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Transcript of coherant Excimer ProductGuide2011
A Full Line of Excimer Lasers
As the world’s largest laser manufacturer and the leader in excimer technology, wemanufacture and ship more excimer lasersthan all other laser companies combined.We’re also the only laser company that makes virtually every other commercially available type of pulsed and continuous-waveultraviolet laser.
We have applications labs on three continentswith each lab fully equipped for UV studies.We’ll also share our 40-plus years of UV experience with you. So, whatever your UVlaser application is, you’ll get the best solutionwhen you work with Coherent.
Cover: Excimer Lasers for Flat Panel Display Production
Coherent offers the following advantages:
• UV technology leader
• Professional applications laboratory facilities worldwide
• High power and high pulse energy
• High repetition rate
• Extremely compact light sources
• OEM integration and custom performance parameters
• Beam management systems
• Superior customer-focused service and support
UV Optical SystemsExcimer Lasers
2Superior Reliability & Performance • www.Coherent.com • [email protected]
3
Laser Selection Guide 4-5
Applications Matrix 6-9
Applications Labs Worldwide 10
Excimer Lasers
ExciStar XS 12-13
Xantos XS 14-15
BraggStar Industrial Series 16-19
IndyStar 18-19
COMPexPro 20-21
LPXpro Series 22-23
LEAP 24-25
LAMBDA SX 26-31
VYPER 32-33
On-Site Requirements 34-35
UV Optical Systems and Components 36
LineBeam 37-38
VarioLas Family 39-40
GeoLasPro 41-42
5X Optical Subsystems 43
CrystaLas 44
Components 45-47
Service 48-49
Laser Measurement and Control Accessories 50-51
Contents
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz)
ExciStar XS1 157 1 200/500193 5 200/500248 8 200/500351 4 200/500
Xantos XS1 157 1 500193 5 500248 8 500351 4 500
BraggStar Industrial Series1 193 7 1000248 11 1000
IndyStar 1 193 8 1000193 4 2000248 12 1000248 6 2000
COMPexProCOMPexPro 50 193 100 50
248 150 50
COMPexPro 100 193 200 20/100248 400 20/100308 250 20/100351 200 20/100
COMPexPro 200 193 400 10/50248 700 10/50307 500 10/50351 300 10/50
Laser Selection GuideExcimer Lasers
1 Max. energy (mJ) is stabilized energy.
4
Laser Selection Guide
Superior Reliability & Performance • www.Coherent.com • [email protected]
Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz)
LPXpro Series
LPFpro 200 157 50 200
LPXpro 210 193 300 100248 700 100308 450 100351 200 100
LPXpro 220 193 250 200248 400 200308 275 200351 130 200
LPXpro 240 193 80 300248 160 400308 - 400351 55 400
LPXpro 305 193 400 50248 800 50308 600 50351 300 50
LEAP
LEAP 130K 248 650 200
LEAP 130C 308 650 200
LAMBDA SX
LAMBDA SX C-Series 308 900/1000 300/600
LAMBDA SX K-Series 248 1000 300
LAMBDA SX C-Series FOR ELA 308 1000 500
VYPER
VYPER 308 2000 600
Laser Selection GuideExcimer Lasers
5
Laser S
electio
n Guide
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
Applications Matrix1
ExciStar XS
Xantos XS
BraggStar Industrial
Series
IndyStar
COMPexPro
LEAP
LAMBDA SX
LPXPro Series
61 This matrix shows only a sampling of many possible applications for our lasers. Please contact us regarding your application.
Applications
Superior Reliability & Performance • www.Coherent.com • [email protected]
VYPER
Marking
High-Speed Cable Marking • • •
Eyeglass Marking • • • • •
Teflon Marking • • • • • •
Diamond and Jewel Marking • •
Material Processing
Inkjet Nozzle Drilling • • • •
Diamond and Sapphire Drilling • • • •
FBG Writing • • • •
Transparent Conductive Oxides Structuring (TCO, microfluidic) • • •
Laser Lift-Off (LLO) • • • • •
Surface Treatment
Excimer Laser Annealing (ELA/SLS) • •
Cylinder Honing • •
Pulsed Laser Deposition (PLD) • • • • •
Laser Direct Synthesis (LDS) • • •
Laser Direct Patterning (LDP) • • • •
Laser-Induced Transfer Imaging (LITI) • • • • •
Ion Implantation/Doping/Implant Activation • • • • •
Cleaning • • • • • •
Gas-Assisted Laser Etching (GALE) • • • • • •
Measurement
Combustion Analysis • • •
Optics/Coating Testing • • •
Mask Inspection •
Spectroscopy • • • • •
Laser-Induced Fluorescence (LIF) • • • • •
Medical Procedures
Psoriasis/Vitiligo Treatment • •
Refractive Eye Surgery (LASIK*) • • •
7
Applications
ApplicationsExamples
Glass Marking (courtesy of Carl Zeiss Vision)
Laser Model ExciStar XS
Cylinder Honing (courtesy of Audi AG)
Laser Model LAMBDA SX
Advanced Wafer Marking (courtesy of Innolas)
Laser Model IndyStar
Laser Direct Patterning of Circuits (courtesy of LPKF)
Laser Model LAMBDA SX
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
ApplicationsExamples
8
Applications
Laser CVD and PLD generated thin films on various base material wafers
Laser Model CompexPro, LPXPro, LEAP, LAMBDA-SX
Laser doping phosphorous silicate glass (PSG) solar cell after irradiation with single pulses
Laser Model LPXpro, LEAP, LAMBDA-SX
Superior Reliability & Performance • www.Coherent.com • [email protected]
9
Applications
ApplicationsExamples
Frontside ablation of SiNx for structuring and etch barrier removal on c-Si solar sells
Laser Model LPXpro, LEAP, LAMBDA-SX
Thin film ablation on Si wafer. Insert showing close-up, giving an idea on the depth control reachable.
Laser Model IndyStar, CompexPro, LPXpro, LEAP
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Excimer Laser Applications
10
Applications
Excimer Laser Advantages
ExcimerLaser
Superior Reliability & Performance • www.Coherent.com • [email protected]
Flow feature for ink and inkjet nozzle hole machined in polyimide foilc-Si surface after excimer drilling of SiNx etch barrier
and subsequent etching for PV applications
Row of nozzle holes in polyimide foil for inkjet printers ELA x-tallised LTPS film after secco etch (courtesy JSW) Marking of polymer (PET, PE, PP, PTFE etc.) tubings
UV WavelengthDirectly GeneratedImposing HighResolution on Large Areas
Low Coherence
High Pulse Energy
Stable BeamProperties overOperation Range
Flexible Repetition Rate
Laser Pulseson Demand
11
Applications Labs Worldwide
Our laser applications labs provide state-of-the-art feasibility testing of material processing methods. Please contact yourCoherent representative or Coherent sales office for more information. For contact information, please go to page 50.
Application Lab, Goettingen
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
Applications
Excimer Laser Application Lab Locations
12
Excimer Lasers
2. Key Features and Customer Benefits
Key Features Customer Benefits
Ultra-Compact • Low investment costsLightweight Design • Flexible integration
Almeta XS Tube Design • Extended tube lifetime• High pulse-to-pulse stability• Available at 157, 193, 248 and 351 nmwavelengths
Corona Preionization • Homogeneous beam profile
Solid-State Switch • Immediate operation• Maintenance-free operation
Energy Monitor • Preset stabilized energy operation
1. Description
ExciStar XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the new Almeta XS tube design,they deliver excellent results in low pulse energy applications.
Featuring soft corona preionization, the ExciStar XS provides ahomogeneous energy distribution and high pulse-to-pulsestability. Solid-state switching provides immediate and main-tenance-free operation, and units are available with maxi-mum repetition rates of 200 Hz and 500 Hz.
ExciStar XSExcimer Lasers
3. Specifications
Wavelength (nm) 157 193 248 351
Max. Repetition Rate (Hz) 200/500 200/500 200/500 200/500
Max. Pulse Energy (mJ) 2 8 12 5
Stabilized Pulse Energy (mJ) 1 5 8 4
Average Pulse Power1 0.2/0.5 1/2.5 1.6/4 0.8/2
Energy Stability1 (sigma, %) 2/3 2/3 2/3 2/3
Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3 6 x 3 6 x 3
Beam Divergence (FWHM, V x H, mrad2) 3 x 1.5 3 x 1.5 3 x 1.5 3 x 1.5
Pulse Duration (ns)(typ.) 5 5 5 51 Measured at stabilized energy and maximum repetition rate (200/500 Hz).
