CFI60 LU Plan Fluor BD series
CFI60 L Plan EPI CR series of objective lenseswith correction ring
With correction at 0.7 mm (50x)Without correction (50x)
Transmission wavelength coverageextended to UV CFI LU Plan Fluor seriesThe new CFI LU Plan Fluor series covers transmissionwavelength ranges up to UV. These objective lenses are suitablefor various research, analysis and examination needs, whilemaintaining Nikon’s commitment to high NA and long workingdistance. Only one kind of objective lens is needed forbrightfield, darkfield, simple polarizing, observation with first-order compensator, DIC and UV epi-fluorescence observations.These objective lenses, which offer high resolution and easy-to-use performance, can be combined not only with microscopesbut also with other equipment for even greater versatility.
Objective lenses with correction ringCFI L Plan EPI CR seriesThe CFI60 series now includes the CFI L Plan EPI CR series tocope with the thinner coverglass used in liquid crystal displays,and highly integrated, and dense devices. Coverglass correctioncan be continuously made from 0 mm up to 1.2 mm (0-0.7 mmand 0.6-1.3 mm for 100x) with the correction ring. The 100xobjective lens offers 0.85 high NA, while enabling high-contrastimaging of cells and patterns without being affected by thecoverglass.
Environmentally friendlyThe eco glass used in the CFI LU Plan Fluor and L Plan EPI CRseries does not contain harmful substances such as lead andarsenic.
Model Magnification NA Working Distance (mm)CFI L Plan EPI 2.5X 0.075 8.8CFI LU Plan Fluor EPI 5X 0.15 23.5New 10X 0.30 17.3
20X 0.45 4.550X 0.80 1.0100X 0.90 1.0
CFI LU Plan EPI ELWD 20X 0.40 13.050X 0.55 10.1100X 0.80 3.5
CFI L Plan EPI SLWD 20X 0.35 24.050X 0.45 17.0100X 0.70 6.5
CFI LU Plan Apo EPI 100X 0.95 0.4150X 0.95 0.3
CFI L Plan Apo EPI WI 150X 1.25 0.25
Model Magnification NA Working Distance (mm)CFI LU Plan Fluor BD 5X 0.15 18.0New 10X 0.30 15.0
20X 0.45 4.550X 0.80 1.0100X 0.90 1.0
CFI LU Plan BD ELWD 20X 0.40 13.050X 0.55 9.8100X 0.80 3.5
CFI LU Plan Apo BD 100X 0.90 0.51150X 0.90 0.4
Model Magnification NA (mm) Working Distance (mm) Glass Thickness Correction Range CFI L Plan EPI CR New 20x 0.45 10.9-10.0 0-1.2mmCFI L Plan EPI CR New 50x 0.7 3.9-3.0 0-1.2mmCFI L Plan EPI CRA New 100x 0.85 1.2-0.85 0-0.7mmCFI L Plan EPI CRB New 100x 0.85 1.3-0.95 0.6-1.3mm
CFI60 Series Objectives
8 9Impr
oved
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form
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Usability has been vastly improved as has durability and rigidity.
Improved performance
Highly rigid, vibration-free body The use of structural analysis during the design processhas improved rigidity and antivibration parameters toyield clear images even at high magnification.
Tilting trinocular eyepiece tube
LV-TT2 Tilting Trinocular EyepieceTubeThe newly developed LV-TT2 tilting trinoculareyepiece tube (erect image) offers comfort to allusers, regardless of their stature or viewingposition. The optical path changeover of100:0/20:80 allows the simultaneous use of amonitor.
Highly durable motorized nosepiece
LV-NU5A Nosepiece The LV-NU5A motorized universal quintuplenosepiece is 10 times more durable than itspredecessor and can be used with the LV150A. Incombination with the LV-NCNT motorizednosepiece controller, it can also be used in otherdevices.
Manual nosepiece A variety of manual nosepieces are available to suitall needs.
Thorough ESD protection
All parts of the microscope that might be touched,including the body, tube and stage, have beeninsulated. This improves anticontamination andprevents samples from being harmed by staticelectricity, thereby improving yields.
Electrostatic decay time: 1000-10V, within 0.2 sec.
