EUREKA: A new Industry EUV Research Center at...
Transcript of EUREKA: A new Industry EUV Research Center at...
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Berkeley Lab | MSD Materials Sciences Division 1
EUREKA: A new Industry EUV
Research Center at LBNL Patrick Naulleau
Center for X-ray Optics
Lawrence Berkeley National Laboratory
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Berkeley Lab | MSD Materials Sciences Division 2
Operating model
• Core operational and infrastructure
funding to build and preserve facilities
provided by Core Members
• Differential funding for expanded
operations and non-core upgrades
provided by Supplier Members
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Berkeley Lab | MSD Materials Sciences Division 3
Status • Master agreement with Founding Core Members
signed mid September
• Title to SEMATECH EUV assets in Berkeley
transferred to LBNL on 9/25
• Multiple supplier members now in signing process
• Discussions underway with numerous other
suppliers in resist, tool, and mask space
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Berkeley Lab | MSD Materials Sciences Division
Reflectometer/
Scatterometer
13-nm in non-CAR
0.5-NA Litho coming soon EUV AIMS up to 0.6 NA
0.3-NA Litho Cornerstone tools
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Berkeley Lab | MSD Materials Sciences Division
Specifications
• Wavelength precision: 0.007%
• Wavelength accuracy: 0.013%
• Reflectance precision: 0.08%
• Reflectance accuracy: 0.08%
• Spectral purity: 99.98%
• Dynamic range: 1010
CXRO Calibrations
and Standards
Beamline
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Berkeley Lab | MSD Materials Sciences Division
0 10 20 30 40 50 60 70 80 901E-5
1E-4
1E-3
0.01
0.1
1PMMA (=13.5 nm)
d = 286.5 nm
Re
flect
an
ce
Angle (deg)
=0.0242, =0.0054
High accuracy measurements of optical
constants of EUV resist and mask materials
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Berkeley Lab | MSD Materials Sciences Division
EUV 0.3-NA MET
13 nm
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Berkeley Lab | MSD Materials Sciences Division
MET: engine
for materials
learning Cumulative
wafers
Cumulative
materials
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Berkeley Lab | MSD Materials Sciences Division 9
13-nm patterning achieved in non-CA resist
60
mJ/cm2
LWR
= 3.1 nm
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Berkeley Lab | MSD Materials Sciences Division 10
• NA = 0.5
• Magnification = 5x
• Resolution limit = 8 nm
• Programmable pupil fill
• Mask angle of incidence = 6°
• Integrated wavefront metrology
• Robotic linked track
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Berkeley Lab | MSD Materials Sciences Division 11
Reticle stage assembly
Projection optics box
Tool core metrology frame
Wafer stage assembly
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Berkeley Lab | MSD Materials Sciences Division 12
7-axis reticle stage
Spec Measured
XY Low freq.
(<2Hz) PV 3 nm 0.92 nm
XY High freq.
(>0.5Hz) RMS 2 nm 0.33 nm
Z Low freq.
(<2Hz) PV 10 nm 1.7 nm
Z High freq.
(>0.5Hz) RMS 3 nm 0.61 nm
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Berkeley Lab | MSD Materials Sciences Division 13
5-axis wafer stage/
2-axis LSI carriage
Spec Measured
XY Low freq.
(<2Hz) PV 3 nm 0.51 nm
XY High freq.
(>0.5Hz) RMS 1 nm 0.65 nm
Tip/Tilt RMS 18 mrad 0.15 mrad
Z Low freq.
(<2Hz) PV 10 nm 1.5 nm
Z High freq.