Superior Reliability & Performance • www.Coherent.com • [email protected]
Specifications (continued)
Wavelength (nm) 157 193 248 351
Part No. (200 Hz) EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS 1115882 1115880 1115885 1157175
Part No. (500 Hz) EXS-500-157 nm-XS EXS-500-193 nm-XS EXS-500-248 nm-XS EXS-500-351 nm-XS 1124412 1124414 1124416 1148001
4. Weight/Utilities/Dimensions
Weight 58 kg/128 lbs.
Cooling Air-cooled
Electrical 230V, 50 or 60 Hz, 2000 VAC, 16A (recommended external fuse),single-phase
Dimensions 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.)
ExciStar XSExcimer Lasers
13
Excimer La
sers
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
14
Excimer Lasers
2. Key Features and Customer Benefits
Key Features Customer Benefits
Gas Management • Equipped with a complete gas management system, including premix gas cylinder• No additional external gas compartment necessary
• Compliant with GermanTÜV safety standards
Almeta XS Tube Design • Extended tube lifetime• High pulse-to-pulse stability• Available at 157, 193, 248 and 351 nm wavelengths
Corona Preionization • Homogeneous beam profile
Solid-State Switch • Immediate operation• Maintenance-free operation
Energy Monitor • Preset stabilized energy operation
1. Description
Xantos XS excimer lasers are compact, fully integrated systemsthat are very easy to install. For ease of use in the lab, theXantos XS housing contains a complete laser module based onthe ExciStar XS, plus a pre-mixed gas cylinder that includes gashandling and complies with all necessary gas safety standards.Xantos XS lasers are best suited for low pulse energy applica-tions, such as spectroscopy and precision material processing.
Featuring soft corona preionization, the Xantos XS provides a homogeneous energy distribution and high pulse-to-pulsestability. Solid-state switching ensures immediate, mainte-nance-free operation. Xantos XS lasers are available for maximum repetition rates of 500 Hz, and standard versions are equipped with an energy monitor, as well as an electro-mechanical shutter.
Xantos XSExcimer Lasers
3. Specifications
Wavelength (nm) 157 193 248 351
Max. Repetition Rate (Hz) 500 500 500 500
Max. Pulse Energy (mJ) 2 8 12 5
Stabilized Pulse Energy (mJ) 1 5 8 4
Average Pulse Power1 (W) 0.5 2.5 4 2
Energy Stability1 (sigma, %) 3 3 3 3
Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3 6 x 3 6 x 3
Beam Divergence (FWHM, V x H, mrad2) 3 x 1.5 3 x 1.5 3 x 1.5 3 x 1.5
Pulse Duration (typ.) 5 5 5 51 Measured at stabilized energy and maximum repetition rate.
Superior Reliability & Performance • www.Coherent.com • [email protected]
5. Accessories
No accessories available.
4. Weight/Utilities/Dimensions
Weight 170 kg/374.8 lbs.
Cooling Air-cooled
Electrical 230V, 50 to 60 Hz, 2000 VAC,16A (recommended external fuse), single-phase
Dimensions 900 x 400 x 1045 mm (L x W x H) (35.4 x 15.8 x 41.1 in.)
[including signal lamp]
Xantos XSExcimer Lasers
15
Excimer La
sers
Specifications (continued)
Wavelength (nm) 157 193 248 351
Part No. Xantos XS-500- Xantos XS-500- Xantos XS-500- Xantos XS-500-(always includes energy monitor 157 nm 193 nm 248 nm 351 nmand electromechanical shutter) 1123361 1123362 1123363 1123364
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
16
Excimer Lasers
2. Key Features and Customer Benefits
Key Features Customer Benefits
Industrial Design • High uptime• Low maintenance
FutureTube • Metal/ceramic tube design for extended lifetimes
Corona Preionization • Homogenous beam profile
Solid-State Pulser • "Soft" discharge for better point- ing stability and energy stability
• Especially suitable forFBG Writing
Air-Cooled • Quick and easy integration(water-cooled optional) • Optional external heat
exchanger for water cooling at high repetition rates
1. Description
The BraggStar Industrial Series is a versatile UV light sourcethat delivers excellent performance for all types of:• Phase Mask Fiber Bragg Grating (FBG) Writing• High Spatial Coherence Applications
The BraggStar S-Industrial, which is available at 193 nm and248 nm wavelengths provides repetition rates up to 1000 Hz.It also features the FutureTube design, corona pre-ionizationand solid state pulser technology. Overall BraggStar lasers arecompact, highly effective systems that are easy to install andeasy to operate.
BraggStar Industrial SeriesExcimer Lasers
3. Specifications1
Wavelength (nm) 193 248
Max. Repetition Rate (Hz) 1000 1000
Max. Pulse Energy (mJ) 11 16
Stabilized Pulse Energy (mJ) 7 11
Average Pulse Power2 (W) 7 12
Energy Stability2 (sigma, %) 3 3
Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3
Beam Divergence (FWHM, V x H, mrad2) 2 x 1 2 x 1
Pulse Duration (ns)(typ.) 12 15
Temporal Coherence (FWHM, µm) >30 >120
Spatial Coherence (FWHM, µm) >700 >1500
Superior Reliability & Performance • www.Coherent.com • [email protected]
BraggStar Industrial SeriesExcimer Lasers
17
Excimer La
sers
3. Specifications (continued)
Spectral Bandwidth (FWHM) natural natural
Wavelength (nm) 193 248
Part No. BSI 1000-193 nm-FT BSI 1000-248 nm-FT(always includes energy monitor) 4-06-0022-063 4-06-0018-0641 Measured at stabilized energy and maximum repetition rate.
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
5. Accessories
Part No. Product Description
3-15-0004-000 External heat exchangerKB200V — 19" version (for 50 or 60 Hz and 100, 115, 200, 208 and 230V),Cooling capacity 2.0 kW, water-to-air
4. Weight/Utilities/Dimensions
Weight 135 kg/298 lbs.
Cooling Air-cooled, optionallywater-cooled by externalheat exchanger
Electrical 230V, 50 or 60 Hz, 2000 VAC,16A (recommended external fuse),single-phase or two phases
Dimensions 978 x 380 x 837 mm (L x W x H) (38.5 x 15.0 x 33.0 in.)
18
Excimer Lasers
IndyStarExcimer Lasers
1. Description
The IndyStar Series represents a compact laser series forapplications needing high repetition rates up to 2000 Hz and low pulse energy. Available for 193 nm and 248 nm, it combines the demanding requirements of a semi-S2-certification with an extended components lifetime.
The IndyStar from Coherent is setting new standards for components lifetime in industrial applications. Based on the Almeta-tube-technology, the IndyStar achieves lifetimesof many billion pulses, resulting in a reduction of the overallcosts of operation.
The success of a UV-laser application depends on high performance, reliability, easy process integration, safety andfast-response support from your laser supplier. Coherentknows that at the core of your business is your process deviceand its heart is the laser. The IndyStar series is engineered to meet the demands in every aspect of an industrial laser.
2. Key Features and Customer Benefits
Key Features Customer Benefits
Industrial Design with • High uptimeSemi-S2-certificate • Low maintenance
Corona Preionization • Homogeneous beam profile
Solid-State Pulser • "Soft" discharge for better pointing- and energy stability
• No warm-up time, maintenance- free
AlmetaTube Technology • All metal sealed tube design • Extended lifetimes for many billion pulses
Modified Electronic • Proven designConcept • “POWERLOK” function integrated
• Lowest Jitter by “TIMELOK” function
Integrated • Laser operation at presetEnergy Monitor stabilized energy
Compact Design, Single • Quick and easy integrationPhase, Advanced Service Concept
3. Specifications
Parameter ArF ArF KrF KrF
Wavelength (nm) 193 193 248 248
Max. Repetition Rate (Hz) 1000 2000 1000 2000
Stabilized Pulse Energy (mJ) 8 4 12 6
Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2 <2
Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3 6 x 3 6 x 3
Beam Divergence (FWHM, V x H, mrad2) 3 x 1.5 3 x 1.5 3 x 1.5 3 x 1.5
Pulse Duration (FWHM)(ns) 5 ±2 4 ±1 5 ±2 4 ±1
Part No. IndyStar 193 1 kHz IndyStar 193 2 kHz IndyStar 248 1 kHz IndyStar 248 2 kHz1166017 1162918 1166018 1166016
Superior Reliability & Performance • www.Coherent.com • [email protected]
IndyStarExcimer Lasers
4. Weight/Utilities/Dimensions
Weight 135 kg/298 lbs.