C-N6 Nosepiece(Brightfield)
L-NBD5 Nosepiece(Bright/darkfield)
L-NU5 Nosepiece(Universal)
LV-�P� Plate
BrightfieldThe antiflare design appliedto the objective lenses andlight source ensures bright,high-contrast images.
DarkfieldNikon’s unique “Fly-eyeLens” used in the darkfieldilluminator yields athreefold increase inbrightness over previousmodels. This allows high-sensitivity detection ofdefects and height gaps insamples.
Nomarski DIC
Standard or high contrast DICsliders can be selected to suitthe sample. This method isuseful for the surfaceobservations of variousdevices and precision molds.
Epi-fluorescenceUV, V, BV, B or G excitationfluorescence filter blocks canbe selected. This method isperfect for the observation ofOEL, ion migration and othersubstrate uses.
L-DIC DIC Prism (standard) L-DIHC DIC Prism (high contrast) Brightfield Epi-fluorescence B-2A
Fluorescence filter blocks
Simple polarizingIn addition to simplepolarizing, a lambda platecan be inserted into theoptical path to achieveobservations with a first-order compensator. This isuseful for liquid crystalinspections (when used incombination with the LV-UEPI 2).
Double-beam interferometry equipment(measures minute height gaps)
Michelson (TI) and Mirau (DI)types of episcopic double-beam interferometry can becarried out. A filar micrometereyepiece can be used toexamine or measure sampleswhile avoiding direct contact.
Diascopic illuminationDiascopic illumination isused to observe opticalparts, FPD and other samplesthat transmit light.
Episcopic Two-beam Interferometry Equipment TI/DI
Condenser
Observation Methods
YM-POPolarizer
LV-UVPolarizer
LV-FLAN FLAnalyzer
L-ANAnalyzer
LV-PO Polarizer
LV-FLAN FL Analyzer
L-DIC DIC Prism
L-DICH[??]High-contrastDIC Prism
YM-POPolarizer
L-ANAnalyzer
10 11
Semiconductor (IC wafer) Semiconductor (IC wafer) MEMS (optical switch)
Brightfield Darkfield Brightfield
Micro bump Compact disc (CD) Image sensor (CCD)
Brightfield Simple polarizing Brightfield
PCB (ion migration) PCB (ion migration) Precision mold
Brightfield Epi-fluorescence DIC
L150A controls
(Episcopic illumination type)
Applications
CFI-series eyepiece
An illuminator that can beused for brightfield,darkfield, simplepolarizing and DICobservations.
LV-UEPI
A universal motorizednosepiece that is 10 timesmore durable than itspredecessors.
LV-NU5A Nosepiece
These objective lenses feature ahigh NA, long working distancesand an extended transmissionwavelength range.
CFI LU Plan Fluor series
The LV150 and LV150Amicroscopes are used forepiscopic illumination.
A trinocular tube with anoptical path changeoverof 100:0/0:100.
LV150/LV150A
An episcopic illuminationstage capable of inspecting150mm wafers. (With 6”wafer holder)
LV-S6 6x6 Stage
LV-TI3 Trinocular TubeA low power-consumption 12V-50Whalogen light source equivalent to orhigher than the 12V-100W type.
LV-LH50PC Precentered Lamphouse
Motorized nosepiece controls
12 13
Applications
(Episcopic/diascopic illumination type)
LCD (color filter) LCD (conductive particle) Test reticle
Diascopic brightfield DIC Diascopic brightfield
リシャ輝石?? Carbon paper Nodular graphite cast iron
DIC Brightfield DIC
Tourmaline Tourmaline Tourmaline
Brightfield DIC Double-beam interferometry
CFI-series eyepiece
The LV-UEPI2 illuminatorenables brightfield,darkfield, DIC, simplepolarizing, and UVexcitation epi-fluorescenceobservations.
LV-UEPI2
Selectable from C-N6(brightfield), L-NBD5(bright/darkfield) and L-NU5 (universal) nosepieces.
Nosepiece
These objective lenses featurehigh NA, long working distancesand an extended transmissionwavelength range.
CFI LU Plan Fluor Series
A trinocular tube with anoptical path changeoverof 100:0/0:100.
