Diamond Field Emitter Arrayson Micromachined SiliconNano Science & Engineering LabECEOld Dominion University Norfolk, Virginia 23529Dr. Wehai FuDr. Sacharia Albin

Outline SummaryIntroductionField emissionExperimentsIIIIIIIVField emission and applicationsAdvantages of diamond field emitters Project goalFowler-Nordheim field emissionField emission enhancementSilicon tip array fabricationDiamond emitter fabricationResults and discussionVSilicon tip array wet etchingDiamond film characterizationDiamond emitter I-V characteristics

I. Introduction Thermal excitationPhoto excitationTunnelingElectron emission mechanismsSurface barrierSurface barrier bending due to applied fieldAdvantages of field emissionLow energy consumptionHigh current densitySmall device size (sharp tips)

Cold cathode Flat panel displayVacuum microelectronic deviceMicrosensorScanning probe microscope for surface imagingAnodeGateEmitterProbeGateEmitter arrayPhosphorConductive coating5 mmdE-beamEmitter arrayExtracting gateFocusing electrodeField Emission ApplicationsPressureI. Introduction

Requirements for applications:Drawbacks of metal and silicon emitters:Low turn-on voltage Large emission current Uniform over the arrayStable emissionHigh extracting fieldSputtering damageSurface adsorptionEmitter overheatingAnodeEmitterI. Introduction

Diamond Field EmitterHardest known material 10,400 kg/cm2Highest thermal conductivity 20 W/cm-oC 5 times larger than copperChemically inertSmall effective work functionProperties of diamondAdvantages for field emissionLow threshold voltage for electron emissionResistance to sputtering damage by residual gasEfficient and fast thermal dissipation Robust performance in harsh environment I. Introduction

Research Developments 1928 Field emission theory proposed (Fowler and Nordheim) 1968 First metal field emitter with self-aligned gate demonstrated (Spindt)1990 Silicon field emitter array with self-aligned gate developed (Betsui)1979 Negative electron affinity (NEA) of diamond discovered (Himpsel)1976 Enhanced chemical vapor deposition (CVD) diamond developed (Deryagin)1994 Mold-filled CVD diamond tip array fabricated (Okano)1997 Diamond film coated silicon sharp tips demonstrated (Zhirnov)1997 Diamond tips for tunneling microscopy developed (Albin)YearHighlightsI. Introduction1999 Diamond field emitter arrays with self-aligned gate succeeded (Albin)

Project Goal Scanning electron microscopyOptical emission spectroscopyRaman spectroscopyI-V measurementDesign, fabricate, and characterize diamond field emitter arrays using:Silicon surface micro-machiningPlasma enhanced CVD diamondI. Introduction

Surface Energy Barrier#Image ChargeApplied Field Combined effect# S. O. Kasap, Principles of Electrical Engineering Materials and Devices (McGraw-Hill, 1997).II. Field Emission fEfEfEfxxxfFefff- exFPe(x)Pext(x)P(x)Schottky barrier reductiondSurface barrier thinningVacuum LevelVacuum LevelVacuum Level

Fowler-Nordheim Equation# m mass of electron work function of the cathode y function of F and t(y), v(y) approximated as constants# R. H. Fowler and L. W. Nordheim, Proc. R. Soc. London A119, 173 (1928).

J emission current density e electron charge h Plancks constant F electric field at cathodeII. Field EmissionField Emission Current DensityN(T,S): electron densityD(F,s,): tunneling probabilitys: kinetic energyT: temperature F: applied field: work function

F-N Plot Where:Simplified F-N Equation#a emitting area f emitter work function field enhancement factor# C. A. Spindt, I. Brodie, L. Humphrey, and E. R.Westerberg, J. Appl. Phys. 47, 5248 (1976).5.5 eV3 eV2 eV5 eV4 eVI-V PlotF-N PlotII. Field Emissionor(400 tip array with a tip radius of 20 nm and a field enhancement factor of 105 cm-1)

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899255824103.6524766900626.4776943525174.90683336961013.75706357133978.99747236

945435790302.27726614523959.94381040514947.418341975590.58600098231478.28549111

993094865504.38328559603455.05921145156730.7600947541331.49572969468544.88391539

1042249138937.5330604977318.79121257860656.3107353704063.066684210859089.0136581

1092914352153.6532753481662.56181379046922.7134660512086.161883112417998.0606413

1145105905990.2135007949019.69331509145569.1316168016220.211325714161171.6484649

1198838867516.6237371206936.72081648596240.5856376269844.278639616105556.0138769

1254127976951.139846076636.7911797847946.2844885328934.87376218269177.6057474

1310987654535.0342435371753.26951957358811.8277695252100.488734220671175.8332769

1369432007353.3445141897131.6062127595826.11709106100612.84624423331834.8943227

1429474836090.8647968447697.44592309034583.77687117938434.86236526272614.6199623

1491129641715.7650917807388.93732502159023.84586130832245.33598329516180.276692

1554409632082.653992748151.15242707461165.4617144851460.3876633086431.2729435

1619327728448.0957196028990.52762925440841.22192160068251.68020937008528.7218529

1685896571894.2560530395087.22143156605428.86626176557561.4619741308921.8174181

1754128529653.7863998576963.29423401469581.88698194397114.48177746015372.9862884

Electric Field (107 V/cm)

Current Density (A/cm2)