Cooling1 kHz-version Air-cooled; water-cooling optionally2 kHz-version Water-cooled
Electrical 230V, 50/60 Hz, 2000 VAC,16A (recommended external fuse), single or two phases
Dimensions 974 x 381 x 838 mm(L x W x H) (38.35 x 14.96 x 32.95 in.)
5. Accessories
Part No. Description
3-15-0004-000 External heat exchanger KB200V— 19" version (for 50/60 Hz and 100, 115, 200, 208 and 230V), cooling capacity 2.0 kW, water-to-air
19
Excimer La
sers
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
20
Excimer Lasers
COMPexProExcimer Lasers
2. Key Features and Customer Benefits
Key Features Customer Benefits
Ceramic Preionization • Unmatched pulse-to-pulse stability • Increased pulse energy• Increased static gas lifetime
Integrated Vacuum Pump • Compact standalone designand Halogen Filter
Integrated, Purgable • Preset stabilized energy Energy Monitor operation
Air-Cooled (up to 20 Hz), • Quick and easy integrationSingle-Phase
1. Description
COMPexPro lasers are highly effective light sources, featuring acompact design and easy installation and operation. Theydeliver superior results in demanding applications, such assolid sampling systems (LA-ICP-MS), material research (PLD)and precise material processing.
Featuring new ceramic preionization, the COMPexPro pro-vides multi-hundred millijoules output, plus unmatchedpulse-to-pulse stability. The COMPexPro also comes with animproved gas processor that extends both gas and opticslifetimes.
3. Specifications
Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm) 50 102 110 201 205
Maximum Pulse Energy1 (mJ) 193 100 200 200 400 400248 150 400 400 700 700308 - 250 250 500 500351 - 200 200 300 300
Maximum Average Power2 (W) 193 4 4 12 4 15248 7 7 30 7 30308 - 5 16 4 20351 - 4 12 3 15
Maximum Repetition Rate (Hz) All 50 20 100 10 50
Pulse Duration (FWHM)(ns) All 20 20 20 25 25
Energy Stability (sigma, %) All 1 1 1 1 1
Beam Dimensions (FWHM, V x H, mm2) All 14 x 5 24 x 10 24 x 10 24 x 10 24 x 10
Beam Divergence (FWHM, V x H, mrad2) All 2 x 1 3 x 1 3 x 1 3 x 1 3 x 11 Measured at 10 Hz.2 Measured at maximum repetition rate.
Superior Reliability & Performance • www.Coherent.com • [email protected]
21
Excimer La
sers
COMPexProExcimer Lasers
4. Weight/Utilities/Dimensions
WeightCOMPexPro 50/100 270 kg/591 lbs.COMPexPro 200 325 kg/716 lbs.
Cooling Water, 2 to 3 l/min. (0.5 to 0.8 gal./min.), 15 to 20°C
Electrical
COMPexPro 50/100 230V, ±10%, 16A, 50/60 Hz switchable, 1-phase
COMPexPro 200 115V, ± 10%, 25A, 50/60 Hz switchable, 1-phase
Dimensions (L x W x H)COMPexPro 50/100 1282 x 375 x 793 mm
(51 x 15 x 31 in.)COMPexPro 200 1682 x 375 x 793 mm
(67 x 15 x 31 in.)
5. Accessories
Part No. Product Description
26082610 Unstable resonator optics 193 nm(COMPexPro 50 and 100)
26082710 Unstable resonator optics 248 nm(COMPexPro 50 and 100)
26082810 Unstable resonator optics 308 nm(COMPexPro 100)
26083010 Unstable resonator optics 193 nm(COMPexPro 200)
26083110 Unstable resonator optics 248 nm(COMPexPro 200)
26083210 Unstable resonator optics 308 nm(COMPexPro 200)
262456 Unstable resonator adapter(COMPexPro 50, 100 and 200)
1149339 Beam aligner
1132990 Temperature stabilization module
Specifications (continued)
Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm) 50 102 110 201 205
Part No. (F-Version) All 1124409 1113836 1113838 1115129 1115131
Part No. (XeCl-Version) All - 1113837 1113839 1115130 1115132
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22
Excimer Lasers
LPXproExcimer Lasers
2. Key Features and Customer Benefits
Key Features Customer Benefits
Adaptable Resonator • Fit to application requirementsConfigurationFlexible Pulse Energy • Advanced process control
F-version • 193, 248, 351 nm operationC-version • 308 nm operation
True Specs • Reliable long-term operationInternal Burst Generator • Programmable laser pulses
Rugged Laser Frame • Unmatched beam stability
Longest Gas Life • Low operation costs
1. Description
LPXpro is a family of RoHS compliant excimer lasers, offered at wavelengths of 193, 248, 308 and 351 nm, with output powers as high as 80W at 248 nm. The LPFpro familyexpands wavelength range to vacuum UV with 157 nm. Thebeam quality, high pulse energy, short pulse length and highpeak power of LPXpro and LPFpro lasers combine to optimizeUV applications.
These characteristics, plus their proven reliability and low cost of ownership make LPXpro lasers suitable for a widerange of demanding, high precision processing tasks. Theseinclude drilling, pulsed laser deposition (PLD), laser direct patterning (LDP), laser lift off (LLO) and cleaning.
3. Specifications
Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm) 210 220 240 305 205 220
Max. Pulse Energy (mJ) 157 – – – – 50 40up to 10 Hz 193 450 300 160 600 400 250
248 800 550 300 1100 – –308 500 300 – 700 – –351 400 200 120 400 – –
Max. Stabilized Pulse Energy (mJ) 157 – – – – – –at Full Repetition Rate 193 300 250 80 400 – –
248 700 400 160 800 – –308 450 275 – 600 – –351 200 130 55 300 – –
Max. Rep. Rate (Hz) all 100 200 300/4002 50 50 200
Max. Stabilized Average Power (W) 157 – – – – 2.53 73193 30 50 24 20 153 403248 70 80 64 40 – –308 45 55 – 30 – –351 20 26 22 15 – –
Energy Stability (at 5 Hz, 1 sigma, %) 248 <_1 <_1 <_2 <_1 <_104 <_104
Pulse Duration (ns, typ.) 248 25 20 15 25 – –
Superior Reliability & Performance • www.Coherent.com • [email protected]
LPXproExcimer Lasers
4. Weight/Utilities/Dimensions
WeightLPFpro/LPXpro 200 400 kg/880 lbs.LPXpro 305 430 kg/946 lbs.
Cooling Water, <_7 l/min. (1.8 gal./min.), 15 to 20°C
Electrical 208 or 400 VAC, 50/60 Hz 3-phase
Dimensions (L x W x H)Laser Head 1966 x 800 x 474 mm3
(77 x 32 x 19 in.3)Power Supply 460 x 185 x 750 mm3
(18 x 7 x 30 in.3)
5. Accessories
Part No. Product Description
26083020 Unstable resonator optics 193 nm(external resonator configuration)
26083120 Unstable resonator optics 248 nm(external resonator configuration)
26083220 Unstable resonator optics 308 nm(external resonator configuration)
26083320 Unstable resonator optics 351 nm(external resonator configuration)
26083010 Unstable Resonator Optics 193 nm(LPXpro 240)
26083110 Unstable Resonator Optics 248 nm(LPXpro 240)
262856 Upgrade Kit VCR Gas Connections
1149339 Beam aligner
23
Excimer La
sers
3. Specifications (continued)
Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm) 210 220 240 305 205 220
Avg. Beam Dimensions (V x H, FWHM, mm2, typ.) 248 12 x 24 8 x 24 8 x 22 12 x 30 10 x 244 10 x 244
Beam Divergence (V x H, FWHM, mm2, typ.) 248 <_1 x 3 <_1 x 3 <_1 x 3 <_1 x 3 <_2 x 64 <_2 x 64
Part No. (F-Version, 400V) 1120125 1120129 1152299 1120133 1120137 1120139
Part No. (F-Version, 208V) 1120126 1120130 1152300 1120134 1120138 1120140
Part No. (C-Version, 400V) 1120127 1120131 – 1120135 – –
Part No. (C-Version, 208V) 1120128 1120132 – 1120136 – – 1 157 nm with LPFpro only; 193 nm, 248 nm, and 351 nm with LPXpro F-version only; 308 nm with LPXpro C-version only.2 At 193 nm (300 Hz only).3 Max. average power at maximum high voltage. Max. stabilized power not specified for LPFpro.4 At 157 nm.