This small, industrial-usestage has a triple-platedesign and can be used forepiscopic and diascopicillumination.
LV-S32 3x2 Stage
LV-TI3 Trinocular Tube
A low power-consumption 12V-50Whalogen light source equivalent to orhigher than the 12V-100W type.
LV-LH50PC 12V-50W Lamphouse
The LV100D microscope iscapable of episcopic anddiascopic illumination.
LV100D
14 15ACCESSORIES
100100
ININ
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0 0
100100
OUTOUT
JAPA
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Eyepiece tubesIlluminators Double Port Polarizing/DIC accessories
Nosepieces
Objective adapters
Objective lenses
Substages (LV150/LV150A)
Stages
Holders
MicrometersDiascopic illumination condensers
Model F.O.V. Remarks
CFI 10x 22
CFI 10xM 22 Photomask included
CFI 10×CM:for C-TE binocular ergo tube 22 Crosshairs and micrometer included
CFI 12.5x 16
CFI 15x 14.5
CFI UW 10x 25
CFI UW 10xM 25 Photomask included
Mirometer eyepiece 10xN 20 Stroke 10 mmMain scale: 0.1 mm/incrementsSub scale: 0.01 mm/increments
Objective micrometer Eyepiece micrometer Grid micrometer
LV-TI3 TrinocularEyepiece Tube ESD Y-IDP Double Port
(Beamsplit 45:55/0:100)Y-IDP Double Port 0/100(Beamsplit 100:0/0:100)
LV-TT2 Tilting Trinocular Eyepiece Tube
LV-SUB Stage LV-SUB Stage 2
C-N6 Nosepiece(Brightfield)
L-NBD5 Nosepiece(Bright/darkfield)
L-NU5Nosepiece(Universal)
C-OA 15mm AdapterLU objective Adapter M32-25
LV-NU5A MotorizedNosepiece (Universal)
LV-S6 6x6 Stage LV-S64 6x4 Stage LV-S32 3x2 Stage
L-S6WH WaferHolder
For LV-S6 6x6 Stage For LV-S32 3x2 Stage
L-S6PL ESD Plate LV-S32SGHSlideglass Holder
LV-S32PLESD Plate
Simple Polarizing
UV polarizing epi-fluorescence
YM-POPolarizer
LV-UVPolarizer
LV-FLAN FLAnalyzer
L-DIC DICPrism
L-DICHHigh-contrastDIC Prism
L-ANAnalyzer
YM-POPolarizer
L-ANAnalyzer
LV-POPolarizer
LV-FLAN FLAnalyzer
LV-�P� Plate
Observation with first-order compensator
DIC
LWDAchromat
C-C Abbe DF (Dry)Slide (Swing-out??)Achromat 2-100x
C-C Achro
CFI LU PLAN FLUOR EPI series
CFI LU PLAN FLUOR BD series
CFI L PLAN EPI CR series
LV-UEPI
LV-UEPI2
Eyepieces
16 17
Digital cameras for microscopes
The Digital Sight series is a powerful imaging system for monitoring/capturing images taken under brightfield,
darkfield, DIC, epi-fluorescence, and other observation methods.
Ultrahigh-definition Digital Camera
Digital Camera
The DXM1200F produces true-to-life, extremely high-quality images with up to approximately 12 million output pixels. It meets
the demanding requirements of professional users and is excellent for image analysis in advanced R&D fields.
• Approx. 12 million output pixels comparable to filmhigh-end cameras, thanks to Nikon’s exclusive micro-step high-density imaging technology
• Live image display at a frame rate of 12 fps max.
• The wide exposure latitude produces true-to-lifeimages regardless of brightness level.
Standalone type
This type comes with an LCD monitor, making itconvenient for on-screen monitoring without a PC and inapplications that require long/multiple exposures.
Real imaging camera—DS-2Mv-L1• Live image display at 30fps max.• Image size: 1600 x 1200 pixels• 6.3” TFT monitor• Analog RGB output• CompactFlash card slot• USB mass-storage-class
compatible• Direct print function (Pict
bridge compatible)optional*1
• Ethernet (100BASE/TX) port*2
*1: A CP900DC dedicated printerand C-mount adapter arenecessary. Provided with real 10mode (10X printing).
