Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides...
Transcript of Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides...
![Page 1: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/1.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Computer Aided Design ofMicro-Electro-Mechanical SystemsFrom Energy Losses to Dick Tracy Watches
D. Bindel
Courant Institute for Mathematical SciencesNew York University
Stanford University, 12 Nov 2008
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
The Computational Science Picture
Application modelingDisk resonatorBeam resonatorShear ring resonator, checkerboard, ...
Mathematical analysisPhysical modeling and finite element technologyStructured eigenproblems and reduced-order modelsParameter-dependent eigenproblems
Software engineeringHiQLabSUGARFEAPMEX / MATFEAP
![Page 3: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/3.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
The Computational Science Picture
Application modelingDisk resonatorBeam resonatorShear ring resonator, checkerboard, ...
Mathematical analysisPhysical modeling and finite element technologyStructured eigenproblems and reduced-order modelsParameter-dependent eigenproblems
Software engineeringHiQLabSUGARFEAPMEX / MATFEAP
![Page 4: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/4.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
![Page 5: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/5.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
![Page 6: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/6.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
What are MEMS?
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
MEMS Basics
Micro-Electro-Mechanical SystemsChemical, fluid, thermal, optical (MECFTOMS?)
Applications:Sensors (inertial, chemical, pressure)Ink jet printers, biolab chipsRadio devices: cell phones, inventory tags, pico radio
Use integrated circuit (IC) fabrication technologyTiny, but still classical physics
![Page 8: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/8.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Resonant RF MEMS
Microguitars from Cornell University (1997 and 2003)
MHz-GHz mechanical resonatorsFavorite application: radio on chipClose second: really high-pitch guitars
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
The Mechanical Cell Phone
filter
Mixer
Tuning
control
...RF amplifier /
preselector
Local
Oscillator
IF amplifier /
Your cell phone has many moving parts!What if we replace them with integrated MEMS?
![Page 10: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/10.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Ultimate Success
“Calling Dick Tracy!”
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Disk Resonator
DC
AC
Vin
Vout
![Page 12: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/12.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Disk Resonator
AC
C0
Vout
Vin
Lx
Cx
Rx
![Page 13: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/13.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Electromechanical Model
Kirchoff’s current law and balance of linear momentum:
ddt
(C(u)V ) + GV = Iexternal
Mutt + Ku −∇u
(12
V ∗C(u)V)
= Fexternal
Linearize about static equilibium (V0, u0):
C(u0) δVt + G δV + (∇uC(u0) · δut) V0 = δIexternal
M δutt + K δu +∇u (V ∗0 C(u0) δV ) = δFexternal
where
K = K − 12
∂2
∂u2 (V ∗0 C(u0)V0)
![Page 14: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/14.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Electromechanical Model
Assume time-harmonic steady state, no external forces:[iωC + G iωB−BT K − ω2M
] [δVδu
]=
[δIexternal
0
]Eliminate the mechanical terms:
Y (ω) δV = δIexternal
Y (ω) = iωC + G + iωH(ω)
H(ω) = BT (K − ω2M)−1B
Goal: Understand electromechanical piece (iωH(ω)).As a function of geometry and operating pointPreferably as a simple circuit
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Damping and Q
Designers want high quality of resonance (Q)Dimensionless damping in a one-dof system
d2udt2 + Q−1 du
dt+ u = F (t)
For a resonant mode with frequency ω ∈ C:
Q :=|ω|
2 Im(ω)=
Stored energyEnergy loss per radian
To understand Q, we need damping models!
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
The Designer’s Dream
Ideally, would likeSimple models for behavioral simulationParameterized for design optimizationIncluding all relevant physicsWith reasonably fast and accurate set-up
We aren’t there yet.
![Page 17: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/17.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
![Page 18: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/18.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Enter HiQLab
Existing codes do not compute quality factors... and awkward to prototype new solvers... and awkward to programmatically define meshesSo I wrote a new finite element code: HiQLab
![Page 19: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/19.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Heritage of HiQLab
SUGAR: SPICE for the MEMS worldSystem-level simulation using modified nodal analysisFlexible device description languageC core with MATLAB interfaces and numerical routines
FEAPMEX: MATLAB + a finite element codeMATLAB interfaces for steering, testing solvers, runningparameter studiesTime-tested finite element architectureBut old F77, brittle in places
![Page 20: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/20.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Other Ingredients
“Lesser artists borrow. Great artists steal.”– Picasso, Dali, Stravinsky?