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
24
Excimer Lasers
LEAPExcimer Lasers
Superior Reliability & Performance • www.Coherent.com • [email protected]
1. Description
LEAP is a series of high duty-cycle excimer lasers, offered atwavelengths 248 and 308 nm, with output powers as high as130W. The beam quality, high stabilized pulse energy of 650mJ, short pulse length and high peak power of LEAP laserscombine to optimize UV manufacturing applications. Thesecharacteristics plus their reliability and economy make LEAPlasers suitable for a wide range of demanding, high-precisionprocessing tasks. These include micro drilling and structuring,laser direct patterning (LDP), and surface treatment.
2. Specifications
LEAP 130K LEAP 130C
Wavelength (nm) 248 308
Stabilized Pulse Energy Range (mJ) 550 to 650 550 to 650
Maximum Stabilized Average Power (W) 130 130
Maximum Repetition Rate (Hz) 200 200
Energy Stability (sigma, %) <_1.5 <_1.5
Pulse Duration (FWHM)(ns) 22 22
Average Beam Dimensions (V x H, FWHM, mm2, typ.) 35 x 12.5 35 x 12.5
Beam Divergence (V x H, FWHM, mrad) <_4.5 x 1.5 <_4.5 x 1.5
Dynamic Gas Lifetime >30 >30(at max. stabilized energy) (mio. pulses)
Part No. (200/208V) 1165692 1165693LEAP 130K Excimer Laser 248 nm; LEAP 130C Excimer Laser 308 nm;200/208V 200/208V
Part No. (400V) 1165694 1165695LEAP 130K Excimer Laser 248 nm; LEAP 130C Excimer Laser 308 nm;400V 400V
25
Excimer La
sers
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LEAPExcimer Lasers
3. Weight/Utilities/Dimensions
Weight 850 kg/1874 lbs.
Cooling Water, 20 l/min. (37 gal./min.), 19 to 21°C
Electrical 8.6 kVA, 3-phase, 200/208 VAC or 400 VAC, 50/60 Hz
Dimensions (L x W x H) 2415 x 800 x 1130 mm3 (95.1 x 31.4 x 44.5 in.3)
26
Excimer Lasers
LAMBDA SXExcimer Lasers
2. Key Features + Customer Benefits
Key Features Customer Benefits
Industrial Design • Rugged and reliable • Modular setup
Industrial Interfaces • Integrated industrial PC • Serial interface RS-232• Direct Control Port (DCP) for easy integration intoworkstations
External Resonator • Excellent beam-pointing stability• SlideValves for tube window maintenance
Sealed and Purged • Long optics lifetimes, suitable forBeam Path rugged industrial enviroments
High-Stability NovaTube • Outstanding energy stability —NovaPowerSwitch significantly below 1% (rms)
High UV Laser Power • Lowest costs per Watt UV
Flexible Pulse Energy • Advance process control
External Resonator • Unmatched beam stability
1. Description
The LAMBDA SX industrial excimer laser series provides highlystabilized UV power to the production floor. It is designed todeliver the best energy stability available, and also features a number of innovative technologies forunsurpassed performance and reliability.
PowerLokProprietary PowerLok technology brings every pulse of a bursttrain to the desired energy level. PowerLok employs a self-learning algorithm, utilizing a look-up table to smoothencycling bursts.
TimeLokProprietary TimeLok technology stabilizes the trigger-to-pulsedelay of all-solid-state HV switch-driven excimer lasers andminimizes the time jitter. TimeLok also employs a self-learning algorithm, utilizing a look-up table for delay stabilization in any operation mode.
Onboard Diagnostics and LoggingThe last 10,000 values of HV, energy and sigma are stored in a ring buffer and are continuously updated from pulse topulse. This enables detailed logging of laser operations.
e-DiagnosticsProvides external online data acquisition and analysis(optional). Allows tracking and analysis of laser performanceexternally on a notebook PC. Supports predicted maintenanceand process parameter control.
Superior Reliability & Performance • www.Coherent.com • [email protected]
LAMBDA SX C-Series Excimer Lasers
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Excimer La
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3. Specifications1
LAMBDA SX 300C LAMBDA SX 200C LAMBDA SX 540C
Wavelength (nm) 308 308 308
Stabilized Pulse Energy Range (mJ) 800 to 1000 550 to 670 700 to 900
Maximum Stabilized Average Power (W) 300 200 540
Maximum Repetition Rate (Hz) 300 300 600
Energy Stability (rms, %) <_2 <_1 <_2
Pulse Duration (FWHM)(ns) 29 22 29 ±6
Beam Dimensions (FWHM, V x H, mm2)2 35 x 13 35 x 12 35 x 13
Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5 <_4.5 x 1.5
Dynamic Gas Lifetime >40 >40 >50(at max. stabilized energy)(mio. pulses)
Part No. 1121446 1139028 1139024LAMBDA SX 300C, LAMBDA SX 200C, LAMBDA SX 540C,400 VAC, 50/60 Hz 400 VAC, 50/60 Hz 400 VAC, 50/60 Hz
1 All specifications are subject to change without prior notice in order to provide the best product possible.2 At 1.0m from beam exit.
4. Weight/Utilities/Dimensions LAMBDA SX 300C LAMBDA SX 200C LAMBDA SX 540C
Weight 1400 kg/3086 lbs. 1370 kg/3020 lbs. 1480 kg/3263 lbs.
Cooling Water, 12 to 28 l/min. Water, 12 to 28 l/min. Water, up to 70 l/min.(3.2 to 7.4 gal./min.), (3.2 to 7.4 gal./min.), (18.5 gal./min.),10 to 15°C 10 to 15°C 12 to 15°C
Electrical 22 kVA, 3-phase, 18 kVA, 3-phase, 40 kVA, 3-phase400 VAC, 50 or 60 Hz, 400 VAC, 50 or 60 Hz, 400 VAC, 50 or 60 Hz,190 to 480 VAC 190 to 480 VAC 190 to 480 VAC(w/optional transformer) (w/optional transformer) (w/optional transformer)
Dimensions 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(L x W x H) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)
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28
Excimer Lasers
LAMBDA SX C-Series for ELAExcimer Lasers
2. Key Features + Customer Benefits
Key Features Customer Benefits
Best Pulse Stability High annealing homogeneity
Flexible Pulse Energy Advanced process & cost control
Stable Beam Parameter High annealing yield
1. Description
The LAMBDA SX 315C and the LAMBDA SX 540C HPS are specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimer lasers.
3. Specifications1
LAMBDA SX 315C LAMBDA SX 540C HPS
Wavelength (nm) 308 308
Stabilized Pulse Energy Range(mJ) 800 to 1050 800 to 1000
Maximum Stabilized Average Power (W) 315 500
Maximum Repetition Rate (Hz) 300 500
Energy Stability (rms, %) <_1 <_1
Pulse Duration (FWHM)(ns) 29 ±6 29 ±6
Average Beam Dimensions (FWHM, V x H, mm2)2 35 x 13 35 x 13
Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5
Beam-Pointing Stability (V x H) <_0.45 x 0.15 _0.45 x 0.15
Dynamic Gas Lifetime >40 >50(at max. stabilized energy)(mio. pulses)
Part No. 1139020 1170166LAMBDA SX 315C, LAMBDA SX 540C HPS,400 VAC, 50/60 Hz 400 VAC, 50/60 Hz
1 All specifications are subject to change without prior notice in order to provide the best product possible.2 At 1.0m from beam exit.