*2: FTP Client/Server, HTTP Server Telnet Server functions provided.
PC-connection type
This type requires connection to a PC and allowsobservation on a PC monitor, image capture,measurement and analysis when special applicationsoftware, ACT-2U, is used.
Real imaging camera—DS-2Mv-U1• Live image display at 12fps (800 x 560)• Image size: 1600 x 1200 pixels• PC connection via USB2.0• Dedicated application software—ACT-2U
Camera headsSelect the best type to match your sample and use.
For brightfield, darkfield, DIC observationsFor fluorescence observations (that require long exposure)
A host of measuring tools
*Dedicated ACT-2U camera control software is necessary when using the DS-U1.
DS-2MBW• Image size: 1600 x 1200 pixels
• 15 fps (30 max.)
• Superb movie
DS-5M• Image size: 2560 x 1920 pixels
• True-to-life recording of minute
images
DS-2MBWc• Image size: 1600 x 1200 pixels
• Sensitivity approx. 5 times greater
than predecessors
• Includes a Peltier device
• Brilliant images with minimum noise
DS-5Mc• Image size: 2560 x 1920 pixels
• Includes a Peltier device
• Brilliant images with minimum noise
Cross scale (DS-L1 only)
Option: camera control software
ACT-2The optional ACT-2U software offers the followingarrays of convenient measurement tools.
Camera control software
ACT-1Minimizes fatigue during large-volume, extendedtime shooting.All essential sections, including � live image preview, �captured image window, � thumbnail, and � imagecapture parameter setting panel, are simultaneouslydisplayed on a single screen, enabling users to easilyunderstand image capture procedures. The size of theparameter setting panel has been reduced to leave morespace for image display.
� �
� �
Dedicated camera controlsoftware ACT-2U
Wafer/IC chip
Two-point distance
Area (DS-U1 only) XY scaleScreen pattern (crossline, circle)
Scale Point to line distance Intersection angle Circumference/diameter
Metal/ceramics PCB
Camera control software for DS-L1/DS-U1Scene mode—optimal imaging with a single mouse clickOptimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily performphotography of the highest level. Two-point distance
Scale
Point to line distance
Intersection angle
Circumference/diameter
Area
XY scale
Screen pattern (crossline, circle)
1918
Dimensional diagrams
LV-UEPI Universal Epi-illuminator LV-UEPI2 Universal Epi-illuminator 2
LV-DIA Dia Dase
100
IN
0
0
100
OUT
95.5
267.090
508.5
387.2
326
193
78.1
341456.8
134.5
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250
25.5
JAPAN
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391
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122 122
76.5
88 88
26.5
5 4.7
155 35
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φ48
336295
27660
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95
Cable length 220mm (cord bush exit to connector exit)
54
φ40
40
45°
410.5370
11025.5
300.5113.3
81.3
10079.3
φ48
5712
φ21φ51
65 516
54
φ40
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45°
410.5370
11025.5
300.5113.3
81.3
79.3
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65 516
105
95
Cable length 220mm (cord bush exit to connector exit)
48
10°
110
28
111
(182)
ケーブル長:固定部より160mm
6915
φ127φ43.5
15°
14993.755.7(8
9)
48
88
100
171.5
171.5
φ60
φ48
φ62
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127
55341
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JAPAN
JAPAN
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φ34
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40 31 217 25.5
129 299
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φ34 φ34109 109
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192.7 65.5
20°
20°
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φ10
E.P.
