Failure Analysis (FA) Introduction (Failure Analysis Concept) · PDF fileFailure Analysis...
Transcript of Failure Analysis (FA) Introduction (Failure Analysis Concept) · PDF fileFailure Analysis...
Failure AnalysisFailure AnalysisFailure Analysis
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Failure Analysis (FA) IntroductionFailure Analysis (FA) Introduction
((Failure Analysis Concept)Failure Analysis Concept)
Failure AnalysisFailure AnalysisFailure Analysis
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Failure Analysis (FA)Failure Analysis (FA)
FA Definition:To identify the failure mechanism of failed product.
FA Concept:Not only to confirm the failure, but trace the root causes.
FA Attitude:1) Why/What/Who/When/How it failed.2) What should we do now.3) How do we improve better.
FA Value:1) Identification of material-related defects.2) Solving manufacturing problems.3) Solving service-related problem.4) Providing corrective or prevention measures.5) Providing manufacturers’ insurance or legal defense/claim cases6) To improve product design, production yield and reliability
真相大白仍須鐵證如山
水落石出也要明察秋毫
時時留意處處小心
- Failure mode- Failure mechanism- Root cause
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Failure Analysis ElementsFailure Analysis Elements
• Current Status (Failure rate)• Failure Mode (EFA)• Failure Mechanism (Possible)• Failure Analysis Technology (Tools)• FA Procedure (Flowchart)• Result Consistence (Date Speak)• Time Pressure (Resource Limit)
Failure AnalysisFailure AnalysisFailure Analysis
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-Large ElasticDeformation
-Yield-Buckling-Brittle Fracture-Ductile Fracture-InterfacialDe-adhesion
-ElectromagneticInterferenceDamage
-ElectricalOverstress
-Gate OxideBreakdownDischarge
-SecondBreakdown
-IonicContamination
-Single EventUpset
-Soft Error
-Fatigue CrackInitiation
-Fatigue CrackPropagation
-Creep-Wear
-Gate OxideBreakdown
Time DependentDielectricBreakdown
-Slow Trapping-Surface chargeSpreading
-Hot electrons-HillockFormation
-Contact Spiking-Electromigration
-Diffusion-Interdiffusion-Corrosion-Stress Corrosion-Dendritic Growth-Soft Error-Excessive LeakageCurrents
-Radiation InducedThermal Breakdown
Wear-outOverstress
Thermo-mechanical
Electrical Chemicaland Radiation
Thermo-mechanical
Electrical Chemicaland Radiation
IC Failure Mechanism/PropertyIC Failure Mechanism/Property
Failure AnalysisFailure AnalysisFailure Analysis
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��DCDC ---- Open/Short: Pin Continuity/ESD TestOpen/Short: Pin Continuity/ESD Test
---- Leakage: Input Buffer High/Low Current TestLeakage: Input Buffer High/Low Current Test
---- ICC: Standby/Dynamic/Refresh Current TestICC: Standby/Dynamic/Refresh Current Test
��AC AC ---- High/Low Voltage AppliedHigh/Low Voltage Applied
---- Data High/Low (1/0) AppliedData High/Low (1/0) Applied
---- Pattern (Scan/Checkerboard/March) AppliedPattern (Scan/Checkerboard/March) Applied
---- Timing (Speed) TestTiming (Speed) Test
Electrical AnalysisElectrical Analysis
DC (Direct Current): Assembly related EFA AC (Alternative Current): Device related EFA
Failure AnalysisFailure AnalysisFailure Analysis
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Parameter DefectParameter Defect
V53C162581 Vcc Vss 442 I/O 1 I/O 16 433 I/O 2 I/O 15 424 I/O 3 I/O 14 415 I/O 4 I/O 13 406 Vcc Vss 397 I/O 5 I/O 12 388 I/O 6 I/O 11 379 I/O 7 I/O 10 3610 I/O 8 I/O 9 35
13 NC NC 3214 NC LCAS 3115 WE UCAS 3016 RAS OE 2917 NC A8 2818 Ao A7 2719 A1 A6 2620 A2 A5 2521 A3 A4 2422 Vcc Vss 23
Pin Names (V53C16258)A0-A8 Address InputsRAS Row Address StrobeUCAS Column Address Strobe
/Upper Byte ControlLCAS Column Address Strobe
/Lower Byte ControlWE Write EnableOE Output EnableI/O1~I/O 16 Date Input, OutputVcc +5V SupplyVss 0V SupplyNC No Connect
Vcc Vss
IO1
IO2
IO3
IO4
IO16
IO15
IO14
IO13
Chip
Lead-frame
Gold-wire
bond-padCompound
Lead
- Open (開路) - Short (短路)- Leakage (漏電)- Idd (靜態電流)
Vcc
Vss
VLSI Circuit
Physical Package Diagram
Failure AnalysisFailure AnalysisFailure Analysis
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Force current I (0.1mA) to measure voltage V0.2V 2V
Pass OpenShort
V
I (mA)
0.7
0.1
V
I (mA)
0.7
0.1
V
I (mA)
0.7
0.1
Judgement
Input
Vdd
Vss
Output
I
Circuit Diagram (ESD Protection)
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
Vss=0V
- Sink 0.1 mA- Measure V- All pins
E
Pin connection
C
E
C
+ -
Open/ShortOpen/Short
EDS
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LeakageLeakage
0 - 5/3.3V
Vdd=5/3.3V
Vss=0V
Output
Leakage Hi
Leakage Lo
10uA (depend on spec.)