Lua: www.lua.orgEvolved from simulator data languages (DEL and SOL)Pascal-like syntax fits on one page; complete languagedescription is 21 pagesFast, freely available, widely used in game design
MATLAB: www.mathworks.com“The Language of Technical Computing”OCTAVE also works well
Standard numerical libraries: ARPACK, UMFPACKMATEXPR, MWRAP, and other utilities
![Page 21: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/21.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
HiQLab Structure
User interfaces
(C++)Core libraries
Solver library(C, C++, Fortran, MATLAB)
Element library(C++)
Problem description(Lua)
(MATLAB, Lua)
Standard finite element structures + some new ideasFull scripting language for mesh inputCallbacks for boundary conditions, material propertiesMATLAB interface for quick algorithm prototypingCross-language bindings are automatically generated
![Page 22: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/22.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
![Page 23: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/23.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Damping Mechanisms
Possible loss mechanisms:Fluid dampingMaterial lossesThermoelastic dampingAnchor loss
Model substrate as semi-infinite with a
Perfectly Matched Layer (PML).
![Page 24: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/24.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Perfectly Matched Layers
Complex coordinate transformationGenerates a “perfectly matched” absorbing layerIdea works with general linear wave equations
Electromagnetics (Berengér, 1994)Quantum mechanics – exterior complex scaling(Simon, 1979)Elasticity in standard finite element framework(Basu and Chopra, 2003)
![Page 25: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/25.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem
Domain: x ∈ [0,∞)
Governing eq:
∂2u∂x2 −
1c2
∂2u∂t2 = 0
Fourier transform:
d2udx2 + k2u = 0
Solution:u = coute−ikx + cineikx
![Page 26: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/26.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model with Perfectly Matched Layer
Transformed domainx
σ
Regular domain
dxdx
= λ(x) where λ(s) = 1− iσ(s)
d2udx2 + k2u = 0
u = coute−ik x + cineik x
![Page 27: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/27.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model with Perfectly Matched Layer
Transformed domainx
σ
Regular domain
dxdx
= λ(x) where λ(s) = 1− iσ(s),
1λ
ddx
(1λ
dudx
)+ k2u = 0
u = coute−ikx−kΣ(x) + cineikx+kΣ(x)
Σ(x) =
∫ x
0σ(s) ds
![Page 28: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/28.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model with Perfectly Matched Layer
Transformed domainx
σ
Regular domain
If solution clamped at x = L then
cin
cout= O(e−kγ) where γ = Σ(L) =
∫ L
0σ(s) ds
![Page 29: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/29.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-1
-0.5
0
0.5
1
-1
-0.5
0
0.5
1
![Page 30: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/30.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-2
-1
0
1
2
3
-1
-0.5
0
0.5
1
![Page 31: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/31.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-4
-2
0
2
4
6
-1
-0.5
0
0.5
1
![Page 32: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/32.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-10
-5
0
5
10
15
-1
-0.5
0
0.5
1
![Page 33: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/33.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-20
0
20
40
-1
-0.5
0
0.5
1
![Page 34: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/34.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Model Problem Illustrated
Outgoing exp(−ix) Incoming exp(ix)
Transformed coordinate
Re(x)
0 2 4 6 8 10 12 14 16 18
0 5 10 15 200 5 10 15 20
-4
-2
0
-50
0
50
100
-1
-0.5
0
0.5
1
![Page 35: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/35.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Finite Element Implementation
x(ξ)
ξ2
ξ1
x1
x2 x2
x1
Ωe Ωe
Ω
x(x)
Combine PML and isoparametric mappings
ke =
∫Ω
BT DBJ dΩ
me =
∫Ω
ρNT NJ dΩ
Matrices are complex symmetric
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Eigenvalues and Model Reduction
Want to know about the transfer function H(ω):
H(ω) = BT (K − ω2M)−1B
Can eitherLocate poles of H (eigenvalues of (K , M))Plot H in a frequency range (Bode plot)
Usual tactic: subspace projectionBuild an Arnoldi basis V for a Krylov subspace Kn
Compute with much smaller V ∗KV and V ∗MVCan we do better?