Superior Reliability & Performance • www.Coherent.com • [email protected]
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Excimer La
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LAMBDA SX C-Series for ELAExcimer Lasers
4. Weight/Utilities/Dimensions
LAMBDA SX 315C LAMBDA SX 540C HPS
Weight 1400 kg/3086 lbs. 1480 kg/3263 lbs.
Cooling Water, 12 to 28 l/min. Water, up to 70 l/min.(3.2 to 7.4 gal./min.), 10 to 15°C (18.5 gal./min.), 12 to 15°C
Electrical 22 kVA, 3-phase, 400 VAC, 40 kVA, 3-phase, 400 VAC,50 or 60 Hz, 190 to 480 VAC 50 or 60 Hz, 190 to 480 VAC,(with optional transformer) (with optional transformer)
Dimensions (L x W x H) 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)
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30
Excimer Lasers
LAMBDA SX K-SeriesExcimer Lasers
Superior Reliability & Performance • www.Coherent.com • [email protected]
4. Weight/Utilities/Dimensions LAMBDA SX 300K LAMBDA SX 200K
Weight 1330 kg/2932 lbs. 1320 kg/2910 lbs.
Cooling Water, 12 to 25 l/min. Water, 12 to 25 l/min. (3.2 to 6.6 gal./min.), 10 to 15°C (3.2 to 6.6 gal./min.), 10 to 15°C
Electrical 19 kVA, 3-phase, 400 VAC, 17 kVA, 3-phase, 400 VAC, 50 or 60 Hz, 190 to 480 VAC 50 or 60 Hz, 190 to 480 VAC(with optional transformer) (with optional transformer)
Dimensions 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(L x W x H) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)
3. Specifications1
LAMBDA SX 300K LAMBDA SX 200K
Wavelength (nm) 248 248
Maximum Stabilized Pulse Energy (mJ) 800 to 1000 550 to 670
Maximum Stabilized Average Power1 (W) 300 200
Maximum Repetition Rate (Hz) 300 300
Energy Stability (rms, %) <_2 <_2
Pulse Duration (FWHM)(ns) 34 24
Beam Dimensions (FWHM, V x H, mm2)2 36 x 16 36 x 16
Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5
Dynamic Gas Lifetime >40 >40(at max. stabilized energy) (mio. pulses)
Part No. 11139033 1139031LAMBDA SX 300K, 400 VAC, 50/60 Hz LAMBDA SX 200K, 400 VAC, 50/60 HZ
1 All specifications are subject to change without prior notice in order to provide the best product possible.2 At 1.0m from beam exit.
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Excimer La
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LAMBDA SX Excimer Lasers
5. Accessories
Part No. Product Description
1121675 e-Diagnostics tool kit, consisting ofrecording and analysis software,licensed for installation on a notebook PC
262673 Torque wrench for cavity windowassembly for 300 Hz series lasers
Halogen sensor integratedin laser exhaust
1142697 F-Series Sensor1142730 C-Series Sensor
For line voltages other than 3-phase, 400 VAC, please orderexternal transformer.
Part No. Product Description1136303 Transformer 30 kVA
300 Hz series lasers190 up to 480 VAC
1136304 Transformer 60 kVA600 Hz series lasers190 up to 480 VAC
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32
Excimer Lasers
VYPERExcimer Lasers
Superior Reliability & Performance • www.Coherent.com • [email protected]
1. Description
The VYPER is a next generation very high power excimer laser specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturingrequires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimerlasers. The VYPER laser fits perfectly to the high powerLineBeam 750 optics.
2. Specifications
VYPER
Wavelength (nm) 308
Stabilized Pulse Energy Range(mJ) 1800 to 2000
Maximum Stabilized Average Power (W) 1200
Maximum Repetition Rate (Hz) 600
Energy Stability (sigma, %) <_0.5
Pulse Duration (FWHM)(ns) 29 ±6
Average Beam Dimensions (FWHM, V x H, mm2) 35 x 13
Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5
Dynamic Gas Lifetime (at max. stabilized energy)(mio. pulses) >100
Part No. 1179155VYPER, 400 VAC 50/60 Hz
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Excimer La
sers
3. Weight/Utilities/Dimensions
Weight 4400 kg/9700 lbs.
Cooling Water, up to 140 l/min. (37 gal./min.), 12 to 15°C
Electrical 120 kVA, 3-phase, 400 VAC,50 or 60 Hz
Dimensions 2800 x 1700 x 2085 mm(L x W x H) (110 x 66.9 x 82 in.)
4. Accessories
For line voltages other than 3-phase, 400 VAC, please orderexternal transformer. Two transformers per laser required.
Part No. Product Description
1136304 Transformer 60 kVA600 Hz series lasers190 up to 480 VAC
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VYPERExcimer Lasers
34
Excimer Lasers
On-Site RequirementsExcimer Lasers
Cooling
Excimer lasers have overall efficiencies of about 2 or 3%. Most of the dissipated electrical energy of the laser dischargeis transformed into heat. Low duty cycle excimer lasers areusually air-cooled. However, at medium to high powers and ahigh duty cycle, most excimer lasers need water or externalheat exhangers for cooling. For information about individuallaser cooling requirements, please ask for detailed specifica-tions about a system.
Exhaust Ventilation
At the installation site, the laser system must be connected to an exhaust ventilation system. COMPexPro, LPXPro, LAMBDA SX, and VYPER have their own ventilation fans, which guarantee the required negative pressure. For detailedinformation about individual exhaust ventilation require-ments, please refer to the Site Preparation Manual.
Beam Path Purging
Excimer laser operation at 157 nm and 193 nm requires purgingof the beam path with nitrogen in order to avoid absorptionby ambient air.
On-site preparation is required before an excimer laser can be installed. The following is a brief overview: For detailedinformation, please refer to the Site Preparation Manual,which is available from your Coherent representative.
Power Supply
Excimer laser power requirements vary by model and can be either single-phase (115V, 50/60 Hz or 230V, 50/60 Hz) or three-phase (200/208V, 50/60 Hz or 400V, 50/60 Hz).
To determine the power requirements and wall-plug configuration for a particular model, please refer to the laserspecifications.
Gas Supply
The active medium of an excimer laser is a mixture of a raregas (argon, krypton or xenon), a halogen (fluorine or hydrogenchloride), and a buffer gas (helium or neon). In addition to thepremixed gas, another gas (in most cases, nitrogen) is neededto purge the laser beam and, for certain service procedures, aflush gas (helium) is also required. For more informationabout gas handling and installation, please refer to the sitepreparation manual.
Superior Reliability & Performance • www.Coherent.com • [email protected]
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Excimer La
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On-Site RequirementsExcimer Lasers
Air Cooling (air-to-air exchange)
External heat exchanger option (water-to-air exchange)
Xantos XS (only air-cooled)ExciStar XS (only air-cooled)IndyStarBraggStar Industrial Series
Water Cooling (water-to-water exchange)
COMPexPro >20 HzLPXpro/LPFpro/LEAPLAMBDA SX/VYPERIndyStar (optional)
Laser Gases
ExciStar XS SeriesIndyStarBraggStar Industrial SeriesCOMPexProLPXpro*(for 157/193 nm)
COMPexProLPXpro/LPFpro/LEAPLAMBDA SX/VYPER*(for 157/193 nm)
Halogen is F2/He, HCl/H2/Ne or premix(depending on wavelength and laser).
Rare is Ar, Kr, Xe or premix(depending on wavelength and laser).
Xantos XS includes a premix gas cylinderintegrated in the He device.
Xantos XS
Halogen
Rare
Ne He
He
N2*
N2*L A S E R
Power
Single-phase AC115V, 50/60 Hz
· COMPexPro
Single-phase AC230V, 50/60 Hz
· ExciStar XS· IndyStar· BraggStar Industrial Series· Xantos XS
Three-phase AC200/208V,50/60 Hz or400V, 50/60 Hz
· LPXpro/LPFpro/LEAP
Three-phase AC400V 50/60 Hz (190to 480V withtransformer)
· LAMBDA SX/VYPER
Premix
He
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36
UV O
ptical Systems
UV Optical Systems, Modules and ComponentsUV Optical Systems
Functional BlocksModular System Approach
UVoptical systems usually include a set of blocks that formthe illumination beam path and the imaging beam path. Theoptical system shapes and homogenizes the laser radiation toilluminate a mask that contains the desired pattern. Thismask, whose pattern can easily be changed, is then imagedwith a projection lens onto the substrate.
