Energy Harvesting: advanced MEMS to NEMS - N.i.P.S) Lab Cottone - EH advanced.pdf · Energy...
Transcript of Energy Harvesting: advanced MEMS to NEMS - N.i.P.S) Lab Cottone - EH advanced.pdf · Energy...
Energy Harvesting:
advanced
MEMS to NEMS
NiPS Summer School
July 7-12th, 2015
Fiuggi, Italy
Francesco Cottone
NiPS lab, Physics Dep., Università di Perugia
francesco.cottone at unipg.it
1NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Outline
MEMS- to NEMS-based energy harvesters and
potential applications
Micro/nanoscale energy harvesters: scaling issues
Nonlinear and frequency-up conversion approaches
Conclusions
2NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
MEMS- to NEMS-based harvesting devices
and potential applicationsMEMS-based drug delivery systems
Bohm S. et al. 2000
Body-powered oximeter
Leonov, V., & Vullers, R. J. (2009).
D. Tran, Stanford Univ. 2007
Heart powered pacemakerA 1mm-20mg nanorobot flying at
1 m/s requires F ~ 4 microN and
P ~ 41 uW.
The input power for a 20mg
robotic fly is 10 – 100 uW
depending on many factors: air
friction, aerodynamic efficiency
etc.
Micro-robot for remote
monitoring
A. Freitas Jr., Nanomedicine, Landes Bioscience,
1999
Pacemaker consumption is
around 40uW.
Beating heart could produce
200uW of power from heat
differentials, physiological
pressures, and flows and
movements, such as blood
flow
3NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
MEMS- to NEMS-based harvesting devices
and potential applicationsPiezoelectric
Chang. MIT 2013
Jeon et al. 2005
D. Briand, EPFL 2010
M. Marzencki 2008 – TIMA Lab (France)
ZnO nanowires
Wang, Georgia Tech
(2005)
4NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
MEMS- to NEMS-based harvesting devices
and potential applicationsElectrostatic and Electromagnetic
EM generator, Miao et al. 2006
Cottone F., Basset P.
ESIEE Paris 2013-14
Mitcheson 2005 (UK)
Electrostatic generator 20Hz
2.5uW @ 1g
Le and Halvorsen, 2012
5NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
MEMS- to NEMS-based harvesting devices
and potential applicationsNEMS-based energy harvesting devices
ZnO nanowires –Xu F.
(2010) tensile stress test
Chen, X. et al (2010) Nano letters
0,6 V – 30nW
Cha, S. (2010). Sound-driven piezoelectric
nanowire-based nanogenerators.
Advanced materials
Qi, Yi, 2011 Nano Letters
PZT Nanoribbons
Virus-directed BaTiO3 nanogenerator
Jeong, C. et al (2013). ACS
nano,
Time
2005 2015
6NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Microscale kinetic harvesters: scaling
issuesObjective :
100 µW/cm3 of power density
Temporary storage
and conditioning electrinics:
• Ultra capacitors
• Rechargeable Batteries
Energy harvesting system:
• piezoelectric,
• electromagentic,
• electrostatic,
• magnetostrictive
Sensor node and
transceiver
Mechanical vibrations
7NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Who’s the best for MEMS/NEMS ?
Technique Advantages Drawbacks
Piezoelectric • high output voltages
• well adapted for
miniaturization
• high coupling in single
crystal
• no external voltage source
needed
• expensive
• small coupling for
piezoelectric thin films
• large load optimal
impedance required (MΩ)
• Fatigue effect
Electrostatic • suited for MEMS
integration
• good output voltage (2-
10V)
• possiblity of tuning
electromechanical
coupling
• Long-lasting
• need of external bias
voltage
• relatively low power
density at small scale
Electromagnetic • good for low frequencies
(5-100Hz)
• no external voltage source
needed
• suitable to drive low
impedances
• inefficient at MEMS scales:
low magnetic field, micro-
magnets manufacturing
issues
• large mass displacement
required.8NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
First order power calculus with William and Yates model
Microscale kinetic harvesters: scaling issues
k
Transducer as an electrical damper
F(t)=mÿ
xdm
m
y
de
Motion equation
( ) ( ) ( ) ( ) ( )m emx t d d x t kx t my t 0( ) sin( )f t my Y t
Inertial force
2
022
2
( ) sin( )
( )e m
x t Y t
d dk
m m
Steady state solution
setting dT =dm+de the total damping coefficient, the phase angle is given by
1
2tan Td
k m
/n k m and the natural frequency
2
2 2
( )( )
( ) 2 ( )xf
e m n n
XH
Y i
By introducing the damping ratio, namely T=(e+m)=dT/2mn, the position transfer fuction is expressed by
9NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
First order power calculus with William and Yates model
3
3 2
0
22 2
1 2( )
e
n
e
e m
n n
m Y
P
that is
At resonance, that is =n , the maximum power is given by
3 2 2 4 2
0
2 24( ) 2( )
e n e ne
e m e m
m Y m d YP
d d
or with acceleration amplitude
A0=n2Y0.