(>0.5Hz) RMS 3 nm 0.42 nm
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Berkeley Lab | MSD Materials Sciences Division 14
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Berkeley Lab | MSD Materials Sciences Division
Range Specification Result
Figure CA – 3mm < 0.1nm rms 0.04 nm rms
Flare 3mm – 0.43um < 0.17nm rms 0.12 nm rms
HSFR 1um – 10nm < 0.15nm rms 0.08 nm rms
Range Specification Result
Figure CA – 8mm < 0.1nm rms 0.08 nm rms
Flare 8mm – 1.2um < 0.17nm rms 0.14 nm rms
HSFR 1um – 10nm < 0.15nm rms 0.09 nm rms
M1
M2
Predicted POB EUV flare = 2.86%
Individual mirrors better than spec
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Berkeley Lab | MSD Materials Sciences Division 16
System wavefront 2x better than spec
Reticle field point (um)
WFE @ 30cycles across aperture (nm rms)
0, 0 0.21 (spec=0.5)
75, 500 0.43 (spec=1.0)
75, -500 0.41 (spec=1.0)
-75, -500 0.34 (spec=1.0)
-75, 500 0.36 (spec=1.0)
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Berkeley Lab | MSD Materials Sciences Division
Platform integration nearly complete
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Berkeley Lab | MSD Materials Sciences Division 18
Other relevant assets for EUREKA Members at LBNL
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Berkeley Lab | MSD Materials Sciences Division
Instrumentation for direct characterization of EUV radiation chemistry
1: Introduce materials
as molecular or
nanoparticle beam
2: Irradiate with
EUV or electrons
3: Measurement
of electrons and
chemistry
Inorganic nanoparticle
resists coated in-situ
with resist materials
Nebulized
polymeric resist
condenses to
particles
Molecular resist
EUV
Fragment Mass
Electron Energy
Co
un
t
Co
un
t Mass
spectroscopy
for molecular
reactions
Ee- = 92eV-
Binding E
Photo-electron
imaging for
energy and count
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Berkeley Lab | MSD Materials Sciences Division
RSoXS: soft-x-ray potential for 3D chemically sensitive profile metrology
MSE Division
Preliminary Fitting of Soft X-ray Data
• Fits to soft x-ray data within uncertainty of hard x-ray data
• Supportive to idea of asymmetric edge profile
• Additional data considerably reduces fit uncertainty
Soft X-ray
Hard X-ray Soft X-ray
10-3
10-2
10-1
100
101
102
103
104
105
106
107
108
109
1010
1011
Inte
nsity (
a.u
.)
-0.6 -0.4 -0.2 0.0 0.2 0.4 0.6
q (nm-1
)
10-3
10-2
10-1
100
101
102
103
104
105
106
107
108
109
1010
1011
Inte
nsity (
a.u
.)
0.40.20.0-0.2-0.4
q (nm-1
)
60
50
40
30
20
10
0
He
igh
t (n
m)
-20 -10 0 10 20
Width (nm)
60
50
40
30
20
10
0
He
igh
t (n
m)
-20 -10 0 10 20
Width (nm)
PMMA
Sunday et al. JM3 12 (3), 2013, 031103
MSE Division
Soft X-ray CD-SAXS Results for 1:1 Sample
• Scattering intensity and number of peaks increased substantially
with RSoXS
– qx-qz plot result of reconstruction from >400 images
– Data up to 10th order diffraction peak
• Higher q data corresponds to smaller features and finer details
10-1
100
101
102
103
104
105
106
Co
un
ts (
arb
)
0.060.040.020.00-0.02-0.04qz (Å
-1)
Hard X-ray_n3 Soft X-ray_n3 Hard X-ray_n4 Soft X-ray_n4 Hard X-ray_n5 Soft X-ray_n5
Hard vs. Soft
n=3
n=4
n=5
10
12
3 4 5
Hard X-ray
1
2 3 45
67
8 9
Soft X-ray
Sunday et al. JM3 12 (3), 2013, 031103
CD-RSoXS on Polymer Lithography Grating
Compares favorably to hard X-ray and provides benefit
of chemical sensitivity for potential use in latent images
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Berkeley Lab | MSD Materials Sciences Division 21
Realtime in liquid AFM for development studies
Encased cantilever for fast response in liquid
Start of developer injection
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Berkeley Lab | MSD Materials Sciences Division 22
Nano-Auger for Surface Elemental Analysis
Auger
REELS
In-situ analysis of
SiAu alloys above
and below the
Eutectic point
Mapping S and Mo in single
monolayer CVD MoS2
islands showing S deficit at
grain boundaries
Chemical Analysis with sub-50 nm
resolution on SEM-type samples
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Berkeley Lab | MSD Materials Sciences Division