Pass Leakage
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
Vdd=5V/3.3V Vss=0V
- Force 0V and 5V (3.3V)- Measure I- All pins
C
AUX E
AUX
C
E
Pin connection
Circuit Diagram
Judgement
Force voltage V (Lo=0V, Hi=5V) to measure current I
EDS
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Idd CurrentIdd Current
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
1 402 393 384 375 366 357 348 339 3210 3111 3012 2913 2814 2715 2616 2517 2418 2319 2220 21
Vdd=5V/3.3Vmeasure Idd Vss=0V
Input
Vdd=5/3.3V
Vss=0V
Output
Idd
C E
E
CPin connection
Circuit Diagram
Pass Idd fail
Judgement
Force voltage V (5V) to measure current I
- Force Vdd=5V(3.3V) - Measure I- Vdd and Vss
EDS
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I-V CurveI-V Curve
Curve TracerCurve Tracer
Feature- Pin to pin test- O/S test- Leakage test- Idd test
Feature- Pin to pin test- O/S test- Leakage test- Idd test
Tektronix 370A curve tracer spec.Range Resolution
V -500V ~ +500V 5mVI -2A ~ +2A 100pA
AUX -40V ~ +40V 20mA
DC TesterDC Tester
Feature- Socket test- O/S test- Leakage test- Idd test
Feature- Socket test- O/S test- Leakage test- Idd test
ChipMOS DC tester spec.Range Resolution
V -110V ~ +110V 100µVI -1A ~ +1A 100fA
Test socketTSOP II 54L
Normal Open Short Leakage
Failure AnalysisFailure AnalysisFailure Analysis
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X-光顯微儀(XRM, X-Ray Microscopy)
超音波掃描儀(SAT, Scanning Acoustic Tomograph)
檢測產品內部金線連接, 金線傾斜及銀膠氣洞等(wire connection, wire sweep, epoxy void)
檢測產品內部脫層, 氣洞, 晶片傾斜等(delamination, void, chip tilt)
Brand: SONIXModel: HS-1000
Brand: FEINFOCUSModel: FXS-100.23
Non-Destructive Test, NDTNon-Destructive Test, NDT
Failure AnalysisFailure AnalysisFailure Analysis
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Destructive TestDestructive Test
膠體開蓋機(Decapsulator)
金相試片製作(DPA, Destructive Physical Analysis)
去除產品封膠材料以便觀察金線及晶片等(Move away EMC to observe wire and chip)
Brand: NIPPON / Model: PS101
(Lead frame)
(Epoxy)
(Die pad)
Chip
產品內部結構及尺寸分析, 缺陷檢測(Internal structure and dimension)
Failure AnalysisFailure AnalysisFailure Analysis
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DPA Preparation, Cross-SectionDPA Preparation, Cross-Section
切割切割切割切割(Cutting)
切割切割切割切割(Cutting)
鑲埋鑲埋鑲埋鑲埋(Monting)
鑲埋鑲埋鑲埋鑲埋(Monting)
研磨研磨研磨研磨(Grinding)
研磨研磨研磨研磨(Grinding)
拋光拋光拋光拋光(Polishing)
拋光拋光拋光拋光(Polishing)
Brand: ALLIEDModel: METPREP 8
LiquidPowder
Brand: EXTEC Model: 14560 (p)
14565 (l)
Brand: BUEHLERModel: ECOMET 3
Brand: BUEHLERModel: ISOMET
Failure AnalysisFailure AnalysisFailure Analysis
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OM Appearance: Package crack
XRM: Cannot find abnormality
P45
P46
P47
P48
P49P50P51P52
P48
P49
SEM: Find 2nd stitch bond crack
compound
Crack-line
Au-wire
Ag-plating
Cu-leadframe
Failure mode: 2nd bond crack/broken
Failure AnalysisFailure AnalysisFailure Analysis
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光學顯微鏡(Optical Microscopy)
掃描式電子顯微鏡(SEM, Scanning Electron Microscopy)
MeasurescopyBrand: NIKONModel: MM-60/L3U
StereoscopyBrand: NIKONModel: SMZ-10A
H.M. Optical MicroscopyBrand: NIKONModel: OPTZPHOT-200
Brand: HITACHIModel: S-3500N
Auxiliary Tools (Microscope)Auxiliary Tools (Microscope)
Failure AnalysisFailure AnalysisFailure Analysis
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Device Related FA InstrumentsDevice Related FA Instruments
光子顯微鏡(EM, Emission Microscopy)
液晶顯微鏡(LCM, Liquid Crystal Microscopy)
聚焦離子束儀(FIB, Focus Ion Beam)
記憶體分析儀(MOSAID Memory Analyzer)
(Chemical Analysis, FTIR, Auger, EDX, AA…)
Failure AnalysisFailure AnalysisFailure Analysis
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XRM Image
SAT Picture
SEM Photo
Hot Spot(Defect)
LCM Photo
Sample
Open/Short Test
Leakage (Hi/Lo)
Idd Current Test
DC Tester
Open/Short only
Decapsulation
SEMSEM
LCMLCM
Curve Tracer(Tektronix 370A)
Liquid CrystalMicroscope
(Wentworth MP-2300)
Report
X-Ray Microscope(Feinfocus FXS 100.23)
- Sample - Pin Assignment- Socket
XRMXRM
SATSAT(Cause)
Scanning ElectronMicroscope
(HITACHI S-3500N)
Scanning AcousticTomograph
(SONIX HS-1000)
Failure Analysis ProcedureProcedure
PASS
(Pin to Pin)(Socket, all pins)
Leakage only(Hot-spot)
(Cause)
Chip ProbingChip Probing
(Cause)
Open/Short only
Failure AnalysisFailure AnalysisFailure Analysis
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Reference
www.semiconfareast.com Crime Scene Investigation