Sheet2

-188.8999889397-343.1364309613-524.79633981100

-97.8246355229-175.8203229501-267.196339811-370.3754063466-426.0165341743

-67.466184384-120.0482869464-181.3296731443-250.3730915541-287.5710956635

-52.2869588145-92.1622689445-138.396339811-190.3719341578-218.3483764081

-43.1794234728-75.4306581434-112.636339811-154.3712397201-176.8147448548

-37.107733245-64.2762509427-95.4630064776-130.3707767616-149.1256571527

-32.7708116537-56.3088172279-83.196339811-113.2275889341-129.3477373654

-29.5181204603-50.3332419417-73.996339811-100.3701980635-114.514297525

-26.988249532-45.6855722748-66.8407842554-90.3700051641-102.9771776491

-24.9643527894-41.9674365412-61.116339811-82.3698508446-93.7474817484

-23.3084372728-38.9253254864-56.4327034473-75.8242700377-86.1959123751

-21.9285076755-36.3902329408-52.5296731443-70.3696193653-79.9029378973

-20.7608749394-34.245154633-49.2271090417-65.7541457195-74.5781133392

-19.7600468799-32.4065160834-46.396339811-61.7980254516-70.0139780037

-18.8926625617-30.8130293404-43.9430064776-58.3693878861-66.0583940462

-18.1337012832-29.4187284403-41.796339811-55.3693300163-62.5972580834

-17.4640295669-28.1884629403-39.9022221639-52.7222201311-59.5433145869

-16.8687658191-27.0948936069-38.2185620332-50.3692335666-56.8286981455

-16.3361614131-26.1164368349-36.7121292847-48.2639297983-54.3998308032

-15.8568174478-25.2358257401-35.356339811-46.3691564068-52.2138501951

-15.4231252886-24.4390823686-34.1296731443-44.6548376241-50.2360582164

-15.0288596894-23.7147702127-33.0145216292-43.0963660034-48.4380655085

-14.6688780554-23.0534417225-31.996339811-41.6734136541-46.7964199925

-14.3388948908-22.4472239399-31.0630064776-40.3690406672-45.2915782696

-14.0353103794-21.8895035798-30.204339811-39.1690175193-43.9071238845

-13.7550785228-21.374684786-29.4117244264-38.0613038443-42.6291659905

-13.4956045814-20.8980007176-28.6778212925-37.0356430341-41.4458716443

-13.254664493-20.4553655112-27.996339811-36.0832437103-40.3470983228

-13.0303409624-20.0432568708-27.3618570524-35.1965270986-39.3241024717

-12.8209723339-19.6586221397-26.7696731443-34.3689249276-38.3693063441

-12.6251113588-19.2988025526-26.2156946497-33.5947164451-37.4761099666

-12.4414916946-18.9614716896-25.696339811-32.8688959927-36.6387383627

-12.269000495-18.6445851214-25.2084610231-32.1870646586-35.852116553

-12.1066558365-18.3463389396-24.7492809874-31.5453410501-35.1117666144

-11.9535880156-18.0651353967-24.316339811-30.9402873621-34.4137223866

-11.8090239626-17.7995542729-23.9074509221-30.3688477678-33.7544583937

-11.6722741827-17.5483288855-23.5206641353-29.8282968003-33.1308302923

-11.5427217596-17.3103258869-23.1542345478-29.3161958837-32.5400247225

-11.4198130505-17.0845281703-22.8065962212-28.8303565526-31.9795168743

-11.3030497769-16.8700203395-22.476339811-28.368809188-31.4470344185

-11.1919822728-16.6659763053-22.1621934695-27.929776329-30.9405267166

-11.0862036974-16.4716486538-21.8630064776-27.5116497966-30.4581384292

-10.9853450557-16.2863594976-21.5777351598-27.1129710099-29.9981868062

-10.8890708977-16.1094925758-21.3054307201-26.7324139862-29.5591420752

-10.7970755913-15.9404864061-21.0452286999-26.3687706081-29.1396104433

-10.7090800807-15.7788283307-20.796339811-26.0209378116-28.7383193172

-10.62482906-15.6240493224-20.5580419386-25.6879064107-28.3541044092

-10.5440884984-15.4757194394-20.3296731443-25.3687513182-27.9858984557

-10.46664347-15.3334438374-20.1106255253-25.0626229641-27.6327213167

-10.3922962427-15.1968592594-19.900339811-24.7687397442-27.2936712632

-10.320864593-15.0656309394-19.6983005953-24.4863813564-26.9679172902

-10.2521803144-14.9394498625-19.5040321187-24.2148829067-26.6546923162

-10.1860878954-14.8180303356-19.317094528-23.9536296814-26.3532871526

-10.1224433437-14.7011078283-19.1370805517-23.7020525016-26.0630451431

-10.0611131394-14.5884370484-18.9636125382-23.4596235828-25.7833573885

-10.0019732995-14.4797902251-18.796339811-23.2258528397-25.5136584823

-9.9449085418-14.3749555709-18.6349363022-23.0002845788-25.2534226957

-9.8898115342-14.2737359049-18.4790984317-22.7824945338-25.0021605568

-9.8365822219-14.1759474139-18.3285432008-22.5720872022-24.7594157786

-9.78512722-14.0814185393-18.1830064776-22.3686934483-24.524762493

-9.7353592673-13.9899889721-18.0422414503-22.1719683421-24.2978027577

-9.6871967324-13.9015087458-17.9060172303-21.9815892071-24.0781643042

-9.6405631669-13.8158374155-17.7741175888-21.7972538541-23.8654985001

-9.5953869004-13.7328433143-17.646339811-21.6186789809-23.6594785023

-9.5516006727-13.6524028778-17.5224936571-21.4455987192-23.4597975814

-9.5091413005-13.5744000302-17.402400417-21.2777633139-23.2661675974

-9.4679493722-13.4987256259-17.2858920498-21.1149379207-23.078317613

-9.4279689713-13.4252769393-17.1728103992-20.9569015096-22.8959926281

-9.3891474225-13.3539572001-17.0630064776-20.8034458641-22.7189524254

-9.3514350608-13.2846751678-16.956339811-20.6543746656-22.5469705143

-9.3147850192-13.2173447421-16.8526778391-20.5095026558-22.3798331639

-9.2791530343-13.1518846059-16.7518953665-20.3686548685-22.2173385178

-9.2444972682-13.0882178982-16.6538740576-20.2316659246-22.0592957798

-9.2107781444-13.0262719122-16.5585019731-20.0983793847-21.9055244671

-9.1779581972-12.9659778192-16.4656731443-19.9686471525-21.7558537228

-9.1460019328-12.9072704129-16.3752871794-19.8423289264-21.6101216822

-9.1148757013-12.8500878743-16.2872489019-19.7192916932-21.4681748895

-9.0845475783-12.7943715546-16.2014680161-19.5994092608-21.3298677581

-9.0549872559-12.7400657747-16.1178587983-19.4825618267-21.1950620731

-9.0261659415-12.6871176392-16.036339811-19.3686355785-21.0636265302

-8.9980562645-12.6354768652-15.9568336381-19.2575223241-20.9354363094

-8.9706321894-12.5850956222-15.8792666402-19.149119149-20.8103726793

-8.9438689354-12.535928385-15.8035687266-19.0433280987-20.6883226306

-8.9177429017-12.4879317964-15.7296731443-18.9400558828-20.5691785355

-8.8922315982-12.4410645392-15.6575162816-18.8392136015-20.4528378309

-8.8673135809-12.3952872183-15.5870374854-18.7407164895-20.339202724

-8.8429683915-12.3505622496-15.5181788914-18.6444836789-20.2281799185

-8.8191765019-12.3068537574-15.4508852655-18.5504379777-20.1196803585

-8.7959192615-12.2641274785-15.3851038559-18.458505663-20.0136189909

-8.7731788487-12.2223506725-15.3207842554-18.3686162886-19.9099145426

-8.7509382251-12.1814920381-15.2578782725-18.2807025049-19.8084893129

-8.7291810934-12.1415216348-15.196339811-18.1946998903-19.7092689796

-8.707891857-12.1024108102-15.1361247572-18.1105467944-19.6121824168

-8.687055583-12.0641321307-15.0771908748-18.0281841899-19.5171615256

-8.6666579675-12.0266593181-15.0194977057-17.9475555349-19.4241410742

-8.6466853023-11.9899671892-14.9630064776-17.8686066436-19.3330585488

1/F (10-7 cm/V)

ln (J/F2) (ln(A/V2)

