EE C247B/ME C218: Introduction to MEMS Design CTN 3/5/20 Lecture 13w: Beam … › ~ee247b › sp20...
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 1
Lecture 13: Beam Combos I
• Announcements:
• HW#3 due Tuesday, 3/10, at 8 a.m.
• Midterm Exam about 2 weeks away, Thursday, March 19, 9:30-11:00 a.m., 521 Cory (right here)
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• Reading: Senturia, Chpt. 9
• Lecture Topics:
Bending of beams
Cantilever beam under small deflections
Combining cantilevers in series and parallel
Folded suspensions
Design implications of residual stress and stress gradients
• -------------------------------------
• Last Time:
• Finished stress gradients
• Now, move into beam combos
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 2
• … and the result:
• We just quantified this
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 3
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 4
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 5
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 6
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EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I
CTN 3/5/20
Copyright © 2020 Regents of the University of California 7
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