Using this technique, the MicroLas line of components pro-vides an easy way to build dedicated optical beam deliverysystems for a wide range of applications.
In addition to our optical and laser products, we also performfeasibility studies, application lab sample preparation/testing,and offer small-scale job shop opportunities to customersaround the world.
Customized Optical Systems for a wide range of R&D applications.
Laser Shutter Attenuator Telescope
Homo-genizer
Field Lens
Mask
P-Lens
Substrate
Illum
ination
Beam
Path
Imag
ing
Beam
Path
Superior Reliability & Performance • www.Coherent.com • [email protected]
37
UV Optical Systems
LineBeamSystem for Crystallization Annealing Applications
1. Description
LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates has been transferred intoindustrial production in the mid 90s. This technique is pro-gressing to even longer line beams for annealing larger areas,employing new excimer lasers with more and more pulseenergy. .
2. Key Features and Customer Benefits
Key Features
• Excellent beam profile homogeneity
• Outstanding optical lifetime performance
•Display industry proven technology, large installation base world wide
• Standard technology for silicon annealing process (LTPS-LCD, OLED)
• Flexible and adaptable for various applications (e.g. ELA, LLO, Activation)
• Perfect match with LAMBDA SX and LEAP excimer lasers
3. Specifications
LineBeam LB250 LB275 LB370 LB380Wavelength (nm) 308 308 308 308Energy Density (mJ/cm2)(at laser pulse energy 1050 mJ)
Specification >_650 >_620 >_450 >_430Typical Value ~800 ~720 ~550 ~530
Beam Length (mm) 250 275 370 380(at 96% from mean value) (+10/-0) (+10/-0) (+10/-0) (+10/-0)Beam Width (µm) 400 400 400 400(at 96% from mean value) (±10) (±10) (±10) (±10)
Homogeneity Long Axis (at 96% from mean value)Specification <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigmaTypical Value <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma
Steepness short axis (µm) <_100 <_100 <_100 <_100(90% to 10%), open slit
Depth of focus (DOF)(µm) ±200 ±200 ±200 ±200
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4. Options
Micro Smoothing Device
Beam Profiler
Pulse Duration Extender
Pulse Expander Module
Alignment Tool
Energy Density Monitor
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UV O
ptical Systems
LineBeamSystem for Crystallization Annealing Applications
Superior Reliability & Performance • www.Coherent.com • [email protected]
5. System Overview - LineBeam Optics 380
A LaserB Attenuator ModuleC Telescope Lens TL1D Telescope Lens TL2E Telescope Lens TL3F Homogenizer Array (LAH1)G Homogenizer Array (LAH2)H Condenser Lens (CLLA)I Homogenizer Array (SAH1)J Homogenizer Array (SAH2)K Condenser Lens (CLSA)L Field Lens (FL)M Slit MaskN CCD Camera Alignment ToolO Field Curvature Correction Lens (FCCL)P Projection Lens DoubletQ Beam Profiler CCD Camera and Power MeterR Substrate SurfaceS Micro Smoothing Device (optional)1 Optics Module #12 Optics Module #2
W1 Entrance WindowW2 Exit Window (power meter port)W3 Exit WindowSA Attenuator SubstrateSC Compensator SubstrateMX Mirrors Laser Beam Path and Power Meter PortMAX Mirrors Alignment ToolMBP Mirror Beam ProfilerPM Power Meter (optional)
39
UV Optical Systems
VarioLas FamilyUV Optical Systems - Material Processing Systems
1. Description
VarioLas UV material processing systems based on theCOMPexPro 100 excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design,rugged mechanics and unmatched pulse-to-pulse stabilityare the key ingredients to each of the VarioLas systems which are available for the common excimer laser wave-lengths 193 nm, 248 nm and 308 nm.
VarioLas mask imaging systems ECO and PRO provide micro-machining resolutions of 30 µm and 5 µm, respectively, at afield size of 2 x 2 mm2 and are ideal for machining of all kinds ofmaterials such as polymers, semiconductors, ceramics or glasses.
The VarioLas SWEEP supports scanned, large-area processing with a 50 x 0.6 mm2 line beam for applicationssuch as dopant activation of wafers and surface annealing.
Each VarioLas version can be tailored to best suit the individual requirements. From a pure UV beam projectiontrain providing a maximum degree of customization to a fully automated Class 1 microprocessing workstation.
2. Key Features and Customer Benefits
Key Features Customer Benefits
High Energy Excimer • Superior pulse-to-pulse stabilityLaser Inside • Largest on-sample fluence range
• Hands-off operation over weeks
Rock Solid Optical and • Maintenance-free operationMechanical Design • Unmatched processing stability
Modular Concept with • Customizable from optical beamUpgrading Options train to ready-to-use workstation
3. Specifications1
Wavelength (nm) VarioLasECO VarioLasPRO VarioLasSWEEPField Geometry All Square Square LineMask Field Size (mm2) All 20 x 20 20 x 20 -Substrate Field Size (mm2) All 2 x 2 2 x 2 50 x 0.6Resolution (µm) All 30 5 -Working Distance (mm) All 50 50 150Maximum Repetition Rate2 (Hz) All 100 100 100Maximum Energy Density (mJ/cm2) 193 1000 1000 230
248 3500 3500 600308 3000 3000 500
Energy Stability (%, rms) 193 2 2 2248 1 1 1308 1 1 1
Pulse Width (ns) 193 15 15 15248 20 20 20308 20 20 20
Part No.3 193 1156386 1156390 1156394248 1156387 1156391 1156395308 1156388 1156392 1156396
1 All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.
2 With COMPexPro 110 laser model (Maximum 20 Hz with COMPexPro 102 laser model).3 VarioLas beam delivery requires COMPexPro 102 or 110 laser model.
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40
VarioLas FamilyUV Optical Systems - Material Processing Systems
4. Weight/Utilities/Dimensions
WeightVarioLas beam delivery system 500 kg/1100 lbs.COMPexPro 102/110 laser model 250 kg/551 lbs.
Cooling Air (if used with COMPexPro 102 laser model)Water, 2 to 3 l/min. (0.5 to 0.8 gal./min.), 15 to 20°C
Electrical 230V, ±10%, 16A, 50/60 Hzswitchable, 1-phase115V, ±10%, 25A, 50/60 Hzswitchable, 1-phase
Options 20 Hz or 100 HzCOMPexPro 100 laser model
Dimensions (L x W x H) 3300 x 1200 x 1830 mm(131 x 48 x 73 in.)
5. Accessories
Part No. Safety Options
1161813 Class 1 housing
1161812 Automated safety class 3 interlock circuit
1107556 Automated beam shutter for 193 nm
1107557 Automated beam shutter for 248 nm
1157558 Automated beam shutter for 308 nm
Part No. Control Options
1161814 Control PC (with monitor)
1161815 Substrate stage (3-axes incl. substrate chuck)
1161816 Observation unit (for VarioLasPRO, 193 nm)
1161817 Observation unit (for VarioLasPRO, 248 nm/308 nm)
1161818 Observation unit (for VarioLasECO, all wavelengths)
1161819 Motorized attenuator (upgrade)
1161820 Mot. Attenuator, Energy Control, PRO/ECO, 193 nm
1161821 Mot. Attenuator, Energy Control, PRO/ECO, 248 nm
1161822 Mot. Attenuator, Energy Control, PRO/ECO, 308 nm
Superior Reliability & Performance • www.Coherent.com • [email protected]
UV O
ptical Systems
41
GeoLasProUV Optical Systems - Solid Sampling System for LA-ICP-MS
1. Description
The GeoLasPro makes the most out of today’s advanced mass spectrometers. It provides unmatched energy densitiesranging from 1 J/cm2 up to 45 J/cm2 for material-independentsolid sampling. GeoLasPro utilizes sophisticated homogeniz-ing optics to ensure accurate and shallow depth control,along with flat-bottom craters. Using 193 nm wavelength insolid sampling produces smaller particle sizes, highest signalintensities and lowest intrinsic fractionation due to optimummaterial-light interaction. GeoLasPro has a rigid design whichis virtually maintenance-free and allows the user to focus on what he is really interested in – uncompromised solidsampling and data recording day after day.