Sheet3

1439.1945194355524300000001970000000076700000000

0.00005944388.136260982575433323628000000

00.1766022129.713277184.95692883

00.000002911.066616765.072743753.52

00.00000000840.01952835.224633503.073

Work Function (eV)

Current Density (A/cm2)

Voltage (v)

Emission current (A)

Chart1

-108.6356217965-186.6305525085-278.0077254364-381.1797926873-436.8265461303

-63.0981217965-102.9730525085-149.2077254364-201.1797926873-229.1590461303

-47.9189551299-75.0872191751-106.274392103-141.1797926873-159.9365461303

-40.3293717965-61.1443025085-84.8077254364-111.1797926873-125.3252961303

-35.7756217965-52.7785525085-71.9277254364-93.1797926873-104.5585461303

-32.7397884632-47.2013858418-63.3410587697-81.1797926873-90.7140461303

-30.5713360823-43.2176953656-57.2077254364-72.6083641159-80.8251175589

-28.9449967965-40.2299275085-52.6077254364-66.1797926873-73.4084211303

-27.680066241-37.906108064-49.0299476586-61.1797926873-67.6398794637

-26.6681217965-36.0470525085-46.1677254364-57.1797926873-63.0250461303

-25.8401672511-34.5260070539-43.8259072545-53.9070654146-59.249273403

-25.1502051299-33.2584691751-41.874392103-51.1797926873-56.1027961303

-24.5663910273-32.1859371238-40.2231100518-48.8721003796-53.4403922842

-24.0659789394-31.266623937-38.8077254364-46.8940784016-51.1583318446

-23.6322884632-30.4698858418-37.5810587697-45.1797926873-49.1805461303

-23.2528092965-29.7727400085-36.5077254364-43.6797926873-47.4499836303

-22.9179747377-29.157611332-35.5606666128-42.3562632755-45.9230167186

-22.6203440188-28.6108302862-34.7188365475-41.1797926873-44.565712797

-22.3540428492-28.12160514-33.9656201732-40.1271611084-43.3512829724

-22.1143717965-27.6813025085-33.2877254364-39.1797926873-42.2582961303

-21.8975265585-27.2829334608-32.674392103-38.3226498302-41.2694032732

-21.7003945238-26.9207797812-32.1168163455-37.5434290509-40.3704097667

-21.5204044052-26.5901177258-31.6077254364-36.8319666003-39.5495896086

-21.3554134632-26.2870108418-31.1410587697-36.1797926873-38.7971711303

-21.2036217965-26.0081525085-30.7117254364-35.5797926873-38.1049461303

-21.0635064119-25.7507448161-30.3154177441-35.0259465335-37.4659692072

-20.9337699447-25.5124043603-29.9484661771-34.5131260206-36.8743239081

-20.813300368-25.2910882227-29.6077254364-34.0369355444-36.3249389875

-20.7011390379-25.0850352671-29.2904840571-33.5935857908-35.813442682

-20.5964551299-24.8927191751-28.994392103-33.1797926873-35.3360461303

-20.4985250224-24.712810573-28.7174028557-32.7926959131-34.8894493561

-20.4067155465-24.5441462585-28.4577254364-32.4297926873-34.4707648803

-20.3204702814-24.3857040236-28.2137860424-32.0888835964-34.0774552212

-20.2392982671-24.2365819202-27.9841960246-31.7680279814-33.7072814244

-20.1627646537-24.0959810799-27.7677254364-31.465506973-33.358260416

-20.0904829077-23.9631913973-27.5632809919-31.1797926873-33.0286294637

-20.022108283-23.8375795355-27.3698875985-30.909522417-32.7168164006

-19.9573323229-23.7185788242-27.1866728048-30.6534768978-32.4214145514

-19.8958782068-23.6056807136-27.0128536415-30.4105619181-32.1411615149

-19.8374967965-23.4984275085-26.8477254364-30.1797926873-31.8749211303

-19.78196326-23.396406167-26.6906522656-29.9602804922-31.6216680815

-19.7290741775-23.2992429846-26.5410587697-29.7512212587-31.3804747018

-19.6786450524-23.2065990201-26.3984231108-29.5518857106-31.1504996187

-19.6305081602-23.1181661448-26.2622708909-29.3616108691-30.9309779485

-19.5845106854-23.0336636196-26.1321698808-29.1797926873-30.721212797

-19.5405131009-22.9528351171-26.0077254364-29.0058796438-30.5205678695

-19.498387754-22.8754461255-25.8885765002-28.8393671554-30.3284610239

-19.4580176299-22.8012816751-25.774392103-28.6797926873-30.1443586303

-19.4192952659-22.7301443452-25.6648682935-28.5267314628-29.9677706201

-19.3821217965-22.6618525085-25.5597254364-28.3797926873-29.7982461303

-19.3464061103-22.596238783-25.4587058285-28.2386162167-29.6353696597

-19.3120641042-22.5331486623-25.3615715902-28.1028696104-29.4787576688

-19.279018023-22.4724393009-25.2681027949-27.9722455175-29.3280555643

-19.2471958706-22.4139784344-25.1780958067-27.846459354-29.1829350192

-19.2165308875-22.3576434175-25.0913618-27.7252472328-29.0430915849

-19.1869610823-22.3033203656-25.0077254364-27.6083641159-28.9082425589

-19.1584288141-22.2509033856-24.927023682-27.495582161-28.7781250777

-19.1308804172-22.2002938878-24.8491047467-27.386689239-28.6524944062

-19.1042658643-22.1513999661-24.7738271313-27.2814876026-28.5311224015

-19.0785384632-22.1041358418-24.7010587697-27.1797926873-28.4137961303

-19.0536545834-22.0584213609-24.630676256-27.0814320316-28.3003166221

-19.0295734095-22.0141815407-24.562564146-26.9862443002-28.1904977432

-19.0062567172-21.9713461592-24.4966143253-26.8940784016-28.0841651779

-18.9836686715-21.9298493835-24.4327254364-26.8047926873-27.9811555053

-18.9617756427-21.8896294315-24.3708023594-26.7182542258-27.8813153611

-18.940546039-21.850628266-24.3107557394-26.6343381419-27.7845006758

-18.9199501548-21.8127913144-24.2525015558-26.5529270157-27.6905759811

-18.8999600318-21.7760672143-24.1959607305-26.4739103344-27.5994137774

-18.8805493328-21.7404075809-24.1410587697-26.3971839917-27.5108939564

-18.8616932251-21.7057667942-24.0877254364-26.3226498302-27.4249032732

-18.8433682754-21.6721018042-24.0358944505-26.2502152225-27.3413348627

-18.8255523521-21.6393719529-23.9855032141-26.1797926873-27.260087797

-18.8082245363-21.6075388098-23.9364925597-26.1112995366-27.1810666783

-18.7913650398-21.576566022-23.8888065174-26.0446575522-27.1041812655

-18.7749551299-21.5464191751-23.842392103-25.9797926873-27.0293461303

-18.7589770597-21.5170656663-23.7971991206-25.9166347926-26.9564803408

-18.7434140043-21.4884745864-23.7531799818-25.8551173626-26.8855071693

-18.7282500017-21.460616611-23.7102895389-25.7951773027-26.8163538226

-18.7134698978-21.4334639009-23.66848493-25.7367547126-26.7489511936

-18.6990592965-21.4069900085-23.6277254364-25.6797926873-26.6832336303

-18.6850045126-21.3811697924-23.5879723499-25.6242371317-26.6191387229

-18.6712925283-21.3559793377-23.549188851-25.5700365897-26.5566071059

-18.6579109532-21.3313958819-23.5113398942-25.5171420849-26.4955822749

-18.644847987-21.3073977465-23.474392103-25.465506973-26.436010416

-18.6320923848-21.2839642732-23.4383136717-25.415086805-26.377840248

-18.6196334245-21.2610757643-23.4030742736-25.3658391989-26.3210228745

-18.607460877-21.238713428-23.3686449766-25.3177237218-26.2655116476

-18.5955649784-21.2168593266-23.3349981636-25.2707017782-26.2112620394

-18.5839364033-21.1954963287-23.3021074588-25.2247365075-26.1582315236

-18.572566241-21.174608064-23.2699476586-25.1797926873-26.1063794637

-18.5614459724-21.1541788821-23.2384946671-25.1358366433-26.0556670094

-18.5505674487-21.1341938128-23.2077254364-25.0928361656-26.0060569999

-18.5399228718-21.11463853-23.1776179095-25.0507604292-25.9575138723

-18.5295047753-21.095499317-23.1481509683-25.0095799213-25.9100035771

-18.5193060071-21.0767630348-23.1193043837-24.9692663715-25.8634934987

-18.5093197132-21.0584170918-23.0910587697-24.9297926873-25.8179523803

-18.4995393223-21.0404494157-23.0633955395-24.8911328935-25.773350254

-18.4899585312-21.0228484268-23.0362968649-24.8532620751-25.7296583752

-18.4805712915-21.0056030135-23.0097456384-24.8161563237-25.6868491606

-18.4713717965-20.9887025085-22.9837254364-24.7797926873-25.6448961303

1/V (1/V)

ln(I/V2) (A/V2)