for a particular transduction mechanism forced at natural
frequency n, the power can be maximized from the equation
2
24 ( )
eel
n m e
m AP
Max power when the condition
e=m is verified
The instantaneous dissipated power by electrical damping is given
by
2
0
1( ) ( )
2
x
T
dP t F t dx d x
dt
The velocity is obtained by the first derivative of steady state
amplitude2
0
2 2 2,
(1 ) (2( ) )e m
r YX
r r
Microscale kinetic harvesters: scaling issues
10NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
3 322 2
2
2
0.32( / 4) 0.32( / 4)
4 ( ) 816
si mo si moeel
n m e n m
n m
si
lwh l lwh lm AP A A
E hC
l
PIEZOELECTRIC CANTILEVER
22n n
E hC
l
Boudary
conditions C1
doubly clamped 1,03
cantilever 0,162h
w
lBoudary
conditions Uniform load xsi Point load xsi
doubly clamped 32 16
cantilever 0,67 0,2530.32 0.32( / 4)eff beam tip si sim m m lwh l
At max power condition e=m
By assuming
1
0.01
/ 200
/ 4
m
A g
h l
w l
2 4/ 800 0.32 64
16
200
si moel
n m
si
P A lE
C
3
3
Ewhk
l
Microscale kinetic harvesters: scaling issues
11NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
MEMS-VEHs
h
w
l
NEMS-VEHs
PIEZOELECTRIC CANTILEVER
Microscale kinetic harvesters: scaling issues
12NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
1
0.01
/ 200
/ 4
m
A g
h l
w l
By assuming
NEMS-VEHsMEMS-VEHs
h
w
l
By assuming
1
0.01
/ 200
/ 4
m
A g
h l
w l
Microscale kinetic harvesters: scaling issues
13NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
PIEZOELECTRIC CANTILEVER
h
w
l
By assuming1
0.01
/ 200
/ 4
m
A g
h l
w l
Alex Zettl, California Univ. 2010 AFM cantilever
Microscale kinetic harvesters: scaling issues
14NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
PIEZOELECTRIC CANTILEVER
Piezoelectric conversion
22 3131
11 33
.
. E T
El energy dk
Mech energy s
Electromechanical Coupling is an adimensional factor that provides the effectiveness of a
piezoelectric material. IT’s defined as the ratio between the mechanical energy converted and the
electric energy input or the electric energy converted per mechanical energy input
Characteristic PZT-5H BaTiO3 PVDF AlN
(thin film)
d33 (10-10 C/N) 593 149 -33 5,1
d31 (10-10 C/N) -274 78 23 -3,41
k33 0,75 0,48 0,15 0,3
k31 0,39 0,21 0,12 0,23
𝜀𝑟 3400 1700 12 10,5
Strain-charge Stress-charge
15NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Microscale kinetic harvesters: scaling
issues
Mitcheson, P. D., E. M. Yeatman, et al. (2008).
Bandwidth figure of
merit
Frequency range within which the output
power is less than 1 dB
below its maximum valueGalchev et al. (2011)
16NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Microscale kinetic harvesters: scaling
issues
Galchev et al. (2011)
Bandwidth figure of
merit
Frequency range within which the output
power is less than 1 dB
below its maximum value
Mitcheson, P. D., E. M. Yeatman, et al. (2008).
17NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
At micro/nano scale direct force generators are much more
efficient because not limited by the inertial mass!!!
RL
Transducer
k
i
F(t)
zRL d
m
fe
k
i
Transducer
F(t)=mÿ
zd
m
fe
y
Microscale kinetic harvesters: scaling
issues
( )
( )
L
L c i L c
dU zmz dz V my
dz
V V z
( )( )
( )
L
L c i L c
dU zmz dz V F t
dz
V V z
18NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Power fluxes
RL
Transducer
k
i
F(t)
zRL d
m
fe
k
i
Transducer
F(t)=mÿ
zd
m
fe
y
Microscale kinetic harvesters: scaling
issues
3( )mP t my z l z ( ) ( ) ( )mP t F t z t
2 ( )( )L
dU zmzz dz z V z F t z
dz
19NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Nonlinear MEMS electrostatic kinetic energy
harvester
20NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Electrostatic generators
Sine sweeping from 1 to 200 Hz within 5 seconds
of time.
At low frequency the ball transfer its kinetic
energy to the oscillating silicon mass
throughout impacts with inner walls of the
cavity. After the impact the mass resonate at
its natural frequency (163 Hz) and this energy
is converted by the coupling with electrostatic
transducer.
Microball
displacement
Inner walls of the
cavity
Silicon mass displacement
Capacitance
variation
Voltage variation
21NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Electrostatic generators
22
INPUT SIGNAL: walking man
RMS acceleration: 0.39 grms
Generated Power: 1.34 µW
Bias voltage: 20 V
MEMS direction: X
NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
F. Cottone et al., 2014 IEEE 27th Int. Conf. Micro Electro Mech. Syst, 2014.
23NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone
Conclusions
o Many potential applications are waiting for powerful MEMS/NEMS
harvesting system to enable self-powering features
o Inertial vibration energy harvesters are very limited at small scale
-> direct force piezoelectric/electrostatic devices are more
efficient at nanoscale
o Design challenges
o Materials with high electromechanical coupling,
o Cheap miniaturization/fabrication processes
o Very efficient conditioning electronics
o In general the specific application decides if one or many micro-
VEH are the best choice with respect to one macro-scale VEH
24NiPS Summer School 2015 – July 7-12th - Fiuggi (Italy) – F. Cottone