137.3 138.3
φ60φ50
φ51 φ51
60 67 202.5
118
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92.582
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φ52
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35 26.544
70 74 507430.5 13
8-M4
4-M4
( 39)
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1206696
LV-TI3 TrinocularTube ESD
LV-TT2 TiltingTrinocular Tube
LV-CR Column Riser 35
LV-S6 6x6 Stage LV-S64 6x4 Stage
LV-SUB Stage
LV-NU5ANosepiece
LV-NCNT NosepieceController
LV-SUB Stage 2 LV-S32PLESD Plate
LV-S32SGH SlideglassHolder
LV-S32 3x2 Stage
LV150A/LV150
LV100D
20 21
LV150/150A
Main specifications
Main body Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage),82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control transformer built in
Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, withrefocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece(universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, withflare prevention)
Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D LV-U EPI changeover; ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer mountable
Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness LV-U EPI2 control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover;
f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (invertedimage, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)
Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate)LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate)LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination)
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Power consumption 1.2A/75W
Weight Approx. 8.6kg
LV100DMain body Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W
brightness control transformer built in
Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, withrefocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece(universal quintuple, with flare prevention)
Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D LV-U EPI changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable
Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness control,LV-U EPI2 no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter
(NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable
Diascopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters(ND8, NCB11) insertable
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (invertedimage, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)
Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Power consumption 1.2A/75W
Weight Approx. 9.4kg
Polarizers/analyzers/�plate
YM-PO Polarizer LV-PO Polarizer
LV-FLAN FL Analyzer LV-�P �Plate
LV-UVPO Polarizer L-AN Analyzer
47113.5
79
903030
30
36.5
7.5
307.5
10
45°±'
λ板の方位
6.5
6.5
90
30
85.479
85.4 85.479
30
φ29
φ20 φ17.5 φ9
φ23.8
φ29
φ23.8
φ29
φ23.8M25x0.75 M25x0.75 M25x0.75
M25x0.75 M25x0.75
36.5
60.2
60.2
60.1
60.3
(0.5)
(0.5)
(0.7)
49.1
42 45
35
51
60 60
3 3
60 60 60
54 54
0.2
0.2
0.2
0.5
0.5
6.7
3.95
56.1
58.7
10.8
14.5
14.3
1322
6.2
25
(0.7)
14.3
1322
6.4
1.8
15.5
6.5
3.13
11.7
13
21.1
5
55
55.5
5
595
595
5 5
42.5
55.5 59 5947.5 47.5
4.5
4.5
2.3
3.5
5 5 5
45°
50°
45°30°
W.D.=23.5
W.D.=17.5
4.5
60 60 60
60 60
CFI LU Plan Fluor EPI 5X CFI LU Plan Fluor EPI 10X
45°
CFI LU Plan Fluor EPI 20X φ30
φ23.8
φ30
φ23.8
40°
30°W.D.=1
W.D.=1
φ17.5φ21.8
φ24
CFI LU Plan Fluor EPI 50X
φ8.5
φ18φ21.8
φ24
φ8.8
CFI LU Plan Fluor EPI 100X
φ35
φ36φ34φ30.8
φ36φ34φ30.8
φ36φ34
φ35φ35
φ40φ40
φ30.8 φ30.8φ30.8
φ35.5φ25 φ26.2
(φ28.4) (φ28.4)φ37 φ37
φ33.5
φ27.6
φ33.5 φ35.5 φ35.5
φ19.8φ24.8
φ27φ32.5
φ29.5 φ29.5φ28.5φ23.8
φ28.5
φ34 φ34
φ13φ18.8φ23.3
φ31.5φ26