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Stanford 08
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Variational Principles
Variational form for complex symmetric eigenproblems:Hermitian (Rayleigh quotient):
ρ(v) =v∗Kvv∗Mv
Complex symmetric (modified Rayleigh quotient):
θ(v) =vT KvvT Mv
First-order accurate eigenvectors =⇒Second-order accurate eigenvalues.Key: relation between left and right eigenvectors.
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Accurate Model Reduction
Build new projection basis from V :
W = orth[Re(V ), Im(V )]
span(W ) contains both Kn and Kn=⇒ double digits correct vs. projection with VW is a real-valued basis=⇒ projected system is complex symmetric
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Disk Resonator Simulations
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Disk Resonator Mesh
PML region
Wafer (unmodeled)
Electrode
Resonating disk
0 1 2 3 4
x 10−5
−4
−2
0
2x 10
−6
Axisymmetric model with bicubic meshAbout 10K nodal points in converged calculation
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Mesh Convergence
Mesh density
Com
pute
dQ
Cubic
LinearQuadratic
1 2 3 4 5 6 7 80
1000
2000
3000
4000
5000
6000
7000
Cubic elements converge with reasonable mesh density
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Model Reduction Accuracy
Frequency (MHz)
Tra
nsf
er(d
B)
Frequency (MHz)
Phase
(deg
rees
)
47.2 47.25 47.3
47.2 47.25 47.3
0
100
200
-80
-60
-40
-20
0
Results from ROM (solid and dotted lines) nearlyindistinguishable from full model (crosses)
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Model Reduction Accuracy
Frequency (MHz)
|H(ω
)−
Hreduced(ω
)|/H
(ω)|
Arnoldi ROM
Structure-preserving ROM
45 46 47 48 49 50
10−6
10−4
10−2
Preserve structure =⇒get twice the correct digits
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Response of the Disk Resonator
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Variation in Quality of Resonance
Film thickness (µm)
Q
1.2 1.3 1.4 1.5 1.6 1.7 1.8100
102
104
106
108
Simulation and lab measurements vs. disk thickness
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Explanation of Q Variation
Real frequency (MHz)
Imagin
ary
freq
uen
cy(M
Hz)
ab
cdd
e
a b
cdd
e
a = 1.51 µm
b = 1.52 µm
c = 1.53 µm
d = 1.54 µm
e = 1.55 µm
46 46.5 47 47.5 480
0.05
0.1
0.15
0.2
0.25
Interaction of two nearby eigenmodes
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Stanford 08
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Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
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Backup slides
Thermoelastic Damping (TED)
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Thermoelastic Damping (TED)
u is displacement and T = T0 + θ is temperature
σ = Cε− βθ1ρu = ∇ · σ
ρcv θ = ∇ · (κ∇θ)− βT0 tr(ε)
Coupling between temperature and volumetric strain:Compression and expansion =⇒ heating and coolingHeat diffusion =⇒ mechanical dampingNot often an important factor at the macro scaleRecognized source of damping in microresonators
Zener: semi-analytical approximation for TED in beamsWe consider the fully coupled system
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Nondimensionalized Equations
Continuum equations:
σ = Cε− ξθ1u = ∇ · σθ = η∇2θ − tr(ε)
Discrete equations:
Muuu + Kuuu = ξKuθθ + fCθθθ + ηKθθθ = −Cθuu
Micron-scale poly-Si devices: ξ and η are ∼ 10−4.Linearize about ξ = 0
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Perturbative Mode Calculation
Discretized mode equation:
(−ω2Muu + Kuu)u = ξKuθθ
(iωCθθ + ηKθθ)θ = −iωCθuu
First approximation about ξ = 0:
(−ω20Muu + Kuu)u0 = 0
(iω0Cθθ + ηKθθ)θ0 = −iω0Cθuu0
First-order correction in ξ:
−δ(ω2)Muuu0 + (−ω20Muu + Kuu)δu = ξKuθθ0
Multiply by uT0 :
δ(ω2) = −ξ
(uT
0 Kuθθ0
uT0 Muuu0
)
![Page 52: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/52.jpg)
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Conclusion
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Zener’s Model
1 Clarence Zener investigated TED in late 30s-early 40s.2 Model for beams common in MEMS literature.3 “Method of orthogonal thermodynamic potentials” ==
perturbation method + a variational method.
