Teaching Nanoelectronics Paolo Lugli Institute for Nanoelectronics Munich, Germany.
IBM Graphene Nanoelectronics Technologies
Transcript of IBM Graphene Nanoelectronics Technologies
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IBM Research | Science & Technology
IBM Graphene NanoelectronicsTechnologies
C.Y Sung Program ManagerIBM T.J. Watson Research Center Science & Technology Strategy Department
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis (CVD and Epi)
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research
1986
1995
1972 1998
1995
1982
1956
1961
IBM Research Worldwide
Ten Labs with >4,000Researchers Around The World
Ten Labs with >4,000Researchers Around The World
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IBM Research | Science & Technology
Technical Transition Plan
FundamentalResearch
Screen new materials & processes
IBM Almaden & Yorktown
Advanced Semiconductor
R&D
Innovation in integrated device & process technology
Albany Nanotech Center
TechnologyDevelopment
Multi-company co-located joint development
IBM East Fishkill
Manufacturing
Process synchronized fabricators (GDSII compatible)
USA
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IBM Research | Science & Technology
Frontiers of IT Nanosystem Vision
New systems enable us to
reach the greatest potential
for our creativity, innovation
and ingenuity.
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IBM Research | Science & Technology
6
Fraud Prevention Enhanced Wellness
Financial Retail
Revenue Maximization
Medical
Product Design, Launch andTime to Revenue & Profit Optimization
General Business
Better Security in a Complex World
Defense and Security
Learning Systems Will Impact Every Sector
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IBM Research | Science & Technology
NRI Scope and Objectives
NRI Scope :
Discover New Switch Device for Beyond CMOS by 2020
NRI Objectives :
By 2020, discover and reduce to practice via technology transfer to industry non-CMOS devices, technologies and new manufacturing paradigms, which will provide a new scaling path and extend the historical cost / function reduction with increased performance and density for another several orders of magnitude beyond the limits of CMOS.
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Carbon on Insulator (COI)
Graphene Attractive Properties:
•Extraordinary high e- and h+ mobility (20,000 cm2/Vs, >100X of Si)
Long carrier mean free paths (~a few µµµµm @ Room Temp.)->Enable High Performance Devices
•Ultra-thin body (one-atom thick) Ideal electrostatics: ->Enable Scaling Paths
•High thermal conductance and high current carrying capability->Allow Low Power Operations
•Linear energy dispersion and massless ballistics transport
->New Physics for New Devices•Planar structure
-> CMOS Process Compatible
12-22 nm
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis (Epi and CVD)
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Epi Graphene on SiC
IDS – VDS
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Graphene Mono Atomic Layer on 2” SiC Wafer
100 µµµµm
1
0
Rela
tive G
-prim
e in
ten
sity
1-2 layers
1-2 layers 1-2 layers1-2 layers
1-2 layers
100 µµµµm
1
0
Rela
tive G
-prim
e in
ten
sity
1-2 layers
1-2 layers 1-2 layers1-2 layers
1-2 layers
Graphene
Buffer
SiC
Graphene on Si-face of SiC
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Up to 12” Successfully Demonstrated
Roll-Based Producing Graphene Films
Cu
PMMA
Spin-on PMMA
Dissolve Cu
Cu
PMMA
Spin-on PMMA
Dissolve Cu
Place PMMA + graphene
on substrate
Dissolve PMMA
Place PMMA + graphene
on substrate
Dissolve PMMA
Graphene Growth on Cu Foils by CVD
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
220nm Single Atomic Layer GrapheneTransistor on 2” SiC Wafer
1
10
100
Curr
ent G
ain
|h
21|
1 10 100
Frequency [GHz]
gate length 240 nm 550 nm
100 GHz
VD = 2.5 V
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Graphene Logic Devices (Innovative Concepts)
IDS – VDS
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Veselago Lens Switches
� On/Off via electron focusing
� Speed Cheianov, Fal’ko & Altshuler,
Science (2007)
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Graphene Optoelectronics
IDS – VDS
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
VDS
Eye-diagram
Or
Recovered waveform
Optical
amplifie
r
980 nm Pump
Pseudo-Random-Bit-Sequence
(PRBS) generator
Electrical Optical
modulator (E-O conversion)
1.55 µm continuous light in
Optic
al
Graphene photodetector(O-E conversion)
VG
OpticalBit stream
Trigger
Bias-teeRecovered
electrical signal Electricalamplifier
fG = 16 GHz
10 Gbit/s
Graphene
Paladiumcontact
Titaniumcontact
5 µm
1.55 µm light spot
Graphene
Paladiumcontact
Titaniumcontact
5 µm
1.55 µm light spot
1.4 mA/W
2.7 mA/W
Graphene Photodetector in 10 Gbit/s 1.55 µm
Optical Communication Link
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Graphene Sensor and Energy Devices
IDS – VDS
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Graphene RF Thin Film Sensors
Digital Contact Lens
Graphene Thin Film
Smart Graphene Bandage
Sensitive Sensor for toxic gases and proteins
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Green applications: Photovoltaics/ Supercapacitors
• Graphene Energy Devices for Low Weight•High Performance Battery Cells•Supercapacitors.
•Graphene based photovoltaics device create more efficient cell.
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Outline
�Motivation
�Synthesis
�Device Fabrication and Performance
� Future Applications
�Conclusions
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IBM Research | Science & Technology
C.Y Sung | IBM Confidential
Tablet Computer
Touch Screens/ Microelectronics
Scientific Background on the Nobel Prize in Physics 2010
Graphene
Compiled by the Class for Physics
of the Royal Swedish Academy Science
Communications
Composite Materials
Watches/Calendars
Electronics PaymentsMobile Phones
Thin Flexible Light Panel