2. Key Features and Customer Benefits
Key Features Customer Benefits
High Energy 193 nm • Superior pulse-to-pulse stabilityCOMPexPro Inside • Hands-off operation over weeks
Petrographic • Superior observation capabilitiesMicroscope • Easy localization of fluid inclusions
Large Range of • Accurate ablation of all materialsEnergy Densities • Precise depth profiling
3. Specifications1
GeoLasPro
Wavelength (nm) 193
Energy Density on Sample 1 to 45(J/cm2)
Spot Size at Sample (µm) 4 to 160
Pulse Stability (%, rms) 2
Repetition Rate (Hz) 1 to 100
Resolution x,y-stage (µm) 1
Resolution z-stage (µm) 0.25 to 0.5
Part No. 1114413 (230V)1114414 (115V)
1 All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.
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UV Optical Systems
42
GeoLasProUV Optical Systems - Solid Sampling System for LA-ICP-MS
4. Weight/Utilities/Dimensions
WeightGeoLasPro system 450 kg/990 lbs.COMPexPro 102 laser model 250 kg/551 lbs.
Cooling Air
Electrical 230V, ±10%, 16A, 50/60 Hzswitchable, 1-phase115V, ±10%, 25A, 50/60 Hzswitchable, 1-phase
Dimensions (L x W x H) 2600 x 970 x 1440 mm(104 x 39 x 57 in.)
5. Accessories
Part No. Product Description
1161814 Class 1 Housing
1161815 Manual Aperture Mask Slider
Superior Reliability & Performance • www.Coherent.com • [email protected]
UV O
ptical Systems
43
5X Optical SubsystemsUV Optical Systems
1. Description
MicroLas 5x optical subsystems are manufactured for integration into workstations. Configurations consist of anattenuator module, deflection mirrors, telescope lenses,homogenizer optics, field lenses and a projection lens (imaginglens). Each system's design can also include observationoptics with CCD cameras, an optional beam profiling monitor,as well as additional sensors and actuators.
2. Specifications1
Optics Subsystem for Integration
Operating Wavelength 248 nm or 308 nm
Field Size (mm2) 15.2 x 1.1 (other sizes on request)
Energy Density (mJ/cm2)with LSX 200K (248 nm) 1220with LSX 200C (308 mm) 1400
Field Size at Mask (mm2) 75 x 6 mm2
Inhomogeneity <_ ±2.5% (2 sigma)
Projection Lens 5x/18 NA = 0.13Field of View: 18 mmResolution: 2 microns(diffraction-limited)
Concentricity <= 0.7°
Mask Field Observation (mm2) 3.5 x 2.6 mm2
Substrate Fieldof Observation (µm2) 600 x 450
Part No. 1137126
3. Options
Beam profiler package
Pupilometer monitor optics
Power meter-port with mirror on manual slide
Depolarizer
Focus monitor
LTS PLUS lens temperature stabilization
Laser distance sensor
Field enlargement mirror
Base honeycomb table
Mask stage
Mask holder
Principal sketch of 5X Optical Subsystem.
1 All specifications are typical data and are subject to change withoutprior notice in order to provide the best product possible.
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UV Optical Systems
44
CrystaLas Optical SystemUV Optical Systems
1. Description
CrystaLas is an excimer laser-based optical system for the annealing and crystallization of thin silicon films. The system's flexible design allows annealing processes on laboratory samples, as well as on large-size substrates. This system uses a mask imaging technique to generate polycrystalline thin films. CrystaLas is designed for integrationinto a complete fabrication system using LAMBDA SX excimer lasers on industrial production lines. Furthermore,CrystaLas is an ideal research tool for developing new production processes in the semiconductor and flat-paneldisplay industry.
2. Specifications1
Example of a 308 nm CrystaLas Optical System— 18 mm and 30 mm Field of View (FOV)
Wavelength (nm) 308 308
Optical >40% >40%Efficiency (typ.)
Projection Lens 5X/18 5X/30NA 0.13 diffraction- 0.1 diffraction-
limited limitedDemagnification 5X 5XField of View (mm) 18 30
Field Size at Mask (mm) 50 x 10 125 x 5
Homogeneity (2 s) 2.5% 2.5%
Field Size at Substrate (mm) 10 x 2 25 x 1
Energy Density (mJ/cm2) >1000 >1000
Part No. 1900053 1900175
SLS-generated polycrystallinesilicon film.
CrystaLas Optical Subsystem for generation 4 TFT p-Si thin film annealing.
1 All specifications are typical data and are subject to change without prior notice in orderto provide the best product possible.
Superior Reliability & Performance • www.Coherent.com • [email protected]
UV O
ptical Systems
45
ComponentsUV Optical Systems
Attenuator Module
Attenuator Module, Manual Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.
Attenuator Module, Motorized Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ATM RS-232 interface module, interface cables, mini-controller and control software for Windows*. Electromagnetic shutter.
Attenuator Module for 157 nm Leak-tight module housing with observation window. Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digitalscale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.
1. Specifications
Wavelength Attenuator Module, Attenuator Module, Attenuator Module(nm) Manual Motorized for 157 nm
Part No. 157 1111338193 2910218 1116186248 2910216 2910566308 1116181 1116184351 1116182 2910568
Attenuator module.
* Windows is a registered trademark of Microsoft Corporation.
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UV Optical Systems
46
ComponentsUV Optical Systems
1. Specifications Homogenizers
Homogenizer 5x5 Homogenizer 10x10 Homogenizer 20x20
Homogenized Field Size (mm) 5 x 5 10 x 10 20 x 20
Zoom ±10% ±10% ±10%
Homogeneity <±5% <±5% <±5%
Field Position Entrance aperture Entrance aperture Entrance apertureApprox. 600 mm 32 x 32 mm, 29.6 x 29.6 mm, 29.6 x 29.6 mm,after Homogenizer Exit overall size entrance-exit overall size entrance-exit overall size entrance-exit(depending on wavelength) approx. 1100 mm approx. 1000 mm approx. 900 mm
(depending on wavelength) (depending on wavelength) (depending on wavelength)
Other versions on request Field dimensions from 4 x 4 mm up to 200 mm
Part No. 193 nm 1116198 1116202248 nm 1116199 1116203308 nm 1116200 1116204351 nm 1116201 1116205
Superior Reliability & Performance • www.Coherent.com • [email protected]
Homogenizer setup in separate x, y, phi mounts.
UV O
ptical Systems
47
ComponentsUV Optical Systems
1. Specifications Projection Lenses
P-lens 4-10x/4-xxx P-lens 5x/18-xxx P-lens 5x/30-xxx Doublet 50-xxx Doublet 100-xxx
Wavelength (nm) 157 157193 193 193248 248 248 248308 308 308 308 308351 351 351
Demagnification 4 to 10x 5x 5x Variable Variable(higherdemagnificationon request)
Focal Length (mm) approx. 100 approx. 50 approx. 100
Image Field 4 mm 18 mm 30 mm Depending on Depending onDiameter wavelength wavelength
Numerical Depending on 0.13 0.1 - -Aperture wavelength (diffraction-limited) (diffraction-limited)
(diffraction-limitedfor all availablewavelengths)
Spatial Resolution 3 µm 2 µm 2.5 µm 50 µm 50 µmlines and spaces lines and spaces lines and spaces lines and spaces lines and spaces
Working Distance Depending on Depending on Depending on Approx. 35 mm Approx. 70 mmwavelength, wavelength wavelengthuse of eyepiece, anddemagnification
Tracking Length Depending on 800 mm 1050 mm Depending on Depending onwavelength, use wavelength and wavelength andof eye piece, and demagnification demagnificationdemagnification ratio ratio
Transmission >80% >80% >80% - -
Part No. 157 nm 1116211 1116216193 nm 9680011 1116212 1116217248 nm M290009 M290022 1137121 1116213 1116218308 nm 1116206 M290008 9680052 1116214 2921330351 nm 1116207 1116215 1116219
• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
UV Optical Systems
With over 40 years of experience supporting critical laser environments, Coherent knows how important it is to establish lastingpartnerships that enable our customers to achieve success today and well into the future. With Coherent's wide range of serviceproducts, everything you need is under one roof, designed to safeguard and enhance your investment.