φ32φ29φ27φ23.8
φ33.5φ29.5
φ31.5
φ20
φ27.5
0.6(CG)
0.6(CG)
0.3(CG)
0.9(CG)
W.D.=10.5
W.D.=3.5
W.D.=1.1
58.2
5W.D.=1.2
11°
(45°)
CFI L PLAN EPI 20XCR
M25x0.75
CFI L PLAN EPI 50XCR
M25x0.75-6g M25x0.75
(7°)
45°
30°
(16°)
45°
6.5
25°
(16°)
45°
6.5
26°
φ11.5
φ19.8φ24.8
φ32.5φ27
φ14.5
CFI L PLAN EPI 100XCRA CFI L PLAN EPI 100XCRB
W.D.=18
W.D.=15
W.D.=4.5
W.D.=1
W.D.=1
M32x0.75 M32x0.75 M32x0.75 M32x0.75 M32x0.75
45°
45°
35°
35°
40.4(Over head screw) 40.4
(Over head screw)
CFI LU Plan Fluor BD 100XCFI LU Plan Fluor BD 50XCFI LU Plan Fluor BD 20XCFI LU Plan Fluor BD 10XCFI LU Plan Fluor BD 5X
CFI LU PLAN FLUOR
CFI L PLAN EPI CR
CFI LU PLAN FLUOR BD
JAPANJAPANJAPANJAPAN
JAPANJAPANL.UL.U
L.UL.U
L.UL.U23.5WD
15A5X /
JAPANJAPAN
L.UL.U
18WD15A5X /
JAPANJAPAN
L.UL.U
15WD30A10X /
JAPANJAPAN
L.UL.U
4.5WD45 A20X /
JAPANJAPAN
L.UL.U
1.0WD90 A100X /
JAPANJAPAN
L.UL.U
1.0WD80 A50X /
17.5WD30A10X /
4.5WD45A20X /
JAPANJAPAN
L.UL.U
1.0WD80A50X /
JAPANJAPANJAPANJAPAN JAPANJAPAN
L 100X / 0.35
JAPANJAPAN
L 100X / 0.35L 50X / 0.70L 20X / 0.45
JAPANJAPAN
L.UL.U
1.0WD90A100X /
Objective lenses
22 23
System diagram
LV150/LV150A LV100D
D-FB
ND4ND16
NCB11
λOUT
IN
F FE
AB
A
FE
B
II’
I’
I’
F E
O P
P'
T
Q
Q'
R
Q S
O
T Q'
R
S
*Not necessary on the LV150A as the operation unit has been built into the main body.
Fiber
External Power Supply
S
I
P
P'
POWER
MIN. MAX.
PhotomicrographicSystem FX-III Series ENG-mount CCTV Camera C-mount CCTV Camera
Camera Mount
V-T Photo Adapter
Projection LensesPLI 2xPLI 2.5xPLI 4xPLI 5x
ENG-mount CCTV Adapters0.45x0.6x
ENG-mount CCTV Adapter
Relay Lens 1x
ENG-mount Zooming Adapter
Zooming Lens
C-mount Zooming Adapter
C-mount CCTV Adapter
Relay Lens 1x
C-mount CCTV Adapters0.35x0.45x0.6x0.7x
C-mount CCTV AdapterVM2.54x
C-mount CCTV AdapterVM4x
C-mount Direct CCTV Adapter C-mount
Adapter A0.7x
DXM1200F
DS-5M DS-2M
LV-TV TV Tube
C-mount Adapter0.55x
0.5x 2nd Objective Y-TB
Binocular Tube
Other Eclipse series eyepiece tubes can be used.
LV-TI3 Trinocular Tube ESD
LV-TT2 Tilting Trinocular Tube
Eyepiece Tubes
Epi-fluorescence Accessories
C-FL Fluorescence Filter Block L-AN
AnalyzerYM-PO Polarizer
LV-FLAN FL Analyzer
LV-λP λPlate
LV-PO Polarizer
LV-UVPO Polarizer
D-FB Excitation Light Balancer
NCB Slider
ND Slider
Adapter
CFI UW10x
CFI UW10x M
F.N.ø25F.N.ø22
CFI15x
C-CTCentering
Telescope CFI
12.5xCFI
10xCMCFI
10xMCFI10x
L-W10xESD
Filar Micrometer10xN
Eyepieces
LV-SUB Substage
Surugaseiki B23-60CR LV-SUB
Substage 2
LV-CR Column Riser 35
C-ER Eyelevel Riser
Y-IDP Double Port (100:0 / 55:45)
Y-IDP Double Port (100:0 / 0:100)
LV-UEPI Universal Epi-Illuminator
LV-UEPI2 Universal Epi-Illuminator 2
Intermediate Modules
L-S6WH Wafer Holder
L-S6PL ESD Plate
LV-S32SGH Slidegalss Holder
LV-S32PL ESD Plate
LV-S6 6x6 Stage
LV-S64 6x4 Stage
LV-S32 3x2 Stage
StagesLV-LH50PC Precentered Lamphouse
D-LH 12V-100W Precentered Lamphouse (Requires TE2 External External Power Supply)
C-HGF Fiber Adapter
LV-HL50W 12V-50W-LL Halogen Lamp
12V-100W Lamp
100W TE2 Power Supply
Lamphouses
L-DIC DIC Prism
L-DIHC High Contrast DIC Prism LV-NU5A
Motorized Nosepiece
L-NU5 U5 Nosepiece
L-NBD5 DB5 Nosepiece
C-N C-N6 Nosepiece
P-N P-N5 Nosepiece
Adapter
LV-NCNT Nosepiece Controller*
LV-NCNT Nosepiece Controller Cable 10m
LU Plan Fluor BD Objective
LU Plan Fluor EPI Objective
LU Nosepiece AdapterM32-25
C-OA 15MM Adapter
DI Objective
CFI L/LU EPI P Objective
TI Objective Adapter
Nosepieces
C
D-FB
ND4ND16
NCB11
λOUT
IN
F FE
A
FE
B
I
F E
O P
P'
T
Q
Q'
R
Q S
I’O
T Q'
R
S
LV-S32 3x2 Stage
鏡筒
S
I
P
P'
A
B
I
C
カメラマウント
TE2-PS100W Power Supply (YM-EPI3 3-pin extension cord is required)
POWER
MIN. MAX.
