Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion...
Transcript of Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion...
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OXIDATION
Discussion 3Monday, February 23, 2015 12:20 PM
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Monday, February 23, 2015 12:25 PM
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EVAPORATION AND SPUTTER DEPOSITION
Monday, February 23, 2015 12:29 PM
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CVD
Monday, February 23, 2015 12:33 PM
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Monday, February 23, 2015 12:38 PM
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LITHOGRAPY
Monday, February 23, 2015 1:15 PM
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ETCHING
Monday, February 23, 2015 1:17 PM
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Silicon Wet EtchingMonday, February 23, 2015 1:20 PM
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DRY ETCHING
Monday, February 23, 2015 1:26 PM
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DOPING
Monday, February 23, 2015 1:29 PM
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Monday, February 23, 2015 1:33 PM
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Monday, February 23, 2015 1:34 PM
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IRVIN'S CURVES
Monday, February 23, 2015 1:36 PM
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Surface MicromachiningMonday, February 23, 2015 1:49 PM
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Monday, February 23, 2015 1:49 PM
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Monday, February 23, 2015 1:49 PM
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STRESS
Variation of residual stress in the direction of film growth
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Can warp released structures in z-direction
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TOPOGRAPHY
Monday, February 23, 2015 1:58 PM
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