Sheet1

2000000400 tips with radius of 20 nm

4000000b= 10e5 cm-1

6000000

8000000

10000000

1200.00000000010000

1400.0000000010000

1600.00000000690000

1800.00000003080000

2000.00000010480000

2200.00000029010000

2400.00000068840.0000000002000

2600.00000144840.0000000007000

2800.00000277070.0000000021000

3000.00000490760.0000000053000

3200.00000816080.000000012000

3400.00001287680.0000000251000

3600.00001944080.00000004860.000000000100

3800.00002827030.00000008840.000000000300

4000.0000398080.00000015220.000000000600

4200.0000545160.00000024980.000000001100

4400.00007286920.00000039390.000000002200

4600.00009535050.00000059920.00000000400

4800.00012244590.00000088340.000000006900

5000.00015464080.00000126690.00000001150.00000000010

5200.00019241640.00000177260.00000001850.00000000020

5400.00023624720.0000024260.00000002870.00000000030

5600.00028659890.00000325530.00000004340.00000000050.0000000001

5800.00034392640.00000429110.0000000640.00000000090.0000000001

6000.00040867280.00000556590.00000009210.00000000140.0000000002

6200.00048126810.00000711450.00000012970.00000000220.0000000003

6400.0005621290.00000897370.00000017920.00000000340.0000000004

6600.0006516580.00001118180.00000024320.0000000050.0000000007

6800.00075024360.00001377860.00000032480.00000000740.0000000011

7000.00085825960.00001680520.00000042740.00000001060.0000000016

7200.00097606590.00002030410.00000055470.00000001490.0000000023

7400.00110400820.00002431840.0000007110.00000002060.0000000034

7600.00124241840.00002889210.00000090080.00000002810.0000000048

7800.0013916150.000034070.00000112890.00000003780.0000000067

8000.0015519030.00003989720.00000140080.000000050.0000000092

8200.00172357510.00004641920.0000017220.00000006550.0000000124

8400.00190691140.00005368170.00000209860.00000008470.0000000166

8600.00210218020.00006173040.00000253690.00000010830.0000000219

8800.00230963830.00007061120.00000304370.00000013720.0000000286

9000.00252953150.00008036960.0000036260.00000017210.0000000368

9200.00276209520.00009105130.00000429110.0000002140.0000000471

9400.00300755450.00010270120.00000504650.00000026390.0000000595

9600.00326612480.00011536440.00000590020.00000032290.0000000746

9800.00353801260.0001290850.00000686030.00000039210.0000000928

10000.00382341510.00014390720.00000793510.00000047290.0000001145

10200.00412252150.00015987430.00000913320.00000056670.0000001402

10400.00443551250.00017702910.00001046350.00000067480.0000001705

10600.00476256140.00019541390.00001193480.00000079880.0000002059

10800.00510383410.00021507030.00001355620.00000094030.0000002471

11000.00545948960.00023603920.00001533720.00000110120.0000002948

11200.00582968010.00025836110.0000172870.00000128310.0000003497

11400.00621455140.00028207540.00001941520.00000148810.0000004127

11600.00661424350.0003072210.00002173140.0000017180.0000004845

11800.00702889040.00033383610.00002424530.0000019750.0000005661

12000.00745862060.00036195810.00002696680.00000226110.0000006583

12200.00790355750.00039162370.00002990560.00000257870.0000007622

12400.00836381940.0004228690.00003307180.000002930.0000008788

12600.00883951990.0004557290.00003647510.00000331730.0000010091

12800.0093307680.00049023840.00004012570.00000374320.0000011544

13000.00983766830.0005264310.00004403330.00000421010.0000013158

13200.01036032150.00056433970.00004820820.00000472060.0000014945

13400.01089882420.00060399690.00005266010.00000527740.0000016918

13600.01145326920.00064543420.00005739920.00000588310.000001909

13800.01202374570.00068868260.00006243520.00000654040.0000021475

14000.01261033970.00073377230.00006777820.00000725230.0000024086

14200.01321313360.00078073290.00007343790.00000802150.0000026939

14400.0138322070.00082959310.00007942430.00000885090.0000030048

14600.01446763630.00088038140.0000857470.00000974340.0000033429

14800.0151194950.00093312510.00009241590.00001070220.0000037096

15000.01578785420.00098785130.00009944050.00001173010.0000041066

15200.01647278210.00104458620.00010683040.00001283030.0000045356

15400.01717434440.00110335560.00011459520.00001400580.0000049982

15600.01789260460.00116418450.00012274430.00001525970.0000054961

15800.01862762390.00122709750.0001312870.00001659520.000006031

16000.01937946110.00129211850.00014023270.00001801560.0000066048

16200.02014817320.00135927080.00014959040.00001952380.0000072191