![Page 53: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/53.jpg)
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Comparison to Zener’s Model
105
106
107
108
109
1010
10−7
10−6
10−5
10−4
The
rmoe
last
ic D
ampi
ng Q
−1
Frequency f(Hz)
Zener’s Formula
HiQlab Results
Comparison of fully coupled simulation to Zenerapproximation over a range of frequenciesReal and imaginary parts after first-order correctionagree to about three digits with Arnoldi
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slides
Outline
1 Resonant MEMS and models
2 HiQLab
3 Anchor losses and disk resonators
4 Thermoelastic losses and beam resonators
5 Conclusion
![Page 55: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/55.jpg)
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Onward!
What about:Modeling more geometrically complex devices?Modeling general dependence on geometry?Modeling general dependence on operating point?Computing nonlinear dynamics?Digesting all this to help designers?
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Ongoing and Future Work
Code developmentAutomation tools (MWRAP and MATEXPR)Design and implementation of parallelized versionStructural elements and elements for different physics
Theoretical analysisError estimate and bounds for resonance calculationsSensitivity analysis and variational model reductionMore damping mechanisms
Application collaborationsUse of nonlinear effects (quasi-static and dynamic)New designs (e.g. internal dielectric drives)Continued experimental comparisons
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Conclusions
RF MEMS are a great source of problemsInteresting applicationsInteresting physics (and not altogether understood)Interesting computing challenges
http://www.cims.nyu.edu/~dbindel
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Concluding Thoughts
The difference between art and science is thatscience is what we understand well enough toexplain to a computer. Art is everything else.
Donald Knuth
The purpose of computing is insight, not numbers.Richard Hamming
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Stanford 08
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Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Checkerboard Resonator
D+
D−
D+
D−
S+ S+
S−
S−
Anchored at outside cornersExcited at northwest cornerSensed at southeast cornerSurfaces move only a few nanometers
![Page 60: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/60.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Checkerboard Model Reduction
Finite element model: N = 2154Expensive to solve for every H(ω) evaluation!
Build a reduced-order model to approximate behaviorReduced system of 80 to 100 vectorsEvaluate H(ω) in milliseconds instead of secondsWithout damping: standard Arnoldi projectionWith damping: Second-Order ARnoldi (SOAR)
![Page 61: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/61.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Checkerboard Simulation
0 2 4 6 8 10
x 10−5
0
2
4
6
8
10
12
x 10
9 9.2 9.4 9.6 9.8
x 107
−200
−180
−160
−140
−120
−100
Frequency (Hz)
Am
plitu
de (
dB)
9 9.2 9.4 9.6 9.8
x 107
0
1
2
3
4
Frequency (Hz)
Pha
se (
rad)
![Page 62: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/62.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Checkerboard Measurement
S. Bhave, MEMS 05
![Page 63: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/63.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Contributions
Built predictive model used to design checkerboardUsed model reduction to get thousand-fold speedup– fast enough for interactive use
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
General Picture
If w∗A = 0 and Av = 0 then
δ(w∗Av) = w∗(δA)v
This impliesIf A = A(λ) and w = w(v), have
w∗(v)A(ρ(v))v = 0.
ρ stationary when (ρ(v), v) is a nonlinear eigenpair.If A(λ, ξ) and w∗
0 and v0 are null vectors for A(λ0, ξ0),
w∗0 (Aλδλ + Aξδξ)v0 = 0.