• Value based service agreement programs
• Custom Service Agreements to meet your unique needs
• Factory-trained service engineers across the globe
• Knowledgeable technical support that is only a phone call away
48
Customer Support
ServiceProductivity Plus Service Agreement
Superior Reliability & Performance • www.Coherent.com • [email protected]
• On site and factory tailored training courses
• Certified high quality parts and accessories, consumables and upgrades, all designed exclusively for your Coherent laser along its lifecycles
• Customer documents (e.g. detailed manuals)
Productivity Plus
Product Description PN for 12 monthagreement
ExciStar XS/Xantos XS 1169709
IndyStar 1169710
BraggStar S Industrial 1169710
COMPexPro 1169717
LPXpro/LPFpro 1169716
Productivity Plus™ Service Agreement
The Support you need to stay up and running
The Productivity Plus service agreement provides the highestlevel of customer care available anywhere. It goes beyondyour warranty and guarantees the performance of your sys-tem. Productivity Plus (PPlus) protects your productivity andprofitability from unexpected downtime and is available formost current Coherent products.
PPlus Service Agreements protect your investment with:• Priority on-site service• Preventative maintenance visits• Unlimited access to the best tech support in the industry
PPlus Service Agreements save you money by:• Protecting your investment in Coherent products• Covering parts and labor• Simplifying service costs
Coherent understands that each operation has its own support needs. We offer you a variety of support plans tochoose from.
49
ServiceTraining Programs
Training Courses
Product Line A/1 day A/2 days AB/4 days ABC/5 days
ExciStar XS/Xantos XS series 1170393 1170393 1170393 1170393
IndyStar series 1170394 1170394 1170394
COMPexPro series 1100554 1100554 1100554
LPXpro/LPFpro series 1100598 1100598 1100598
Product Line A/2 days AB/4 days ABC/10 days
LEAP series 1170395 1170395 1170395
LAMBDA SX series 1154279 1154279 1154279
VYPER series 1192273 1192273 1192273
UV Optical Systems 1100604 1100604 1100604
Custom
er Sup
port
• Toll Free: (800) 367-7890 • Tel: (408) 764-4050 • Fax: (408) 764-4646
A Laser operationAB Laser operation and maintenanceABC Laser operation, maintenance, trouble shooting,
and service procedures• Fully staffed training department at Coherent GmbH in Goettingen, Germany
• Use the latest in presentation materials and techniques including manuals, video overheads and a fully equipped laboratory for hands-on training experience
• Train, re-train, update/improve FSE skills
• Train, to various levels, OEM FSE in a variety of laser types and applications
• End customer training when requested
• Factory and on site tailored training courses
• Class size restrictions are strictly enforced (max. of 4 trainees per class)
BraggStar/IndyStar
COMPexPro 50
LPXpro/LEAP
LSX 200/300 Hz
ExciStar XS/Xantos XS
LSX 600 Hz
Laser Measurement and Control AccessoriesMatrix of Recommendations
50Superior Reliability & Performance • www.Coherent.com • [email protected]
LMC Accessories
Power Measurement
FieldMaxII-TO with PM10X • • •
FieldMaxII-TO with PM30X
FieldMaxII-TO with PM150X • •
FieldMaxII-TO with PM300F-50X •
FieldMaxII-TO with PM1KX •
Energy Measurement
LabMax-TOP with J-25MUV-xxx • •
LabMax-TOP with J-25MT-10KHZ •
FieldMaxII-TOP with J-50MUV-xxx • •
FieldMaxIITM-TOP
1098580 FieldMaxII-TOP meters work with a broad range of thermopile, optical and pyroelectric sensors to measure power from nW to kW, energy from nJ to J, and from the UV to the IR. USB connectivity and a PC applications software suite allow live monitoring of multiple meters simultaneously, data logging, and statistical analysis. LabVIEW* drivers and an ActiveX* library provide the ability to completely control the meter remotely via a PC with customized software. The rechargeable battery and programmable analog output provide portability and convenience.
FieldMaxII-TO
1098579 Power-only version of the FieldMaxII that works with thermopile and optical sensors.
LabMaxTM-TOP Meters
LabMax-TOP LabMax meters are ideal for anyone who needs to analyze and monitor laser 1104622 output. Data can be analyzed via statistical and trend analysis and stored in
LabMax-TOP w/GPIB onboard flash memory for future retrieval with the File Manager tool. 1104620 Alternatively, data can also be processed directly on a PC through USB, RS-232
and optional GPIB interfaces, or by logging data to a USB flash drive attached directly to the meter. Installable applications software and LabVIEW drivers are provided to support PC interfacing. The LabMax display can be positioned at many different angles so customers can place it within the limited bench space typically available in a laser lab and still easily view the display. LabMax-TOP is directly compatiblewith most Coherent thermal, pyroelectric and semiconductor sensors. Used with EnergyMax sensors, LabMax-TOP can measure nJ to joules and up to 10 kHz.
COMPexPro 100/200
Laser Measurement and Control AccessoriesMatrix of Recommendations
51• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170
LMC Ac
cessories
LabMax-TO
1104619 Power-only version of the LabMax that works with thermopile and optical sensors.
PowerMaxTM Power Sensors
PM10X PowerMax PM-model thermopile sensors are compatible with FieldMaxII 1098423 and LabMax meters (both -TOP and -TO models) and provide accurate
PM30X measurement of average laser power. For excimer applications, our X-coating 1098498 offers damage and bleaching resistance in the ultraviolet. NIST-traceability
PM150X and spectral mapping of the sensor response, loaded into EEPROM for 1098455 automatic wavelength compensation, ensures measurement accuracy
PM1KX throughout the ultraviolet.1115484
EnergyMaxTM Energy Sensors
J-25MT-10KHZ With the EnergyMax family of pyroelectric sensors, robust MaxUV, MaxBlack 1110747 and diffuse metallic sensor coatings offer a high damage threshold and
J-25MUV-193 long-term stability, which is further increased on certain models with the use1110741 of optimized diffuser stacks. Spectral mapping of all sensors and diffusers
J-25MUV-248 allows easy wavelength compensation and ensures accuracy throughout 1110745 the ultraviolet. The addition of thermal compensation gives measurement
J-50MUV-248 accuracy that is unaffected by ambient conditions and average power levels. 1110572 The electronic design offers a very high dynamic range and highly accurate
J-50MUV-193, no diffuser and linear repetition rate performance from large diameter sensors. Coupled with a robust mechanical1146237 and electronic design that provides excellent noise immunity, EnergyMax is ideally suited for measuring
J-50MUV-248, no diffuser the pulse energy from excimer lasers.1146243
J-50MB-YAG1110744
EnergyMax Heat Sinks
Small Heat Sink for Optional heat sinks are available for EnergyMax sensors. Coupled with the J-25 Model Sensors sensors' inherent thermal compensation, these heat sinks allow pulse energy
1123430 measurements at average powers in the tens of Watts – ideal for higherMedium Heat Sink for average power excimer lasers.J-50 Model Sensors
1123431Large Heat Sink forJ-50 Model Sensors
1123432
All Coherent product names are trademarks of Coherent, Inc.*All products indicated by an asterisk are registered trademarks of their respective companies.
Contact Us by Phone
Coherent, Inc.(800) 527-3786 or (408) 764-4983
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How to Contact Us
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Coherent, Inc.5100 Patrick Henry DriveSanta Clara, CA 95054phone (800) 527-3786
(408) 764-4983fax (408) 764-4646e-mail [email protected]
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www.Coherent.com
Coherent as your partner.To compete and succeed in today’s fast-paced research and manufacturing environments, you need a laser partner who understands your needs. A partner who can provide a wide range of technologysolutions, and the support that goes with them.
Since 1966, Coherent has been helping customers by providing complete laser-based solutions for a wide range of commercial and scientific applications.
With a history of providing superior reliability and superior performance in our products, we are themost forward-thinking and diversified manufacturer of solid-state, gas, excimer and semiconductorlasers in the industry.
For more information, visit us on the Web at www.Coherent.com. Or call 800-527-3786.
Printed in the U.S.A. MC-028-09-0M0311Rev.ACopyright ©2011 Coherent, Inc.