16400.0209338150.00142857720.00015936940.00002112330.0000078759

16600.02173643940.00150006010.00016957860.00002281720.0000085769

16800.02255609770.00157374110.00018022690.00002460870.0000093241

17000.02339283910.00164964160.00019132320.00002650120.0000101192

17200.02424671140.00172778230.00020287610.00002849790.0000109643

17400.02511776050.00180818330.00021489430.00003060210.0000118613

17600.02600603110.00189086450.00022738640.0000328170.0000128121

17800.02691156610.00197584520.00024036060.0000351460.0000138186

18000.02783440720.00206314410.00025382540.00003759240.0000148829

18200.02877459460.00215277980.0002677890.00004015940.000016007

18400.02973216720.00224477020.00028225950.00004285040.0000171929

18600.03070716270.00233913280.00029724480.00004566870.0000184425

18800.03169961750.00243588480.0003127530.00004861760.0000197581

19000.03270956690.00253504290.00032879170.00005170020.0000211414

19200.03373704510.00263662350.00034536880.00005492010.0000225948

19400.03478208520.00274064250.00036249170.00005828030.0000241201

19600.03584471920.00284711540.0003801680.00006178420.0000257196

19800.03692497810.00295605770.0003984050.00006543510.0000273951

20000.03802289210.0030674840.00041721010.00006923610.000029149

0.05-108.6356217965-186.6305525085-278.0077254364-381.1797926873-436.8265461303

0.025-63.0981217965-102.9730525085-149.2077254364-201.1797926873-229.1590461303

0.0166666667-47.9189551299-75.0872191751-106.274392103-141.1797926873-159.9365461303

0.0125-40.3293717965-61.1443025085-84.8077254364-111.1797926873-125.3252961303

0.01-35.7756217965-52.7785525085-71.9277254364-93.1797926873-104.5585461303

0.0083333333-32.7397884632-47.2013858418-63.3410587697-81.1797926873-90.7140461303

0.0071428571-30.5713360823-43.2176953656-57.2077254364-72.6083641159-80.8251175589

0.00625-28.9449967965-40.2299275085-52.6077254364-66.1797926873-73.4084211303

0.0055555556-27.680066241-37.906108064-49.0299476586-61.1797926873-67.6398794637

0.005-26.6681217965-36.0470525085-46.1677254364-57.1797926873-63.0250461303

0.0045454545-25.8401672511-34.5260070539-43.8259072545-53.9070654146-59.249273403

0.0041666667-25.1502051299-33.2584691751-41.874392103-51.1797926873-56.1027961303

0.0038461538-24.5663910273-32.1859371238-40.2231100518-48.8721003796-53.4403922842

0.0035714286-24.0659789394-31.266623937-38.8077254364-46.8940784016-51.1583318446

0.0033333333-23.6322884632-30.4698858418-37.5810587697-45.1797926873-49.1805461303

0.003125-23.2528092965-29.7727400085-36.5077254364-43.6797926873-47.4499836303

0.0029411765-22.9179747377-29.157611332-35.5606666128-42.3562632755-45.9230167186

0.0027777778-22.6203440188-28.6108302862-34.7188365475-41.1797926873-44.565712797

0.0026315789-22.3540428492-28.12160514-33.9656201732-40.1271611084-43.3512829724

0.0025-22.1143717965-27.6813025085-33.2877254364-39.1797926873-42.2582961303

0.0023809524-21.8975265585-27.2829334608-32.674392103-38.3226498302-41.2694032732

0.0022727273-21.7003945238-26.9207797812-32.1168163455-37.5434290509-40.3704097667

0.002173913-21.5204044052-26.5901177258-31.6077254364-36.8319666003-39.5495896086

0.0020833333-21.3554134632-26.2870108418-31.1410587697-36.1797926873-38.7971711303

0.002-21.2036217965-26.0081525085-30.7117254364-35.5797926873-38.1049461303

0.0019230769-21.0635064119-25.7507448161-30.3154177441-35.0259465335-37.4659692072

0.0018518519-20.9337699447-25.5124043603-29.9484661771-34.5131260206-36.8743239081

0.0017857143-20.813300368-25.2910882227-29.6077254364-34.0369355444-36.3249389875

0.0017241379-20.7011390379-25.0850352671-29.2904840571-33.5935857908-35.813442682

0.0016666667-20.5964551299-24.8927191751-28.994392103-33.1797926873-35.3360461303

0.0016129032-20.4985250224-24.712810573-28.7174028557-32.7926959131-34.8894493561

0.0015625-20.4067155465-24.5441462585-28.4577254364-32.4297926873-34.4707648803

0.0015151515-20.3204702814-24.3857040236-28.2137860424-32.0888835964-34.0774552212

0.0014705882-20.2392982671-24.2365819202-27.9841960246-31.7680279814-33.7072814244

0.0014285714-20.1627646537-24.0959810799-27.7677254364-31.465506973-33.358260416

0.0013888889-20.0904829077-23.9631913973-27.5632809919-31.1797926873-33.0286294637

0.0013513514-20.022108283-23.8375795355-27.3698875985-30.909522417-32.7168164006

0.0013157895-19.9573323229-23.7185788242-27.1866728048-30.6534768978-32.4214145514