POWER
MIN. MAX.
II’
I’
PhotomicrographicSystem FX-III Series ENG-mount CCTV Camera C-mount CCTV Camera
Camera Mount
V-T Photo Adapter
Projection LensesPLI 2xPLI 2.5xPLI 4xPLI 5x
ENG-mount CCTV Adapters0.45x0.6x
ENG-mount CCTV Adapter
Relay Lens 1x
ENG-mount Zooming Adapter
Zooming Lens
C-mount Zooming Adapter
C-mount CCTV Adapter
Relay Lens 1x
C-mount CCTV Adapters0.35x0.45x0.6x0.7x
C-mount CCTV AdapterVM2.54x
C-mount CCTV AdapterVM4x
C-mount Direct CCTV Adapter C-mount
Adapter A0.7x
DXM1200F
DS-5M DS-2M
LV-TV TV Tube
C-mount Adapter0.55x
0.5x 2nd Objective Y-TB
Binocular Tube
Other Eclipse series eyepiece tubes can be used.
LV-TI3 Trinocular Tube ESD
LV-TT2 Tilting Trinocular Tube
Eyepiece Tubes
Epi-fluorescence Accessories
C-FL Fluorescence Filter Block L-AN
AnalyzerYM-PO Polarizer
LV-FLAN FL Analyzer
LV-λP λPlate
LV-PO Polarizer
LV-UVPO Polarizer
D-FB Excitation Light Balancer
NCB Slider
ND Slider
Adapter
CFI UW10x
CFI UW10x M
F.N.ø25F.N.ø22
CFI15x
C-CTCentering
Telescope CFI
12.5xCFI
10xCMCFI
10xMCFI10x
L-W10xESD
Filar Micrometer10xN
Eyepieces
C-SP Simple Polarizing Polarizer
LV-CR Column Riser 35
C-ER Eyelevel Riser
Y-IDP Double Port (100:0 / 55:45)
Y-IDP Double Port (100:0 / 0:100)
LV-UEPI Universal Epi-Illuminator
LV-UEPI2 Universal Epi-Illuminator 2
Intermediate Modules
LV-S32SGH Slidegalss Holder
LV-S32PL ESD Plate
LV-S64 6x4 Stage
StagesLV-LH50PC Precentered Lamphouse
D-LH 12V-100W Precentered Lamphouse (Requires TE2 External Power Supply)
C-HGF Fiber Adapter
LV-HL50W 12V-50W-LL Halogen Lamp
12V-100W Lamp
100W TE2 Power Supply
Lamphouses
L-DIC DIC Prism
L-DIHC High Contrast DIC Prism L-NU5 U5
NosepieceL-NBD5 DB5 Nosepiece
C-N C-N6 Nosepiece
P-N P-N5 Nosepiece
External Power Supply
LU Plan Fluor BD Objective
LU Plan Fluor EPI Objective
LU Nosepiece AdapterM32-25
C-OA 15MM Adapter
DI Objective
CFI L/LU EPI P Objective
TI Objective Adapter
Adapter
Nosepieces
DF (dry)D-C Abbe
C-C Achromat
LWD Achromat
Slide (Swing-out??) Achromat 2-100x
Condensers