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
HiQLab’s Hello World
0 2 4 6 8 10x 10−6
−6
−4
−2
0
2
4
6x 10−6
mesh = Mesh:new(2)mat = make_material(’silicon2’, ’planestrain’)mesh:blocks2d( 0, l , -w/2.0, w/2.0 ,
mat )
mesh:set_bc(function(x,y)if x == 0 then return ’uu’, 0, 0; end
end)
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
HiQLab’s Hello World
>> mesh = Mesh_load(’beammesh.lua’);>> [M,K] = Mesh_assemble_mk(mesh);>> [V,D] = eigs(K,M, 5, ’sm’);>> opt.axequal = 1; opt.deform = 1;>> Mesh_scale_u(mesh, V(:,1), 2, 1e-6);>> plotfield2d(mesh, opt);
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Continuum 2D model problem
k
L
λ(x) =
1− iβ|x − L|p, x > L1 x ≤ L.
1λ
∂
∂x
(1λ
∂u∂x
)+
∂2u∂y2 + k2u = 0
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Continuum 2D model problem
k
L
λ(x) =
1− iβ|x − L|p, x > L1 x ≤ L.
1λ
∂
∂x
(1λ
∂u∂x
)− k2
y u + k2u = 0
![Page 69: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/69.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Continuum 2D model problem
k
L
λ(x) =
1− iβ|x − L|p, x > L1 x ≤ L.
1λ
∂
∂x
(1λ
∂u∂x
)+ k2
x u = 0
1D problem, reflection of O(e−kxγ)
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Discrete 2D model problem
k
L
Discrete Fourier transform in ySolve numerically in xProject solution onto infinite space traveling modesExtension of Collino and Monk (1998)
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Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Nondimensionalization
k
L
λ(x) =
1− iβ|x − L|p, x > L1 x ≤ L.
Rate of stretching: βhp
Elements per wave: (kxh)−1 and (kyh)−1
Elements through the PML: N
![Page 72: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/72.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Nondimensionalization
k
L
λ(x) =
1− iβ|x − L|p, x > L1 x ≤ L.
Rate of stretching: βhp
Elements per wave: (kxh)−1 and (kyh)−1
Elements through the PML: N
![Page 73: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/73.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Discrete reflection behavior
Number of PML elements
log10(β
h)
− log10
(r) at (kh)−1 = 10
1
1
1
2
2
2
2 2 2 2
333
3
3
3
3
444
4
4
5 10 15 20 25 30
-1.5
-1
-0.5
0
0.5
1
Quadratic elements, p = 1, (kxh)−1 = 10
![Page 74: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/74.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Discrete reflection decomposition
Model discrete reflection as two parts:Far-end reflection (clamping reflection)
Approximated well by continuum calculationGrows as (kxh)−1 grows
Interface reflectionDiscrete effect: mesh does not resolve decayDoes not depend on NGrows as (kxh)−1 shrinks
![Page 75: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/75.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Discrete reflection behavior
Number of PML elements
log10(β
h)
− log10
(r) at (kh)−1 = 10
1
1
1
2
2
2
2 2 2 2
333
3
3
3
3
444
4
4
5 10 15 20 25 30
-1.5
-1
-0.5
0
0.5
1
Number of PML elements
log10(β
h)
− log10(rinterface + rnominal) at (kh)−1 = 10
1
1
1
2
2
2
2 2 2 2
333
3
3
3
444
4
4
5 10 15 20 25 30
-1.5
-1
-0.5
0
0.5
1
Quadratic elements, p = 1, (kxh)−1 = 10
Model does well at predicting actual reflectionSimilar picture for other wavelengths, element types,stretch functions
![Page 76: Computer Aided Design of Micro-Electro-Mechanical …bindel/present/2008-11...Backup slides Electromechanical Model Assume time-harmonic steady state, no external forces: i ωC +G](https://reader034.fdocuments.net/reader034/viewer/2022043016/5f3926a02b67593c482dcd9f/html5/thumbnails/76.jpg)
Stanford 08
ResonantMEMS andmodels
HiQLab
Anchor lossesand diskresonators
Thermoelasticlosses andbeamresonators
Conclusion
Backup slidesCheckerboardresonators
Nonlinear eigenvalueperturbation
Hello world!
Reflection Analysis
Choosing PML parameters
Discrete reflection dominated byInterface reflection when kx largeFar-end reflection when kx small
Heuristic for PML parameter choiceChoose an acceptable reflection levelChoose β based on interface reflection at kmax
xChoose length based on far-end reflection at kmin
x