0.0012820513-19.8958782068-23.6056807136-27.0128536415-30.4105619181-32.1411615149

0.00125-19.8374967965-23.4984275085-26.8477254364-30.1797926873-31.8749211303

0.0012195122-19.78196326-23.396406167-26.6906522656-29.9602804922-31.6216680815

0.0011904762-19.7290741775-23.2992429846-26.5410587697-29.7512212587-31.3804747018

0.0011627907-19.6786450524-23.2065990201-26.3984231108-29.5518857106-31.1504996187

0.0011363636-19.6305081602-23.1181661448-26.2622708909-29.3616108691-30.9309779485

0.0011111111-19.5845106854-23.0336636196-26.1321698808-29.1797926873-30.721212797

0.0010869565-19.5405131009-22.9528351171-26.0077254364-29.0058796438-30.5205678695

0.0010638298-19.498387754-22.8754461255-25.8885765002-28.8393671554-30.3284610239

0.0010416667-19.4580176299-22.8012816751-25.774392103-28.6797926873-30.1443586303

0.0010204082-19.4192952659-22.7301443452-25.6648682935-28.5267314628-29.9677706201

0.001-19.3821217965-22.6618525085-25.5597254364-28.3797926873-29.7982461303

0.0009803922-19.3464061103-22.596238783-25.4587058285-28.2386162167-29.6353696597

0.0009615385-19.3120641042-22.5331486623-25.3615715902-28.1028696104-29.4787576688

0.0009433962-19.279018023-22.4724393009-25.2681027949-27.9722455175-29.3280555643

0.0009259259-19.2471958706-22.4139784344-25.1780958067-27.846459354-29.1829350192

0.0009090909-19.2165308875-22.3576434175-25.0913618-27.7252472328-29.0430915849

0.0008928571-19.1869610823-22.3033203656-25.0077254364-27.6083641159-28.9082425589

0.000877193-19.1584288141-22.2509033856-24.927023682-27.495582161-28.7781250777

0.000862069-19.1308804172-22.2002938878-24.8491047467-27.386689239-28.6524944062

0.0008474576-19.1042658643-22.1513999661-24.7738271313-27.2814876026-28.5311224015

0.0008333333-19.0785384632-22.1041358418-24.7010587697-27.1797926873-28.4137961303

0.0008196721-19.0536545834-22.0584213609-24.630676256-27.0814320316-28.3003166221

0.0008064516-19.0295734095-22.0141815407-24.562564146-26.9862443002-28.1904977432

0.0007936508-19.0062567172-21.9713461592-24.4966143253-26.8940784016-28.0841651779

0.00078125-18.9836686715-21.9298493835-24.4327254364-26.8047926873-27.9811555053

0.0007692308-18.9617756427-21.8896294315-24.3708023594-26.7182542258-27.8813153611

0.0007575758-18.940546039-21.850628266-24.3107557394-26.6343381419-27.7845006758

0.0007462687-18.9199501548-21.8127913144-24.2525015558-26.5529270157-27.6905759811

0.0007352941-18.8999600318-21.7760672143-24.1959607305-26.4739103344-27.5994137774

0.0007246377-18.8805493328-21.7404075809-24.1410587697-26.3971839917-27.5108939564

0.0007142857-18.8616932251-21.7057667942-24.0877254364-26.3226498302-27.4249032732

0.0007042254-18.8433682754-21.6721018042-24.0358944505-26.2502152225-27.3413348627

0.0006944444-18.8255523521-21.6393719529-23.9855032141-26.1797926873-27.260087797

0.0006849315-18.8082245363-21.6075388098-23.9364925597-26.1112995366-27.1810666783

0.0006756757-18.7913650398-21.576566022-23.8888065174-26.0446575522-27.1041812655

0.0006666667-18.7749551299-21.5464191751-23.842392103-25.9797926873-27.0293461303

0.0006578947-18.7589770597-21.5170656663-23.7971991206-25.9166347926-26.9564803408

0.0006493506-18.7434140043-21.4884745864-23.7531799818-25.8551173626-26.8855071693

0.0006410256-18.7282500017-21.460616611-23.7102895389-25.7951773027-26.8163538226

0.0006329114-18.7134698978-21.4334639009-23.66848493-25.7367547126-26.7489511936

0.000625-18.6990592965-21.4069900085-23.6277254364-25.6797926873-26.6832336303

0.000617284-18.6850045126-21.3811697924-23.5879723499-25.6242371317-26.6191387229

0.0006097561-18.6712925283-21.3559793377-23.549188851-25.5700365897-26.5566071059

0.0006024096-18.6579109532-21.3313958819-23.5113398942-25.5171420849-26.4955822749

0.0005952381-18.644847987-21.3073977465-23.474392103-25.465506973-26.436010416

0.0005882353-18.6320923848-21.2839642732-23.4383136717-25.415086805-26.377840248

0.0005813953-18.6196334245-21.2610757643-23.4030742736-25.3658391989-26.3210228745

0.0005747126-18.607460877-21.238713428-23.3686449766-25.3177237218-26.2655116476

0.0005681818-18.5955649784-21.2168593266-23.3349981636-25.2707017782-26.2112620394

0.0005617978-18.5839364033-21.1954963287-23.3021074588-25.2247365075-26.1582315236

0.0005555556-18.572566241-21.174608064-23.2699476586-25.1797926873-26.1063794637

0.0005494505-18.5614459724-21.1541788821-23.2384946671-25.1358366433-26.0556670094

0.0005434783-18.5505674487-21.1341938128-23.2077254364-25.0928361656-26.0060569999

0.0005376344-18.5399228718-21.11463853-23.1776179095-25.0507604292-25.9575138723

0.0005319149-18.5295047753-21.095499317-23.1481509683-25.0095799213-25.9100035771

0.0005263158-18.5193060071-21.0767630348-23.1193043837-24.9692663715-25.8634934987

0.0005208333-18.5093197132-21.0584170918-23.0910587697-24.9297926873-25.8179523803

0.0005154639-18.4995393223-21.0404494157-23.0633955395-24.8911328935-25.773350254

0.0005102041-18.4899585312-21.0228484268-23.0362968649-24.8532620751-25.7296583752

0.0005050505-18.4805712915-21.0056030135-23.0097456384-24.8161563237-25.6868491606

0.0005-18.4713717965-20.9887025085-22.9837254364-24.7797926873-25.6448961303

Sheet1

1/V (1/V)

ln(I/V2) (A/V2)

Sheet2

Sheet3

Field Enhancement Factor AnodeCathode = F / VField enhancement factor for typical emitters## H. G. Kosmahl, IEEE Trans. Electron Devices 38 (6), 1534 (1991)hdrF: electric field at emitter tip V: voltage between anode and cathodeII. Field EmissionrSpacer

Emitter Structure Effect SimulationTip height (top to bottom) 4 mm 3 mm 2 mm 1 mm 0.5 mmTip radius (top to bottom) 10 nm 20 nm 40 nm 60 nm 80 nm 100 nmEffect of tip radiusEffect of emitter heightII. Field Emission

Chart1

30.31848936550.106921316685.3859451441117.8764131384148.7608525507

19.192604102830.31848936550.106921316668.229429061785.3859451441

15.153546567923.045306400337.181638090450.106921316662.3177213531

13.075156485619.192604102830.31848936540.49913865850.1069213166

11.84217141816.792423484226.014789669334.476428794542.4592279104

11.062745544915.153546567923.045306400330.31848936537.1816380904

10.563175130213.967572115720.864944756727.261368195433.3015008252

10.255351484513.075156485619.192604102824.911685632330.318489365

10.090985264812.385312219417.867923953323.045306400327.947784756

10.0428601811.84217141816.792423484221.524727438326.0147896693

10.096275018111.409493440215.90211864120.260689433324.406241904

10.244926900611.062745544915.153546567919.192604102823.0453064003

10.489014515210.784753990914.516099923118.277828169221.8779339404

10.834658166310.563175130213.967572115717.485435244220.8649447567

11.294320702410.388954568613.491442744516.792423484219.9772106938

0.5mm

1mm

2mm

3mm

4mm

Emitter radius (nm)

Field enhancement factor

Sheet1

tip radius

1030.31848936550.106921316685.3859451441117.8764131384148.7608525507

2019.192604102830.31848936550.106921316668.229429061785.3859451441

3015.153546567923.045306400337.181638090450.106921316662.3177213531

4013.075156485619.192604102830.31848936540.49913865850.1069213166

5011.84217141816.792423484226.014789669334.476428794542.4592279104

6011.062745544915.153546567923.045306400330.31848936537.1816380904

7010.563175130213.967572115720.864944756727.261368195433.3015008252

8010.255351484513.075156485619.192604102824.911685632330.318489365

9010.090985264812.385312219417.867923953323.045306400327.947784756

10010.0428601811.84217141816.792423484221.524727438326.0147896693

11010.096275018111.409493440215.90211864120.260689433324.406241904

12010.244926900611.062745544915.153546567919.192604102823.0453064003

13010.489014515210.784753990914.516099923118.277828169221.8779339404

14010.834658166310.563175130213.967572115717.485435244220.8649447567

15011.294320702410.388954568613.491442744516.792423484219.9772106938

tip height10 nm20 nm40nm60 nm80 nm100 nm

0.530.31848936519.192604102813.075156485611.062745544910.255351484510.04286018

150.106921316630.31848936516.792423484215.153546567913.075156485611.842171418

285.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842

3117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383

4148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693

Sheet1

0.5mm

1mm

2mm

3mm

4mm

Emitter radius (nm)

Field enhancement factor

Sheet2

10 nm

20 nm

40nm

60 nm

80 nm

100 nm

Sheet3

Chart2

30.31848936519.192604102813.075156485611.062745544910.255351484510.04286018

50.106921316630.31848936516.792423484215.153546567913.075156485611.842171418

85.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842

117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383

148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693

10 nm

20 nm

40nm

60 nm

80 nm

100 nm

Emitter height (mm)

Field enhancement factor

Sheet1

tip radius

1030.31848936550.106921316685.3859451441117.8764131384148.7608525507

2019.192604102830.31848936550.106921316668.229429061785.3859451441

3015.153546567923.045306400337.181638090450.106921316662.3177213531

4013.075156485619.192604102830.31848936540.49913865850.1069213166

5011.84217141816.792423484226.014789669334.476428794542.4592279104

6011.062745544915.153546567923.045306400330.31848936537.1816380904

7010.563175130213.967572115720.864944756727.261368195433.3015008252

8010.255351484513.075156485619.192604102824.911685632330.318489365

9010.090985264812.385312219417.867923953323.045306400327.947784756

10010.0428601811.84217141816.792423484221.524727438326.0147896693

11010.096275018111.409493440215.90211864120.260689433324.406241904

12010.244926900611.062745544915.153546567919.192604102823.0453064003

13010.489014515210.784753990914.516099923118.277828169221.8779339404

14010.834658166310.563175130213.967572115717.485435244220.8649447567

15011.294320702410.388954568613.491442744516.792423484219.9772106938

tip height10 nm20 nm40nm60 nm80 nm100 nm

0.530.31848936519.192604102813.075156485611.062745544910.255351484510.04286018

150.106921316630.31848936516.792423484215.153546567913.075156485611.842171418

285.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842

3117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383

4148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693

Sheet1

0.5mm

1mm

2mm

3mm

4mm

Emitter radius (nm)

Field enhancement factor

Sheet2

10 nm

20 nm

40nm

60 nm

80 nm

100 nm

Emitter height (mm)

Field enhancement factor

Sheet3

(a) Thermal oxidation(b) Photolithography(c) Silicon dioxide etching(d) Silicon etching(e) Tip sharpening(f) Silicon nano tipsSilicon Tip Array Fabrication III. Experiments

Diamond Emitter FabricationPressure ControlSubstrate height control Microwave power control Substrate heating controlGas flow meterPumping SystemH2CH4Microwave generatorWaveguidePlasmaSubstrateGaugeMotorValveQuartz windowExhaustIII. Experiments

Emitter with Self-aligned Gate1. Thermal oxidation and patterning2. Silicon tip etching3. Photoresist planarization for oxide and metal layer4. Photoresist etchback5. Expose silicon tip for seeding6. Diamond depositionSiO2SiPhotoresistMetalSiO2III. Experiments

IV. Results and Discussion Orientation Dependent EtchingSome alkaline etchants etch various crystal planes of silicon at different etch rates

SiO2SiliconSiO2Silicon

_958569311.doc

Silicon Tip Array Wet Etching Silicon tip array etched at 90oC with various tetramethylammonium hydroxide (TMAH) concentrations10% TMAH25% TMAH40% TMAH15 minute etchingExtremely non-uniformHillocks on substrate4 minute pinching under maskHillock-free but non-uniformSmall tip aspect ratio10 minute pinching under maskHillock-free and uniformLarger tip aspect ratioIV. Results and Discussion

Optimized Etching Results ArrayClose-upSilicon tip array etched using: 10 m square SiO2 mask40% TMAH at 90oC 2.2 m high and 1.44 m wideAspect ratio of 1.53 1.4% non-uniformityIV. Results and Discussion

Effect of Etchant TemperatureSilicon tip array etched in 40% TMAH at various temperaturesSilicon tip arrays etched at various temperatures show similar appearanceHeight hBase width dAspect RatioThe slight decrease of aspect ratio shows the etching selectivity between side planes and the base decrease with temperatureEtch rate increases with temperatureIV. Results and DiscussionAspect Ratio = h/d

Chart1

1.7289452.01371.12763

1.7672982.113751.160719

1.7457792.14691.207923

1.532.21.44

Temperature (oC)

Emitter Height and Width (mm) and Aspect Ratio

Sheet1

9236etched at 90C9237etched at 70C9238etched at 80C

2.161.022.06216376362.10340703891.91.071.7149479851.83499434392.181.151.83674776572.1122599306

2.151.161.79389347292.08091642862.031.191.6440534451.95642359952.191.211.74969170732.1171269658

2.131.171.76045045672.05972703442.051.111.78719031081.9837812452.151.231.68678713612.0747481774

2.131.161.77638639062.06060821312.061.221.62642818561.98424238652.161.241.68066218252.0840211063

1.961.141.65767608691.88975073912.071.21.66346570971.99615885172.151.251.65838865592.0729858198

2.171.211.73290805812.09681875032.081.151.74845117672.01071885322.171.241.68885097912.0941752141

2.911.531.84315359672.82002500292.081.141.76456143152.01160003192.211.281.66505228912.13126693

2.152.140.93203780881.99456091092.091.151.75728083562.02087296092.121.231.66202101962.0442858541

2.021.081.811076351.9559624582.011.041.87435871661.94933306532.241.241.7461725552.1652539683

1.80.9321.87297589411.74561353331.921.081.71705683391.85442138062.141.161.78513993182.0707623209

1.961.021.86306361191.90032488411.841.131.56529435841.7687826252.051.11.8042385671.9846624237

2.331.281.76024704912.25311622292.081.211.65738163692.005431780721.081.79227244681.9356542426

2.331.351.66440590492.24694797161.90.9941.85280815131.84169130241.9611.90208724161.9020872416

2.281.341.63959597892.19705861172.041.21.63808044041.96569652852.11.141.78237565562.0319082474

2.21.241.71341736882.12463753732.071.21.66346570971.99615885172.181.191.77204639962.1087352156

2.231.21.79885381292.15862457552.181.21.75654503072.10785403682.21.191.78911212692.1290434311

2.121.191.72084921782.04781056912.061.161.71511160261.9895294592.191.221.73462769432.1162457871

2.131.121.84297582872.06413292812.011.191.62698771771.9361153842.191.241.70522857222.1144834296

2.141.151.80142913012.07164349962.071.131.77197088762.0023271032.191.251.69088180062.1136022508

2.171.171.7951653552.10034346532.051.21.64654219691.97585063622.191.211.74969170732.1171269658

2.171.211.73290805812.09681875032.061.131.76298495151.99217299522.191.211.74969170732.1171269658

2.191.231.71980862462.11536460832.021.11.77654554591.95420010052.21.221.74295073342.1263998948

2.241.231.76108548542.1661351471.991.071.80035636781.92638131362.191.221.73462769432.1162457871

2.191.221.73462769432.11624578712.021.11.77654554591.95420010052.141.211.70773258442.0663564271

1.981.061.80859281561.91710838461.981.11.73962151781.91358366962.141.181.75338979952.0689999634

1.580.8541.7905109571.529096357321.091.77502115941.93477306382.151.151.8102587892.0817976074

2.14692307691.20792307691.74577918351.710.8921.8584655591.657751278721.111.74145108681.9330107063

0.22344161170.2324915350.18569535092.01370370371.12762962961.72894529672.011.091.78433685461.9449271715

0.1040752760.19247213620.1063681780.09307350890.07480443640.07817924611.991.11.74885252481.9237377773

asphrightwidth0.04622006140.06633777120.0452178831.930.9621.94903679591.8749733977

651.7289452.01371.127631.840.9141.9560351051.787816086

751.7672982.113751.1607191.90.9271.99309083071.8475952001

851.7457792.14691.2079232.113751.160718751.7672978419

951.532.21.440.10397735490.09675250580.0842191389

0.04919094260.08335568440.0476541853

temptimeetched at 40% TMAH

955

908

8511.25

7518.33

6531.25

Sheet1

Sheet2

Temperature (oC)

Emitter Height and Width (mm) and Aspect Ratio

Sheet3

Effect of Oxidation Sharpening30 min.60 min.120 min.240 min.Extended oxidation (>60 min.)No appreciable change in tip radiusTip height decreasesShort time oxidation (

Diamond Film GrowthArrayClose-upNanocrystal diamond slurry seeding 0.5-2% CH4 in H2 1 kW microwave power 35 Torr chamber pressure 600oC substrate temperature 5-30 minutes growth timeOptimized process conditions:IV. Results and Discussion

Diamond film grown for 30 minutes without bias using various methane (CH4) concentrations0.5% CH41% CH42% CH4IV. Results and Discussion

0.5% CH41% CH42% CH4IV. Results and DiscussionDiamond film grown for 30 minutes with -150 V bias using various methane (CH4) concentrations

Diamond Growth RateHigh CH4 concentration increasesdiamond growth rate

Negative bias reduces diamond growth rateWithout biasWith biasIV. Results and Discussion

Chart1

00

0.20.2

0.760.655

10.82

1.51.1

44

88

1010

CH4 concentration (%)

Diamond growth rate (mm/hour)

Sheet1

CH4 (%)size (30 min)size (30 min)

0

0.2

0.50.760.6550.380.3275

110.820.50.41

21.51.10.750.55

4

8

10

NO biasBias (-150)NO biasBias (-150)

d9232d9241

d9231d9240

d9233d9239

Sheet1

CH4 concentration (%)

Diamond growth rate (mm/hour)

Sheet2

Sheet3

Raman SpectroscopyDiamond film grown withoutbias shows a diamond peakat 1332 cm-1 and sp2 non-diamond carbon around 1500 cm-1

0.5% CH41% CH42% CH4Diamond film grown with -150 V bias shows no diamond peak but a broad band amorphous carbon signal

0.5% CH41% CH42% CH41332 cm-1IV. Results and Discussion

Chart2

149901603318286

148481621218162

150471621218362

149061601318291

149811607918273

149461592218177

150381604518227

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